Kulicke & Soffa Industries Inc NASDAQ:KLIC Historical Prices

Below are the 8000 trading days of historical prices for KLIC.

#	Exchange	Symbol	Date	Open	High	Low	Close
8000	NASDAQ	KLIC	Mon, Mar 4, 2024	49.20	49.20	49.20	49.20
7999	NASDAQ	KLIC	Fri, Mar 1, 2024	47.89	49.39	46.82	48.87
7998	NASDAQ	KLIC	Thu, Feb 29, 2024	47.95	48.49	45.21	47.62
7997	NASDAQ	KLIC	Wed, Feb 28, 2024	48.17	49.06	48.06	48.10
7996	NASDAQ	KLIC	Tue, Feb 27, 2024	49.39	49.75	48.83	48.85
7995	NASDAQ	KLIC	Mon, Feb 26, 2024	49.24	49.58	48.89	48.89
7994	NASDAQ	KLIC	Fri, Feb 23, 2024	49.38	49.74	48.59	48.97
7993	NASDAQ	KLIC	Thu, Feb 22, 2024	49.43	49.82	48.78	49.37
7992	NASDAQ	KLIC	Wed, Feb 21, 2024	48.05	48.49	47.61	48.45
7991	NASDAQ	KLIC	Tue, Feb 20, 2024	49.44	49.78	48.30	48.59
7990	NASDAQ	KLIC	Fri, Feb 16, 2024	50.57	51.29	50.02	50.36
7989	NASDAQ	KLIC	Thu, Feb 15, 2024	49.87	50.80	49.46	50.53
7988	NASDAQ	KLIC	Wed, Feb 14, 2024	48.77	49.60	48.62	49.48
7987	NASDAQ	KLIC	Tue, Feb 13, 2024	48.70	49.29	47.56	47.91
7986	NASDAQ	KLIC	Mon, Feb 12, 2024	50.21	51.04	49.79	50.17
7985	NASDAQ	KLIC	Fri, Feb 9, 2024	48.10	50.68	47.82	50.13
7984	NASDAQ	KLIC	Thu, Feb 8, 2024	46.91	48.36	46.72	47.55
7983	NASDAQ	KLIC	Wed, Feb 7, 2024	47.94	47.94	46.82	47.15
7982	NASDAQ	KLIC	Tue, Feb 6, 2024	46.66	48.05	46.66	47.61
7981	NASDAQ	KLIC	Mon, Feb 5, 2024	45.97	47.31	44.82	46.89
7980	NASDAQ	KLIC	Fri, Feb 2, 2024	45.00	46.40	44.78	46.06
7979	NASDAQ	KLIC	Thu, Feb 1, 2024	49.50	51.07	45.37	45.48
7978	NASDAQ	KLIC	Wed, Jan 31, 2024	51.95	52.00	50.16	50.32
7977	NASDAQ	KLIC	Tue, Jan 30, 2024	53.09	53.65	52.64	52.67
7976	NASDAQ	KLIC	Mon, Jan 29, 2024	53.03	53.66	52.51	53.63
7975	NASDAQ	KLIC	Fri, Jan 26, 2024	55.13	55.13	53.06	53.20
7974	NASDAQ	KLIC	Thu, Jan 25, 2024	56.50	56.71	54.91	55.19
7973	NASDAQ	KLIC	Wed, Jan 24, 2024	55.63	56.18	55.33	55.42
7972	NASDAQ	KLIC	Tue, Jan 23, 2024	55.80	56.18	54.97	54.97
7971	NASDAQ	KLIC	Mon, Jan 22, 2024	54.00	55.59	53.97	55.48
7970	NASDAQ	KLIC	Fri, Jan 19, 2024	53.24	53.81	52.26	53.56
7969	NASDAQ	KLIC	Thu, Jan 18, 2024	51.76	52.86	51.76	52.58
7968	NASDAQ	KLIC	Wed, Jan 17, 2024	49.87	50.74	49.17	50.72
7967	NASDAQ	KLIC	Tue, Jan 16, 2024	50.33	51.07	50.08	50.51
7966	NASDAQ	KLIC	Fri, Jan 12, 2024	51.09	51.35	50.18	50.54
7965	NASDAQ	KLIC	Thu, Jan 11, 2024	50.90	51.29	50.00	50.80
7964	NASDAQ	KLIC	Wed, Jan 10, 2024	50.94	51.53	49.83	51.10
7963	NASDAQ	KLIC	Tue, Jan 9, 2024	50.79	51.44	50.69	51.05
7962	NASDAQ	KLIC	Mon, Jan 8, 2024	50.86	51.92	50.86	51.66
7961	NASDAQ	KLIC	Fri, Jan 5, 2024	50.82	51.45	50.74	50.81
7960	NASDAQ	KLIC	Thu, Jan 4, 2024	50.81	51.63	50.76	51.08
7959	NASDAQ	KLIC	Wed, Jan 3, 2024	51.88	52.04	50.98	51.10
7958	NASDAQ	KLIC	Tue, Jan 2, 2024	53.84	54.02	52.46	52.75
7957	NASDAQ	KLIC	Fri, Dec 29, 2023	55.21	55.59	54.40	54.72
7956	NASDAQ	KLIC	Thu, Dec 28, 2023	55.65	56.15	55.28	55.35
7955	NASDAQ	KLIC	Wed, Dec 27, 2023	56.07	56.14	55.50	55.68
7954	NASDAQ	KLIC	Tue, Dec 26, 2023	55.55	56.27	55.50	55.85
7953	NASDAQ	KLIC	Fri, Dec 22, 2023	54.99	55.73	54.56	55.42
7952	NASDAQ	KLIC	Thu, Dec 21, 2023	54.40	54.92	54.27	54.53
7951	NASDAQ	KLIC	Wed, Dec 20, 2023	54.56	55.33	53.54	53.55
7950	NASDAQ	KLIC	Tue, Dec 19, 2023	54.62	55.43	54.51	54.99
7949	NASDAQ	KLIC	Mon, Dec 18, 2023	54.58	55.12	54.20	54.28
7948	NASDAQ	KLIC	Fri, Dec 15, 2023	55.88	55.98	54.74	54.80
7947	NASDAQ	KLIC	Thu, Dec 14, 2023	54.14	55.78	54.14	55.46
7946	NASDAQ	KLIC	Wed, Dec 13, 2023	53.87	54.10	52.10	53.56
7945	NASDAQ	KLIC	Tue, Dec 12, 2023	53.00	53.88	52.63	53.87
7944	NASDAQ	KLIC	Mon, Dec 11, 2023	52.21	53.16	52.21	53.07
7943	NASDAQ	KLIC	Fri, Dec 8, 2023	51.46	52.60	51.45	51.89
7942	NASDAQ	KLIC	Thu, Dec 7, 2023	51.00	51.69	50.81	51.67
7941	NASDAQ	KLIC	Wed, Dec 6, 2023	51.56	51.97	50.72	50.80
7940	NASDAQ	KLIC	Tue, Dec 5, 2023	51.99	51.99	50.23	50.81
7939	NASDAQ	KLIC	Mon, Dec 4, 2023	51.91	52.35	51.20	52.30
7938	NASDAQ	KLIC	Fri, Dec 1, 2023	51.47	52.53	51.00	52.46
7937	NASDAQ	KLIC	Thu, Nov 30, 2023	51.65	51.99	51.05	51.52
7936	NASDAQ	KLIC	Wed, Nov 29, 2023	50.12	51.66	50.06	51.65
7935	NASDAQ	KLIC	Tue, Nov 28, 2023	50.04	50.04	49.12	49.25
7934	NASDAQ	KLIC	Mon, Nov 27, 2023	50.02	50.43	49.37	50.37
7933	NASDAQ	KLIC	Fri, Nov 24, 2023	50.01	50.32	49.76	50.25
7932	NASDAQ	KLIC	Wed, Nov 22, 2023	50.18	50.78	49.85	50.16
7931	NASDAQ	KLIC	Tue, Nov 21, 2023	50.44	51.13	49.40	49.64
7930	NASDAQ	KLIC	Mon, Nov 20, 2023	50.48	51.21	50.40	51.04
7929	NASDAQ	KLIC	Fri, Nov 17, 2023	49.79	51.03	49.34	50.65
7928	NASDAQ	KLIC	Thu, Nov 16, 2023	46.60	50.45	46.60	48.98
7927	NASDAQ	KLIC	Wed, Nov 15, 2023	46.87	47.96	46.37	46.77
7926	NASDAQ	KLIC	Tue, Nov 14, 2023	46.00	46.83	45.87	46.79
7925	NASDAQ	KLIC	Mon, Nov 13, 2023	44.66	45.19	44.08	44.89
7924	NASDAQ	KLIC	Fri, Nov 10, 2023	43.64	45.18	43.24	44.91
7923	NASDAQ	KLIC	Thu, Nov 9, 2023	44.25	44.52	42.95	43.02
7922	NASDAQ	KLIC	Wed, Nov 8, 2023	44.13	44.49	43.42	44.07
7921	NASDAQ	KLIC	Tue, Nov 7, 2023	44.59	44.84	44.04	44.07
7920	NASDAQ	KLIC	Mon, Nov 6, 2023	45.33	45.58	44.29	44.59
7919	NASDAQ	KLIC	Fri, Nov 3, 2023	44.38	45.59	44.03	45.18
7918	NASDAQ	KLIC	Thu, Nov 2, 2023	42.39	44.08	42.34	43.81
7917	NASDAQ	KLIC	Wed, Nov 1, 2023	41.51	41.73	40.20	41.60
7916	NASDAQ	KLIC	Tue, Oct 31, 2023	42.48	42.87	41.55	41.61
7915	NASDAQ	KLIC	Mon, Oct 30, 2023	42.32	43.00	41.28	42.73
7914	NASDAQ	KLIC	Fri, Oct 27, 2023	42.32	43.02	42.19	42.39
7913	NASDAQ	KLIC	Thu, Oct 26, 2023	41.33	42.81	41.33	42.19
7912	NASDAQ	KLIC	Wed, Oct 25, 2023	41.73	41.89	40.35	40.98
7911	NASDAQ	KLIC	Tue, Oct 24, 2023	42.63	42.78	42.14	42.29
7910	NASDAQ	KLIC	Mon, Oct 23, 2023	42.83	43.11	41.90	42.04
7909	NASDAQ	KLIC	Fri, Oct 20, 2023	44.30	44.45	43.05	43.17
7908	NASDAQ	KLIC	Thu, Oct 19, 2023	45.80	45.80	43.99	44.04
7907	NASDAQ	KLIC	Wed, Oct 18, 2023	45.37	45.75	45.05	45.36
7906	NASDAQ	KLIC	Tue, Oct 17, 2023	45.62	46.37	45.34	45.89
7905	NASDAQ	KLIC	Mon, Oct 16, 2023	45.28	46.35	45.09	46.32
7904	NASDAQ	KLIC	Fri, Oct 13, 2023	46.38	46.38	44.84	45.20
7903	NASDAQ	KLIC	Thu, Oct 12, 2023	47.32	47.56	46.28	46.79
7902	NASDAQ	KLIC	Wed, Oct 11, 2023	47.35	47.78	46.65	47.44
7901	NASDAQ	KLIC	Tue, Oct 10, 2023	47.53	47.89	47.21	47.25
7900	NASDAQ	KLIC	Mon, Oct 9, 2023	46.94	47.33	46.54	47.31
7899	NASDAQ	KLIC	Fri, Oct 6, 2023	47.19	47.81	46.79	47.31
7898	NASDAQ	KLIC	Thu, Oct 5, 2023	47.73	47.96	47.27	47.39
7897	NASDAQ	KLIC	Wed, Oct 4, 2023	47.55	48.02	47.01	47.73
7896	NASDAQ	KLIC	Tue, Oct 3, 2023	47.99	48.49	47.15	47.55
7895	NASDAQ	KLIC	Mon, Oct 2, 2023	48.78	49.35	47.81	48.29
7894	NASDAQ	KLIC	Fri, Sep 29, 2023	49.21	49.46	48.33	48.63
7893	NASDAQ	KLIC	Thu, Sep 28, 2023	48.57	49.01	48.37	48.60
7892	NASDAQ	KLIC	Wed, Sep 27, 2023	48.33	48.97	47.98	48.57
7891	NASDAQ	KLIC	Tue, Sep 26, 2023	48.34	48.44	47.54	47.87
7890	NASDAQ	KLIC	Mon, Sep 25, 2023	48.11	48.78	48.09	48.72
7889	NASDAQ	KLIC	Fri, Sep 22, 2023	47.99	49.20	47.98	48.49
7888	NASDAQ	KLIC	Thu, Sep 21, 2023	47.23	47.93	47.23	47.55
7887	NASDAQ	KLIC	Wed, Sep 20, 2023	48.08	48.61	47.62	47.62
7886	NASDAQ	KLIC	Tue, Sep 19, 2023	48.21	48.51	47.82	48.13
7885	NASDAQ	KLIC	Mon, Sep 18, 2023	47.43	48.63	47.24	48.43
7884	NASDAQ	KLIC	Fri, Sep 15, 2023	47.71	47.83	46.70	47.48
7883	NASDAQ	KLIC	Thu, Sep 14, 2023	48.28	48.29	47.12	48.10
7882	NASDAQ	KLIC	Wed, Sep 13, 2023	47.30	48.14	47.29	47.76
7881	NASDAQ	KLIC	Tue, Sep 12, 2023	48.29	48.91	47.35	47.44
7880	NASDAQ	KLIC	Mon, Sep 11, 2023	48.85	48.85	48.85	48.85
7879	NASDAQ	KLIC	Fri, Sep 8, 2023	49.66	49.94	49.20	49.50
7878	NASDAQ	KLIC	Thu, Sep 7, 2023	49.47	49.95	48.56	49.81
7877	NASDAQ	KLIC	Wed, Sep 6, 2023	50.69	51.42	50.25	50.52
7876	NASDAQ	KLIC	Tue, Sep 5, 2023	51.85	52.09	50.07	50.60
7875	NASDAQ	KLIC	Fri, Sep 1, 2023	51.83	52.27	51.60	52.08
7874	NASDAQ	KLIC	Thu, Aug 31, 2023	52.30	53.05	51.61	51.73
7873	NASDAQ	KLIC	Wed, Aug 30, 2023	52.09	52.89	51.79	52.54
7872	NASDAQ	KLIC	Tue, Aug 29, 2023	50.79	52.57	50.79	52.34
7871	NASDAQ	KLIC	Mon, Aug 28, 2023	51.30	51.88	50.86	51.13
7870	NASDAQ	KLIC	Fri, Aug 25, 2023	50.30	50.93	49.70	50.87
7869	NASDAQ	KLIC	Thu, Aug 24, 2023	51.80	51.86	50.23	50.29
7868	NASDAQ	KLIC	Wed, Aug 23, 2023	50.62	51.71	50.53	51.35
7867	NASDAQ	KLIC	Tue, Aug 22, 2023	51.57	51.73	50.51	50.66
7866	NASDAQ	KLIC	Mon, Aug 21, 2023	50.19	51.31	50.19	50.96
7865	NASDAQ	KLIC	Fri, Aug 18, 2023	48.97	50.29	48.90	50.10
7864	NASDAQ	KLIC	Thu, Aug 17, 2023	49.50	49.67	49.08	49.23
7863	NASDAQ	KLIC	Wed, Aug 16, 2023	50.16	50.47	49.46	49.50
7862	NASDAQ	KLIC	Tue, Aug 15, 2023	51.47	51.79	50.24	50.29
7861	NASDAQ	KLIC	Mon, Aug 14, 2023	51.50	52.09	51.22	51.83
7860	NASDAQ	KLIC	Fri, Aug 11, 2023	52.34	52.56	51.50	51.77
7859	NASDAQ	KLIC	Thu, Aug 10, 2023	54.23	54.39	52.13	52.96
7858	NASDAQ	KLIC	Wed, Aug 9, 2023	55.15	56.95	54.21	54.41
7857	NASDAQ	KLIC	Tue, Aug 8, 2023	55.15	55.43	54.31	55.17
7856	NASDAQ	KLIC	Mon, Aug 7, 2023	56.50	56.86	55.80	56.00
7855	NASDAQ	KLIC	Fri, Aug 4, 2023	56.41	56.97	55.79	55.97
7854	NASDAQ	KLIC	Thu, Aug 3, 2023	57.62	57.80	55.29	56.47
7853	NASDAQ	KLIC	Wed, Aug 2, 2023	59.10	59.40	57.67	58.18
7852	NASDAQ	KLIC	Tue, Aug 1, 2023	59.30	59.99	59.01	59.98
7851	NASDAQ	KLIC	Mon, Jul 31, 2023	59.52	59.93	59.11	59.88
7850	NASDAQ	KLIC	Fri, Jul 28, 2023	59.52	59.65	58.71	59.52
7849	NASDAQ	KLIC	Thu, Jul 27, 2023	58.51	59.64	58.01	58.29
7848	NASDAQ	KLIC	Wed, Jul 26, 2023	57.52	57.79	56.92	57.19
7847	NASDAQ	KLIC	Tue, Jul 25, 2023	57.29	58.28	57.29	58.00
7846	NASDAQ	KLIC	Mon, Jul 24, 2023	57.07	57.69	56.72	57.35
7845	NASDAQ	KLIC	Fri, Jul 21, 2023	57.49	57.69	56.79	57.10
7844	NASDAQ	KLIC	Thu, Jul 20, 2023	56.77	56.79	55.94	56.53
7843	NASDAQ	KLIC	Wed, Jul 19, 2023	58.91	58.93	57.46	57.53
7842	NASDAQ	KLIC	Tue, Jul 18, 2023	58.91	59.15	58.31	58.94
7841	NASDAQ	KLIC	Mon, Jul 17, 2023	58.42	59.78	57.81	59.34
7840	NASDAQ	KLIC	Fri, Jul 14, 2023	58.73	59.21	57.82	57.95
7839	NASDAQ	KLIC	Thu, Jul 13, 2023	56.45	58.54	56.27	58.52
7838	NASDAQ	KLIC	Wed, Jul 12, 2023	56.79	57.08	55.72	55.85
7837	NASDAQ	KLIC	Tue, Jul 11, 2023	56.62	56.62	55.15	55.78
7836	NASDAQ	KLIC	Mon, Jul 10, 2023	55.64	57.03	55.60	56.62
7835	NASDAQ	KLIC	Fri, Jul 7, 2023	56.08	56.31	55.50	55.70
7834	NASDAQ	KLIC	Thu, Jul 6, 2023	55.67	56.37	55.53	55.86
7833	NASDAQ	KLIC	Wed, Jul 5, 2023	58.25	58.25	56.57	56.66
7832	NASDAQ	KLIC	Mon, Jul 3, 2023	59.33	59.86	57.84	58.64
7831	NASDAQ	KLIC	Fri, Jun 30, 2023	59.76	60.20	59.44	59.45
7830	NASDAQ	KLIC	Thu, Jun 29, 2023	58.39	59.36	57.79	59.35
7829	NASDAQ	KLIC	Wed, Jun 28, 2023	57.50	58.50	57.50	58.01
7828	NASDAQ	KLIC	Tue, Jun 27, 2023	56.21	58.61	56.11	58.55
7827	NASDAQ	KLIC	Mon, Jun 26, 2023	56.04	57.22	55.68	56.23
7826	NASDAQ	KLIC	Fri, Jun 23, 2023	55.65	56.23	55.46	55.75
7825	NASDAQ	KLIC	Thu, Jun 22, 2023	56.26	57.13	56.09	56.53
7824	NASDAQ	KLIC	Wed, Jun 21, 2023	56.47	57.37	55.88	56.53
7823	NASDAQ	KLIC	Tue, Jun 20, 2023	57.95	58.13	55.34	56.21
7822	NASDAQ	KLIC	Fri, Jun 16, 2023	58.30	58.30	56.78	58.14
7821	NASDAQ	KLIC	Thu, Jun 15, 2023	57.46	58.08	57.10	57.53
7820	NASDAQ	KLIC	Wed, Jun 14, 2023	57.95	59.41	57.76	58.43
7819	NASDAQ	KLIC	Tue, Jun 13, 2023	57.70	58.50	56.94	57.98
7818	NASDAQ	KLIC	Mon, Jun 12, 2023	57.06	58.05	57.06	57.77
7817	NASDAQ	KLIC	Fri, Jun 9, 2023	58.00	58.36	56.64	56.80
7816	NASDAQ	KLIC	Thu, Jun 8, 2023	57.16	57.98	56.47	57.94
7815	NASDAQ	KLIC	Wed, Jun 7, 2023	55.21	57.89	55.00	57.20
7814	NASDAQ	KLIC	Tue, Jun 6, 2023	51.39	55.24	51.06	54.97
7813	NASDAQ	KLIC	Mon, Jun 5, 2023	52.86	53.09	50.60	51.78
7812	NASDAQ	KLIC	Fri, Jun 2, 2023	53.50	53.79	52.51	53.56
7811	NASDAQ	KLIC	Thu, Jun 1, 2023	53.07	53.39	52.06	53.11
7810	NASDAQ	KLIC	Wed, May 31, 2023	52.60	53.34	52.30	52.88
7809	NASDAQ	KLIC	Tue, May 30, 2023	54.72	54.72	52.79	53.41
7808	NASDAQ	KLIC	Fri, May 26, 2023	52.00	53.99	51.33	53.90
7807	NASDAQ	KLIC	Thu, May 25, 2023	50.39	51.92	50.39	51.69
7806	NASDAQ	KLIC	Wed, May 24, 2023	49.54	49.93	48.55	49.41
7805	NASDAQ	KLIC	Tue, May 23, 2023	51.06	51.70	50.66	50.80
7804	NASDAQ	KLIC	Mon, May 22, 2023	50.40	51.43	50.40	51.30
7803	NASDAQ	KLIC	Fri, May 19, 2023	50.99	51.12	50.27	50.63
7802	NASDAQ	KLIC	Thu, May 18, 2023	50.06	51.49	50.06	50.91
7801	NASDAQ	KLIC	Wed, May 17, 2023	49.44	50.78	49.08	49.98
7800	NASDAQ	KLIC	Tue, May 16, 2023	48.19	49.74	48.06	49.14
7799	NASDAQ	KLIC	Mon, May 15, 2023	46.90	48.54	46.43	48.36
7798	NASDAQ	KLIC	Fri, May 12, 2023	47.04	47.35	46.38	46.83
7797	NASDAQ	KLIC	Thu, May 11, 2023	47.29	47.49	46.20	46.89
7796	NASDAQ	KLIC	Wed, May 10, 2023	47.31	47.80	46.96	47.38
7795	NASDAQ	KLIC	Tue, May 9, 2023	46.38	46.85	46.20	46.51
7794	NASDAQ	KLIC	Mon, May 8, 2023	46.67	47.08	46.40	46.78
7793	NASDAQ	KLIC	Fri, May 5, 2023	45.56	47.27	45.34	46.80
7792	NASDAQ	KLIC	Thu, May 4, 2023	46.75	49.13	45.03	45.38
7791	NASDAQ	KLIC	Wed, May 3, 2023	47.84	48.36	47.00	47.19
7790	NASDAQ	KLIC	Tue, May 2, 2023	47.88	48.28	47.16	47.87
7789	NASDAQ	KLIC	Mon, May 1, 2023	47.82	48.71	47.73	48.02
7788	NASDAQ	KLIC	Fri, Apr 28, 2023	47.44	47.81	46.79	47.66
7787	NASDAQ	KLIC	Thu, Apr 27, 2023	47.03	47.43	46.50	47.29
7786	NASDAQ	KLIC	Wed, Apr 26, 2023	46.61	47.16	46.34	47.09
7785	NASDAQ	KLIC	Tue, Apr 25, 2023	47.31	47.38	46.01	46.45
7784	NASDAQ	KLIC	Mon, Apr 24, 2023	47.38	47.87	47.01	47.82
7783	NASDAQ	KLIC	Fri, Apr 21, 2023	47.64	47.64	47.05	47.50
7782	NASDAQ	KLIC	Thu, Apr 20, 2023	47.27	48.17	47.15	47.86
7781	NASDAQ	KLIC	Wed, Apr 19, 2023	47.44	47.74	47.04	47.55
7780	NASDAQ	KLIC	Tue, Apr 18, 2023	48.61	48.85	47.50	47.95
7779	NASDAQ	KLIC	Mon, Apr 17, 2023	48.71	48.83	47.83	48.25
7778	NASDAQ	KLIC	Fri, Apr 14, 2023	49.06	49.80	48.25	48.97
7777	NASDAQ	KLIC	Thu, Apr 13, 2023	49.32	49.76	48.60	49.31
7776	NASDAQ	KLIC	Wed, Apr 12, 2023	50.40	50.40	49.07	49.25
7775	NASDAQ	KLIC	Tue, Apr 11, 2023	50.55	50.95	50.02	50.08
7774	NASDAQ	KLIC	Mon, Apr 10, 2023	48.90	50.43	48.90	50.40
7773	NASDAQ	KLIC	Thu, Apr 6, 2023	49.40	49.77	48.83	49.49
7772	NASDAQ	KLIC	Wed, Apr 5, 2023	49.50	50.11	48.77	49.75
7771	NASDAQ	KLIC	Tue, Apr 4, 2023	52.24	52.24	49.73	49.96
7770	NASDAQ	KLIC	Mon, Apr 3, 2023	52.12	52.37	50.76	51.96
7769	NASDAQ	KLIC	Fri, Mar 31, 2023	51.83	52.70	51.83	52.69
7768	NASDAQ	KLIC	Thu, Mar 30, 2023	52.24	52.69	51.70	52.00
7767	NASDAQ	KLIC	Wed, Mar 29, 2023	50.81	52.08	50.54	51.83
7766	NASDAQ	KLIC	Tue, Mar 28, 2023	51.32	51.38	49.68	50.38
7765	NASDAQ	KLIC	Mon, Mar 27, 2023	52.08	52.32	51.18	51.66
7764	NASDAQ	KLIC	Fri, Mar 24, 2023	51.98	52.38	51.30	51.94
7763	NASDAQ	KLIC	Thu, Mar 23, 2023	52.54	53.69	51.85	52.39
7762	NASDAQ	KLIC	Wed, Mar 22, 2023	52.38	53.76	51.76	51.80
7761	NASDAQ	KLIC	Tue, Mar 21, 2023	52.88	53.80	52.00	52.57
7760	NASDAQ	KLIC	Mon, Mar 20, 2023	52.60	53.00	51.72	52.46
7759	NASDAQ	KLIC	Fri, Mar 17, 2023	53.58	53.83	52.26	52.49
7758	NASDAQ	KLIC	Thu, Mar 16, 2023	51.29	54.25	51.24	53.69
7757	NASDAQ	KLIC	Wed, Mar 15, 2023	51.55	51.94	50.66	51.89
7756	NASDAQ	KLIC	Tue, Mar 14, 2023	53.03	53.94	52.00	52.82
7755	NASDAQ	KLIC	Mon, Mar 13, 2023	50.20	52.39	50.20	51.69
7754	NASDAQ	KLIC	Fri, Mar 10, 2023	52.54	52.59	51.02	51.37
7753	NASDAQ	KLIC	Thu, Mar 9, 2023	52.74	53.80	51.90	52.18
7752	NASDAQ	KLIC	Wed, Mar 8, 2023	52.27	53.22	51.90	53.01
7751	NASDAQ	KLIC	Tue, Mar 7, 2023	52.51	52.62	51.23	51.93
7750	NASDAQ	KLIC	Mon, Mar 6, 2023	53.70	53.90	52.28	52.62
7749	NASDAQ	KLIC	Fri, Mar 3, 2023	53.83	53.83	53.00	53.65
7748	NASDAQ	KLIC	Thu, Mar 2, 2023	53.38	54.09	52.71	53.87
7747	NASDAQ	KLIC	Wed, Mar 1, 2023	53.50	54.50	53.23	54.15
7746	NASDAQ	KLIC	Tue, Feb 28, 2023	53.00	54.16	52.71	53.30
7745	NASDAQ	KLIC	Mon, Feb 27, 2023	53.27	53.81	52.92	53.11
7744	NASDAQ	KLIC	Fri, Feb 24, 2023	51.86	53.13	51.58	52.53
7743	NASDAQ	KLIC	Thu, Feb 23, 2023	53.82	54.23	52.21	52.80
7742	NASDAQ	KLIC	Wed, Feb 22, 2023	51.86	52.82	51.56	52.71
7741	NASDAQ	KLIC	Tue, Feb 21, 2023	52.51	53.52	51.93	52.02
7740	NASDAQ	KLIC	Fri, Feb 17, 2023	54.27	54.50	53.11	53.54
7739	NASDAQ	KLIC	Thu, Feb 16, 2023	53.78	54.80	53.65	54.08
7738	NASDAQ	KLIC	Wed, Feb 15, 2023	54.03	55.47	53.50	55.01
7737	NASDAQ	KLIC	Tue, Feb 14, 2023	54.11	55.32	53.68	54.74
7736	NASDAQ	KLIC	Mon, Feb 13, 2023	53.98	54.75	53.34	54.69
7735	NASDAQ	KLIC	Fri, Feb 10, 2023	54.18	54.35	52.90	53.82
7734	NASDAQ	KLIC	Thu, Feb 9, 2023	55.29	56.38	54.38	54.76
7733	NASDAQ	KLIC	Wed, Feb 8, 2023	55.51	56.00	54.19	54.33
7732	NASDAQ	KLIC	Tue, Feb 7, 2023	55.64	56.15	54.23	55.95
7731	NASDAQ	KLIC	Mon, Feb 6, 2023	55.54	56.12	55.25	55.81
7730	NASDAQ	KLIC	Fri, Feb 3, 2023	57.56	58.81	56.02	56.53
7729	NASDAQ	KLIC	Thu, Feb 2, 2023	54.55	58.78	54.55	58.26
7728	NASDAQ	KLIC	Wed, Feb 1, 2023	51.15	54.13	51.15	53.60
7727	NASDAQ	KLIC	Tue, Jan 31, 2023	50.60	51.80	50.48	51.10
7726	NASDAQ	KLIC	Mon, Jan 30, 2023	50.84	51.36	50.27	50.54
7725	NASDAQ	KLIC	Fri, Jan 27, 2023	51.89	52.23	51.19	51.66
7724	NASDAQ	KLIC	Thu, Jan 26, 2023	52.74	52.99	51.79	52.80
7723	NASDAQ	KLIC	Wed, Jan 25, 2023	50.85	52.63	50.27	52.59
7722	NASDAQ	KLIC	Tue, Jan 24, 2023	52.00	52.34	51.28	51.39
7721	NASDAQ	KLIC	Mon, Jan 23, 2023	50.07	52.90	49.92	52.55
7720	NASDAQ	KLIC	Fri, Jan 20, 2023	49.91	50.10	49.13	49.73
7719	NASDAQ	KLIC	Thu, Jan 19, 2023	48.99	49.53	48.39	49.16
7718	NASDAQ	KLIC	Wed, Jan 18, 2023	50.53	51.95	49.26	49.29
7717	NASDAQ	KLIC	Tue, Jan 17, 2023	50.99	51.43	49.37	50.09
7716	NASDAQ	KLIC	Fri, Jan 13, 2023	50.81	51.75	50.80	51.23
7715	NASDAQ	KLIC	Thu, Jan 12, 2023	49.10	51.72	48.10	51.68
7714	NASDAQ	KLIC	Wed, Jan 11, 2023	47.81	49.04	47.63	48.64
7713	NASDAQ	KLIC	Tue, Jan 10, 2023	47.80	48.77	47.54	47.97
7712	NASDAQ	KLIC	Mon, Jan 9, 2023	47.67	49.06	46.93	47.99
7711	NASDAQ	KLIC	Fri, Jan 6, 2023	45.39	47.18	45.18	46.91
7710	NASDAQ	KLIC	Thu, Jan 5, 2023	44.79	45.32	44.43	44.66
7709	NASDAQ	KLIC	Wed, Jan 4, 2023	43.57	45.58	43.57	45.12
7708	NASDAQ	KLIC	Tue, Jan 3, 2023	45.09	45.16	42.54	42.98
7707	NASDAQ	KLIC	Fri, Dec 30, 2022	43.96	44.48	43.42	44.26
7706	NASDAQ	KLIC	Thu, Dec 29, 2022	43.95	45.07	43.58	44.52
7705	NASDAQ	KLIC	Wed, Dec 28, 2022	43.86	44.23	43.19	43.34
7704	NASDAQ	KLIC	Tue, Dec 27, 2022	44.44	44.44	43.77	44.01
7703	NASDAQ	KLIC	Fri, Dec 23, 2022	44.36	44.71	43.79	44.65
7702	NASDAQ	KLIC	Thu, Dec 22, 2022	45.53	45.53	43.19	44.58
7701	NASDAQ	KLIC	Wed, Dec 21, 2022	45.14	46.59	45.14	46.41
7700	NASDAQ	KLIC	Tue, Dec 20, 2022	45.26	45.89	44.90	45.05
7699	NASDAQ	KLIC	Mon, Dec 19, 2022	47.27	47.27	45.00	45.61
7698	NASDAQ	KLIC	Fri, Dec 16, 2022	46.95	48.00	46.38	47.14
7697	NASDAQ	KLIC	Thu, Dec 15, 2022	47.29	48.18	47.10	47.62
7696	NASDAQ	KLIC	Wed, Dec 14, 2022	48.63	49.30	47.83	48.19
7695	NASDAQ	KLIC	Tue, Dec 13, 2022	49.83	50.65	48.52	48.74
7694	NASDAQ	KLIC	Mon, Dec 12, 2022	46.77	48.49	46.62	48.31
7693	NASDAQ	KLIC	Fri, Dec 9, 2022	47.37	48.27	46.73	47.06
7692	NASDAQ	KLIC	Thu, Dec 8, 2022	47.26	48.20	46.05	47.65
7691	NASDAQ	KLIC	Wed, Dec 7, 2022	46.79	47.87	46.47	47.31
7690	NASDAQ	KLIC	Tue, Dec 6, 2022	47.67	47.74	46.81	47.09
7689	NASDAQ	KLIC	Mon, Dec 5, 2022	47.66	48.33	47.36	47.70
7688	NASDAQ	KLIC	Fri, Dec 2, 2022	46.88	47.93	46.51	47.78
7687	NASDAQ	KLIC	Thu, Dec 1, 2022	48.06	48.48	46.84	47.95
7686	NASDAQ	KLIC	Wed, Nov 30, 2022	45.49	47.99	45.42	47.95
7685	NASDAQ	KLIC	Tue, Nov 29, 2022	45.66	46.36	45.20	45.43
7684	NASDAQ	KLIC	Mon, Nov 28, 2022	46.59	46.78	45.21	45.66
7683	NASDAQ	KLIC	Fri, Nov 25, 2022	47.09	47.64	46.96	47.09
7682	NASDAQ	KLIC	Wed, Nov 23, 2022	46.90	48.38	46.88	47.81
7681	NASDAQ	KLIC	Tue, Nov 22, 2022	46.47	47.11	45.81	47.03
7680	NASDAQ	KLIC	Mon, Nov 21, 2022	48.00	48.16	45.54	46.20
7679	NASDAQ	KLIC	Fri, Nov 18, 2022	48.05	48.41	47.10	48.36
7678	NASDAQ	KLIC	Thu, Nov 17, 2022	43.89	48.90	43.00	46.87
7677	NASDAQ	KLIC	Wed, Nov 16, 2022	46.75	47.32	45.08	45.58
7676	NASDAQ	KLIC	Tue, Nov 15, 2022	46.74	48.50	46.66	47.82
7675	NASDAQ	KLIC	Mon, Nov 14, 2022	46.52	46.89	45.50	45.55
7674	NASDAQ	KLIC	Fri, Nov 11, 2022	46.50	47.86	46.25	46.90
7673	NASDAQ	KLIC	Thu, Nov 10, 2022	45.44	46.45	45.02	46.25
7672	NASDAQ	KLIC	Wed, Nov 9, 2022	44.35	45.21	42.85	42.89
7671	NASDAQ	KLIC	Tue, Nov 8, 2022	43.74	45.33	43.64	45.20
7670	NASDAQ	KLIC	Mon, Nov 7, 2022	42.72	43.39	42.21	43.19
7669	NASDAQ	KLIC	Fri, Nov 4, 2022	41.04	42.69	41.04	42.46
7668	NASDAQ	KLIC	Thu, Nov 3, 2022	40.12	40.96	39.83	40.07
7667	NASDAQ	KLIC	Wed, Nov 2, 2022	42.76	42.96	40.72	40.77
7666	NASDAQ	KLIC	Tue, Nov 1, 2022	42.55	42.95	42.08	42.68
7665	NASDAQ	KLIC	Mon, Oct 31, 2022	41.96	42.48	41.07	41.94
7664	NASDAQ	KLIC	Fri, Oct 28, 2022	41.10	42.28	40.80	42.09
7663	NASDAQ	KLIC	Thu, Oct 27, 2022	42.49	42.86	40.21	40.84
7662	NASDAQ	KLIC	Wed, Oct 26, 2022	41.51	43.28	41.13	42.13
7661	NASDAQ	KLIC	Tue, Oct 25, 2022	40.76	42.05	40.70	41.88
7660	NASDAQ	KLIC	Mon, Oct 24, 2022	40.35	41.00	39.89	40.60
7659	NASDAQ	KLIC	Fri, Oct 21, 2022	39.25	40.50	38.94	40.35
7658	NASDAQ	KLIC	Thu, Oct 20, 2022	38.02	39.26	37.92	39.09
7657	NASDAQ	KLIC	Wed, Oct 19, 2022	37.98	38.48	37.38	37.78
7656	NASDAQ	KLIC	Tue, Oct 18, 2022	38.81	39.40	37.65	38.03
7655	NASDAQ	KLIC	Mon, Oct 17, 2022	38.01	38.50	37.60	37.94
7654	NASDAQ	KLIC	Fri, Oct 14, 2022	39.29	39.60	37.42	37.50
7653	NASDAQ	KLIC	Thu, Oct 13, 2022	36.03	39.33	35.95	39.12
7652	NASDAQ	KLIC	Wed, Oct 12, 2022	38.80	38.80	37.52	37.57
7651	NASDAQ	KLIC	Tue, Oct 11, 2022	39.17	39.68	38.09	38.28
7650	NASDAQ	KLIC	Mon, Oct 10, 2022	40.82	40.82	38.91	39.86
7649	NASDAQ	KLIC	Fri, Oct 7, 2022	41.03	41.55	40.47	40.73
7648	NASDAQ	KLIC	Thu, Oct 6, 2022	41.91	42.86	41.91	42.19
7647	NASDAQ	KLIC	Wed, Oct 5, 2022	41.79	42.56	41.26	42.17
7646	NASDAQ	KLIC	Tue, Oct 4, 2022	40.16	42.06	40.16	42.02
7645	NASDAQ	KLIC	Mon, Oct 3, 2022	39.06	40.26	38.50	39.81
7644	NASDAQ	KLIC	Fri, Sep 30, 2022	38.26	39.31	38.05	38.53
7643	NASDAQ	KLIC	Thu, Sep 29, 2022	39.29	39.29	37.52	38.53
7642	NASDAQ	KLIC	Wed, Sep 28, 2022	39.09	39.97	38.87	39.74
7641	NASDAQ	KLIC	Tue, Sep 27, 2022	39.97	40.23	38.93	39.19
7640	NASDAQ	KLIC	Mon, Sep 26, 2022	39.77	40.44	39.05	39.13
7639	NASDAQ	KLIC	Fri, Sep 23, 2022	39.67	40.04	38.94	39.83
7638	NASDAQ	KLIC	Thu, Sep 22, 2022	40.60	40.93	40.00	40.32
7637	NASDAQ	KLIC	Wed, Sep 21, 2022	40.37	42.40	40.37	40.76
7636	NASDAQ	KLIC	Tue, Sep 20, 2022	40.32	40.81	39.99	40.41
7635	NASDAQ	KLIC	Mon, Sep 19, 2022	40.40	41.64	40.28	40.93
7634	NASDAQ	KLIC	Fri, Sep 16, 2022	41.00	41.02	39.78	40.84
7633	NASDAQ	KLIC	Thu, Sep 15, 2022	41.09	41.29	40.22	41.03
7632	NASDAQ	KLIC	Wed, Sep 14, 2022	41.64	41.96	40.76	41.49
7631	NASDAQ	KLIC	Tue, Sep 13, 2022	41.86	42.31	41.15	41.28
7630	NASDAQ	KLIC	Mon, Sep 12, 2022	43.62	43.82	43.12	43.51
7629	NASDAQ	KLIC	Fri, Sep 9, 2022	43.28	44.05	43.04	43.24
7628	NASDAQ	KLIC	Thu, Sep 8, 2022	42.07	42.84	41.19	42.53
7627	NASDAQ	KLIC	Wed, Sep 7, 2022	41.23	42.98	41.23	42.48
7626	NASDAQ	KLIC	Tue, Sep 6, 2022	42.43	43.07	41.33	41.39
7625	NASDAQ	KLIC	Fri, Sep 2, 2022	42.48	43.13	41.72	42.50
7624	NASDAQ	KLIC	Thu, Sep 1, 2022	41.01	41.90	40.25	41.76
7623	NASDAQ	KLIC	Wed, Aug 31, 2022	43.46	43.46	41.94	42.04
7622	NASDAQ	KLIC	Tue, Aug 30, 2022	43.55	43.72	42.02	43.10
7621	NASDAQ	KLIC	Mon, Aug 29, 2022	43.75	44.92	43.29	43.32
7620	NASDAQ	KLIC	Fri, Aug 26, 2022	46.85	46.85	43.95	44.02
7619	NASDAQ	KLIC	Thu, Aug 25, 2022	45.52	46.91	45.31	46.58
7618	NASDAQ	KLIC	Wed, Aug 24, 2022	45.50	45.85	44.83	45.34
7617	NASDAQ	KLIC	Tue, Aug 23, 2022	45.00	46.26	44.95	45.45
7616	NASDAQ	KLIC	Mon, Aug 22, 2022	46.20	46.65	44.50	44.75
7615	NASDAQ	KLIC	Fri, Aug 19, 2022	47.07	47.77	46.77	47.48
7614	NASDAQ	KLIC	Thu, Aug 18, 2022	47.46	48.88	47.18	48.11
7613	NASDAQ	KLIC	Wed, Aug 17, 2022	47.50	47.57	46.24	46.97
7612	NASDAQ	KLIC	Tue, Aug 16, 2022	47.96	48.84	47.67	48.08
7611	NASDAQ	KLIC	Mon, Aug 15, 2022	48.99	50.00	47.84	48.15
7610	NASDAQ	KLIC	Fri, Aug 12, 2022	48.93	50.74	48.93	50.10
7609	NASDAQ	KLIC	Thu, Aug 11, 2022	48.26	50.18	48.05	48.83
7608	NASDAQ	KLIC	Wed, Aug 10, 2022	47.00	48.29	46.85	47.81
7607	NASDAQ	KLIC	Tue, Aug 9, 2022	46.00	46.28	44.37	45.94
7606	NASDAQ	KLIC	Mon, Aug 8, 2022	50.00	50.46	46.50	47.07
7605	NASDAQ	KLIC	Fri, Aug 5, 2022	48.59	50.90	48.57	50.48
7604	NASDAQ	KLIC	Thu, Aug 4, 2022	45.60	51.95	45.18	49.72
7603	NASDAQ	KLIC	Wed, Aug 3, 2022	48.08	48.68	47.31	48.18
7602	NASDAQ	KLIC	Tue, Aug 2, 2022	46.86	48.05	46.56	47.61
7601	NASDAQ	KLIC	Mon, Aug 1, 2022	48.04	48.04	46.15	47.32
7600	NASDAQ	KLIC	Fri, Jul 29, 2022	47.00	48.21	46.60	48.12
7599	NASDAQ	KLIC	Thu, Jul 28, 2022	47.70	47.97	46.24	47.17
7598	NASDAQ	KLIC	Wed, Jul 27, 2022	47.09	48.40	46.54	47.80
7597	NASDAQ	KLIC	Tue, Jul 26, 2022	47.90	48.10	46.65	46.66
7596	NASDAQ	KLIC	Mon, Jul 25, 2022	48.48	49.02	47.69	48.04
7595	NASDAQ	KLIC	Fri, Jul 22, 2022	50.63	50.63	48.46	48.90
7594	NASDAQ	KLIC	Thu, Jul 21, 2022	50.54	50.79	49.11	50.66
7593	NASDAQ	KLIC	Wed, Jul 20, 2022	48.50	50.87	48.50	50.12
7592	NASDAQ	KLIC	Tue, Jul 19, 2022	45.84	48.79	45.84	48.70
7591	NASDAQ	KLIC	Mon, Jul 18, 2022	45.87	47.10	44.78	45.17
7590	NASDAQ	KLIC	Fri, Jul 15, 2022	44.74	45.51	43.25	45.43
7589	NASDAQ	KLIC	Thu, Jul 14, 2022	42.17	43.72	41.59	43.65
7588	NASDAQ	KLIC	Wed, Jul 13, 2022	40.77	42.58	40.57	42.25
7587	NASDAQ	KLIC	Tue, Jul 12, 2022	41.50	42.15	41.00	41.31
7586	NASDAQ	KLIC	Mon, Jul 11, 2022	41.62	41.74	41.00	41.32
7585	NASDAQ	KLIC	Fri, Jul 8, 2022	41.26	42.31	41.09	41.96
7584	NASDAQ	KLIC	Thu, Jul 7, 2022	40.00	41.84	39.98	41.47
7583	NASDAQ	KLIC	Wed, Jul 6, 2022	39.30	39.91	38.63	39.30
7582	NASDAQ	KLIC	Tue, Jul 5, 2022	37.74	39.46	37.36	39.32
7581	NASDAQ	KLIC	Fri, Jul 1, 2022	42.02	42.45	38.98	39.01
7580	NASDAQ	KLIC	Thu, Jun 30, 2022	42.51	44.04	42.16	42.81
7579	NASDAQ	KLIC	Wed, Jun 29, 2022	43.63	43.63	42.16	43.31
7578	NASDAQ	KLIC	Tue, Jun 28, 2022	44.99	45.46	43.65	43.70
7577	NASDAQ	KLIC	Mon, Jun 27, 2022	45.56	45.84	44.53	44.91
7576	NASDAQ	KLIC	Fri, Jun 24, 2022	43.29	45.04	42.97	44.88
7575	NASDAQ	KLIC	Thu, Jun 23, 2022	43.37	43.60	42.37	42.58
7574	NASDAQ	KLIC	Wed, Jun 22, 2022	43.56	44.12	42.58	43.03
7573	NASDAQ	KLIC	Tue, Jun 21, 2022	44.00	45.33	43.32	44.73
7572	NASDAQ	KLIC	Fri, Jun 17, 2022	43.72	43.93	42.00	42.95
7571	NASDAQ	KLIC	Thu, Jun 16, 2022	45.93	46.31	42.69	43.26
7570	NASDAQ	KLIC	Wed, Jun 15, 2022	46.63	48.14	45.73	47.43
7569	NASDAQ	KLIC	Tue, Jun 14, 2022	46.44	47.02	45.93	46.70
7568	NASDAQ	KLIC	Mon, Jun 13, 2022	47.08	47.94	45.44	46.16
7567	NASDAQ	KLIC	Fri, Jun 10, 2022	50.18	51.25	48.50	48.76
7566	NASDAQ	KLIC	Thu, Jun 9, 2022	51.83	51.95	50.84	50.84
7565	NASDAQ	KLIC	Wed, Jun 8, 2022	52.98	53.58	51.68	51.95
7564	NASDAQ	KLIC	Tue, Jun 7, 2022	51.76	53.40	51.76	53.28
7563	NASDAQ	KLIC	Mon, Jun 6, 2022	53.82	54.06	51.91	52.87
7562	NASDAQ	KLIC	Fri, Jun 3, 2022	53.67	54.19	52.64	53.01
7561	NASDAQ	KLIC	Thu, Jun 2, 2022	53.60	54.95	52.73	54.77
7560	NASDAQ	KLIC	Wed, Jun 1, 2022	54.37	54.72	52.89	52.96
7559	NASDAQ	KLIC	Tue, May 31, 2022	53.00	54.60	52.50	54.17
7558	NASDAQ	KLIC	Fri, May 27, 2022	52.51	53.56	52.11	53.37
7557	NASDAQ	KLIC	Thu, May 26, 2022	48.53	52.12	48.03	51.69
7556	NASDAQ	KLIC	Wed, May 25, 2022	47.31	48.81	47.07	48.73
7555	NASDAQ	KLIC	Tue, May 24, 2022	48.62	49.50	46.43	47.49
7554	NASDAQ	KLIC	Mon, May 23, 2022	50.03	50.99	49.43	49.97
7553	NASDAQ	KLIC	Fri, May 20, 2022	50.59	51.93	48.62	49.77
7552	NASDAQ	KLIC	Thu, May 19, 2022	49.52	50.87	48.90	49.53
7551	NASDAQ	KLIC	Wed, May 18, 2022	51.26	52.50	49.37	49.76
7550	NASDAQ	KLIC	Tue, May 17, 2022	51.91	52.92	51.29	52.61
7549	NASDAQ	KLIC	Mon, May 16, 2022	51.17	51.78	50.25	50.57
7548	NASDAQ	KLIC	Fri, May 13, 2022	50.90	54.18	50.14	51.75
7547	NASDAQ	KLIC	Thu, May 12, 2022	49.62	50.82	48.14	49.92
7546	NASDAQ	KLIC	Wed, May 11, 2022	50.99	52.25	50.19	50.28
7545	NASDAQ	KLIC	Tue, May 10, 2022	51.53	52.24	50.18	51.19
7544	NASDAQ	KLIC	Mon, May 9, 2022	49.86	51.25	48.66	49.97
7543	NASDAQ	KLIC	Fri, May 6, 2022	49.77	52.77	49.31	51.54
7542	NASDAQ	KLIC	Thu, May 5, 2022	50.31	52.61	49.00	50.01
7541	NASDAQ	KLIC	Wed, May 4, 2022	48.92	51.14	47.01	50.74
7540	NASDAQ	KLIC	Tue, May 3, 2022	47.30	49.57	46.85	48.77
7539	NASDAQ	KLIC	Mon, May 2, 2022	45.95	47.24	45.27	47.22
7538	NASDAQ	KLIC	Fri, Apr 29, 2022	47.04	48.32	46.23	46.41
7537	NASDAQ	KLIC	Thu, Apr 28, 2022	46.52	48.60	45.69	48.20
7536	NASDAQ	KLIC	Wed, Apr 27, 2022	46.72	47.60	45.01	45.27
7535	NASDAQ	KLIC	Tue, Apr 26, 2022	48.15	48.95	46.88	46.95
7534	NASDAQ	KLIC	Mon, Apr 25, 2022	47.92	49.42	47.50	49.11
7533	NASDAQ	KLIC	Fri, Apr 22, 2022	51.31	51.92	47.89	48.04
7532	NASDAQ	KLIC	Thu, Apr 21, 2022	52.80	53.00	51.00	51.39
7531	NASDAQ	KLIC	Wed, Apr 20, 2022	53.11	53.73	51.66	51.73
7530	NASDAQ	KLIC	Tue, Apr 19, 2022	51.14	52.33	51.03	51.96
7529	NASDAQ	KLIC	Mon, Apr 18, 2022	50.79	52.13	50.79	51.44
7528	NASDAQ	KLIC	Thu, Apr 14, 2022	51.57	52.00	50.88	51.19
7527	NASDAQ	KLIC	Wed, Apr 13, 2022	51.46	52.12	51.07	51.54
7526	NASDAQ	KLIC	Tue, Apr 12, 2022	51.07	52.05	50.61	51.10
7525	NASDAQ	KLIC	Mon, Apr 11, 2022	51.71	52.54	50.91	51.27
7524	NASDAQ	KLIC	Fri, Apr 8, 2022	53.05	53.23	51.76	52.33
7523	NASDAQ	KLIC	Thu, Apr 7, 2022	52.17	54.11	51.44	53.18
7522	NASDAQ	KLIC	Wed, Apr 6, 2022	51.92	53.09	51.00	52.06
7521	NASDAQ	KLIC	Tue, Apr 5, 2022	54.68	55.36	52.54	53.04
7520	NASDAQ	KLIC	Mon, Apr 4, 2022	55.71	56.30	54.86	55.50
7519	NASDAQ	KLIC	Fri, Apr 1, 2022	56.46	57.53	54.55	55.15
7518	NASDAQ	KLIC	Thu, Mar 31, 2022	56.65	57.23	55.73	56.02
7517	NASDAQ	KLIC	Wed, Mar 30, 2022	59.71	59.91	55.95	56.51
7516	NASDAQ	KLIC	Tue, Mar 29, 2022	59.80	60.71	58.81	60.62
7515	NASDAQ	KLIC	Mon, Mar 28, 2022	60.40	60.87	57.80	59.00
7514	NASDAQ	KLIC	Fri, Mar 25, 2022	61.26	61.93	60.28	60.69
7513	NASDAQ	KLIC	Thu, Mar 24, 2022	59.56	61.34	59.39	61.26
7512	NASDAQ	KLIC	Wed, Mar 23, 2022	59.02	60.12	58.35	58.98
7511	NASDAQ	KLIC	Tue, Mar 22, 2022	59.78	60.85	59.34	59.72
7510	NASDAQ	KLIC	Mon, Mar 21, 2022	61.10	62.16	59.27	60.04
7509	NASDAQ	KLIC	Fri, Mar 18, 2022	60.34	61.52	59.36	61.33
7508	NASDAQ	KLIC	Thu, Mar 17, 2022	58.79	60.34	58.14	60.22
7507	NASDAQ	KLIC	Wed, Mar 16, 2022	56.70	59.54	55.79	59.34
7506	NASDAQ	KLIC	Tue, Mar 15, 2022	53.55	56.40	53.51	55.79
7505	NASDAQ	KLIC	Mon, Mar 14, 2022	51.65	55.29	51.14	53.59
7504	NASDAQ	KLIC	Fri, Mar 11, 2022	52.99	53.46	51.01	51.07
7503	NASDAQ	KLIC	Thu, Mar 10, 2022	51.17	52.96	50.64	52.54
7502	NASDAQ	KLIC	Wed, Mar 9, 2022	51.57	53.17	51.10	52.60
7501	NASDAQ	KLIC	Tue, Mar 8, 2022	47.64	51.02	46.93	48.98
7500	NASDAQ	KLIC	Mon, Mar 7, 2022	50.79	51.00	46.93	47.12
7499	NASDAQ	KLIC	Fri, Mar 4, 2022	52.92	53.20	50.68	51.14
7498	NASDAQ	KLIC	Thu, Mar 3, 2022	54.16	55.49	52.85	53.55
7497	NASDAQ	KLIC	Wed, Mar 2, 2022	51.64	53.16	51.21	52.85
7496	NASDAQ	KLIC	Tue, Mar 1, 2022	52.31	52.96	50.30	50.97
7495	NASDAQ	KLIC	Mon, Feb 28, 2022	53.03	54.20	51.57	52.24
7494	NASDAQ	KLIC	Fri, Feb 25, 2022	52.59	53.75	51.82	53.67
7493	NASDAQ	KLIC	Thu, Feb 24, 2022	47.55	52.76	47.00	52.61
7492	NASDAQ	KLIC	Wed, Feb 23, 2022	51.97	52.60	49.95	50.06
7491	NASDAQ	KLIC	Tue, Feb 22, 2022	51.69	53.62	50.77	50.98
7490	NASDAQ	KLIC	Fri, Feb 18, 2022	53.38	54.52	51.69	52.44
7489	NASDAQ	KLIC	Thu, Feb 17, 2022	53.19	54.97	52.95	53.46
7488	NASDAQ	KLIC	Wed, Feb 16, 2022	53.97	54.71	53.47	54.33
7487	NASDAQ	KLIC	Tue, Feb 15, 2022	52.42	54.39	51.88	53.95
7486	NASDAQ	KLIC	Mon, Feb 14, 2022	50.87	52.33	50.00	50.76
7485	NASDAQ	KLIC	Fri, Feb 11, 2022	53.00	54.77	50.34	50.50
7484	NASDAQ	KLIC	Thu, Feb 10, 2022	53.26	55.70	52.89	53.22
7483	NASDAQ	KLIC	Wed, Feb 9, 2022	52.40	54.78	52.25	54.64
7482	NASDAQ	KLIC	Tue, Feb 8, 2022	49.87	51.63	49.77	51.35
7481	NASDAQ	KLIC	Mon, Feb 7, 2022	50.83	51.46	49.46	49.77
7480	NASDAQ	KLIC	Fri, Feb 4, 2022	50.34	51.68	48.85	50.49
7479	NASDAQ	KLIC	Thu, Feb 3, 2022	53.00	55.00	51.26	53.00
7478	NASDAQ	KLIC	Wed, Feb 2, 2022	54.77	55.37	52.81	54.46
7477	NASDAQ	KLIC	Tue, Feb 1, 2022	55.25	55.54	53.12	54.38
7476	NASDAQ	KLIC	Mon, Jan 31, 2022	52.81	54.82	52.01	54.69
7475	NASDAQ	KLIC	Fri, Jan 28, 2022	51.17	52.14	49.07	52.09
7474	NASDAQ	KLIC	Thu, Jan 27, 2022	53.13	53.25	50.18	50.99
7473	NASDAQ	KLIC	Wed, Jan 26, 2022	55.25	55.38	52.06	53.08
7472	NASDAQ	KLIC	Tue, Jan 25, 2022	53.64	54.31	51.51	53.24
7471	NASDAQ	KLIC	Mon, Jan 24, 2022	50.32	54.75	50.00	54.50
7470	NASDAQ	KLIC	Fri, Jan 21, 2022	52.22	54.30	51.28	52.48
7469	NASDAQ	KLIC	Thu, Jan 20, 2022	56.47	57.50	53.03	53.16
7468	NASDAQ	KLIC	Wed, Jan 19, 2022	57.70	58.89	55.63	55.68
7467	NASDAQ	KLIC	Tue, Jan 18, 2022	59.92	60.49	57.20	57.43
7466	NASDAQ	KLIC	Fri, Jan 14, 2022	56.96	60.71	56.96	60.56
7465	NASDAQ	KLIC	Thu, Jan 13, 2022	59.98	62.11	57.77	57.96
7464	NASDAQ	KLIC	Wed, Jan 12, 2022	60.52	61.52	57.81	58.50
7463	NASDAQ	KLIC	Tue, Jan 11, 2022	59.15	60.51	58.25	59.98
7462	NASDAQ	KLIC	Mon, Jan 10, 2022	57.83	58.74	55.16	58.63
7461	NASDAQ	KLIC	Fri, Jan 7, 2022	60.96	61.58	57.73	58.16
7460	NASDAQ	KLIC	Thu, Jan 6, 2022	60.01	62.13	59.18	61.39
7459	NASDAQ	KLIC	Wed, Jan 5, 2022	64.48	65.32	59.17	59.76
7458	NASDAQ	KLIC	Tue, Jan 4, 2022	65.01	65.70	62.75	64.59
7457	NASDAQ	KLIC	Mon, Jan 3, 2022	60.67	65.37	60.67	65.37
7456	NASDAQ	KLIC	Fri, Dec 31, 2021	59.59	61.12	59.59	60.54
7455	NASDAQ	KLIC	Thu, Dec 30, 2021	59.95	60.09	59.19	59.48
7454	NASDAQ	KLIC	Wed, Dec 29, 2021	58.17	59.89	58.01	59.54
7453	NASDAQ	KLIC	Tue, Dec 28, 2021	58.94	59.09	57.51	58.54
7452	NASDAQ	KLIC	Mon, Dec 27, 2021	56.05	58.73	55.94	58.67
7451	NASDAQ	KLIC	Thu, Dec 23, 2021	55.56	56.47	54.89	55.98
7450	NASDAQ	KLIC	Wed, Dec 22, 2021	56.41	56.56	54.75	55.85
7449	NASDAQ	KLIC	Tue, Dec 21, 2021	57.71	58.42	56.22	56.97
7448	NASDAQ	KLIC	Mon, Dec 20, 2021	55.00	57.38	55.00	56.95
7447	NASDAQ	KLIC	Fri, Dec 17, 2021	54.71	57.14	54.03	56.04
7446	NASDAQ	KLIC	Thu, Dec 16, 2021	59.50	59.56	54.03	54.61
7445	NASDAQ	KLIC	Wed, Dec 15, 2021	55.30	58.67	55.15	58.60
7444	NASDAQ	KLIC	Tue, Dec 14, 2021	56.63	57.75	54.40	55.25
7443	NASDAQ	KLIC	Mon, Dec 13, 2021	66.00	66.31	57.04	57.33
7442	NASDAQ	KLIC	Fri, Dec 10, 2021	69.00	70.02	66.22	66.41
7441	NASDAQ	KLIC	Thu, Dec 9, 2021	68.00	73.45	67.61	68.30
7440	NASDAQ	KLIC	Wed, Dec 8, 2021	64.62	69.17	64.53	68.05
7439	NASDAQ	KLIC	Tue, Dec 7, 2021	59.96	65.25	59.54	65.12
7438	NASDAQ	KLIC	Mon, Dec 6, 2021	58.97	59.14	56.95	58.50
7437	NASDAQ	KLIC	Fri, Dec 3, 2021	59.60	60.19	57.74	59.40
7436	NASDAQ	KLIC	Thu, Dec 2, 2021	58.31	59.21	57.20	58.58
7435	NASDAQ	KLIC	Wed, Dec 1, 2021	59.39	60.94	58.55	58.62
7434	NASDAQ	KLIC	Tue, Nov 30, 2021	57.79	58.81	56.13	57.66
7433	NASDAQ	KLIC	Mon, Nov 29, 2021	58.85	59.68	57.77	58.15
7432	NASDAQ	KLIC	Fri, Nov 26, 2021	58.11	59.48	56.38	57.64
7431	NASDAQ	KLIC	Wed, Nov 24, 2021	59.50	60.27	58.89	60.01
7430	NASDAQ	KLIC	Tue, Nov 23, 2021	59.94	61.31	58.59	60.25
7429	NASDAQ	KLIC	Mon, Nov 22, 2021	57.99	60.47	57.27	59.71
7428	NASDAQ	KLIC	Fri, Nov 19, 2021	58.94	59.75	54.47	57.07
7427	NASDAQ	KLIC	Thu, Nov 18, 2021	57.86	62.94	57.84	59.95
7426	NASDAQ	KLIC	Wed, Nov 17, 2021	63.18	63.88	60.52	61.68
7425	NASDAQ	KLIC	Tue, Nov 16, 2021	60.88	63.17	60.88	63.01
7424	NASDAQ	KLIC	Mon, Nov 15, 2021	60.00	62.05	60.00	61.17
7423	NASDAQ	KLIC	Fri, Nov 12, 2021	56.96	59.46	56.80	59.15
7422	NASDAQ	KLIC	Thu, Nov 11, 2021	56.03	57.68	56.01	56.74
7421	NASDAQ	KLIC	Wed, Nov 10, 2021	56.29	58.30	55.06	55.22
7420	NASDAQ	KLIC	Tue, Nov 9, 2021	58.22	58.69	57.13	57.46
7419	NASDAQ	KLIC	Mon, Nov 8, 2021	57.61	59.00	57.61	58.15
7418	NASDAQ	KLIC	Fri, Nov 5, 2021	56.45	58.41	56.41	57.33
7417	NASDAQ	KLIC	Thu, Nov 4, 2021	55.95	57.23	54.37	56.72
7416	NASDAQ	KLIC	Wed, Nov 3, 2021	54.07	56.79	53.58	56.05
7415	NASDAQ	KLIC	Tue, Nov 2, 2021	58.39	58.39	53.90	54.12
7414	NASDAQ	KLIC	Mon, Nov 1, 2021	58.02	59.25	57.32	58.01
7413	NASDAQ	KLIC	Fri, Oct 29, 2021	56.83	57.18	55.99	57.00
7412	NASDAQ	KLIC	Thu, Oct 28, 2021	54.96	57.39	54.96	56.92
7411	NASDAQ	KLIC	Wed, Oct 27, 2021	55.01	56.57	54.05	54.24
7410	NASDAQ	KLIC	Tue, Oct 26, 2021	55.83	56.20	54.49	55.01
7409	NASDAQ	KLIC	Mon, Oct 25, 2021	58.23	58.23	54.58	55.66
7408	NASDAQ	KLIC	Fri, Oct 22, 2021	56.51	57.37	54.88	55.15
7407	NASDAQ	KLIC	Thu, Oct 21, 2021	52.89	56.46	52.79	56.35
7406	NASDAQ	KLIC	Wed, Oct 20, 2021	51.93	53.19	51.80	53.00
7405	NASDAQ	KLIC	Tue, Oct 19, 2021	50.06	52.67	50.05	51.90
7404	NASDAQ	KLIC	Mon, Oct 18, 2021	49.07	50.32	48.61	50.04
7403	NASDAQ	KLIC	Fri, Oct 15, 2021	51.25	51.57	49.12	49.20
7402	NASDAQ	KLIC	Thu, Oct 14, 2021	51.49	51.74	49.84	50.90
7401	NASDAQ	KLIC	Wed, Oct 13, 2021	50.31	51.34	49.58	50.00
7400	NASDAQ	KLIC	Tue, Oct 12, 2021	51.80	51.80	49.26	49.69
7399	NASDAQ	KLIC	Mon, Oct 11, 2021	52.50	53.20	51.22	51.25
7398	NASDAQ	KLIC	Fri, Oct 8, 2021	55.02	55.50	52.36	52.72
7397	NASDAQ	KLIC	Thu, Oct 7, 2021	56.34	56.57	54.78	55.00
7396	NASDAQ	KLIC	Wed, Oct 6, 2021	54.19	55.69	54.19	55.22
7395	NASDAQ	KLIC	Tue, Oct 5, 2021	55.45	56.33	54.57	55.55
7394	NASDAQ	KLIC	Mon, Oct 4, 2021	57.55	58.20	54.99	55.15
7393	NASDAQ	KLIC	Fri, Oct 1, 2021	60.12	60.12	57.17	58.67
7392	NASDAQ	KLIC	Thu, Sep 30, 2021	59.37	60.03	58.26	58.28
7391	NASDAQ	KLIC	Wed, Sep 29, 2021	61.98	62.08	58.47	58.55
7390	NASDAQ	KLIC	Tue, Sep 28, 2021	62.21	62.90	60.37	61.59
7389	NASDAQ	KLIC	Mon, Sep 27, 2021	65.64	65.86	62.58	63.98
7388	NASDAQ	KLIC	Fri, Sep 24, 2021	66.76	67.78	64.81	65.83
7387	NASDAQ	KLIC	Thu, Sep 23, 2021	66.94	67.40	64.54	66.94
7386	NASDAQ	KLIC	Wed, Sep 22, 2021	65.64	66.33	64.40	66.07
7385	NASDAQ	KLIC	Tue, Sep 21, 2021	67.99	68.29	65.31	65.31
7384	NASDAQ	KLIC	Mon, Sep 20, 2021	65.44	67.44	64.54	67.28
7383	NASDAQ	KLIC	Fri, Sep 17, 2021	68.10	68.83	66.18	67.58
7382	NASDAQ	KLIC	Thu, Sep 16, 2021	70.14	70.47	66.64	68.38
7381	NASDAQ	KLIC	Wed, Sep 15, 2021	71.41	71.45	69.92	70.98
7380	NASDAQ	KLIC	Tue, Sep 14, 2021	73.01	73.77	71.21	71.52
7379	NASDAQ	KLIC	Mon, Sep 13, 2021	72.62	72.91	70.82	72.65
7378	NASDAQ	KLIC	Fri, Sep 10, 2021	73.42	74.95	72.24	72.36
7377	NASDAQ	KLIC	Thu, Sep 9, 2021	70.81	74.55	70.50	73.29
7376	NASDAQ	KLIC	Wed, Sep 8, 2021	73.31	73.45	70.85	71.25
7375	NASDAQ	KLIC	Tue, Sep 7, 2021	74.33	75.29	74.00	74.06
7374	NASDAQ	KLIC	Fri, Sep 3, 2021	73.01	73.88	72.42	73.59
7373	NASDAQ	KLIC	Thu, Sep 2, 2021	71.50	73.30	70.19	72.81
7372	NASDAQ	KLIC	Wed, Sep 1, 2021	70.73	71.56	68.40	71.08
7371	NASDAQ	KLIC	Tue, Aug 31, 2021	70.09	71.08	68.90	70.19
7370	NASDAQ	KLIC	Mon, Aug 30, 2021	70.11	72.00	68.86	70.04
7369	NASDAQ	KLIC	Fri, Aug 27, 2021	66.95	70.37	66.76	69.96
7368	NASDAQ	KLIC	Thu, Aug 26, 2021	66.96	67.88	65.91	66.73
7367	NASDAQ	KLIC	Wed, Aug 25, 2021	65.05	67.33	64.72	66.74
7366	NASDAQ	KLIC	Tue, Aug 24, 2021	65.83	66.99	63.04	64.77
7365	NASDAQ	KLIC	Mon, Aug 23, 2021	65.00	65.80	63.77	65.43
7364	NASDAQ	KLIC	Fri, Aug 20, 2021	64.01	64.90	62.75	63.94
7363	NASDAQ	KLIC	Thu, Aug 19, 2021	64.25	65.58	63.27	63.96
7362	NASDAQ	KLIC	Wed, Aug 18, 2021	63.31	66.20	63.31	65.26
7361	NASDAQ	KLIC	Tue, Aug 17, 2021	65.16	65.46	62.10	63.53
7360	NASDAQ	KLIC	Mon, Aug 16, 2021	63.83	66.18	63.17	65.48
7359	NASDAQ	KLIC	Fri, Aug 13, 2021	64.00	65.48	63.11	64.22
7358	NASDAQ	KLIC	Thu, Aug 12, 2021	66.45	66.45	63.66	64.17
7357	NASDAQ	KLIC	Wed, Aug 11, 2021	69.42	69.87	65.28	66.68
7356	NASDAQ	KLIC	Tue, Aug 10, 2021	69.18	71.30	68.50	70.24
7355	NASDAQ	KLIC	Mon, Aug 9, 2021	65.11	69.20	64.16	69.03
7354	NASDAQ	KLIC	Fri, Aug 6, 2021	61.07	65.76	60.54	65.33
7353	NASDAQ	KLIC	Thu, Aug 5, 2021	60.35	64.68	58.86	60.36
7352	NASDAQ	KLIC	Wed, Aug 4, 2021	53.76	54.88	53.05	53.14
7351	NASDAQ	KLIC	Tue, Aug 3, 2021	54.30	54.66	52.39	53.78
7350	NASDAQ	KLIC	Mon, Aug 2, 2021	54.71	55.87	54.25	54.41
7349	NASDAQ	KLIC	Fri, Jul 30, 2021	53.76	55.05	53.45	54.36
7348	NASDAQ	KLIC	Thu, Jul 29, 2021	53.70	54.91	53.27	54.64
7347	NASDAQ	KLIC	Wed, Jul 28, 2021	53.58	54.32	52.74	53.70
7346	NASDAQ	KLIC	Tue, Jul 27, 2021	54.53	54.53	50.45	52.91
7345	NASDAQ	KLIC	Mon, Jul 26, 2021	54.50	55.42	53.95	54.82
7344	NASDAQ	KLIC	Fri, Jul 23, 2021	54.65	54.79	53.80	54.58
7343	NASDAQ	KLIC	Thu, Jul 22, 2021	54.67	55.07	53.87	54.44
7342	NASDAQ	KLIC	Wed, Jul 21, 2021	53.63	55.18	53.61	54.97
7341	NASDAQ	KLIC	Tue, Jul 20, 2021	52.01	53.55	51.02	52.99
7340	NASDAQ	KLIC	Mon, Jul 19, 2021	49.30	51.78	48.55	51.72
7339	NASDAQ	KLIC	Fri, Jul 16, 2021	53.21	53.48	50.53	50.69
7338	NASDAQ	KLIC	Thu, Jul 15, 2021	52.93	53.18	51.65	52.70
7337	NASDAQ	KLIC	Wed, Jul 14, 2021	54.78	55.47	53.07	53.30
7336	NASDAQ	KLIC	Tue, Jul 13, 2021	53.60	54.51	52.58	54.21
7335	NASDAQ	KLIC	Mon, Jul 12, 2021	53.08	53.77	52.28	53.74
7334	NASDAQ	KLIC	Fri, Jul 9, 2021	51.73	53.10	51.06	53.04
7333	NASDAQ	KLIC	Thu, Jul 8, 2021	50.44	51.50	49.51	50.80
7332	NASDAQ	KLIC	Wed, Jul 7, 2021	55.68	56.52	52.21	52.35
7331	NASDAQ	KLIC	Tue, Jul 6, 2021	59.12	59.42	53.95	55.61
7330	NASDAQ	KLIC	Fri, Jul 2, 2021	60.14	60.40	58.65	59.26
7329	NASDAQ	KLIC	Thu, Jul 1, 2021	61.84	62.23	58.56	59.69
7328	NASDAQ	KLIC	Wed, Jun 30, 2021	60.74	61.66	59.50	61.20
7327	NASDAQ	KLIC	Tue, Jun 29, 2021	63.05	63.16	60.89	61.27
7326	NASDAQ	KLIC	Mon, Jun 28, 2021	62.37	63.69	61.60	63.06
7325	NASDAQ	KLIC	Fri, Jun 25, 2021	59.89	62.39	58.82	61.45
7324	NASDAQ	KLIC	Thu, Jun 24, 2021	55.97	60.01	55.97	59.14
7323	NASDAQ	KLIC	Wed, Jun 23, 2021	55.14	56.03	54.72	55.50
7322	NASDAQ	KLIC	Tue, Jun 22, 2021	55.57	56.34	54.78	55.37
7321	NASDAQ	KLIC	Mon, Jun 21, 2021	54.05	56.43	53.22	56.06
7320	NASDAQ	KLIC	Fri, Jun 18, 2021	55.86	56.00	52.60	53.97
7319	NASDAQ	KLIC	Thu, Jun 17, 2021	56.90	57.22	55.14	56.47
7318	NASDAQ	KLIC	Wed, Jun 16, 2021	56.17	57.06	56.02	56.91
7317	NASDAQ	KLIC	Tue, Jun 15, 2021	56.65	57.50	55.83	56.57
7316	NASDAQ	KLIC	Mon, Jun 14, 2021	56.79	57.20	55.46	56.65
7315	NASDAQ	KLIC	Fri, Jun 11, 2021	56.25	56.83	55.19	56.79
7314	NASDAQ	KLIC	Thu, Jun 10, 2021	56.74	56.93	54.83	55.96
7313	NASDAQ	KLIC	Wed, Jun 9, 2021	56.78	56.98	55.64	56.47
7312	NASDAQ	KLIC	Tue, Jun 8, 2021	55.67	56.78	54.83	56.70
7311	NASDAQ	KLIC	Mon, Jun 7, 2021	53.14	55.85	53.14	55.67
7310	NASDAQ	KLIC	Fri, Jun 4, 2021	52.19	53.52	52.19	53.25
7309	NASDAQ	KLIC	Thu, Jun 3, 2021	52.18	52.53	51.08	51.69
7308	NASDAQ	KLIC	Wed, Jun 2, 2021	53.27	53.35	52.27	52.64
7307	NASDAQ	KLIC	Tue, Jun 1, 2021	52.13	53.59	51.86	53.24
7306	NASDAQ	KLIC	Fri, May 28, 2021	52.03	52.23	51.32	51.90
7305	NASDAQ	KLIC	Thu, May 27, 2021	50.77	51.93	50.65	51.59
7304	NASDAQ	KLIC	Wed, May 26, 2021	50.34	50.96	49.76	50.88
7303	NASDAQ	KLIC	Tue, May 25, 2021	51.00	51.59	50.33	50.33
7302	NASDAQ	KLIC	Mon, May 24, 2021	49.69	51.07	49.23	50.56
7301	NASDAQ	KLIC	Fri, May 21, 2021	49.42	49.66	48.66	49.25
7300	NASDAQ	KLIC	Thu, May 20, 2021	49.50	49.74	47.90	49.30
7299	NASDAQ	KLIC	Wed, May 19, 2021	46.72	48.00	46.34	47.50
7298	NASDAQ	KLIC	Tue, May 18, 2021	48.84	49.38	47.72	47.72
7297	NASDAQ	KLIC	Mon, May 17, 2021	46.17	48.21	45.70	48.13
7296	NASDAQ	KLIC	Fri, May 14, 2021	44.71	47.15	44.63	46.82
7295	NASDAQ	KLIC	Thu, May 13, 2021	44.88	45.70	43.41	44.23
7294	NASDAQ	KLIC	Wed, May 12, 2021	45.67	46.15	43.77	43.89
7293	NASDAQ	KLIC	Tue, May 11, 2021	44.56	46.95	43.72	46.66
7292	NASDAQ	KLIC	Mon, May 10, 2021	49.99	49.99	46.12	46.27
7291	NASDAQ	KLIC	Fri, May 7, 2021	48.90	50.97	48.67	50.69
7290	NASDAQ	KLIC	Thu, May 6, 2021	51.48	52.39	45.73	48.48
7289	NASDAQ	KLIC	Wed, May 5, 2021	57.35	57.67	53.40	53.92
7288	NASDAQ	KLIC	Tue, May 4, 2021	57.05	57.53	53.50	54.05
7287	NASDAQ	KLIC	Mon, May 3, 2021	57.07	58.48	56.41	58.40
7286	NASDAQ	KLIC	Fri, Apr 30, 2021	56.79	57.31	56.28	56.85
7285	NASDAQ	KLIC	Thu, Apr 29, 2021	58.35	58.42	56.72	58.01
7284	NASDAQ	KLIC	Wed, Apr 28, 2021	58.81	59.47	56.40	57.89
7283	NASDAQ	KLIC	Tue, Apr 27, 2021	59.72	60.00	57.64	58.27
7282	NASDAQ	KLIC	Mon, Apr 26, 2021	59.43	61.24	58.74	59.32
7281	NASDAQ	KLIC	Fri, Apr 23, 2021	53.74	58.48	53.74	57.84
7280	NASDAQ	KLIC	Thu, Apr 22, 2021	54.00	54.79	52.31	53.74
7279	NASDAQ	KLIC	Wed, Apr 21, 2021	52.01	54.19	51.86	53.93
7278	NASDAQ	KLIC	Tue, Apr 20, 2021	52.33	53.40	51.17	52.06
7277	NASDAQ	KLIC	Mon, Apr 19, 2021	55.55	56.12	50.53	52.12
7276	NASDAQ	KLIC	Fri, Apr 16, 2021	53.30	55.08	52.62	54.42
7275	NASDAQ	KLIC	Thu, Apr 15, 2021	53.71	53.84	51.47	53.13
7274	NASDAQ	KLIC	Wed, Apr 14, 2021	52.71	53.97	52.65	52.75
7273	NASDAQ	KLIC	Tue, Apr 13, 2021	54.35	54.57	52.12	52.89
7272	NASDAQ	KLIC	Mon, Apr 12, 2021	54.13	54.33	52.96	53.79
7271	NASDAQ	KLIC	Fri, Apr 9, 2021	55.41	55.63	53.60	54.23
7270	NASDAQ	KLIC	Thu, Apr 8, 2021	56.03	56.57	55.53	56.20
7269	NASDAQ	KLIC	Wed, Apr 7, 2021	56.02	56.38	54.20	54.95
7268	NASDAQ	KLIC	Tue, Apr 6, 2021	55.98	56.68	54.77	56.22
7267	NASDAQ	KLIC	Mon, Apr 5, 2021	52.70	56.51	52.34	55.59
7266	NASDAQ	KLIC	Thu, Apr 1, 2021	50.00	51.40	50.00	51.39
7265	NASDAQ	KLIC	Wed, Mar 31, 2021	46.88	49.12	46.82	49.11
7264	NASDAQ	KLIC	Tue, Mar 30, 2021	44.78	46.33	44.69	46.33
7263	NASDAQ	KLIC	Mon, Mar 29, 2021	46.30	46.61	44.34	44.88
7262	NASDAQ	KLIC	Fri, Mar 26, 2021	43.83	46.50	43.68	46.42
7261	NASDAQ	KLIC	Thu, Mar 25, 2021	43.97	44.67	42.80	44.34
7260	NASDAQ	KLIC	Wed, Mar 24, 2021	48.46	48.92	45.08	45.13
7259	NASDAQ	KLIC	Tue, Mar 23, 2021	49.50	49.73	46.22	46.72
7258	NASDAQ	KLIC	Mon, Mar 22, 2021	49.71	50.20	48.51	49.68
7257	NASDAQ	KLIC	Fri, Mar 19, 2021	49.57	50.10	48.59	48.90
7256	NASDAQ	KLIC	Thu, Mar 18, 2021	50.97	51.06	49.17	49.62
7255	NASDAQ	KLIC	Wed, Mar 17, 2021	49.59	51.23	48.55	50.98
7254	NASDAQ	KLIC	Tue, Mar 16, 2021	49.26	51.23	49.06	50.28
7253	NASDAQ	KLIC	Mon, Mar 15, 2021	46.71	49.14	46.51	48.76
7252	NASDAQ	KLIC	Fri, Mar 12, 2021	46.32	46.69	45.60	46.61
7251	NASDAQ	KLIC	Thu, Mar 11, 2021	46.22	46.87	45.66	46.84
7250	NASDAQ	KLIC	Wed, Mar 10, 2021	45.79	46.57	44.68	45.20
7249	NASDAQ	KLIC	Tue, Mar 9, 2021	44.02	45.41	43.80	44.96
7248	NASDAQ	KLIC	Mon, Mar 8, 2021	46.21	46.50	42.28	42.69
7247	NASDAQ	KLIC	Fri, Mar 5, 2021	45.62	45.89	42.53	44.11
7246	NASDAQ	KLIC	Thu, Mar 4, 2021	47.67	47.98	43.72	44.73
7245	NASDAQ	KLIC	Wed, Mar 3, 2021	49.08	49.65	47.79	48.39
7244	NASDAQ	KLIC	Tue, Mar 2, 2021	51.79	51.90	48.93	49.11
7243	NASDAQ	KLIC	Mon, Mar 1, 2021	50.65	52.15	50.05	52.07
7242	NASDAQ	KLIC	Fri, Feb 26, 2021	48.40	50.65	47.91	49.86
7241	NASDAQ	KLIC	Thu, Feb 25, 2021	50.25	50.30	46.99	47.50
7240	NASDAQ	KLIC	Wed, Feb 24, 2021	48.03	50.28	48.03	50.09
7239	NASDAQ	KLIC	Tue, Feb 23, 2021	45.27	48.42	44.37	48.27
7238	NASDAQ	KLIC	Mon, Feb 22, 2021	48.39	48.98	46.52	46.80
7237	NASDAQ	KLIC	Fri, Feb 19, 2021	50.71	50.97	48.85	49.07
7236	NASDAQ	KLIC	Thu, Feb 18, 2021	51.79	52.27	49.05	49.68
7235	NASDAQ	KLIC	Wed, Feb 17, 2021	50.94	52.55	49.50	52.15
7234	NASDAQ	KLIC	Tue, Feb 16, 2021	49.31	51.34	49.22	51.03
7233	NASDAQ	KLIC	Fri, Feb 12, 2021	48.17	48.96	47.41	48.50
7232	NASDAQ	KLIC	Thu, Feb 11, 2021	46.00	48.34	45.89	48.12
7231	NASDAQ	KLIC	Wed, Feb 10, 2021	44.73	45.65	43.80	45.16
7230	NASDAQ	KLIC	Tue, Feb 9, 2021	43.01	43.82	42.87	43.64
7229	NASDAQ	KLIC	Mon, Feb 8, 2021	44.60	44.97	42.53	43.17
7228	NASDAQ	KLIC	Fri, Feb 5, 2021	41.55	43.85	40.46	42.99
7227	NASDAQ	KLIC	Thu, Feb 4, 2021	43.99	45.45	39.71	41.03
7226	NASDAQ	KLIC	Wed, Feb 3, 2021	38.95	39.12	36.84	37.28
7225	NASDAQ	KLIC	Tue, Feb 2, 2021	38.12	38.65	37.09	38.50
7224	NASDAQ	KLIC	Mon, Feb 1, 2021	36.68	37.85	36.24	37.69
7223	NASDAQ	KLIC	Fri, Jan 29, 2021	37.47	37.47	35.61	35.67
7222	NASDAQ	KLIC	Thu, Jan 28, 2021	36.33	37.19	35.50	36.89
7221	NASDAQ	KLIC	Wed, Jan 27, 2021	36.07	36.67	34.79	35.95
7220	NASDAQ	KLIC	Tue, Jan 26, 2021	37.92	38.19	36.53	36.66
7219	NASDAQ	KLIC	Mon, Jan 25, 2021	38.07	39.57	37.77	38.12
7218	NASDAQ	KLIC	Fri, Jan 22, 2021	37.82	38.40	37.73	37.94
7217	NASDAQ	KLIC	Thu, Jan 21, 2021	38.76	38.85	38.20	38.51
7216	NASDAQ	KLIC	Wed, Jan 20, 2021	39.03	39.66	37.92	38.45
7215	NASDAQ	KLIC	Tue, Jan 19, 2021	39.01	39.68	38.04	38.70
7214	NASDAQ	KLIC	Fri, Jan 15, 2021	38.27	38.67	36.99	38.08
7213	NASDAQ	KLIC	Thu, Jan 14, 2021	37.86	38.82	37.75	38.47
7212	NASDAQ	KLIC	Wed, Jan 13, 2021	35.98	37.33	35.48	37.25
7211	NASDAQ	KLIC	Tue, Jan 12, 2021	36.00	36.10	35.55	35.99
7210	NASDAQ	KLIC	Mon, Jan 11, 2021	34.38	35.85	34.06	35.76
7209	NASDAQ	KLIC	Fri, Jan 8, 2021	34.47	35.15	34.04	34.70
7208	NASDAQ	KLIC	Thu, Jan 7, 2021	33.34	34.40	33.12	34.33
7207	NASDAQ	KLIC	Wed, Jan 6, 2021	32.99	33.78	32.97	33.30
7206	NASDAQ	KLIC	Tue, Jan 5, 2021	32.09	33.18	31.86	33.13
7205	NASDAQ	KLIC	Mon, Jan 4, 2021	32.22	33.47	32.11	32.28
7204	NASDAQ	KLIC	Thu, Dec 31, 2020	31.95	32.07	31.24	31.81
7203	NASDAQ	KLIC	Wed, Dec 30, 2020	32.09	32.67	31.72	31.80
7202	NASDAQ	KLIC	Tue, Dec 29, 2020	32.66	33.04	31.45	31.86
7201	NASDAQ	KLIC	Mon, Dec 28, 2020	33.01	33.57	32.64	32.72
7200	NASDAQ	KLIC	Thu, Dec 24, 2020	33.90	33.90	32.63	32.89
7199	NASDAQ	KLIC	Wed, Dec 23, 2020	32.93	33.20	32.79	32.88
7198	NASDAQ	KLIC	Tue, Dec 22, 2020	32.62	32.94	32.36	32.85
7197	NASDAQ	KLIC	Mon, Dec 21, 2020	32.34	32.69	31.81	32.35
7196	NASDAQ	KLIC	Fri, Dec 18, 2020	33.24	33.86	32.77	32.77
7195	NASDAQ	KLIC	Thu, Dec 17, 2020	33.49	34.01	33.00	33.36
7194	NASDAQ	KLIC	Wed, Dec 16, 2020	34.24	34.24	33.06	33.35
7193	NASDAQ	KLIC	Tue, Dec 15, 2020	33.82	34.10	33.50	34.07
7192	NASDAQ	KLIC	Mon, Dec 14, 2020	34.00	34.05	33.48	33.51
7191	NASDAQ	KLIC	Fri, Dec 11, 2020	33.93	34.20	33.10	33.67
7190	NASDAQ	KLIC	Thu, Dec 10, 2020	32.44	34.19	32.33	34.02
7189	NASDAQ	KLIC	Wed, Dec 9, 2020	33.02	33.41	32.13	32.44
7188	NASDAQ	KLIC	Tue, Dec 8, 2020	32.90	33.19	32.56	33.01
7187	NASDAQ	KLIC	Mon, Dec 7, 2020	32.44	33.29	32.21	33.01
7186	NASDAQ	KLIC	Fri, Dec 4, 2020	31.37	32.22	31.29	32.21
7185	NASDAQ	KLIC	Thu, Dec 3, 2020	31.04	31.67	31.04	31.43
7184	NASDAQ	KLIC	Wed, Dec 2, 2020	31.24	31.48	30.86	31.01
7183	NASDAQ	KLIC	Tue, Dec 1, 2020	30.83	31.54	30.77	31.29
7182	NASDAQ	KLIC	Mon, Nov 30, 2020	30.51	30.88	29.90	30.45
7181	NASDAQ	KLIC	Fri, Nov 27, 2020	30.67	30.89	30.47	30.61
7180	NASDAQ	KLIC	Wed, Nov 25, 2020	30.79	31.00	30.09	30.55
7179	NASDAQ	KLIC	Tue, Nov 24, 2020	30.99	31.22	30.25	30.92
7178	NASDAQ	KLIC	Mon, Nov 23, 2020	30.19	30.93	29.80	30.66
7177	NASDAQ	KLIC	Fri, Nov 20, 2020	30.14	30.85	29.94	30.05
7176	NASDAQ	KLIC	Thu, Nov 19, 2020	32.01	32.50	29.32	30.03
7175	NASDAQ	KLIC	Wed, Nov 18, 2020	29.50	31.54	29.49	31.19
7174	NASDAQ	KLIC	Tue, Nov 17, 2020	28.32	29.42	28.27	29.31
7173	NASDAQ	KLIC	Mon, Nov 16, 2020	28.54	28.96	28.23	28.55
7172	NASDAQ	KLIC	Fri, Nov 13, 2020	28.51	28.76	28.12	28.40
7171	NASDAQ	KLIC	Thu, Nov 12, 2020	28.40	28.68	27.90	28.12
7170	NASDAQ	KLIC	Wed, Nov 11, 2020	28.60	28.69	28.00	28.49
7169	NASDAQ	KLIC	Tue, Nov 10, 2020	28.29	28.75	27.76	28.18
7168	NASDAQ	KLIC	Mon, Nov 9, 2020	29.50	29.94	28.45	28.53
7167	NASDAQ	KLIC	Fri, Nov 6, 2020	28.34	28.58	27.82	28.47
7166	NASDAQ	KLIC	Thu, Nov 5, 2020	27.80	28.77	26.80	28.34
7165	NASDAQ	KLIC	Wed, Nov 4, 2020	27.12	27.56	26.82	27.38
7164	NASDAQ	KLIC	Tue, Nov 3, 2020	26.82	27.09	26.54	26.81
7163	NASDAQ	KLIC	Mon, Nov 2, 2020	26.54	26.85	26.26	26.49
7162	NASDAQ	KLIC	Fri, Oct 30, 2020	25.75	26.14	25.42	26.14
7161	NASDAQ	KLIC	Thu, Oct 29, 2020	25.42	26.09	25.31	25.94
7160	NASDAQ	KLIC	Wed, Oct 28, 2020	25.43	25.64	25.20	25.45
7159	NASDAQ	KLIC	Tue, Oct 27, 2020	26.12	26.34	25.84	25.87
7158	NASDAQ	KLIC	Mon, Oct 26, 2020	26.41	26.71	26.09	26.19
7157	NASDAQ	KLIC	Fri, Oct 23, 2020	27.17	27.29	26.60	26.91
7156	NASDAQ	KLIC	Thu, Oct 22, 2020	27.22	27.27	26.67	27.13
7155	NASDAQ	KLIC	Wed, Oct 21, 2020	27.01	27.33	26.48	27.17
7154	NASDAQ	KLIC	Tue, Oct 20, 2020	27.16	27.33	26.79	27.00
7153	NASDAQ	KLIC	Mon, Oct 19, 2020	26.91	27.35	26.89	27.01
7152	NASDAQ	KLIC	Fri, Oct 16, 2020	26.82	27.07	26.71	26.85
7151	NASDAQ	KLIC	Thu, Oct 15, 2020	26.39	26.99	26.00	26.93
7150	NASDAQ	KLIC	Wed, Oct 14, 2020	27.48	27.59	26.45	26.92
7149	NASDAQ	KLIC	Tue, Oct 13, 2020	25.13	27.66	25.10	27.47
7148	NASDAQ	KLIC	Mon, Oct 12, 2020	25.20	25.32	24.72	25.18
7147	NASDAQ	KLIC	Fri, Oct 9, 2020	24.83	25.50	24.55	25.08
7146	NASDAQ	KLIC	Thu, Oct 8, 2020	24.00	24.59	23.85	24.55
7145	NASDAQ	KLIC	Wed, Oct 7, 2020	24.11	24.46	23.64	23.88
7144	NASDAQ	KLIC	Tue, Oct 6, 2020	23.29	24.46	23.26	23.92
7143	NASDAQ	KLIC	Mon, Oct 5, 2020	22.04	23.23	22.04	23.20
7142	NASDAQ	KLIC	Fri, Oct 2, 2020	22.10	22.40	21.87	21.89
7141	NASDAQ	KLIC	Thu, Oct 1, 2020	22.53	22.79	22.50	22.70
7140	NASDAQ	KLIC	Wed, Sep 30, 2020	22.58	22.80	22.22	22.40
7139	NASDAQ	KLIC	Tue, Sep 29, 2020	22.61	22.97	22.61	22.64
7138	NASDAQ	KLIC	Mon, Sep 28, 2020	22.30	23.04	22.13	22.54
7137	NASDAQ	KLIC	Fri, Sep 25, 2020	22.15	22.28	21.86	22.09
7136	NASDAQ	KLIC	Thu, Sep 24, 2020	21.91	22.63	21.88	22.33
7135	NASDAQ	KLIC	Wed, Sep 23, 2020	22.79	23.01	22.10	22.11
7134	NASDAQ	KLIC	Tue, Sep 22, 2020	22.92	23.10	22.20	22.72
7133	NASDAQ	KLIC	Mon, Sep 21, 2020	22.84	23.02	22.56	22.77
7132	NASDAQ	KLIC	Fri, Sep 18, 2020	23.53	23.56	22.86	23.18
7131	NASDAQ	KLIC	Thu, Sep 17, 2020	22.77	23.50	22.69	23.43
7130	NASDAQ	KLIC	Wed, Sep 16, 2020	23.63	23.82	23.28	23.31
7129	NASDAQ	KLIC	Tue, Sep 15, 2020	23.68	23.75	23.34	23.52
7128	NASDAQ	KLIC	Mon, Sep 14, 2020	23.33	23.65	23.31	23.49
7127	NASDAQ	KLIC	Fri, Sep 11, 2020	23.10	23.48	22.78	22.93
7126	NASDAQ	KLIC	Thu, Sep 10, 2020	23.69	23.69	22.98	23.02
7125	NASDAQ	KLIC	Wed, Sep 9, 2020	23.80	23.80	23.34	23.35
7124	NASDAQ	KLIC	Tue, Sep 8, 2020	23.53	23.92	23.18	23.37
7123	NASDAQ	KLIC	Fri, Sep 4, 2020	24.89	24.98	23.77	24.22
7122	NASDAQ	KLIC	Thu, Sep 3, 2020	25.53	25.53	24.65	24.82
7121	NASDAQ	KLIC	Wed, Sep 2, 2020	24.80	26.05	24.79	26.00
7120	NASDAQ	KLIC	Tue, Sep 1, 2020	24.00	24.58	23.90	24.45
7119	NASDAQ	KLIC	Mon, Aug 31, 2020	24.60	24.67	23.96	23.98
7118	NASDAQ	KLIC	Fri, Aug 28, 2020	24.57	24.89	24.24	24.68
7117	NASDAQ	KLIC	Thu, Aug 27, 2020	25.14	25.20	24.40	24.42
7116	NASDAQ	KLIC	Wed, Aug 26, 2020	25.15	25.18	24.79	25.16
7115	NASDAQ	KLIC	Tue, Aug 25, 2020	24.72	25.18	24.55	25.11
7114	NASDAQ	KLIC	Mon, Aug 24, 2020	24.20	24.66	24.18	24.63
7113	NASDAQ	KLIC	Fri, Aug 21, 2020	23.71	24.01	23.60	23.97
7112	NASDAQ	KLIC	Thu, Aug 20, 2020	24.37	24.37	23.65	23.83
7111	NASDAQ	KLIC	Wed, Aug 19, 2020	24.23	24.58	24.14	24.46
7110	NASDAQ	KLIC	Tue, Aug 18, 2020	24.20	24.39	23.75	24.34
7109	NASDAQ	KLIC	Mon, Aug 17, 2020	24.15	24.30	23.63	24.10
7108	NASDAQ	KLIC	Fri, Aug 14, 2020	24.45	24.72	23.80	23.89
7107	NASDAQ	KLIC	Thu, Aug 13, 2020	24.86	25.51	24.33	24.52
7106	NASDAQ	KLIC	Wed, Aug 12, 2020	25.12	25.39	24.68	24.81
7105	NASDAQ	KLIC	Tue, Aug 11, 2020	24.90	25.81	24.89	24.93
7104	NASDAQ	KLIC	Mon, Aug 10, 2020	24.84	25.08	24.73	24.93
7103	NASDAQ	KLIC	Fri, Aug 7, 2020	24.55	25.05	24.45	24.83
7102	NASDAQ	KLIC	Thu, Aug 6, 2020	25.47	26.60	24.60	24.72
7101	NASDAQ	KLIC	Wed, Aug 5, 2020	24.18	25.81	23.88	25.22
7100	NASDAQ	KLIC	Tue, Aug 4, 2020	23.58	24.17	23.21	24.15
7099	NASDAQ	KLIC	Mon, Aug 3, 2020	23.86	24.40	23.49	23.60
7098	NASDAQ	KLIC	Fri, Jul 31, 2020	25.51	25.51	23.50	23.70
7097	NASDAQ	KLIC	Thu, Jul 30, 2020	25.35	25.83	24.29	25.28
7096	NASDAQ	KLIC	Wed, Jul 29, 2020	25.29	25.76	25.17	25.58
7095	NASDAQ	KLIC	Tue, Jul 28, 2020	25.23	25.62	24.99	25.11
7094	NASDAQ	KLIC	Mon, Jul 27, 2020	23.66	25.57	23.59	25.41
7093	NASDAQ	KLIC	Fri, Jul 24, 2020	23.96	23.96	23.06	23.43
7092	NASDAQ	KLIC	Thu, Jul 23, 2020	24.18	24.86	24.09	24.21
7091	NASDAQ	KLIC	Wed, Jul 22, 2020	24.05	24.41	23.86	24.25
7090	NASDAQ	KLIC	Tue, Jul 21, 2020	23.84	24.10	23.49	23.94
7089	NASDAQ	KLIC	Mon, Jul 20, 2020	22.50	23.59	22.35	23.57
7088	NASDAQ	KLIC	Fri, Jul 17, 2020	22.11	22.61	21.96	22.50
7087	NASDAQ	KLIC	Thu, Jul 16, 2020	22.03	22.20	21.74	22.01
7086	NASDAQ	KLIC	Wed, Jul 15, 2020	22.43	22.71	22.01	22.23
7085	NASDAQ	KLIC	Tue, Jul 14, 2020	22.11	22.43	21.93	22.25
7084	NASDAQ	KLIC	Mon, Jul 13, 2020	23.13	23.61	22.31	22.34
7083	NASDAQ	KLIC	Fri, Jul 10, 2020	22.85	23.53	22.47	22.76
7082	NASDAQ	KLIC	Thu, Jul 9, 2020	22.01	23.34	21.81	23.29
7081	NASDAQ	KLIC	Wed, Jul 8, 2020	21.65	21.82	21.32	21.76
7080	NASDAQ	KLIC	Tue, Jul 7, 2020	21.70	22.26	21.36	21.49
7079	NASDAQ	KLIC	Mon, Jul 6, 2020	22.19	22.32	21.78	21.88
7078	NASDAQ	KLIC	Thu, Jul 2, 2020	21.06	21.59	20.89	21.21
7077	NASDAQ	KLIC	Wed, Jul 1, 2020	20.90	21.27	20.74	20.79
7076	NASDAQ	KLIC	Tue, Jun 30, 2020	20.27	21.26	20.27	20.83
7075	NASDAQ	KLIC	Mon, Jun 29, 2020	20.30	21.18	20.10	20.20
7074	NASDAQ	KLIC	Fri, Jun 26, 2020	21.35	21.68	20.12	20.20
7073	NASDAQ	KLIC	Thu, Jun 25, 2020	21.78	21.90	21.21	21.43
7072	NASDAQ	KLIC	Wed, Jun 24, 2020	22.42	23.16	21.87	21.89
7071	NASDAQ	KLIC	Tue, Jun 23, 2020	22.74	23.53	22.74	23.13
7070	NASDAQ	KLIC	Mon, Jun 22, 2020	22.84	22.98	22.50	22.73
7069	NASDAQ	KLIC	Fri, Jun 19, 2020	23.24	23.50	22.83	22.95
7068	NASDAQ	KLIC	Thu, Jun 18, 2020	23.19	23.41	23.00	23.06
7067	NASDAQ	KLIC	Wed, Jun 17, 2020	23.49	23.58	23.02	23.28
7066	NASDAQ	KLIC	Tue, Jun 16, 2020	23.65	23.93	23.19	23.27
7065	NASDAQ	KLIC	Mon, Jun 15, 2020	21.71	22.91	21.71	22.89
7064	NASDAQ	KLIC	Fri, Jun 12, 2020	22.90	23.12	22.04	22.35
7063	NASDAQ	KLIC	Thu, Jun 11, 2020	23.00	23.28	22.11	22.26
7062	NASDAQ	KLIC	Wed, Jun 10, 2020	24.37	24.37	23.68	23.72
7061	NASDAQ	KLIC	Tue, Jun 9, 2020	24.36	24.62	24.06	24.37
7060	NASDAQ	KLIC	Mon, Jun 8, 2020	24.34	24.60	23.96	24.56
7059	NASDAQ	KLIC	Fri, Jun 5, 2020	24.33	24.72	23.88	24.34
7058	NASDAQ	KLIC	Thu, Jun 4, 2020	23.39	24.03	23.30	23.67
7057	NASDAQ	KLIC	Wed, Jun 3, 2020	22.91	23.67	22.91	23.48
7056	NASDAQ	KLIC	Tue, Jun 2, 2020	22.44	22.54	22.05	22.46
7055	NASDAQ	KLIC	Mon, Jun 1, 2020	22.27	22.56	22.01	22.24
7054	NASDAQ	KLIC	Fri, May 29, 2020	21.87	22.45	21.63	22.36
7053	NASDAQ	KLIC	Thu, May 28, 2020	23.11	23.26	22.20	22.27
7052	NASDAQ	KLIC	Wed, May 27, 2020	22.97	23.26	22.41	23.09
7051	NASDAQ	KLIC	Tue, May 26, 2020	22.81	23.25	22.57	22.68
7050	NASDAQ	KLIC	Fri, May 22, 2020	22.39	22.43	22.06	22.28
7049	NASDAQ	KLIC	Thu, May 21, 2020	23.00	23.31	22.42	22.43
7048	NASDAQ	KLIC	Wed, May 20, 2020	22.55	23.24	22.36	23.05
7047	NASDAQ	KLIC	Tue, May 19, 2020	21.95	22.85	21.89	22.10
7046	NASDAQ	KLIC	Mon, May 18, 2020	21.59	22.17	21.23	22.00
7045	NASDAQ	KLIC	Fri, May 15, 2020	20.77	21.16	20.65	20.90
7044	NASDAQ	KLIC	Thu, May 14, 2020	20.87	21.28	20.29	21.25
7043	NASDAQ	KLIC	Wed, May 13, 2020	22.20	22.20	20.79	21.15
7042	NASDAQ	KLIC	Tue, May 12, 2020	22.97	23.00	22.22	22.26
7041	NASDAQ	KLIC	Mon, May 11, 2020	22.82	23.13	22.71	22.75
7040	NASDAQ	KLIC	Fri, May 8, 2020	22.61	24.09	22.23	23.14
7039	NASDAQ	KLIC	Thu, May 7, 2020	21.99	22.30	21.79	22.14
7038	NASDAQ	KLIC	Wed, May 6, 2020	21.91	22.20	21.51	21.62
7037	NASDAQ	KLIC	Tue, May 5, 2020	21.33	22.52	21.22	21.71
7036	NASDAQ	KLIC	Mon, May 4, 2020	21.71	21.90	20.65	21.14
7035	NASDAQ	KLIC	Fri, May 1, 2020	23.71	23.71	21.64	21.74
7034	NASDAQ	KLIC	Thu, Apr 30, 2020	25.40	25.82	23.90	23.97
7033	NASDAQ	KLIC	Wed, Apr 29, 2020	25.01	26.43	24.97	26.19
7032	NASDAQ	KLIC	Tue, Apr 28, 2020	25.15	25.39	24.60	24.87
7031	NASDAQ	KLIC	Mon, Apr 27, 2020	24.00	25.22	23.99	24.87
7030	NASDAQ	KLIC	Fri, Apr 24, 2020	23.47	23.88	23.05	23.73
7029	NASDAQ	KLIC	Thu, Apr 23, 2020	23.12	23.65	23.12	23.46
7028	NASDAQ	KLIC	Wed, Apr 22, 2020	23.24	23.48	22.58	23.37
7027	NASDAQ	KLIC	Tue, Apr 21, 2020	23.55	23.76	22.16	22.37
7026	NASDAQ	KLIC	Mon, Apr 20, 2020	23.75	24.12	23.63	23.92
7025	NASDAQ	KLIC	Fri, Apr 17, 2020	24.07	24.49	23.64	24.15
7024	NASDAQ	KLIC	Thu, Apr 16, 2020	23.24	23.78	23.16	23.63
7023	NASDAQ	KLIC	Wed, Apr 15, 2020	22.78	23.18	22.45	22.97
7022	NASDAQ	KLIC	Tue, Apr 14, 2020	22.79	23.60	22.79	23.45
7021	NASDAQ	KLIC	Mon, Apr 13, 2020	22.44	22.58	21.93	22.16
7020	NASDAQ	KLIC	Thu, Apr 9, 2020	22.78	23.31	22.28	22.47
7019	NASDAQ	KLIC	Wed, Apr 8, 2020	22.77	23.09	22.28	22.49
7018	NASDAQ	KLIC	Tue, Apr 7, 2020	22.88	23.18	21.82	22.45
7017	NASDAQ	KLIC	Mon, Apr 6, 2020	20.97	22.25	20.76	22.12
7016	NASDAQ	KLIC	Fri, Apr 3, 2020	20.65	21.03	19.94	20.34
7015	NASDAQ	KLIC	Thu, Apr 2, 2020	20.19	20.98	19.78	20.89
7014	NASDAQ	KLIC	Wed, Apr 1, 2020	19.95	20.83	19.55	20.31
7013	NASDAQ	KLIC	Tue, Mar 31, 2020	21.07	21.48	20.77	20.87
7012	NASDAQ	KLIC	Mon, Mar 30, 2020	21.10	21.72	20.72	21.15
7011	NASDAQ	KLIC	Fri, Mar 27, 2020	21.52	21.65	20.75	20.88
7010	NASDAQ	KLIC	Thu, Mar 26, 2020	20.96	22.50	20.81	22.40
7009	NASDAQ	KLIC	Wed, Mar 25, 2020	20.25	21.39	19.15	20.83
7008	NASDAQ	KLIC	Tue, Mar 24, 2020	18.98	20.58	18.83	20.01
7007	NASDAQ	KLIC	Mon, Mar 23, 2020	19.09	19.68	16.91	18.21
7006	NASDAQ	KLIC	Fri, Mar 20, 2020	20.72	21.22	18.65	18.72
7005	NASDAQ	KLIC	Thu, Mar 19, 2020	19.98	21.16	18.75	20.30
7004	NASDAQ	KLIC	Wed, Mar 18, 2020	19.90	21.52	19.55	20.28
7003	NASDAQ	KLIC	Tue, Mar 17, 2020	20.25	21.30	19.15	21.30
7002	NASDAQ	KLIC	Mon, Mar 16, 2020	18.25	21.19	18.00	19.73
7001	NASDAQ	KLIC	Fri, Mar 13, 2020	19.45	22.97	19.27	22.90
7000	NASDAQ	KLIC	Thu, Mar 12, 2020	19.35	19.85	18.43	18.46
6999	NASDAQ	KLIC	Wed, Mar 11, 2020	21.79	21.95	20.43	20.65
6998	NASDAQ	KLIC	Tue, Mar 10, 2020	22.15	22.57	21.34	22.42
6997	NASDAQ	KLIC	Mon, Mar 9, 2020	22.27	23.27	21.50	21.51
6996	NASDAQ	KLIC	Fri, Mar 6, 2020	23.64	24.51	23.43	24.04
6995	NASDAQ	KLIC	Thu, Mar 5, 2020	23.12	24.61	22.99	24.51
6994	NASDAQ	KLIC	Wed, Mar 4, 2020	23.20	23.80	22.68	23.80
6993	NASDAQ	KLIC	Tue, Mar 3, 2020	23.67	24.28	22.62	22.83
6992	NASDAQ	KLIC	Mon, Mar 2, 2020	22.90	23.75	22.41	23.69
6991	NASDAQ	KLIC	Fri, Feb 28, 2020	21.77	22.97	21.40	22.83
6990	NASDAQ	KLIC	Thu, Feb 27, 2020	22.26	22.79	21.81	22.05
6989	NASDAQ	KLIC	Wed, Feb 26, 2020	22.98	23.42	22.78	22.96
6988	NASDAQ	KLIC	Tue, Feb 25, 2020	24.15	24.15	22.78	22.85
6987	NASDAQ	KLIC	Mon, Feb 24, 2020	23.77	24.16	23.55	23.93
6986	NASDAQ	KLIC	Fri, Feb 21, 2020	25.41	25.41	24.79	24.89
6985	NASDAQ	KLIC	Thu, Feb 20, 2020	25.47	25.66	25.04	25.59
6984	NASDAQ	KLIC	Wed, Feb 19, 2020	25.39	25.56	25.18	25.48
6983	NASDAQ	KLIC	Tue, Feb 18, 2020	25.89	26.05	25.00	25.13
6982	NASDAQ	KLIC	Fri, Feb 14, 2020	26.43	26.53	25.95	26.21
6981	NASDAQ	KLIC	Thu, Feb 13, 2020	26.40	26.61	26.26	26.39
6980	NASDAQ	KLIC	Wed, Feb 12, 2020	26.30	26.64	26.06	26.60
6979	NASDAQ	KLIC	Tue, Feb 11, 2020	25.94	26.15	25.65	26.03
6978	NASDAQ	KLIC	Mon, Feb 10, 2020	25.87	26.08	25.65	25.71
6977	NASDAQ	KLIC	Fri, Feb 7, 2020	26.61	26.72	25.93	26.07
6976	NASDAQ	KLIC	Thu, Feb 6, 2020	27.52	27.66	26.60	26.89
6975	NASDAQ	KLIC	Wed, Feb 5, 2020	27.23	27.65	26.92	27.48
6974	NASDAQ	KLIC	Tue, Feb 4, 2020	26.44	26.84	26.25	26.77
6973	NASDAQ	KLIC	Mon, Feb 3, 2020	26.04	26.32	25.60	25.94
6972	NASDAQ	KLIC	Fri, Jan 31, 2020	27.09	27.26	25.84	25.89
6971	NASDAQ	KLIC	Thu, Jan 30, 2020	27.74	28.25	26.42	27.28
6970	NASDAQ	KLIC	Wed, Jan 29, 2020	28.27	28.66	27.99	28.28
6969	NASDAQ	KLIC	Tue, Jan 28, 2020	27.42	28.36	27.18	28.27
6968	NASDAQ	KLIC	Mon, Jan 27, 2020	27.42	27.42	26.65	27.26
6967	NASDAQ	KLIC	Fri, Jan 24, 2020	28.25	28.45	27.60	28.02
6966	NASDAQ	KLIC	Thu, Jan 23, 2020	27.21	28.20	27.02	28.18
6965	NASDAQ	KLIC	Wed, Jan 22, 2020	27.47	27.58	27.02	27.19
6964	NASDAQ	KLIC	Tue, Jan 21, 2020	27.40	27.48	27.13	27.38
6963	NASDAQ	KLIC	Fri, Jan 17, 2020	27.75	27.86	27.56	27.63
6962	NASDAQ	KLIC	Thu, Jan 16, 2020	27.36	27.70	27.18	27.69
6961	NASDAQ	KLIC	Wed, Jan 15, 2020	26.89	27.55	26.84	27.18
6960	NASDAQ	KLIC	Tue, Jan 14, 2020	26.67	27.06	26.62	26.91
6959	NASDAQ	KLIC	Mon, Jan 13, 2020	26.38	26.66	26.35	26.64
6958	NASDAQ	KLIC	Fri, Jan 10, 2020	26.52	26.57	26.13	26.29
6957	NASDAQ	KLIC	Thu, Jan 9, 2020	26.88	26.90	26.16	26.51
6956	NASDAQ	KLIC	Wed, Jan 8, 2020	26.71	26.99	26.50	26.61
6955	NASDAQ	KLIC	Tue, Jan 7, 2020	26.46	26.73	26.15	26.66
6954	NASDAQ	KLIC	Mon, Jan 6, 2020	27.12	27.14	26.28	26.34
6953	NASDAQ	KLIC	Fri, Jan 3, 2020	27.31	27.50	27.11	27.35
6952	NASDAQ	KLIC	Thu, Jan 2, 2020	27.50	27.58	27.05	27.56
6951	NASDAQ	KLIC	Tue, Dec 31, 2019	26.78	27.24	26.78	27.20
6950	NASDAQ	KLIC	Mon, Dec 30, 2019	26.93	27.15	26.57	26.92
6949	NASDAQ	KLIC	Fri, Dec 27, 2019	27.25	27.25	26.88	27.06
6948	NASDAQ	KLIC	Thu, Dec 26, 2019	27.18	27.29	27.05	27.24
6947	NASDAQ	KLIC	Tue, Dec 24, 2019	27.33	27.36	26.93	27.27
6946	NASDAQ	KLIC	Mon, Dec 23, 2019	26.84	27.48	26.74	27.36
6945	NASDAQ	KLIC	Fri, Dec 20, 2019	27.00	27.17	26.71	26.92
6944	NASDAQ	KLIC	Thu, Dec 19, 2019	26.74	26.82	26.45	26.76
6943	NASDAQ	KLIC	Wed, Dec 18, 2019	26.62	26.74	26.11	26.67
6942	NASDAQ	KLIC	Tue, Dec 17, 2019	26.41	26.53	26.00	26.53
6941	NASDAQ	KLIC	Mon, Dec 16, 2019	26.50	26.64	26.17	26.26
6940	NASDAQ	KLIC	Fri, Dec 13, 2019	26.00	26.36	26.00	26.35
6939	NASDAQ	KLIC	Thu, Dec 12, 2019	25.52	26.20	25.52	26.15
6938	NASDAQ	KLIC	Wed, Dec 11, 2019	25.19	25.55	25.16	25.53
6937	NASDAQ	KLIC	Tue, Dec 10, 2019	25.56	25.56	25.07	25.15
6936	NASDAQ	KLIC	Mon, Dec 9, 2019	25.70	25.91	25.55	25.58
6935	NASDAQ	KLIC	Fri, Dec 6, 2019	25.37	25.83	25.37	25.75
6934	NASDAQ	KLIC	Thu, Dec 5, 2019	25.00	25.40	25.00	25.25
6933	NASDAQ	KLIC	Wed, Dec 4, 2019	24.36	25.04	24.32	25.03
6932	NASDAQ	KLIC	Tue, Dec 3, 2019	24.31	24.63	23.99	24.17
6931	NASDAQ	KLIC	Mon, Dec 2, 2019	25.20	25.20	24.51	24.69
6930	NASDAQ	KLIC	Fri, Nov 29, 2019	25.23	25.28	25.06	25.09
6929	NASDAQ	KLIC	Wed, Nov 27, 2019	25.00	25.61	24.78	25.31
6928	NASDAQ	KLIC	Tue, Nov 26, 2019	24.82	24.94	24.56	24.91
6927	NASDAQ	KLIC	Mon, Nov 25, 2019	23.90	24.90	23.90	24.89
6926	NASDAQ	KLIC	Fri, Nov 22, 2019	23.09	24.02	23.09	23.90
6925	NASDAQ	KLIC	Thu, Nov 21, 2019	23.49	23.75	22.83	22.97
6924	NASDAQ	KLIC	Wed, Nov 20, 2019	22.91	23.43	22.85	22.95
6923	NASDAQ	KLIC	Tue, Nov 19, 2019	22.91	23.30	22.55	23.18
6922	NASDAQ	KLIC	Mon, Nov 18, 2019	23.96	24.22	22.71	22.76
6921	NASDAQ	KLIC	Fri, Nov 15, 2019	26.74	26.95	23.87	24.15
6920	NASDAQ	KLIC	Thu, Nov 14, 2019	25.30	25.30	24.92	25.17
6919	NASDAQ	KLIC	Wed, Nov 13, 2019	25.29	25.85	25.13	25.36
6918	NASDAQ	KLIC	Tue, Nov 12, 2019	25.41	25.52	25.32	25.47
6917	NASDAQ	KLIC	Mon, Nov 11, 2019	25.18	25.55	25.12	25.38
6916	NASDAQ	KLIC	Fri, Nov 8, 2019	25.25	25.61	25.08	25.26
6915	NASDAQ	KLIC	Thu, Nov 7, 2019	25.60	25.74	25.24	25.38
6914	NASDAQ	KLIC	Wed, Nov 6, 2019	25.32	25.53	25.03	25.37
6913	NASDAQ	KLIC	Tue, Nov 5, 2019	24.58	25.48	24.58	25.45
6912	NASDAQ	KLIC	Mon, Nov 4, 2019	24.41	24.63	24.27	24.58
6911	NASDAQ	KLIC	Fri, Nov 1, 2019	23.98	24.29	23.70	24.29
6910	NASDAQ	KLIC	Thu, Oct 31, 2019	24.10	24.10	23.65	23.75
6909	NASDAQ	KLIC	Wed, Oct 30, 2019	24.06	24.18	23.75	24.18
6908	NASDAQ	KLIC	Tue, Oct 29, 2019	24.26	24.65	23.85	24.06
6907	NASDAQ	KLIC	Mon, Oct 28, 2019	23.94	24.26	23.94	24.01
6906	NASDAQ	KLIC	Fri, Oct 25, 2019	23.46	24.00	23.36	23.82
6905	NASDAQ	KLIC	Thu, Oct 24, 2019	23.10	23.54	22.91	23.50
6904	NASDAQ	KLIC	Wed, Oct 23, 2019	22.90	23.29	22.80	22.89
6903	NASDAQ	KLIC	Tue, Oct 22, 2019	23.35	23.35	23.08	23.10
6902	NASDAQ	KLIC	Mon, Oct 21, 2019	23.00	23.49	22.90	23.23
6901	NASDAQ	KLIC	Fri, Oct 18, 2019	23.15	23.26	22.74	22.93
6900	NASDAQ	KLIC	Thu, Oct 17, 2019	22.67	23.28	22.67	23.12
6899	NASDAQ	KLIC	Wed, Oct 16, 2019	23.05	23.09	22.49	22.54
6898	NASDAQ	KLIC	Tue, Oct 15, 2019	23.46	23.52	23.13	23.23
6897	NASDAQ	KLIC	Mon, Oct 14, 2019	23.35	23.58	23.26	23.39
6896	NASDAQ	KLIC	Fri, Oct 11, 2019	23.40	23.68	23.40	23.45
6895	NASDAQ	KLIC	Thu, Oct 10, 2019	22.88	23.18	22.88	22.95
6894	NASDAQ	KLIC	Wed, Oct 9, 2019	22.56	22.89	22.42	22.81
6893	NASDAQ	KLIC	Tue, Oct 8, 2019	23.21	23.30	22.37	22.41
6892	NASDAQ	KLIC	Mon, Oct 7, 2019	23.63	23.69	23.43	23.48
6891	NASDAQ	KLIC	Fri, Oct 4, 2019	23.73	23.78	23.46	23.76
6890	NASDAQ	KLIC	Thu, Oct 3, 2019	23.37	23.65	23.10	23.52
6889	NASDAQ	KLIC	Wed, Oct 2, 2019	23.28	23.52	23.18	23.42
6888	NASDAQ	KLIC	Tue, Oct 1, 2019	23.58	24.14	23.25	23.50
6887	NASDAQ	KLIC	Mon, Sep 30, 2019	23.40	23.57	23.35	23.48
6886	NASDAQ	KLIC	Fri, Sep 27, 2019	23.54	23.71	23.07	23.36
6885	NASDAQ	KLIC	Thu, Sep 26, 2019	23.85	23.86	23.49	23.62
6884	NASDAQ	KLIC	Wed, Sep 25, 2019	23.66	24.05	23.32	24.00
6883	NASDAQ	KLIC	Tue, Sep 24, 2019	24.42	24.68	23.80	23.85
6882	NASDAQ	KLIC	Mon, Sep 23, 2019	24.00	24.65	23.87	24.30
6881	NASDAQ	KLIC	Fri, Sep 20, 2019	24.19	24.26	23.85	24.18
6880	NASDAQ	KLIC	Thu, Sep 19, 2019	23.90	24.18	23.55	23.93
6879	NASDAQ	KLIC	Wed, Sep 18, 2019	23.30	23.92	23.21	23.89
6878	NASDAQ	KLIC	Tue, Sep 17, 2019	22.93	23.19	22.58	23.18
6877	NASDAQ	KLIC	Mon, Sep 16, 2019	22.80	23.32	22.61	22.92
6876	NASDAQ	KLIC	Fri, Sep 13, 2019	22.92	23.23	22.72	22.90
6875	NASDAQ	KLIC	Thu, Sep 12, 2019	23.16	23.16	22.49	22.83
6874	NASDAQ	KLIC	Wed, Sep 11, 2019	22.53	23.04	22.37	23.01
6873	NASDAQ	KLIC	Tue, Sep 10, 2019	22.12	22.66	21.86	22.49
6872	NASDAQ	KLIC	Mon, Sep 9, 2019	21.54	22.16	21.43	22.16
6871	NASDAQ	KLIC	Fri, Sep 6, 2019	21.58	21.82	21.32	21.37
6870	NASDAQ	KLIC	Thu, Sep 5, 2019	21.22	21.93	21.22	21.55
6869	NASDAQ	KLIC	Wed, Sep 4, 2019	20.70	20.97	20.68	20.91
6868	NASDAQ	KLIC	Tue, Sep 3, 2019	20.66	20.69	20.14	20.42
6867	NASDAQ	KLIC	Fri, Aug 30, 2019	20.92	21.07	20.74	20.83
6866	NASDAQ	KLIC	Thu, Aug 29, 2019	20.41	21.07	20.41	20.80
6865	NASDAQ	KLIC	Wed, Aug 28, 2019	19.39	20.14	19.34	20.11
6864	NASDAQ	KLIC	Tue, Aug 27, 2019	19.76	19.91	19.37	19.48
6863	NASDAQ	KLIC	Mon, Aug 26, 2019	20.24	20.24	19.59	19.66
6862	NASDAQ	KLIC	Fri, Aug 23, 2019	20.24	20.51	19.76	19.92
6861	NASDAQ	KLIC	Thu, Aug 22, 2019	20.79	20.92	20.30	20.46
6860	NASDAQ	KLIC	Wed, Aug 21, 2019	20.74	20.81	20.52	20.71
6859	NASDAQ	KLIC	Tue, Aug 20, 2019	20.80	20.81	20.48	20.48
6858	NASDAQ	KLIC	Mon, Aug 19, 2019	20.87	21.05	20.82	20.84
6857	NASDAQ	KLIC	Fri, Aug 16, 2019	20.27	20.64	20.27	20.56
6856	NASDAQ	KLIC	Thu, Aug 15, 2019	20.13	20.41	19.99	20.10
6855	NASDAQ	KLIC	Wed, Aug 14, 2019	20.63	20.83	20.00	20.00
6854	NASDAQ	KLIC	Tue, Aug 13, 2019	20.53	21.26	20.32	21.11
6853	NASDAQ	KLIC	Mon, Aug 12, 2019	20.72	20.98	20.62	20.64
6852	NASDAQ	KLIC	Fri, Aug 9, 2019	21.00	21.09	20.65	20.90
6851	NASDAQ	KLIC	Thu, Aug 8, 2019	21.02	21.48	20.22	21.22
6850	NASDAQ	KLIC	Wed, Aug 7, 2019	20.34	21.05	20.34	20.90
6849	NASDAQ	KLIC	Tue, Aug 6, 2019	21.65	21.68	20.31	20.61
6848	NASDAQ	KLIC	Mon, Aug 5, 2019	21.46	21.64	21.15	21.28
6847	NASDAQ	KLIC	Fri, Aug 2, 2019	22.08	22.65	21.68	22.18
6846	NASDAQ	KLIC	Thu, Aug 1, 2019	22.55	23.15	21.62	21.66
6845	NASDAQ	KLIC	Wed, Jul 31, 2019	23.14	23.19	22.41	22.63
6844	NASDAQ	KLIC	Tue, Jul 30, 2019	23.10	23.42	23.10	23.19
6843	NASDAQ	KLIC	Mon, Jul 29, 2019	23.23	23.41	23.10	23.26
6842	NASDAQ	KLIC	Fri, Jul 26, 2019	23.35	23.59	23.22	23.30
6841	NASDAQ	KLIC	Thu, Jul 25, 2019	24.04	24.15	23.19	23.24
6840	NASDAQ	KLIC	Wed, Jul 24, 2019	22.91	24.24	22.91	24.21
6839	NASDAQ	KLIC	Tue, Jul 23, 2019	22.40	22.92	22.25	22.84
6838	NASDAQ	KLIC	Mon, Jul 22, 2019	22.10	22.52	22.10	22.22
6837	NASDAQ	KLIC	Fri, Jul 19, 2019	22.30	22.53	21.93	21.95
6836	NASDAQ	KLIC	Thu, Jul 18, 2019	22.20	22.70	22.20	22.29
6835	NASDAQ	KLIC	Wed, Jul 17, 2019	21.94	22.35	21.85	22.20
6834	NASDAQ	KLIC	Tue, Jul 16, 2019	21.76	22.15	21.69	21.85
6833	NASDAQ	KLIC	Mon, Jul 15, 2019	21.73	21.92	21.46	21.80
6832	NASDAQ	KLIC	Fri, Jul 12, 2019	21.55	21.83	21.54	21.67
6831	NASDAQ	KLIC	Thu, Jul 11, 2019	21.39	21.59	21.22	21.52
6830	NASDAQ	KLIC	Wed, Jul 10, 2019	21.68	22.03	21.33	21.38
6829	NASDAQ	KLIC	Tue, Jul 9, 2019	21.35	21.45	21.27	21.37
6828	NASDAQ	KLIC	Mon, Jul 8, 2019	21.62	21.67	20.88	21.45
6827	NASDAQ	KLIC	Fri, Jul 5, 2019	22.30	22.58	22.24	22.54
6826	NASDAQ	KLIC	Wed, Jul 3, 2019	22.62	22.63	22.39	22.50
6825	NASDAQ	KLIC	Tue, Jul 2, 2019	23.16	23.23	22.49	22.56
6824	NASDAQ	KLIC	Mon, Jul 1, 2019	23.10	23.55	22.79	23.27
6823	NASDAQ	KLIC	Fri, Jun 28, 2019	22.69	22.90	22.46	22.55
6822	NASDAQ	KLIC	Thu, Jun 27, 2019	22.37	22.60	22.25	22.53
6821	NASDAQ	KLIC	Wed, Jun 26, 2019	22.17	22.43	22.15	22.28
6820	NASDAQ	KLIC	Tue, Jun 25, 2019	22.06	22.22	21.80	21.81
6819	NASDAQ	KLIC	Mon, Jun 24, 2019	22.43	22.50	22.06	22.10
6818	NASDAQ	KLIC	Fri, Jun 21, 2019	22.20	22.65	22.20	22.43
6817	NASDAQ	KLIC	Thu, Jun 20, 2019	22.29	22.74	22.14	22.39
6816	NASDAQ	KLIC	Wed, Jun 19, 2019	21.74	22.09	21.69	21.94
6815	NASDAQ	KLIC	Tue, Jun 18, 2019	21.06	21.77	20.92	21.62
6814	NASDAQ	KLIC	Mon, Jun 17, 2019	21.31	21.31	20.83	20.85
6813	NASDAQ	KLIC	Fri, Jun 14, 2019	21.12	21.40	20.75	21.35
6812	NASDAQ	KLIC	Thu, Jun 13, 2019	21.48	21.65	21.30	21.45
6811	NASDAQ	KLIC	Wed, Jun 12, 2019	21.86	22.13	21.37	21.43
6810	NASDAQ	KLIC	Tue, Jun 11, 2019	22.29	22.35	21.83	21.94
6809	NASDAQ	KLIC	Mon, Jun 10, 2019	21.22	22.01	21.22	22.01
6808	NASDAQ	KLIC	Fri, Jun 7, 2019	20.77	21.26	20.69	21.13
6807	NASDAQ	KLIC	Thu, Jun 6, 2019	20.46	21.09	20.35	21.00
6806	NASDAQ	KLIC	Wed, Jun 5, 2019	21.00	21.10	20.21	20.42
6805	NASDAQ	KLIC	Tue, Jun 4, 2019	20.01	20.99	20.01	20.96
6804	NASDAQ	KLIC	Mon, Jun 3, 2019	19.54	19.93	19.33	19.73
6803	NASDAQ	KLIC	Fri, May 31, 2019	19.25	19.46	19.15	19.39
6802	NASDAQ	KLIC	Thu, May 30, 2019	19.32	19.80	19.32	19.48
6801	NASDAQ	KLIC	Wed, May 29, 2019	18.86	19.34	18.80	19.31
6800	NASDAQ	KLIC	Tue, May 28, 2019	19.10	19.21	18.85	19.04
6799	NASDAQ	KLIC	Fri, May 24, 2019	19.20	19.39	19.04	19.06
6798	NASDAQ	KLIC	Thu, May 23, 2019	19.37	19.43	18.98	19.14
6797	NASDAQ	KLIC	Wed, May 22, 2019	19.29	19.72	19.27	19.62
6796	NASDAQ	KLIC	Tue, May 21, 2019	19.51	19.75	19.31	19.32
6795	NASDAQ	KLIC	Mon, May 20, 2019	19.25	19.68	19.02	19.18
6794	NASDAQ	KLIC	Fri, May 17, 2019	19.88	20.25	19.60	19.64
6793	NASDAQ	KLIC	Thu, May 16, 2019	20.44	20.59	20.14	20.15
6792	NASDAQ	KLIC	Wed, May 15, 2019	20.01	20.72	19.98	20.60
6791	NASDAQ	KLIC	Tue, May 14, 2019	20.12	20.43	19.95	20.16
6790	NASDAQ	KLIC	Mon, May 13, 2019	20.77	20.87	19.78	19.85
6789	NASDAQ	KLIC	Fri, May 10, 2019	21.50	21.89	21.27	21.37
6788	NASDAQ	KLIC	Thu, May 9, 2019	21.92	22.09	21.42	21.54
6787	NASDAQ	KLIC	Wed, May 8, 2019	22.99	23.06	22.25	22.27
6786	NASDAQ	KLIC	Tue, May 7, 2019	22.99	23.28	22.65	23.00
6785	NASDAQ	KLIC	Mon, May 6, 2019	22.85	23.45	22.80	23.35
6784	NASDAQ	KLIC	Fri, May 3, 2019	22.71	24.16	22.71	23.55
6783	NASDAQ	KLIC	Thu, May 2, 2019	22.78	23.20	22.34	22.63
6782	NASDAQ	KLIC	Wed, May 1, 2019	23.50	23.60	22.79	22.85
6781	NASDAQ	KLIC	Tue, Apr 30, 2019	22.80	23.54	22.80	23.27
6780	NASDAQ	KLIC	Mon, Apr 29, 2019	23.59	23.59	22.95	22.96
6779	NASDAQ	KLIC	Fri, Apr 26, 2019	23.53	23.69	23.11	23.62
6778	NASDAQ	KLIC	Thu, Apr 25, 2019	24.48	24.55	23.60	23.67
6777	NASDAQ	KLIC	Wed, Apr 24, 2019	23.95	24.82	23.95	24.35
6776	NASDAQ	KLIC	Tue, Apr 23, 2019	23.92	24.09	23.76	23.87
6775	NASDAQ	KLIC	Mon, Apr 22, 2019	24.19	24.30	23.67	23.74
6774	NASDAQ	KLIC	Thu, Apr 18, 2019	24.62	24.99	24.16	24.29
6773	NASDAQ	KLIC	Wed, Apr 17, 2019	24.89	24.95	24.44	24.57
6772	NASDAQ	KLIC	Tue, Apr 16, 2019	23.92	24.68	23.87	24.68
6771	NASDAQ	KLIC	Mon, Apr 15, 2019	23.85	23.99	23.50	23.80
6770	NASDAQ	KLIC	Fri, Apr 12, 2019	23.98	24.00	23.71	23.87
6769	NASDAQ	KLIC	Thu, Apr 11, 2019	24.04	24.18	23.72	23.72
6768	NASDAQ	KLIC	Wed, Apr 10, 2019	23.85	24.12	23.70	24.01
6767	NASDAQ	KLIC	Tue, Apr 9, 2019	23.82	24.00	23.69	23.82
6766	NASDAQ	KLIC	Mon, Apr 8, 2019	23.89	24.04	23.62	24.02
6765	NASDAQ	KLIC	Fri, Apr 5, 2019	23.43	23.89	23.31	23.88
6764	NASDAQ	KLIC	Thu, Apr 4, 2019	23.19	23.41	23.13	23.40
6763	NASDAQ	KLIC	Wed, Apr 3, 2019	22.73	23.40	22.48	23.17
6762	NASDAQ	KLIC	Tue, Apr 2, 2019	22.47	22.58	22.24	22.41
6761	NASDAQ	KLIC	Mon, Apr 1, 2019	22.33	22.44	21.96	22.40
6760	NASDAQ	KLIC	Fri, Mar 29, 2019	21.90	22.17	21.80	22.11
6759	NASDAQ	KLIC	Thu, Mar 28, 2019	21.63	21.96	21.51	21.71
6758	NASDAQ	KLIC	Wed, Mar 27, 2019	21.93	22.03	21.48	21.65
6757	NASDAQ	KLIC	Tue, Mar 26, 2019	22.20	22.58	21.94	22.04
6756	NASDAQ	KLIC	Mon, Mar 25, 2019	22.08	22.36	21.88	22.07
6755	NASDAQ	KLIC	Fri, Mar 22, 2019	22.84	22.85	22.09	22.14
6754	NASDAQ	KLIC	Thu, Mar 21, 2019	22.45	23.27	22.23	22.93
6753	NASDAQ	KLIC	Wed, Mar 20, 2019	22.67	22.76	22.21	22.38
6752	NASDAQ	KLIC	Tue, Mar 19, 2019	22.74	22.91	22.62	22.68
6751	NASDAQ	KLIC	Mon, Mar 18, 2019	23.01	23.06	22.53	22.68
6750	NASDAQ	KLIC	Fri, Mar 15, 2019	22.71	23.47	22.71	22.99
6749	NASDAQ	KLIC	Thu, Mar 14, 2019	22.69	23.03	22.66	22.71
6748	NASDAQ	KLIC	Wed, Mar 13, 2019	23.18	23.18	22.67	22.69
6747	NASDAQ	KLIC	Tue, Mar 12, 2019	23.40	23.40	22.98	23.04
6746	NASDAQ	KLIC	Mon, Mar 11, 2019	22.86	23.40	22.74	23.38
6745	NASDAQ	KLIC	Fri, Mar 8, 2019	22.56	22.82	22.50	22.70
6744	NASDAQ	KLIC	Thu, Mar 7, 2019	23.18	23.32	22.74	22.76
6743	NASDAQ	KLIC	Wed, Mar 6, 2019	24.00	24.01	23.33	23.33
6742	NASDAQ	KLIC	Tue, Mar 5, 2019	23.80	23.90	23.59	23.81
6741	NASDAQ	KLIC	Mon, Mar 4, 2019	23.60	23.88	23.40	23.80
6740	NASDAQ	KLIC	Fri, Mar 1, 2019	23.53	23.70	23.36	23.44
6739	NASDAQ	KLIC	Thu, Feb 28, 2019	23.18	23.43	23.02	23.32
6738	NASDAQ	KLIC	Wed, Feb 27, 2019	23.54	23.54	23.01	23.30
6737	NASDAQ	KLIC	Tue, Feb 26, 2019	23.73	23.97	23.52	23.57
6736	NASDAQ	KLIC	Mon, Feb 25, 2019	23.77	24.13	23.77	23.83
6735	NASDAQ	KLIC	Fri, Feb 22, 2019	23.43	23.57	23.20	23.57
6734	NASDAQ	KLIC	Thu, Feb 21, 2019	23.54	23.54	23.15	23.35
6733	NASDAQ	KLIC	Wed, Feb 20, 2019	22.90	23.62	22.63	23.59
6732	NASDAQ	KLIC	Tue, Feb 19, 2019	22.37	23.02	22.35	22.88
6731	NASDAQ	KLIC	Fri, Feb 15, 2019	22.52	22.53	22.17	22.40
6730	NASDAQ	KLIC	Thu, Feb 14, 2019	22.06	22.64	22.06	22.47
6729	NASDAQ	KLIC	Wed, Feb 13, 2019	22.25	22.37	22.10	22.11
6728	NASDAQ	KLIC	Tue, Feb 12, 2019	21.80	22.34	21.76	22.18
6727	NASDAQ	KLIC	Mon, Feb 11, 2019	21.60	21.76	21.32	21.62
6726	NASDAQ	KLIC	Fri, Feb 8, 2019	21.63	21.73	21.00	21.60
6725	NASDAQ	KLIC	Thu, Feb 7, 2019	22.14	22.28	21.73	21.86
6724	NASDAQ	KLIC	Wed, Feb 6, 2019	22.28	22.78	22.07	22.40
6723	NASDAQ	KLIC	Tue, Feb 5, 2019	21.83	22.16	21.69	22.09
6722	NASDAQ	KLIC	Mon, Feb 4, 2019	21.89	22.05	21.29	21.86
6721	NASDAQ	KLIC	Fri, Feb 1, 2019	20.88	22.50	20.88	22.01
6720	NASDAQ	KLIC	Thu, Jan 31, 2019	21.65	22.62	20.77	22.53
6719	NASDAQ	KLIC	Wed, Jan 30, 2019	21.25	21.63	20.67	21.57
6718	NASDAQ	KLIC	Tue, Jan 29, 2019	21.52	21.71	20.83	20.93
6717	NASDAQ	KLIC	Mon, Jan 28, 2019	21.15	21.96	21.00	21.59
6716	NASDAQ	KLIC	Fri, Jan 25, 2019	21.46	22.00	21.31	21.63
6715	NASDAQ	KLIC	Thu, Jan 24, 2019	20.48	21.70	20.31	21.23
6714	NASDAQ	KLIC	Wed, Jan 23, 2019	20.77	20.77	19.66	19.93
6713	NASDAQ	KLIC	Tue, Jan 22, 2019	21.62	21.70	20.57	20.62
6712	NASDAQ	KLIC	Fri, Jan 18, 2019	22.04	22.17	21.67	21.79
6711	NASDAQ	KLIC	Thu, Jan 17, 2019	21.48	22.04	21.27	21.89
6710	NASDAQ	KLIC	Wed, Jan 16, 2019	21.51	21.94	21.39	21.61
6709	NASDAQ	KLIC	Tue, Jan 15, 2019	21.40	21.56	20.99	21.51
6708	NASDAQ	KLIC	Mon, Jan 14, 2019	21.28	21.61	21.08	21.33
6707	NASDAQ	KLIC	Fri, Jan 11, 2019	21.17	21.73	21.16	21.50
6706	NASDAQ	KLIC	Thu, Jan 10, 2019	20.87	21.45	20.76	21.31
6705	NASDAQ	KLIC	Wed, Jan 9, 2019	20.67	21.24	20.60	21.01
6704	NASDAQ	KLIC	Tue, Jan 8, 2019	20.47	20.68	20.13	20.58
6703	NASDAQ	KLIC	Mon, Jan 7, 2019	20.23	20.84	20.16	20.35
6702	NASDAQ	KLIC	Fri, Jan 4, 2019	19.40	20.17	19.24	20.02
6701	NASDAQ	KLIC	Thu, Jan 3, 2019	19.85	20.00	19.12	19.12
6700	NASDAQ	KLIC	Wed, Jan 2, 2019	19.89	20.48	19.70	20.28
6699	NASDAQ	KLIC	Mon, Dec 31, 2018	20.19	20.42	20.07	20.27
6698	NASDAQ	KLIC	Fri, Dec 28, 2018	19.75	20.43	19.58	20.01
6697	NASDAQ	KLIC	Thu, Dec 27, 2018	19.08	19.69	19.08	19.59
6696	NASDAQ	KLIC	Wed, Dec 26, 2018	18.17	19.38	17.92	19.37
6695	NASDAQ	KLIC	Mon, Dec 24, 2018	18.26	18.69	17.79	18.09
6694	NASDAQ	KLIC	Fri, Dec 21, 2018	19.05	19.05	18.14	18.27
6693	NASDAQ	KLIC	Thu, Dec 20, 2018	19.10	19.25	18.52	18.84
6692	NASDAQ	KLIC	Wed, Dec 19, 2018	19.46	20.02	19.02	19.06
6691	NASDAQ	KLIC	Tue, Dec 18, 2018	19.50	20.19	19.50	19.57
6690	NASDAQ	KLIC	Mon, Dec 17, 2018	19.61	19.89	19.10	19.30
6689	NASDAQ	KLIC	Fri, Dec 14, 2018	19.77	20.07	19.58	19.59
6688	NASDAQ	KLIC	Thu, Dec 13, 2018	19.87	20.30	19.87	20.00
6687	NASDAQ	KLIC	Wed, Dec 12, 2018	19.49	20.08	19.26	19.81
6686	NASDAQ	KLIC	Tue, Dec 11, 2018	19.67	20.06	19.06	19.14
6685	NASDAQ	KLIC	Mon, Dec 10, 2018	19.56	19.69	19.05	19.42
6684	NASDAQ	KLIC	Fri, Dec 7, 2018	20.28	20.62	19.48	19.55
6683	NASDAQ	KLIC	Thu, Dec 6, 2018	20.29	20.51	19.94	20.33
6682	NASDAQ	KLIC	Tue, Dec 4, 2018	21.71	21.71	20.77	20.79
6681	NASDAQ	KLIC	Mon, Dec 3, 2018	22.15	22.31	21.56	21.93
6680	NASDAQ	KLIC	Fri, Nov 30, 2018	21.37	21.71	21.29	21.60
6679	NASDAQ	KLIC	Thu, Nov 29, 2018	21.56	21.57	21.27	21.37
6678	NASDAQ	KLIC	Wed, Nov 28, 2018	20.56	21.25	20.22	21.23
6677	NASDAQ	KLIC	Tue, Nov 27, 2018	20.80	20.97	20.38	20.41
6676	NASDAQ	KLIC	Mon, Nov 26, 2018	20.61	20.84	20.11	20.84
6675	NASDAQ	KLIC	Fri, Nov 23, 2018	20.11	20.67	20.08	20.31
6674	NASDAQ	KLIC	Wed, Nov 21, 2018	21.26	21.57	19.80	20.27
6673	NASDAQ	KLIC	Tue, Nov 20, 2018	17.50	22.69	17.40	21.24
6672	NASDAQ	KLIC	Mon, Nov 19, 2018	20.74	20.78	19.88	19.90
6671	NASDAQ	KLIC	Fri, Nov 16, 2018	20.31	20.93	20.06	20.86
6670	NASDAQ	KLIC	Thu, Nov 15, 2018	20.10	20.93	20.08	20.81
6669	NASDAQ	KLIC	Wed, Nov 14, 2018	20.66	20.78	19.99	20.07
6668	NASDAQ	KLIC	Tue, Nov 13, 2018	20.37	21.04	20.25	20.48
6667	NASDAQ	KLIC	Mon, Nov 12, 2018	20.62	20.62	19.79	20.17
6666	NASDAQ	KLIC	Fri, Nov 9, 2018	21.16	21.34	20.65	20.78
6665	NASDAQ	KLIC	Thu, Nov 8, 2018	21.17	21.46	21.17	21.42
6664	NASDAQ	KLIC	Wed, Nov 7, 2018	21.50	21.55	21.05	21.29
6663	NASDAQ	KLIC	Tue, Nov 6, 2018	21.50	21.79	21.20	21.33
6662	NASDAQ	KLIC	Mon, Nov 5, 2018	21.78	21.90	20.97	21.53
6661	NASDAQ	KLIC	Fri, Nov 2, 2018	22.01	22.04	21.54	21.77
6660	NASDAQ	KLIC	Thu, Nov 1, 2018	20.46	22.22	20.26	21.91
6659	NASDAQ	KLIC	Wed, Oct 31, 2018	20.61	20.70	20.27	20.33
6658	NASDAQ	KLIC	Tue, Oct 30, 2018	19.64	20.25	19.61	20.24
6657	NASDAQ	KLIC	Mon, Oct 29, 2018	19.98	20.43	19.29	19.57
6656	NASDAQ	KLIC	Fri, Oct 26, 2018	19.51	20.16	19.46	19.80
6655	NASDAQ	KLIC	Thu, Oct 25, 2018	19.56	20.27	19.56	20.01
6654	NASDAQ	KLIC	Wed, Oct 24, 2018	20.61	20.67	19.49	19.50
6653	NASDAQ	KLIC	Tue, Oct 23, 2018	20.66	21.03	19.85	20.83
6652	NASDAQ	KLIC	Mon, Oct 22, 2018	21.26	21.46	20.97	21.31
6651	NASDAQ	KLIC	Fri, Oct 19, 2018	21.48	21.70	21.02	21.20
6650	NASDAQ	KLIC	Thu, Oct 18, 2018	21.80	21.83	21.36	21.42
6649	NASDAQ	KLIC	Wed, Oct 17, 2018	22.23	22.32	21.83	21.98
6648	NASDAQ	KLIC	Tue, Oct 16, 2018	21.58	22.04	21.51	21.92
6647	NASDAQ	KLIC	Mon, Oct 15, 2018	21.24	21.46	21.01	21.34
6646	NASDAQ	KLIC	Fri, Oct 12, 2018	21.36	21.57	21.12	21.25
6645	NASDAQ	KLIC	Thu, Oct 11, 2018	20.65	21.21	20.65	20.87
6644	NASDAQ	KLIC	Wed, Oct 10, 2018	21.66	21.73	20.78	20.80
6643	NASDAQ	KLIC	Tue, Oct 9, 2018	21.69	22.39	21.65	21.92
6642	NASDAQ	KLIC	Mon, Oct 8, 2018	22.18	22.18	21.47	21.74
6641	NASDAQ	KLIC	Fri, Oct 5, 2018	22.80	22.90	22.02	22.25
6640	NASDAQ	KLIC	Thu, Oct 4, 2018	23.52	23.62	22.70	22.86
6639	NASDAQ	KLIC	Wed, Oct 3, 2018	23.79	23.79	23.34	23.60
6638	NASDAQ	KLIC	Tue, Oct 2, 2018	24.04	24.35	23.64	23.67
6637	NASDAQ	KLIC	Mon, Oct 1, 2018	24.05	24.95	23.95	24.12
6636	NASDAQ	KLIC	Fri, Sep 28, 2018	24.03	24.06	23.73	23.84
6635	NASDAQ	KLIC	Thu, Sep 27, 2018	24.10	24.46	23.92	24.03
6634	NASDAQ	KLIC	Wed, Sep 26, 2018	24.42	24.65	23.98	24.04
6633	NASDAQ	KLIC	Tue, Sep 25, 2018	25.23	25.47	24.56	24.59
6632	NASDAQ	KLIC	Mon, Sep 24, 2018	25.28	25.50	25.10	25.30
6631	NASDAQ	KLIC	Fri, Sep 21, 2018	25.33	25.60	25.30	25.31
6630	NASDAQ	KLIC	Thu, Sep 20, 2018	25.23	25.61	25.23	25.37
6629	NASDAQ	KLIC	Wed, Sep 19, 2018	25.07	25.35	24.77	25.09
6628	NASDAQ	KLIC	Tue, Sep 18, 2018	25.08	25.31	24.90	25.06
6627	NASDAQ	KLIC	Mon, Sep 17, 2018	25.07	25.35	24.90	24.99
6626	NASDAQ	KLIC	Fri, Sep 14, 2018	24.74	25.35	24.73	25.20
6625	NASDAQ	KLIC	Thu, Sep 13, 2018	24.59	24.91	24.52	24.66
6624	NASDAQ	KLIC	Wed, Sep 12, 2018	24.59	24.60	24.05	24.35
6623	NASDAQ	KLIC	Tue, Sep 11, 2018	24.74	24.83	24.43	24.82
6622	NASDAQ	KLIC	Mon, Sep 10, 2018	24.99	25.00	24.52	24.81
6621	NASDAQ	KLIC	Fri, Sep 7, 2018	24.92	25.25	24.80	24.86
6620	NASDAQ	KLIC	Thu, Sep 6, 2018	25.69	25.69	24.94	25.00
6619	NASDAQ	KLIC	Wed, Sep 5, 2018	26.16	26.16	25.33	25.67
6618	NASDAQ	KLIC	Tue, Sep 4, 2018	25.67	26.27	25.53	26.23
6617	NASDAQ	KLIC	Fri, Aug 31, 2018	25.94	25.94	25.40	25.79
6616	NASDAQ	KLIC	Thu, Aug 30, 2018	26.08	26.15	25.85	25.88
6615	NASDAQ	KLIC	Wed, Aug 29, 2018	26.25	26.45	26.05	26.10
6614	NASDAQ	KLIC	Tue, Aug 28, 2018	25.94	26.36	25.57	26.35
6613	NASDAQ	KLIC	Mon, Aug 27, 2018	25.70	26.19	25.65	25.86
6612	NASDAQ	KLIC	Fri, Aug 24, 2018	25.69	25.83	25.53	25.62
6611	NASDAQ	KLIC	Thu, Aug 23, 2018	25.70	25.91	25.45	25.49
6610	NASDAQ	KLIC	Wed, Aug 22, 2018	25.70	25.80	25.35	25.68
6609	NASDAQ	KLIC	Tue, Aug 21, 2018	25.39	25.81	25.21	25.77
6608	NASDAQ	KLIC	Mon, Aug 20, 2018	25.74	25.80	25.17	25.33
6607	NASDAQ	KLIC	Fri, Aug 17, 2018	26.25	26.25	25.69	25.84
6606	NASDAQ	KLIC	Thu, Aug 16, 2018	26.60	26.61	26.21	26.32
6605	NASDAQ	KLIC	Wed, Aug 15, 2018	26.90	26.90	26.06	26.37
6604	NASDAQ	KLIC	Tue, Aug 14, 2018	27.00	27.38	26.99	27.01
6603	NASDAQ	KLIC	Mon, Aug 13, 2018	26.64	27.09	26.60	26.93
6602	NASDAQ	KLIC	Fri, Aug 10, 2018	26.71	26.75	26.35	26.64
6601	NASDAQ	KLIC	Thu, Aug 9, 2018	27.23	27.26	26.76	26.92
6600	NASDAQ	KLIC	Wed, Aug 8, 2018	27.38	27.45	27.02	27.04
6599	NASDAQ	KLIC	Tue, Aug 7, 2018	26.88	27.42	26.62	27.38
6598	NASDAQ	KLIC	Mon, Aug 6, 2018	26.31	26.98	26.24	26.72
6597	NASDAQ	KLIC	Fri, Aug 3, 2018	26.71	26.85	26.42	26.52
6596	NASDAQ	KLIC	Thu, Aug 2, 2018	26.26	26.88	26.04	26.83
6595	NASDAQ	KLIC	Wed, Aug 1, 2018	26.29	26.42	25.43	25.87
6594	NASDAQ	KLIC	Tue, Jul 31, 2018	26.47	26.71	26.03	26.36
6593	NASDAQ	KLIC	Mon, Jul 30, 2018	26.97	26.97	26.24	26.30
6592	NASDAQ	KLIC	Fri, Jul 27, 2018	26.61	27.09	26.49	26.89
6591	NASDAQ	KLIC	Thu, Jul 26, 2018	26.40	26.62	26.00	26.49
6590	NASDAQ	KLIC	Wed, Jul 25, 2018	26.44	26.50	25.77	26.42
6589	NASDAQ	KLIC	Tue, Jul 24, 2018	27.02	27.10	26.44	26.50
6588	NASDAQ	KLIC	Mon, Jul 23, 2018	27.41	27.44	26.61	26.93
6587	NASDAQ	KLIC	Fri, Jul 20, 2018	28.06	28.06	27.39	27.41
6586	NASDAQ	KLIC	Thu, Jul 19, 2018	28.28	28.39	27.76	28.03
6585	NASDAQ	KLIC	Wed, Jul 18, 2018	28.21	28.61	27.88	28.31
6584	NASDAQ	KLIC	Tue, Jul 17, 2018	28.00	28.23	27.66	28.09
6583	NASDAQ	KLIC	Mon, Jul 16, 2018	28.46	28.46	27.82	28.09
6582	NASDAQ	KLIC	Fri, Jul 13, 2018	27.71	28.69	27.58	28.48
6581	NASDAQ	KLIC	Thu, Jul 12, 2018	26.28	27.84	26.13	27.71
6580	NASDAQ	KLIC	Wed, Jul 11, 2018	25.95	26.46	25.58	26.00
6579	NASDAQ	KLIC	Tue, Jul 10, 2018	25.50	26.30	25.35	25.92
6578	NASDAQ	KLIC	Mon, Jul 9, 2018	25.23	25.33	24.75	25.25
6577	NASDAQ	KLIC	Fri, Jul 6, 2018	24.30	25.24	23.94	25.11
6576	NASDAQ	KLIC	Thu, Jul 5, 2018	23.97	24.24	23.90	24.21
6575	NASDAQ	KLIC	Tue, Jul 3, 2018	24.32	24.40	23.66	23.66
6574	NASDAQ	KLIC	Mon, Jul 2, 2018	23.82	24.49	23.36	24.46
6573	NASDAQ	KLIC	Fri, Jun 29, 2018	23.65	24.10	23.65	23.82
6572	NASDAQ	KLIC	Thu, Jun 28, 2018	23.40	23.62	23.36	23.57
6571	NASDAQ	KLIC	Wed, Jun 27, 2018	24.14	24.34	23.38	23.39
6570	NASDAQ	KLIC	Tue, Jun 26, 2018	23.92	24.65	23.43	24.27
6569	NASDAQ	KLIC	Mon, Jun 25, 2018	24.49	24.49	23.62	23.91
6568	NASDAQ	KLIC	Fri, Jun 22, 2018	24.08	24.38	23.87	24.01
6567	NASDAQ	KLIC	Thu, Jun 21, 2018	23.71	24.17	23.71	24.00
6566	NASDAQ	KLIC	Wed, Jun 20, 2018	23.63	23.88	23.45	23.62
6565	NASDAQ	KLIC	Tue, Jun 19, 2018	23.53	23.81	23.32	23.57
6564	NASDAQ	KLIC	Mon, Jun 18, 2018	23.85	24.01	23.62	23.85
6563	NASDAQ	KLIC	Fri, Jun 15, 2018	23.40	24.07	23.38	24.02
6562	NASDAQ	KLIC	Thu, Jun 14, 2018	23.88	24.00	23.36	23.47
6561	NASDAQ	KLIC	Wed, Jun 13, 2018	23.82	24.36	23.66	23.76
6560	NASDAQ	KLIC	Tue, Jun 12, 2018	23.38	23.77	23.27	23.71
6559	NASDAQ	KLIC	Mon, Jun 11, 2018	23.66	23.92	23.23	23.45
6558	NASDAQ	KLIC	Fri, Jun 8, 2018	23.58	23.83	23.06	23.63
6557	NASDAQ	KLIC	Thu, Jun 7, 2018	24.01	24.46	23.50	23.68
6556	NASDAQ	KLIC	Wed, Jun 6, 2018	23.62	24.10	23.46	24.05
6555	NASDAQ	KLIC	Tue, Jun 5, 2018	23.65	23.94	23.01	23.62
6554	NASDAQ	KLIC	Mon, Jun 4, 2018	23.67	23.95	23.27	23.66
6553	NASDAQ	KLIC	Fri, Jun 1, 2018	24.20	24.24	23.58	23.73
6552	NASDAQ	KLIC	Thu, May 31, 2018	23.50	24.69	23.50	24.08
6551	NASDAQ	KLIC	Wed, May 30, 2018	23.06	23.37	22.81	22.91
6550	NASDAQ	KLIC	Tue, May 29, 2018	22.35	22.92	22.35	22.89
6549	NASDAQ	KLIC	Fri, May 25, 2018	22.26	22.77	22.25	22.55
6548	NASDAQ	KLIC	Thu, May 24, 2018	22.16	22.31	22.04	22.16
6547	NASDAQ	KLIC	Wed, May 23, 2018	22.33	22.48	22.05	22.23
6546	NASDAQ	KLIC	Tue, May 22, 2018	22.39	22.93	22.26	22.45
6545	NASDAQ	KLIC	Mon, May 21, 2018	22.00	22.52	21.79	22.19
6544	NASDAQ	KLIC	Fri, May 18, 2018	22.57	22.61	21.87	21.98
6543	NASDAQ	KLIC	Thu, May 17, 2018	22.62	22.90	22.53	22.83
6542	NASDAQ	KLIC	Wed, May 16, 2018	22.29	22.98	22.28	22.75
6541	NASDAQ	KLIC	Tue, May 15, 2018	22.61	22.74	22.05	22.30
6540	NASDAQ	KLIC	Mon, May 14, 2018	21.90	23.12	21.78	22.72
6539	NASDAQ	KLIC	Fri, May 11, 2018	23.72	23.89	21.58	21.99
6538	NASDAQ	KLIC	Thu, May 10, 2018	23.39	23.84	23.36	23.79
6537	NASDAQ	KLIC	Wed, May 9, 2018	23.15	23.55	23.00	23.29
6536	NASDAQ	KLIC	Tue, May 8, 2018	22.80	23.32	22.80	23.17
6535	NASDAQ	KLIC	Mon, May 7, 2018	23.19	23.35	22.96	23.04
6534	NASDAQ	KLIC	Fri, May 4, 2018	22.81	23.26	22.76	23.09
6533	NASDAQ	KLIC	Thu, May 3, 2018	22.80	23.19	22.57	22.99
6532	NASDAQ	KLIC	Wed, May 2, 2018	23.25	23.50	22.79	23.03
6531	NASDAQ	KLIC	Tue, May 1, 2018	22.74	23.26	22.58	23.24
6530	NASDAQ	KLIC	Mon, Apr 30, 2018	23.52	23.52	22.70	22.89
6529	NASDAQ	KLIC	Fri, Apr 27, 2018	23.90	24.05	23.42	23.52
6528	NASDAQ	KLIC	Thu, Apr 26, 2018	23.67	23.98	23.42	23.70
6527	NASDAQ	KLIC	Wed, Apr 25, 2018	23.87	23.88	23.12	23.49
6526	NASDAQ	KLIC	Tue, Apr 24, 2018	24.38	24.40	23.43	23.76
6525	NASDAQ	KLIC	Mon, Apr 23, 2018	24.67	24.67	24.15	24.29
6524	NASDAQ	KLIC	Fri, Apr 20, 2018	24.27	24.91	24.27	24.57
6523	NASDAQ	KLIC	Thu, Apr 19, 2018	25.63	25.63	24.22	24.29
6522	NASDAQ	KLIC	Wed, Apr 18, 2018	26.19	26.19	25.44	25.91
6521	NASDAQ	KLIC	Tue, Apr 17, 2018	26.09	26.42	26.05	26.30
6520	NASDAQ	KLIC	Mon, Apr 16, 2018	26.00	26.15	25.74	26.00
6519	NASDAQ	KLIC	Fri, Apr 13, 2018	25.86	26.14	25.36	25.90
6518	NASDAQ	KLIC	Thu, Apr 12, 2018	25.46	25.98	25.37	25.70
6517	NASDAQ	KLIC	Wed, Apr 11, 2018	25.15	25.59	25.10	25.28
6516	NASDAQ	KLIC	Tue, Apr 10, 2018	24.91	25.53	24.73	25.33
6515	NASDAQ	KLIC	Mon, Apr 9, 2018	24.65	25.13	24.33	24.34
6514	NASDAQ	KLIC	Fri, Apr 6, 2018	24.44	24.85	24.11	24.47
6513	NASDAQ	KLIC	Thu, Apr 5, 2018	25.25	25.34	24.47	24.66
6512	NASDAQ	KLIC	Wed, Apr 4, 2018	23.95	25.05	23.92	24.96
6511	NASDAQ	KLIC	Tue, Apr 3, 2018	24.59	24.92	24.11	24.57
6510	NASDAQ	KLIC	Mon, Apr 2, 2018	24.88	25.00	24.06	24.44
6509	NASDAQ	KLIC	Thu, Mar 29, 2018	24.37	25.24	24.23	25.01
6508	NASDAQ	KLIC	Wed, Mar 28, 2018	24.53	24.81	23.69	24.29
6507	NASDAQ	KLIC	Tue, Mar 27, 2018	25.98	26.14	24.40	24.57
6506	NASDAQ	KLIC	Mon, Mar 26, 2018	25.40	25.79	25.10	25.76
6505	NASDAQ	KLIC	Fri, Mar 23, 2018	26.00	26.25	25.02	25.06
6504	NASDAQ	KLIC	Thu, Mar 22, 2018	26.65	26.74	25.97	26.36
6503	NASDAQ	KLIC	Wed, Mar 21, 2018	25.85	26.98	25.85	26.85
6502	NASDAQ	KLIC	Tue, Mar 20, 2018	25.49	25.98	25.36	25.82
6501	NASDAQ	KLIC	Mon, Mar 19, 2018	25.51	25.96	25.07	25.53
6500	NASDAQ	KLIC	Fri, Mar 16, 2018	25.42	25.78	25.28	25.72
6499	NASDAQ	KLIC	Thu, Mar 15, 2018	25.58	25.74	25.20	25.35
6498	NASDAQ	KLIC	Wed, Mar 14, 2018	25.69	25.84	25.37	25.57
6497	NASDAQ	KLIC	Tue, Mar 13, 2018	25.79	25.95	25.44	25.45
6496	NASDAQ	KLIC	Mon, Mar 12, 2018	25.02	25.70	25.02	25.57
6495	NASDAQ	KLIC	Fri, Mar 9, 2018	24.67	25.39	24.58	24.95
6494	NASDAQ	KLIC	Thu, Mar 8, 2018	24.69	24.97	24.25	24.65
6493	NASDAQ	KLIC	Wed, Mar 7, 2018	23.27	24.58	23.09	24.46
6492	NASDAQ	KLIC	Tue, Mar 6, 2018	22.96	23.51	22.82	23.35
6491	NASDAQ	KLIC	Mon, Mar 5, 2018	22.97	23.00	22.62	22.93
6490	NASDAQ	KLIC	Fri, Mar 2, 2018	22.60	23.00	21.98	22.97
6489	NASDAQ	KLIC	Thu, Mar 1, 2018	23.36	23.42	22.46	22.80
6488	NASDAQ	KLIC	Wed, Feb 28, 2018	23.76	23.80	23.23	23.30
6487	NASDAQ	KLIC	Tue, Feb 27, 2018	23.46	23.81	23.35	23.57
6486	NASDAQ	KLIC	Mon, Feb 26, 2018	22.95	23.47	22.95	23.39
6485	NASDAQ	KLIC	Fri, Feb 23, 2018	22.73	22.81	22.10	22.79
6484	NASDAQ	KLIC	Thu, Feb 22, 2018	22.84	22.98	22.20	22.76
6483	NASDAQ	KLIC	Wed, Feb 21, 2018	23.16	23.53	22.78	22.79
6482	NASDAQ	KLIC	Tue, Feb 20, 2018	22.02	23.34	22.02	23.10
6481	NASDAQ	KLIC	Fri, Feb 16, 2018	22.22	22.41	22.00	22.02
6480	NASDAQ	KLIC	Thu, Feb 15, 2018	22.10	22.32	21.47	22.29
6479	NASDAQ	KLIC	Wed, Feb 14, 2018	20.97	21.97	20.96	21.90
6478	NASDAQ	KLIC	Tue, Feb 13, 2018	21.39	21.40	20.77	21.05
6477	NASDAQ	KLIC	Mon, Feb 12, 2018	21.51	21.89	21.37	21.53
6476	NASDAQ	KLIC	Fri, Feb 9, 2018	21.48	21.80	20.72	21.39
6475	NASDAQ	KLIC	Thu, Feb 8, 2018	21.87	22.19	20.90	21.12
6474	NASDAQ	KLIC	Wed, Feb 7, 2018	22.42	22.61	21.68	21.77
6473	NASDAQ	KLIC	Tue, Feb 6, 2018	21.20	22.92	20.65	22.75
6472	NASDAQ	KLIC	Mon, Feb 5, 2018	21.72	22.41	21.14	21.15
6471	NASDAQ	KLIC	Fri, Feb 2, 2018	23.12	23.19	21.86	21.97
6470	NASDAQ	KLIC	Thu, Feb 1, 2018	23.20	23.65	22.40	23.38
6469	NASDAQ	KLIC	Wed, Jan 31, 2018	23.81	23.90	22.61	23.01
6468	NASDAQ	KLIC	Tue, Jan 30, 2018	24.13	24.28	23.11	23.28
6467	NASDAQ	KLIC	Mon, Jan 29, 2018	24.71	24.71	24.20	24.47
6466	NASDAQ	KLIC	Fri, Jan 26, 2018	24.25	25.05	24.03	24.79
6465	NASDAQ	KLIC	Thu, Jan 25, 2018	25.01	25.10	23.83	24.00
6464	NASDAQ	KLIC	Wed, Jan 24, 2018	25.47	25.47	24.52	24.71
6463	NASDAQ	KLIC	Tue, Jan 23, 2018	25.46	25.61	25.34	25.51
6462	NASDAQ	KLIC	Mon, Jan 22, 2018	25.54	25.61	25.28	25.49
6461	NASDAQ	KLIC	Fri, Jan 19, 2018	25.60	25.65	25.20	25.61
6460	NASDAQ	KLIC	Thu, Jan 18, 2018	25.72	25.97	25.29	25.50
6459	NASDAQ	KLIC	Wed, Jan 17, 2018	25.13	25.86	25.09	25.70
6458	NASDAQ	KLIC	Tue, Jan 16, 2018	25.00	25.13	24.53	24.84
6457	NASDAQ	KLIC	Fri, Jan 12, 2018	24.92	25.15	24.66	24.73
6456	NASDAQ	KLIC	Thu, Jan 11, 2018	24.82	25.07	24.73	24.92
6455	NASDAQ	KLIC	Wed, Jan 10, 2018	24.93	25.01	24.34	24.69
6454	NASDAQ	KLIC	Tue, Jan 9, 2018	25.70	25.74	24.91	25.13
6453	NASDAQ	KLIC	Mon, Jan 8, 2018	25.78	25.94	25.35	25.69
6452	NASDAQ	KLIC	Fri, Jan 5, 2018	25.30	25.87	25.16	25.71
6451	NASDAQ	KLIC	Thu, Jan 4, 2018	25.36	25.66	24.98	25.25
6450	NASDAQ	KLIC	Wed, Jan 3, 2018	24.53	25.13	24.49	25.03
6449	NASDAQ	KLIC	Tue, Jan 2, 2018	24.47	24.67	24.35	24.47
6448	NASDAQ	KLIC	Fri, Dec 29, 2017	24.33	24.69	24.28	24.34
6447	NASDAQ	KLIC	Thu, Dec 28, 2017	24.16	24.27	24.04	24.18
6446	NASDAQ	KLIC	Wed, Dec 27, 2017	24.02	24.21	23.92	24.04
6445	NASDAQ	KLIC	Tue, Dec 26, 2017	24.18	24.18	23.77	23.98
6444	NASDAQ	KLIC	Fri, Dec 22, 2017	24.32	24.53	24.00	24.34
6443	NASDAQ	KLIC	Thu, Dec 21, 2017	24.75	24.75	24.14	24.35
6442	NASDAQ	KLIC	Wed, Dec 20, 2017	24.55	24.92	23.91	24.65
6441	NASDAQ	KLIC	Tue, Dec 19, 2017	25.02	25.31	24.63	24.73
6440	NASDAQ	KLIC	Mon, Dec 18, 2017	24.80	25.41	24.80	25.02
6439	NASDAQ	KLIC	Fri, Dec 15, 2017	24.50	25.05	24.30	24.65
6438	NASDAQ	KLIC	Thu, Dec 14, 2017	24.21	24.68	24.17	24.33
6437	NASDAQ	KLIC	Wed, Dec 13, 2017	24.12	24.42	23.96	24.12
6436	NASDAQ	KLIC	Tue, Dec 12, 2017	23.96	24.42	23.96	24.00
6435	NASDAQ	KLIC	Mon, Dec 11, 2017	24.15	24.48	23.91	24.31
6434	NASDAQ	KLIC	Fri, Dec 8, 2017	24.36	24.65	24.08	24.14
6433	NASDAQ	KLIC	Thu, Dec 7, 2017	24.14	24.74	24.14	24.36
6432	NASDAQ	KLIC	Wed, Dec 6, 2017	23.84	24.25	23.82	23.99
6431	NASDAQ	KLIC	Tue, Dec 5, 2017	23.77	24.60	23.59	24.00
6430	NASDAQ	KLIC	Mon, Dec 4, 2017	24.31	24.55	23.43	23.72
6429	NASDAQ	KLIC	Fri, Dec 1, 2017	24.84	24.85	23.67	24.08
6428	NASDAQ	KLIC	Thu, Nov 30, 2017	25.49	25.51	24.73	24.83
6427	NASDAQ	KLIC	Wed, Nov 29, 2017	26.40	26.46	24.88	25.22
6426	NASDAQ	KLIC	Tue, Nov 28, 2017	26.67	26.75	26.14	26.46
6425	NASDAQ	KLIC	Mon, Nov 27, 2017	27.50	27.51	26.18	26.58
6424	NASDAQ	KLIC	Fri, Nov 24, 2017	27.59	27.92	27.43	27.87
6423	NASDAQ	KLIC	Wed, Nov 22, 2017	28.02	28.14	27.08	27.56
6422	NASDAQ	KLIC	Tue, Nov 21, 2017	27.13	28.11	27.07	27.93
6421	NASDAQ	KLIC	Mon, Nov 20, 2017	26.81	26.89	26.17	26.80
6420	NASDAQ	KLIC	Fri, Nov 17, 2017	26.84	27.63	26.65	26.80
6419	NASDAQ	KLIC	Thu, Nov 16, 2017	26.04	27.01	25.94	26.85
6418	NASDAQ	KLIC	Wed, Nov 15, 2017	28.40	28.40	25.42	25.77
6417	NASDAQ	KLIC	Tue, Nov 14, 2017	26.23	28.71	26.23	28.52
6416	NASDAQ	KLIC	Mon, Nov 13, 2017	23.46	23.93	23.30	23.69
6415	NASDAQ	KLIC	Fri, Nov 10, 2017	23.48	23.63	23.29	23.61
6414	NASDAQ	KLIC	Thu, Nov 9, 2017	24.32	24.32	23.34	23.52
6413	NASDAQ	KLIC	Wed, Nov 8, 2017	23.47	24.56	23.40	24.49
6412	NASDAQ	KLIC	Tue, Nov 7, 2017	23.67	23.82	23.43	23.50
6411	NASDAQ	KLIC	Mon, Nov 6, 2017	22.80	23.71	22.72	23.63
6410	NASDAQ	KLIC	Fri, Nov 3, 2017	22.47	22.79	22.47	22.77
6409	NASDAQ	KLIC	Thu, Nov 2, 2017	22.31	22.50	22.20	22.42
6408	NASDAQ	KLIC	Wed, Nov 1, 2017	22.72	22.85	21.96	22.32
6407	NASDAQ	KLIC	Tue, Oct 31, 2017	22.51	22.73	22.33	22.65
6406	NASDAQ	KLIC	Mon, Oct 30, 2017	22.21	22.52	22.11	22.49
6405	NASDAQ	KLIC	Fri, Oct 27, 2017	22.42	22.54	21.96	22.31
6404	NASDAQ	KLIC	Thu, Oct 26, 2017	21.89	22.30	21.51	22.23
6403	NASDAQ	KLIC	Wed, Oct 25, 2017	21.91	21.95	21.46	21.80
6402	NASDAQ	KLIC	Tue, Oct 24, 2017	22.04	22.16	21.83	21.98
6401	NASDAQ	KLIC	Mon, Oct 23, 2017	22.20	22.29	21.97	22.01
6400	NASDAQ	KLIC	Fri, Oct 20, 2017	22.28	22.50	21.94	22.05
6399	NASDAQ	KLIC	Thu, Oct 19, 2017	22.09	22.17	21.45	22.10
6398	NASDAQ	KLIC	Wed, Oct 18, 2017	22.17	22.37	22.02	22.30
6397	NASDAQ	KLIC	Tue, Oct 17, 2017	21.96	22.16	21.61	22.15
6396	NASDAQ	KLIC	Mon, Oct 16, 2017	22.03	22.14	21.86	21.97
6395	NASDAQ	KLIC	Fri, Oct 13, 2017	22.12	22.15	21.90	22.03
6394	NASDAQ	KLIC	Thu, Oct 12, 2017	21.85	22.17	21.85	21.96
6393	NASDAQ	KLIC	Wed, Oct 11, 2017	21.75	22.09	21.69	21.90
6392	NASDAQ	KLIC	Tue, Oct 10, 2017	22.05	22.05	21.52	21.79
6391	NASDAQ	KLIC	Mon, Oct 9, 2017	21.97	22.23	21.87	21.93
6390	NASDAQ	KLIC	Fri, Oct 6, 2017	22.01	22.25	21.87	21.96
6389	NASDAQ	KLIC	Thu, Oct 5, 2017	22.00	22.14	21.88	22.03
6388	NASDAQ	KLIC	Wed, Oct 4, 2017	21.99	22.08	21.80	21.94
6387	NASDAQ	KLIC	Tue, Oct 3, 2017	21.94	22.04	21.61	22.00
6386	NASDAQ	KLIC	Mon, Oct 2, 2017	21.51	22.09	21.44	21.98
6385	NASDAQ	KLIC	Fri, Sep 29, 2017	21.56	21.75	20.47	21.57
6384	NASDAQ	KLIC	Thu, Sep 28, 2017	20.95	21.59	20.90	21.58
6383	NASDAQ	KLIC	Wed, Sep 27, 2017	20.42	21.15	20.42	20.99
6382	NASDAQ	KLIC	Tue, Sep 26, 2017	20.19	20.43	20.05	20.27
6381	NASDAQ	KLIC	Mon, Sep 25, 2017	20.15	20.15	19.69	20.07
6380	NASDAQ	KLIC	Fri, Sep 22, 2017	19.34	20.29	19.34	20.17
6379	NASDAQ	KLIC	Thu, Sep 21, 2017	19.80	19.90	19.38	19.45
6378	NASDAQ	KLIC	Wed, Sep 20, 2017	20.02	20.02	19.55	19.77
6377	NASDAQ	KLIC	Tue, Sep 19, 2017	19.99	20.15	19.80	19.90
6376	NASDAQ	KLIC	Mon, Sep 18, 2017	19.70	20.09	19.70	20.00
6375	NASDAQ	KLIC	Fri, Sep 15, 2017	19.14	19.59	19.11	19.59
6374	NASDAQ	KLIC	Thu, Sep 14, 2017	19.02	19.29	18.86	19.13
6373	NASDAQ	KLIC	Wed, Sep 13, 2017	19.14	19.31	18.99	19.02
6372	NASDAQ	KLIC	Tue, Sep 12, 2017	18.69	19.32	18.63	19.16
6371	NASDAQ	KLIC	Mon, Sep 11, 2017	18.63	18.89	18.51	18.57
6370	NASDAQ	KLIC	Fri, Sep 8, 2017	18.86	18.96	18.43	18.48
6369	NASDAQ	KLIC	Thu, Sep 7, 2017	19.01	19.15	18.84	18.87
6368	NASDAQ	KLIC	Wed, Sep 6, 2017	19.17	19.17	18.88	19.01
6367	NASDAQ	KLIC	Tue, Sep 5, 2017	19.16	19.24	18.88	19.05
6366	NASDAQ	KLIC	Fri, Sep 1, 2017	19.14	19.37	19.12	19.28
6365	NASDAQ	KLIC	Thu, Aug 31, 2017	19.30	19.34	19.00	19.03
6364	NASDAQ	KLIC	Wed, Aug 30, 2017	18.97	19.29	18.89	19.23
6363	NASDAQ	KLIC	Tue, Aug 29, 2017	18.32	18.91	18.22	18.89
6362	NASDAQ	KLIC	Mon, Aug 28, 2017	18.67	18.87	18.53	18.62
6361	NASDAQ	KLIC	Fri, Aug 25, 2017	18.70	19.04	18.54	18.63
6360	NASDAQ	KLIC	Thu, Aug 24, 2017	18.59	18.72	18.41	18.59
6359	NASDAQ	KLIC	Wed, Aug 23, 2017	18.68	18.82	18.48	18.51
6358	NASDAQ	KLIC	Tue, Aug 22, 2017	18.68	18.95	18.60	18.87
6357	NASDAQ	KLIC	Mon, Aug 21, 2017	18.96	19.14	18.52	18.57
6356	NASDAQ	KLIC	Fri, Aug 18, 2017	18.64	18.93	18.63	18.90
6355	NASDAQ	KLIC	Thu, Aug 17, 2017	19.12	19.23	18.59	18.62
6354	NASDAQ	KLIC	Wed, Aug 16, 2017	19.04	19.36	18.87	19.19
6353	NASDAQ	KLIC	Tue, Aug 15, 2017	19.30	19.73	18.91	18.93
6352	NASDAQ	KLIC	Mon, Aug 14, 2017	19.46	19.68	19.14	19.18
6351	NASDAQ	KLIC	Fri, Aug 11, 2017	18.92	19.26	18.91	19.16
6350	NASDAQ	KLIC	Thu, Aug 10, 2017	19.41	19.48	18.92	18.92
6349	NASDAQ	KLIC	Wed, Aug 9, 2017	19.68	19.75	19.31	19.53
6348	NASDAQ	KLIC	Tue, Aug 8, 2017	20.14	20.39	19.87	20.06
6347	NASDAQ	KLIC	Mon, Aug 7, 2017	19.50	20.35	19.42	20.26
6346	NASDAQ	KLIC	Fri, Aug 4, 2017	19.03	19.86	18.73	19.41
6345	NASDAQ	KLIC	Thu, Aug 3, 2017	19.23	19.70	19.00	19.06
6344	NASDAQ	KLIC	Wed, Aug 2, 2017	21.72	21.72	18.90	19.11
6343	NASDAQ	KLIC	Tue, Aug 1, 2017	21.54	22.56	21.38	21.72
6342	NASDAQ	KLIC	Mon, Jul 31, 2017	21.55	21.59	21.31	21.54
6341	NASDAQ	KLIC	Fri, Jul 28, 2017	21.80	21.95	21.40	21.51
6340	NASDAQ	KLIC	Thu, Jul 27, 2017	22.58	22.70	21.50	21.94
6339	NASDAQ	KLIC	Wed, Jul 26, 2017	22.64	22.71	22.44	22.56
6338	NASDAQ	KLIC	Tue, Jul 25, 2017	22.31	22.67	22.06	22.53
6337	NASDAQ	KLIC	Mon, Jul 24, 2017	22.13	22.32	21.99	22.27
6336	NASDAQ	KLIC	Fri, Jul 21, 2017	22.37	22.37	22.05	22.11
6335	NASDAQ	KLIC	Thu, Jul 20, 2017	22.57	22.57	22.18	22.53
6334	NASDAQ	KLIC	Wed, Jul 19, 2017	22.47	22.51	22.26	22.50
6333	NASDAQ	KLIC	Tue, Jul 18, 2017	22.38	22.52	22.07	22.33
6332	NASDAQ	KLIC	Mon, Jul 17, 2017	22.32	22.55	22.05	22.51
6331	NASDAQ	KLIC	Fri, Jul 14, 2017	21.83	22.24	21.75	22.23
6330	NASDAQ	KLIC	Thu, Jul 13, 2017	21.84	22.10	21.51	21.81
6329	NASDAQ	KLIC	Wed, Jul 12, 2017	21.26	22.00	21.01	21.93
6328	NASDAQ	KLIC	Tue, Jul 11, 2017	20.19	21.17	20.19	21.08
6327	NASDAQ	KLIC	Mon, Jul 10, 2017	20.03	20.19	19.75	20.14
6326	NASDAQ	KLIC	Fri, Jul 7, 2017	19.21	20.01	19.21	19.97
6325	NASDAQ	KLIC	Thu, Jul 6, 2017	18.96	19.37	18.84	19.06
6324	NASDAQ	KLIC	Wed, Jul 5, 2017	19.00	19.38	18.91	19.20
6323	NASDAQ	KLIC	Mon, Jul 3, 2017	19.16	19.28	18.82	18.82
6322	NASDAQ	KLIC	Fri, Jun 30, 2017	19.13	19.30	18.80	19.02
6321	NASDAQ	KLIC	Thu, Jun 29, 2017	20.29	20.31	18.95	19.16
6320	NASDAQ	KLIC	Wed, Jun 28, 2017	19.68	20.30	19.36	20.02
6319	NASDAQ	KLIC	Tue, Jun 27, 2017	19.95	19.98	19.44	19.49
6318	NASDAQ	KLIC	Mon, Jun 26, 2017	20.43	20.67	19.82	19.99
6317	NASDAQ	KLIC	Fri, Jun 23, 2017	20.20	20.60	20.13	20.31
6316	NASDAQ	KLIC	Thu, Jun 22, 2017	20.45	20.47	20.24	20.29
6315	NASDAQ	KLIC	Wed, Jun 21, 2017	20.66	20.75	20.44	20.51
6314	NASDAQ	KLIC	Tue, Jun 20, 2017	20.93	21.14	20.53	20.53
6313	NASDAQ	KLIC	Mon, Jun 19, 2017	20.70	21.07	20.70	20.96
6312	NASDAQ	KLIC	Fri, Jun 16, 2017	20.46	20.60	20.40	20.53
6311	NASDAQ	KLIC	Thu, Jun 15, 2017	20.40	20.68	20.36	20.40
6310	NASDAQ	KLIC	Wed, Jun 14, 2017	21.22	21.29	20.40	20.73
6309	NASDAQ	KLIC	Tue, Jun 13, 2017	21.32	21.48	21.09	21.25
6308	NASDAQ	KLIC	Mon, Jun 12, 2017	21.52	21.64	20.98	21.14
6307	NASDAQ	KLIC	Fri, Jun 9, 2017	22.80	22.96	21.38	21.75
6306	NASDAQ	KLIC	Thu, Jun 8, 2017	22.64	22.71	22.53	22.71
6305	NASDAQ	KLIC	Wed, Jun 7, 2017	22.44	22.71	22.44	22.63
6304	NASDAQ	KLIC	Tue, Jun 6, 2017	22.26	22.55	22.26	22.43
6303	NASDAQ	KLIC	Mon, Jun 5, 2017	22.31	22.59	22.31	22.44
6302	NASDAQ	KLIC	Fri, Jun 2, 2017	22.53	22.59	22.39	22.45
6301	NASDAQ	KLIC	Thu, Jun 1, 2017	22.27	22.51	22.02	22.46
6300	NASDAQ	KLIC	Wed, May 31, 2017	22.63	22.75	22.05	22.15
6299	NASDAQ	KLIC	Tue, May 30, 2017	22.41	22.69	22.41	22.57
6298	NASDAQ	KLIC	Fri, May 26, 2017	22.42	22.61	22.31	22.46
6297	NASDAQ	KLIC	Thu, May 25, 2017	21.89	22.50	21.85	22.38
6296	NASDAQ	KLIC	Wed, May 24, 2017	21.67	21.91	21.53	21.82
6295	NASDAQ	KLIC	Tue, May 23, 2017	21.61	21.61	21.27	21.54
6294	NASDAQ	KLIC	Mon, May 22, 2017	21.51	21.67	21.32	21.61
6293	NASDAQ	KLIC	Fri, May 19, 2017	21.27	21.55	21.25	21.35
6292	NASDAQ	KLIC	Thu, May 18, 2017	20.88	21.33	20.56	21.22
6291	NASDAQ	KLIC	Wed, May 17, 2017	21.45	21.50	20.95	20.97
6290	NASDAQ	KLIC	Tue, May 16, 2017	21.60	21.78	21.47	21.72
6289	NASDAQ	KLIC	Mon, May 15, 2017	21.41	21.63	21.39	21.51
6288	NASDAQ	KLIC	Fri, May 12, 2017	21.40	21.49	21.21	21.42
6287	NASDAQ	KLIC	Thu, May 11, 2017	21.30	21.50	21.15	21.46
6286	NASDAQ	KLIC	Wed, May 10, 2017	21.38	21.47	21.19	21.37
6285	NASDAQ	KLIC	Tue, May 9, 2017	21.12	21.38	21.10	21.30
6284	NASDAQ	KLIC	Mon, May 8, 2017	21.70	21.78	21.06	21.09
6283	NASDAQ	KLIC	Fri, May 5, 2017	22.01	22.10	21.28	21.43
6282	NASDAQ	KLIC	Thu, May 4, 2017	21.00	22.28	20.94	21.96
6281	NASDAQ	KLIC	Wed, May 3, 2017	21.93	22.31	20.24	20.85
6280	NASDAQ	KLIC	Tue, May 2, 2017	23.00	23.00	21.92	22.28
6279	NASDAQ	KLIC	Mon, May 1, 2017	22.49	22.97	22.31	22.95
6278	NASDAQ	KLIC	Fri, Apr 28, 2017	22.70	22.80	22.22	22.32
6277	NASDAQ	KLIC	Thu, Apr 27, 2017	22.07	22.77	21.93	22.72
6276	NASDAQ	KLIC	Wed, Apr 26, 2017	21.91	22.10	21.64	21.93
6275	NASDAQ	KLIC	Tue, Apr 25, 2017	21.18	22.19	21.18	21.92
6274	NASDAQ	KLIC	Mon, Apr 24, 2017	20.94	21.06	20.69	20.97
6273	NASDAQ	KLIC	Fri, Apr 21, 2017	20.54	20.74	20.34	20.64
6272	NASDAQ	KLIC	Thu, Apr 20, 2017	20.25	20.69	20.25	20.60
6271	NASDAQ	KLIC	Wed, Apr 19, 2017	19.92	20.15	19.86	20.13
6270	NASDAQ	KLIC	Tue, Apr 18, 2017	19.66	19.80	19.43	19.79
6269	NASDAQ	KLIC	Mon, Apr 17, 2017	19.46	19.71	19.45	19.70
6268	NASDAQ	KLIC	Thu, Apr 13, 2017	19.55	19.74	19.33	19.36
6267	NASDAQ	KLIC	Wed, Apr 12, 2017	19.80	19.84	19.52	19.60
6266	NASDAQ	KLIC	Tue, Apr 11, 2017	19.55	19.81	19.39	19.81
6265	NASDAQ	KLIC	Mon, Apr 10, 2017	19.61	19.97	19.58	19.63
6264	NASDAQ	KLIC	Fri, Apr 7, 2017	19.56	19.75	19.52	19.66
6263	NASDAQ	KLIC	Thu, Apr 6, 2017	19.64	19.76	18.95	19.60
6262	NASDAQ	KLIC	Wed, Apr 5, 2017	20.11	20.20	19.54	19.66
6261	NASDAQ	KLIC	Tue, Apr 4, 2017	19.93	20.28	19.93	20.06
6260	NASDAQ	KLIC	Mon, Apr 3, 2017	20.25	20.45	19.90	19.93
6259	NASDAQ	KLIC	Fri, Mar 31, 2017	20.31	20.36	20.26	20.32
6258	NASDAQ	KLIC	Thu, Mar 30, 2017	20.16	20.38	20.16	20.35
6257	NASDAQ	KLIC	Wed, Mar 29, 2017	20.34	20.34	20.01	20.15
6256	NASDAQ	KLIC	Tue, Mar 28, 2017	20.22	20.43	20.19	20.42
6255	NASDAQ	KLIC	Mon, Mar 27, 2017	20.06	20.25	19.74	20.20
6254	NASDAQ	KLIC	Fri, Mar 24, 2017	20.29	20.50	20.15	20.28
6253	NASDAQ	KLIC	Thu, Mar 23, 2017	20.21	20.33	20.12	20.25
6252	NASDAQ	KLIC	Wed, Mar 22, 2017	20.33	20.46	19.83	20.24
6251	NASDAQ	KLIC	Tue, Mar 21, 2017	20.85	20.95	20.12	20.34
6250	NASDAQ	KLIC	Mon, Mar 20, 2017	20.65	21.00	20.65	20.73
6249	NASDAQ	KLIC	Fri, Mar 17, 2017	20.53	20.67	20.42	20.62
6248	NASDAQ	KLIC	Thu, Mar 16, 2017	20.52	20.60	20.30	20.46
6247	NASDAQ	KLIC	Wed, Mar 15, 2017	20.28	20.52	20.02	20.47
6246	NASDAQ	KLIC	Tue, Mar 14, 2017	20.30	20.30	20.03	20.23
6245	NASDAQ	KLIC	Mon, Mar 13, 2017	20.26	20.38	20.16	20.38
6244	NASDAQ	KLIC	Fri, Mar 10, 2017	20.25	20.49	20.17	20.29
6243	NASDAQ	KLIC	Thu, Mar 9, 2017	20.14	20.34	19.82	20.18
6242	NASDAQ	KLIC	Wed, Mar 8, 2017	20.46	20.56	20.17	20.22
6241	NASDAQ	KLIC	Tue, Mar 7, 2017	20.17	20.51	20.10	20.43
6240	NASDAQ	KLIC	Mon, Mar 6, 2017	20.38	20.68	20.08	20.19
6239	NASDAQ	KLIC	Fri, Mar 3, 2017	20.67	20.74	20.26	20.39
6238	NASDAQ	KLIC	Thu, Mar 2, 2017	20.80	20.92	20.55	20.68
6237	NASDAQ	KLIC	Wed, Mar 1, 2017	20.67	20.87	20.46	20.86
6236	NASDAQ	KLIC	Tue, Feb 28, 2017	20.67	20.67	20.27	20.47
6235	NASDAQ	KLIC	Mon, Feb 27, 2017	20.74	20.90	20.43	20.67
6234	NASDAQ	KLIC	Fri, Feb 24, 2017	20.44	20.80	20.07	20.74
6233	NASDAQ	KLIC	Thu, Feb 23, 2017	20.86	20.95	20.41	20.59
6232	NASDAQ	KLIC	Wed, Feb 22, 2017	21.03	21.08	20.81	20.87
6231	NASDAQ	KLIC	Tue, Feb 21, 2017	20.61	21.23	20.60	21.02
6230	NASDAQ	KLIC	Fri, Feb 17, 2017	20.26	20.70	20.10	20.54
6229	NASDAQ	KLIC	Thu, Feb 16, 2017	20.45	20.50	20.11	20.42
6228	NASDAQ	KLIC	Wed, Feb 15, 2017	20.18	20.45	19.99	20.42
6227	NASDAQ	KLIC	Tue, Feb 14, 2017	20.30	20.40	19.91	20.19
6226	NASDAQ	KLIC	Mon, Feb 13, 2017	20.30	20.43	20.19	20.30
6225	NASDAQ	KLIC	Fri, Feb 10, 2017	20.50	20.55	20.06	20.09
6224	NASDAQ	KLIC	Thu, Feb 9, 2017	20.30	20.59	20.13	20.52
6223	NASDAQ	KLIC	Wed, Feb 8, 2017	20.41	20.47	19.98	20.17
6222	NASDAQ	KLIC	Tue, Feb 7, 2017	20.00	20.78	19.80	20.49
6221	NASDAQ	KLIC	Mon, Feb 6, 2017	19.84	19.99	19.36	19.99
6220	NASDAQ	KLIC	Fri, Feb 3, 2017	19.43	19.76	19.12	19.40
6219	NASDAQ	KLIC	Thu, Feb 2, 2017	18.95	19.60	18.55	19.22
6218	NASDAQ	KLIC	Wed, Feb 1, 2017	17.71	17.89	17.29	17.53
6217	NASDAQ	KLIC	Tue, Jan 31, 2017	17.59	17.78	17.29	17.58
6216	NASDAQ	KLIC	Mon, Jan 30, 2017	17.76	17.82	17.33	17.68
6215	NASDAQ	KLIC	Fri, Jan 27, 2017	17.85	18.02	17.73	17.92
6214	NASDAQ	KLIC	Thu, Jan 26, 2017	17.92	18.00	17.48	17.74
6213	NASDAQ	KLIC	Wed, Jan 25, 2017	17.44	18.12	17.42	17.79
6212	NASDAQ	KLIC	Tue, Jan 24, 2017	17.05	17.32	17.05	17.31
6211	NASDAQ	KLIC	Mon, Jan 23, 2017	17.00	17.18	16.98	17.03
6210	NASDAQ	KLIC	Fri, Jan 20, 2017	17.20	17.20	16.90	17.01
6209	NASDAQ	KLIC	Thu, Jan 19, 2017	17.13	17.30	17.00	17.10
6208	NASDAQ	KLIC	Wed, Jan 18, 2017	16.98	17.38	16.96	17.12
6207	NASDAQ	KLIC	Tue, Jan 17, 2017	17.00	17.18	16.76	16.96
6206	NASDAQ	KLIC	Fri, Jan 13, 2017	16.83	17.21	16.75	17.06
6205	NASDAQ	KLIC	Thu, Jan 12, 2017	16.73	16.89	16.47	16.81
6204	NASDAQ	KLIC	Wed, Jan 11, 2017	16.46	16.84	16.39	16.83
6203	NASDAQ	KLIC	Tue, Jan 10, 2017	16.26	16.55	16.26	16.47
6202	NASDAQ	KLIC	Mon, Jan 9, 2017	16.23	16.53	16.17	16.28
6201	NASDAQ	KLIC	Fri, Jan 6, 2017	16.29	16.45	16.14	16.29
6200	NASDAQ	KLIC	Thu, Jan 5, 2017	16.31	16.43	16.14	16.25
6199	NASDAQ	KLIC	Wed, Jan 4, 2017	16.34	16.50	16.27	16.36
6198	NASDAQ	KLIC	Tue, Jan 3, 2017	16.00	16.47	15.95	16.26
6197	NASDAQ	KLIC	Fri, Dec 30, 2016	15.98	15.99	15.84	15.95
6196	NASDAQ	KLIC	Thu, Dec 29, 2016	15.95	16.19	15.87	15.95
6195	NASDAQ	KLIC	Wed, Dec 28, 2016	16.27	16.31	15.95	15.97
6194	NASDAQ	KLIC	Tue, Dec 27, 2016	16.21	16.37	16.14	16.25
6193	NASDAQ	KLIC	Fri, Dec 23, 2016	16.00	16.18	16.00	16.18
6192	NASDAQ	KLIC	Thu, Dec 22, 2016	16.25	16.25	16.02	16.05
6191	NASDAQ	KLIC	Wed, Dec 21, 2016	16.31	16.45	16.18	16.24
6190	NASDAQ	KLIC	Tue, Dec 20, 2016	16.30	16.39	16.26	16.34
6189	NASDAQ	KLIC	Mon, Dec 19, 2016	16.10	16.34	15.91	16.29
6188	NASDAQ	KLIC	Fri, Dec 16, 2016	16.28	16.45	16.07	16.10
6187	NASDAQ	KLIC	Thu, Dec 15, 2016	16.01	16.35	15.80	16.15
6186	NASDAQ	KLIC	Wed, Dec 14, 2016	16.22	16.36	16.04	16.08
6185	NASDAQ	KLIC	Tue, Dec 13, 2016	16.30	16.40	16.22	16.23
6184	NASDAQ	KLIC	Mon, Dec 12, 2016	16.60	16.73	16.16	16.29
6183	NASDAQ	KLIC	Fri, Dec 9, 2016	16.68	16.88	16.58	16.73
6182	NASDAQ	KLIC	Thu, Dec 8, 2016	16.48	16.73	16.41	16.65
6181	NASDAQ	KLIC	Wed, Dec 7, 2016	16.20	16.63	16.03	16.54
6180	NASDAQ	KLIC	Tue, Dec 6, 2016	16.05	16.19	15.80	16.16
6179	NASDAQ	KLIC	Mon, Dec 5, 2016	15.57	16.05	15.39	16.03
6178	NASDAQ	KLIC	Fri, Dec 2, 2016	15.08	15.62	15.07	15.59
6177	NASDAQ	KLIC	Thu, Dec 1, 2016	15.46	15.65	15.08	15.13
6176	NASDAQ	KLIC	Wed, Nov 30, 2016	15.88	15.88	15.39	15.43
6175	NASDAQ	KLIC	Tue, Nov 29, 2016	15.64	15.95	15.54	15.76
6174	NASDAQ	KLIC	Mon, Nov 28, 2016	15.70	15.79	15.49	15.61
6173	NASDAQ	KLIC	Fri, Nov 25, 2016	15.52	15.88	15.44	15.67
6172	NASDAQ	KLIC	Wed, Nov 23, 2016	15.52	15.60	15.24	15.57
6171	NASDAQ	KLIC	Tue, Nov 22, 2016	15.27	15.63	15.27	15.56
6170	NASDAQ	KLIC	Mon, Nov 21, 2016	14.98	15.25	14.94	15.19
6169	NASDAQ	KLIC	Fri, Nov 18, 2016	15.33	15.37	14.48	14.80
6168	NASDAQ	KLIC	Thu, Nov 17, 2016	14.81	15.37	14.80	15.33
6167	NASDAQ	KLIC	Wed, Nov 16, 2016	14.50	14.89	14.46	14.80
6166	NASDAQ	KLIC	Tue, Nov 15, 2016	14.48	14.90	14.25	14.49
6165	NASDAQ	KLIC	Mon, Nov 14, 2016	13.98	14.20	13.98	14.02
6164	NASDAQ	KLIC	Fri, Nov 11, 2016	13.71	14.00	13.55	13.94
6163	NASDAQ	KLIC	Thu, Nov 10, 2016	13.85	14.07	13.69	13.80
6162	NASDAQ	KLIC	Wed, Nov 9, 2016	13.30	13.87	13.30	13.82
6161	NASDAQ	KLIC	Tue, Nov 8, 2016	13.33	13.52	13.22	13.45
6160	NASDAQ	KLIC	Mon, Nov 7, 2016	13.35	13.49	13.27	13.38
6159	NASDAQ	KLIC	Fri, Nov 4, 2016	13.15	13.31	13.08	13.17
6158	NASDAQ	KLIC	Thu, Nov 3, 2016	13.25	13.32	13.11	13.11
6157	NASDAQ	KLIC	Wed, Nov 2, 2016	13.25	13.43	13.21	13.24
6156	NASDAQ	KLIC	Tue, Nov 1, 2016	13.24	13.35	13.05	13.22
6155	NASDAQ	KLIC	Mon, Oct 31, 2016	13.27	13.27	13.07	13.24
6154	NASDAQ	KLIC	Fri, Oct 28, 2016	13.34	13.42	13.14	13.24
6153	NASDAQ	KLIC	Thu, Oct 27, 2016	13.56	13.56	13.25	13.27
6152	NASDAQ	KLIC	Wed, Oct 26, 2016	13.42	13.54	13.13	13.44
6151	NASDAQ	KLIC	Tue, Oct 25, 2016	13.65	13.69	13.47	13.49
6150	NASDAQ	KLIC	Mon, Oct 24, 2016	13.43	13.72	13.42	13.66
6149	NASDAQ	KLIC	Fri, Oct 21, 2016	13.32	13.42	13.21	13.40
6148	NASDAQ	KLIC	Thu, Oct 20, 2016	13.12	13.39	13.06	13.30
6147	NASDAQ	KLIC	Wed, Oct 19, 2016	12.89	13.20	12.81	13.19
6146	NASDAQ	KLIC	Tue, Oct 18, 2016	13.16	13.16	12.90	12.93
6145	NASDAQ	KLIC	Mon, Oct 17, 2016	13.01	13.18	12.90	13.02
6144	NASDAQ	KLIC	Fri, Oct 14, 2016	12.79	13.05	12.79	12.98
6143	NASDAQ	KLIC	Thu, Oct 13, 2016	12.77	12.80	12.64	12.72
6142	NASDAQ	KLIC	Wed, Oct 12, 2016	12.75	12.94	12.71	12.90
6141	NASDAQ	KLIC	Tue, Oct 11, 2016	13.11	13.15	12.65	12.79
6140	NASDAQ	KLIC	Mon, Oct 10, 2016	13.20	13.30	13.08	13.15
6139	NASDAQ	KLIC	Fri, Oct 7, 2016	13.34	13.34	13.21	13.25
6138	NASDAQ	KLIC	Thu, Oct 6, 2016	13.38	13.40	13.22	13.28
6137	NASDAQ	KLIC	Wed, Oct 5, 2016	13.14	13.35	13.11	13.32
6136	NASDAQ	KLIC	Tue, Oct 4, 2016	13.00	13.20	12.87	13.10
6135	NASDAQ	KLIC	Mon, Oct 3, 2016	12.87	12.99	12.86	12.96
6134	NASDAQ	KLIC	Fri, Sep 30, 2016	12.80	13.00	12.70	12.93
6133	NASDAQ	KLIC	Thu, Sep 29, 2016	13.08	13.10	12.63	12.80
6132	NASDAQ	KLIC	Wed, Sep 28, 2016	12.62	13.16	12.58	13.06
6131	NASDAQ	KLIC	Tue, Sep 27, 2016	12.53	12.60	12.48	12.59
6130	NASDAQ	KLIC	Mon, Sep 26, 2016	12.76	12.76	12.55	12.57
6129	NASDAQ	KLIC	Fri, Sep 23, 2016	12.85	12.91	12.71	12.87
6128	NASDAQ	KLIC	Thu, Sep 22, 2016	12.86	12.97	12.82	12.93
6127	NASDAQ	KLIC	Wed, Sep 21, 2016	12.58	12.87	12.52	12.86
6126	NASDAQ	KLIC	Tue, Sep 20, 2016	12.50	12.52	12.38	12.49
6125	NASDAQ	KLIC	Mon, Sep 19, 2016	12.41	12.52	12.32	12.44
6124	NASDAQ	KLIC	Fri, Sep 16, 2016	12.30	12.45	12.13	12.32
6123	NASDAQ	KLIC	Thu, Sep 15, 2016	12.13	12.40	12.13	12.38
6122	NASDAQ	KLIC	Wed, Sep 14, 2016	11.96	12.12	11.85	12.09
6121	NASDAQ	KLIC	Tue, Sep 13, 2016	11.86	12.15	11.86	11.96
6120	NASDAQ	KLIC	Mon, Sep 12, 2016	11.29	12.18	11.29	12.16
6119	NASDAQ	KLIC	Fri, Sep 9, 2016	12.49	12.49	12.08	12.09
6118	NASDAQ	KLIC	Thu, Sep 8, 2016	12.37	12.59	12.29	12.56
6117	NASDAQ	KLIC	Wed, Sep 7, 2016	12.35	12.56	12.32	12.43
6116	NASDAQ	KLIC	Tue, Sep 6, 2016	12.47	12.47	12.25	12.35
6115	NASDAQ	KLIC	Fri, Sep 2, 2016	12.40	12.48	12.23	12.47
6114	NASDAQ	KLIC	Thu, Sep 1, 2016	12.23	12.45	12.23	12.36
6113	NASDAQ	KLIC	Wed, Aug 31, 2016	12.30	12.37	12.21	12.23
6112	NASDAQ	KLIC	Tue, Aug 30, 2016	12.54	12.67	12.07	12.32
6111	NASDAQ	KLIC	Mon, Aug 29, 2016	12.48	12.68	12.48	12.56
6110	NASDAQ	KLIC	Fri, Aug 26, 2016	12.61	12.78	12.49	12.54
6109	NASDAQ	KLIC	Thu, Aug 25, 2016	12.65	12.72	12.59	12.65
6108	NASDAQ	KLIC	Wed, Aug 24, 2016	12.85	12.88	12.65	12.68
6107	NASDAQ	KLIC	Tue, Aug 23, 2016	12.75	12.88	12.75	12.86
6106	NASDAQ	KLIC	Mon, Aug 22, 2016	12.85	13.44	12.74	12.77
6105	NASDAQ	KLIC	Fri, Aug 19, 2016	12.98	13.00	12.87	12.88
6104	NASDAQ	KLIC	Thu, Aug 18, 2016	12.86	12.95	12.83	12.94
6103	NASDAQ	KLIC	Wed, Aug 17, 2016	12.85	12.92	12.75	12.89
6102	NASDAQ	KLIC	Tue, Aug 16, 2016	12.86	12.92	12.78	12.85
6101	NASDAQ	KLIC	Mon, Aug 15, 2016	12.80	12.92	12.72	12.90
6100	NASDAQ	KLIC	Fri, Aug 12, 2016	12.75	12.83	12.71	12.82
6099	NASDAQ	KLIC	Thu, Aug 11, 2016	12.73	12.77	12.64	12.75
6098	NASDAQ	KLIC	Wed, Aug 10, 2016	12.60	12.71	12.28	12.71
6097	NASDAQ	KLIC	Tue, Aug 9, 2016	12.52	12.65	12.49	12.62
6096	NASDAQ	KLIC	Mon, Aug 8, 2016	12.48	12.59	12.20	12.59
6095	NASDAQ	KLIC	Fri, Aug 5, 2016	12.30	12.49	12.17	12.45
6094	NASDAQ	KLIC	Thu, Aug 4, 2016	11.90	12.41	11.90	12.30
6093	NASDAQ	KLIC	Wed, Aug 3, 2016	11.96	12.33	11.50	11.87
6092	NASDAQ	KLIC	Tue, Aug 2, 2016	12.69	12.78	12.33	12.40
6091	NASDAQ	KLIC	Mon, Aug 1, 2016	12.58	12.78	12.58	12.70
6090	NASDAQ	KLIC	Fri, Jul 29, 2016	12.73	12.73	12.48	12.56
6089	NASDAQ	KLIC	Thu, Jul 28, 2016	12.84	12.96	12.67	12.70
6088	NASDAQ	KLIC	Wed, Jul 27, 2016	12.77	12.92	12.71	12.90
6087	NASDAQ	KLIC	Tue, Jul 26, 2016	12.65	12.78	12.57	12.75
6086	NASDAQ	KLIC	Mon, Jul 25, 2016	12.68	12.79	12.59	12.65
6085	NASDAQ	KLIC	Fri, Jul 22, 2016	12.53	12.69	12.35	12.67
6084	NASDAQ	KLIC	Thu, Jul 21, 2016	12.57	12.65	12.38	12.53
6083	NASDAQ	KLIC	Wed, Jul 20, 2016	12.52	12.65	12.50	12.54
6082	NASDAQ	KLIC	Tue, Jul 19, 2016	12.55	12.71	12.50	12.50
6081	NASDAQ	KLIC	Mon, Jul 18, 2016	12.70	12.80	12.53	12.53
6080	NASDAQ	KLIC	Fri, Jul 15, 2016	12.53	12.63	12.45	12.58
6079	NASDAQ	KLIC	Thu, Jul 14, 2016	12.70	12.70	12.49	12.53
6078	NASDAQ	KLIC	Wed, Jul 13, 2016	12.60	12.71	12.49	12.57
6077	NASDAQ	KLIC	Tue, Jul 12, 2016	12.44	12.58	12.41	12.56
6076	NASDAQ	KLIC	Mon, Jul 11, 2016	12.19	12.43	11.98	12.41
6075	NASDAQ	KLIC	Fri, Jul 8, 2016	12.13	12.23	11.86	12.16
6074	NASDAQ	KLIC	Thu, Jul 7, 2016	12.10	12.27	12.01	12.04
6073	NASDAQ	KLIC	Wed, Jul 6, 2016	12.09	12.16	11.84	12.06
6072	NASDAQ	KLIC	Tue, Jul 5, 2016	12.11	12.31	11.98	12.17
6071	NASDAQ	KLIC	Fri, Jul 1, 2016	12.10	12.28	11.99	12.22
6070	NASDAQ	KLIC	Thu, Jun 30, 2016	11.82	12.26	11.50	12.17
6069	NASDAQ	KLIC	Wed, Jun 29, 2016	11.74	12.23	11.70	11.78
6068	NASDAQ	KLIC	Tue, Jun 28, 2016	11.72	11.76	11.49	11.67
6067	NASDAQ	KLIC	Mon, Jun 27, 2016	12.09	12.11	11.52	11.57
6066	NASDAQ	KLIC	Fri, Jun 24, 2016	11.99	12.12	11.52	11.95
6065	NASDAQ	KLIC	Thu, Jun 23, 2016	12.34	12.56	12.34	12.46
6064	NASDAQ	KLIC	Wed, Jun 22, 2016	12.28	12.41	12.24	12.28
6063	NASDAQ	KLIC	Tue, Jun 21, 2016	12.27	12.39	12.22	12.31
6062	NASDAQ	KLIC	Mon, Jun 20, 2016	12.14	12.41	12.09	12.24
6061	NASDAQ	KLIC	Fri, Jun 17, 2016	11.99	12.09	11.88	12.06
6060	NASDAQ	KLIC	Thu, Jun 16, 2016	12.05	12.09	11.90	12.04
6059	NASDAQ	KLIC	Wed, Jun 15, 2016	12.13	12.20	12.05	12.05
6058	NASDAQ	KLIC	Tue, Jun 14, 2016	12.15	12.23	12.05	12.09
6057	NASDAQ	KLIC	Mon, Jun 13, 2016	12.24	12.33	12.14	12.17
6056	NASDAQ	KLIC	Fri, Jun 10, 2016	12.26	12.44	12.23	12.25
6055	NASDAQ	KLIC	Thu, Jun 9, 2016	12.45	12.52	12.33	12.41
6054	NASDAQ	KLIC	Wed, Jun 8, 2016	12.45	12.60	12.41	12.53
6053	NASDAQ	KLIC	Tue, Jun 7, 2016	12.43	12.60	12.36	12.42
6052	NASDAQ	KLIC	Mon, Jun 6, 2016	12.52	12.52	12.17	12.40
6051	NASDAQ	KLIC	Fri, Jun 3, 2016	12.68	12.72	12.45	12.45
6050	NASDAQ	KLIC	Thu, Jun 2, 2016	12.50	12.98	12.48	12.70
6049	NASDAQ	KLIC	Wed, Jun 1, 2016	12.52	12.62	12.43	12.54
6048	NASDAQ	KLIC	Tue, May 31, 2016	12.52	12.55	12.40	12.49
6047	NASDAQ	KLIC	Fri, May 27, 2016	12.28	12.55	12.25	12.46
6046	NASDAQ	KLIC	Thu, May 26, 2016	12.25	12.41	12.18	12.23
6045	NASDAQ	KLIC	Wed, May 25, 2016	12.26	12.34	12.04	12.20
6044	NASDAQ	KLIC	Tue, May 24, 2016	11.91	12.25	11.81	12.23
6043	NASDAQ	KLIC	Mon, May 23, 2016	11.66	12.06	11.53	11.88
6042	NASDAQ	KLIC	Fri, May 20, 2016	11.35	11.71	11.18	11.62
6041	NASDAQ	KLIC	Thu, May 19, 2016	11.27	11.33	11.16	11.25
6040	NASDAQ	KLIC	Wed, May 18, 2016	11.19	11.40	11.18	11.31
6039	NASDAQ	KLIC	Tue, May 17, 2016	11.32	11.45	11.15	11.19
6038	NASDAQ	KLIC	Mon, May 16, 2016	11.30	11.46	11.21	11.33
6037	NASDAQ	KLIC	Fri, May 13, 2016	11.26	11.38	11.20	11.23
6036	NASDAQ	KLIC	Thu, May 12, 2016	11.52	11.56	11.19	11.25
6035	NASDAQ	KLIC	Wed, May 11, 2016	11.47	11.58	11.42	11.48
6034	NASDAQ	KLIC	Tue, May 10, 2016	11.33	11.60	11.30	11.51
6033	NASDAQ	KLIC	Mon, May 9, 2016	11.35	11.47	11.25	11.31
6032	NASDAQ	KLIC	Fri, May 6, 2016	11.52	11.63	11.05	11.31
6031	NASDAQ	KLIC	Thu, May 5, 2016	11.42	11.79	11.42	11.59
6030	NASDAQ	KLIC	Wed, May 4, 2016	12.20	12.30	11.21	11.34
6029	NASDAQ	KLIC	Tue, May 3, 2016	10.83	11.17	10.63	11.16
6028	NASDAQ	KLIC	Mon, May 2, 2016	10.72	10.98	10.62	10.79
6027	NASDAQ	KLIC	Fri, Apr 29, 2016	10.97	11.07	10.64	10.72
6026	NASDAQ	KLIC	Thu, Apr 28, 2016	11.08	11.17	10.94	11.02
6025	NASDAQ	KLIC	Wed, Apr 27, 2016	11.03	11.18	10.95	11.17
6024	NASDAQ	KLIC	Tue, Apr 26, 2016	11.14	11.20	10.99	11.07
6023	NASDAQ	KLIC	Mon, Apr 25, 2016	11.14	11.27	11.00	11.05
6022	NASDAQ	KLIC	Fri, Apr 22, 2016	11.00	11.24	11.00	11.14
6021	NASDAQ	KLIC	Thu, Apr 21, 2016	11.00	11.10	10.90	11.04
6020	NASDAQ	KLIC	Wed, Apr 20, 2016	11.12	11.20	10.90	11.02
6019	NASDAQ	KLIC	Tue, Apr 19, 2016	11.23	11.26	11.10	11.12
6018	NASDAQ	KLIC	Mon, Apr 18, 2016	11.27	11.34	11.18	11.18
6017	NASDAQ	KLIC	Fri, Apr 15, 2016	11.29	11.42	11.23	11.27
6016	NASDAQ	KLIC	Thu, Apr 14, 2016	11.28	11.33	11.16	11.31
6015	NASDAQ	KLIC	Wed, Apr 13, 2016	11.15	11.32	11.11	11.32
6014	NASDAQ	KLIC	Tue, Apr 12, 2016	11.12	11.21	10.96	11.14
6013	NASDAQ	KLIC	Mon, Apr 11, 2016	11.15	11.35	11.07	11.07
6012	NASDAQ	KLIC	Fri, Apr 8, 2016	11.07	11.21	11.06	11.14
6011	NASDAQ	KLIC	Thu, Apr 7, 2016	10.97	11.04	10.84	10.95
6010	NASDAQ	KLIC	Wed, Apr 6, 2016	10.81	11.12	10.74	11.06
6009	NASDAQ	KLIC	Tue, Apr 5, 2016	11.20	11.20	11.20	10.83
6008	NASDAQ	KLIC	Mon, Apr 4, 2016	11.25	11.30	11.00	11.20
6007	NASDAQ	KLIC	Fri, Apr 1, 2016	11.23	11.33	11.13	11.25
6006	NASDAQ	KLIC	Thu, Mar 31, 2016	11.24	11.45	11.22	11.24
6005	NASDAQ	KLIC	Wed, Mar 30, 2016	11.05	11.31	11.05	11.24
6004	NASDAQ	KLIC	Tue, Mar 29, 2016	10.68	11.18	10.55	10.74
6003	NASDAQ	KLIC	Mon, Mar 28, 2016	10.96	10.96	10.78	10.78
6002	NASDAQ	KLIC	Thu, Mar 24, 2016	10.95	10.95	10.95	10.97
6001	NASDAQ	KLIC	Wed, Mar 23, 2016	11.27	11.35	10.95	10.95
6000	NASDAQ	KLIC	Tue, Mar 22, 2016	11.52	11.52	11.15	11.25
5999	NASDAQ	KLIC	Mon, Mar 21, 2016	11.35	11.51	10.97	11.51
5998	NASDAQ	KLIC	Fri, Mar 18, 2016	11.04	11.41	10.82	11.35
5997	NASDAQ	KLIC	Thu, Mar 17, 2016	10.94	11.05	10.80	11.03
5996	NASDAQ	KLIC	Wed, Mar 16, 2016	10.89	11.00	10.81	10.98
5995	NASDAQ	KLIC	Tue, Mar 15, 2016	10.97	10.97	10.97	10.88
5994	NASDAQ	KLIC	Mon, Mar 14, 2016	11.15	11.19	10.95	10.97
5993	NASDAQ	KLIC	Fri, Mar 11, 2016	11.09	11.20	10.83	11.15
5992	NASDAQ	KLIC	Thu, Mar 10, 2016	11.00	11.00	11.00	11.03
5991	NASDAQ	KLIC	Wed, Mar 9, 2016	11.16	11.27	10.91	11.09
5990	NASDAQ	KLIC	Tue, Mar 8, 2016	11.06	11.16	10.91	11.15
5989	NASDAQ	KLIC	Mon, Mar 7, 2016	11.22	11.30	11.03	11.15
5988	NASDAQ	KLIC	Fri, Mar 4, 2016	11.28	11.28	11.28	11.31
5987	NASDAQ	KLIC	Thu, Mar 3, 2016	11.29	11.29	11.29	11.28
5986	NASDAQ	KLIC	Wed, Mar 2, 2016	11.38	11.46	11.28	11.42
5985	NASDAQ	KLIC	Tue, Mar 1, 2016	11.30	11.30	11.30	11.42
5984	NASDAQ	KLIC	Mon, Feb 29, 2016	11.25	11.53	11.24	11.28
5983	NASDAQ	KLIC	Fri, Feb 26, 2016	11.56	11.56	11.56	11.28
5982	NASDAQ	KLIC	Thu, Feb 25, 2016	11.38	11.57	11.27	11.56
5981	NASDAQ	KLIC	Wed, Feb 24, 2016	11.17	11.41	11.05	11.38
5980	NASDAQ	KLIC	Tue, Feb 23, 2016	11.43	11.67	10.72	11.28
5979	NASDAQ	KLIC	Mon, Feb 22, 2016	11.43	11.72	11.28	11.59
5978	NASDAQ	KLIC	Fri, Feb 19, 2016	11.26	11.43	11.23	11.31
5977	NASDAQ	KLIC	Thu, Feb 18, 2016	11.39	11.53	11.14	11.24
5976	NASDAQ	KLIC	Wed, Feb 17, 2016	11.10	11.50	11.10	11.33
5975	NASDAQ	KLIC	Tue, Feb 16, 2016	10.80	11.19	10.79	11.07
5974	NASDAQ	KLIC	Fri, Feb 12, 2016	10.71	10.83	10.54	10.69
5973	NASDAQ	KLIC	Thu, Feb 11, 2016	10.85	10.92	10.59	10.70
5972	NASDAQ	KLIC	Wed, Feb 10, 2016	11.20	11.35	11.07	11.08
5971	NASDAQ	KLIC	Tue, Feb 9, 2016	11.21	11.40	11.12	11.20
5970	NASDAQ	KLIC	Mon, Feb 8, 2016	11.33	11.48	11.09	11.31
5969	NASDAQ	KLIC	Fri, Feb 5, 2016	11.60	11.73	11.42	11.48
5968	NASDAQ	KLIC	Thu, Feb 4, 2016	11.74	11.81	11.41	11.60
5967	NASDAQ	KLIC	Wed, Feb 3, 2016	10.69	12.20	10.56	11.68
5966	NASDAQ	KLIC	Tue, Feb 2, 2016	10.28	10.42	10.05	10.05
5965	NASDAQ	KLIC	Mon, Feb 1, 2016	10.07	10.35	9.82	10.35
5964	NASDAQ	KLIC	Fri, Jan 29, 2016	9.97	10.19	9.80	10.12
5963	NASDAQ	KLIC	Thu, Jan 28, 2016	10.25	10.46	9.89	9.97
5962	NASDAQ	KLIC	Wed, Jan 27, 2016	10.21	10.34	10.05	10.05
5961	NASDAQ	KLIC	Tue, Jan 26, 2016	10.06	10.19	9.82	10.17
5960	NASDAQ	KLIC	Mon, Jan 25, 2016	10.08	10.21	9.95	10.05
5959	NASDAQ	KLIC	Fri, Jan 22, 2016	10.08	10.17	9.98	10.09
5958	NASDAQ	KLIC	Thu, Jan 21, 2016	9.93	10.05	9.63	9.98
5957	NASDAQ	KLIC	Wed, Jan 20, 2016	9.99	10.22	9.63	9.93
5956	NASDAQ	KLIC	Tue, Jan 19, 2016	10.09	10.23	10.02	10.10
5955	NASDAQ	KLIC	Fri, Jan 15, 2016	9.79	9.97	9.71	9.97
5954	NASDAQ	KLIC	Thu, Jan 14, 2016	9.96	10.19	9.83	10.02
5953	NASDAQ	KLIC	Wed, Jan 13, 2016	10.20	10.48	9.84	9.88
5952	NASDAQ	KLIC	Tue, Jan 12, 2016	10.46	10.51	10.10	10.21
5951	NASDAQ	KLIC	Mon, Jan 11, 2016	10.51	10.69	10.30	10.36
5950	NASDAQ	KLIC	Fri, Jan 8, 2016	11.01	11.12	10.43	10.50
5949	NASDAQ	KLIC	Thu, Jan 7, 2016	10.81	11.17	10.80	11.05
5948	NASDAQ	KLIC	Wed, Jan 6, 2016	11.30	11.36	11.03	11.06
5947	NASDAQ	KLIC	Tue, Jan 5, 2016	11.30	11.55	11.24	11.44
5946	NASDAQ	KLIC	Mon, Jan 4, 2016	11.47	11.56	11.23	11.31
5945	NASDAQ	KLIC	Thu, Dec 31, 2015	12.04	12.14	11.67	11.67
5944	NASDAQ	KLIC	Wed, Dec 30, 2015	12.11	12.20	11.95	12.04
5943	NASDAQ	KLIC	Tue, Dec 29, 2015	12.15	12.31	12.10	12.15
5942	NASDAQ	KLIC	Mon, Dec 28, 2015	12.11	12.15	11.97	12.12
5941	NASDAQ	KLIC	Thu, Dec 24, 2015	12.13	12.32	12.13	12.16
5940	NASDAQ	KLIC	Wed, Dec 23, 2015	12.10	12.39	12.05	12.18
5939	NASDAQ	KLIC	Tue, Dec 22, 2015	11.84	12.24	11.71	12.05
5938	NASDAQ	KLIC	Mon, Dec 21, 2015	11.72	11.87	11.55	11.84
5937	NASDAQ	KLIC	Fri, Dec 18, 2015	11.10	11.49	10.94	11.49
5936	NASDAQ	KLIC	Thu, Dec 17, 2015	10.97	11.38	10.41	11.10
5935	NASDAQ	KLIC	Wed, Dec 16, 2015	11.09	11.10	10.43	10.84
5934	NASDAQ	KLIC	Tue, Dec 15, 2015	10.77	11.16	10.77	11.01
5933	NASDAQ	KLIC	Mon, Dec 14, 2015	10.62	10.81	10.51	10.71
5932	NASDAQ	KLIC	Fri, Dec 11, 2015	11.00	11.03	10.68	10.70
5931	NASDAQ	KLIC	Thu, Dec 10, 2015	11.09	11.29	10.98	11.00
5930	NASDAQ	KLIC	Wed, Dec 9, 2015	11.08	11.48	11.07	11.14
5929	NASDAQ	KLIC	Tue, Dec 8, 2015	11.07	11.35	10.90	11.08
5928	NASDAQ	KLIC	Mon, Dec 7, 2015	11.94	11.97	11.13	11.21
5927	NASDAQ	KLIC	Fri, Dec 4, 2015	11.68	12.01	11.68	11.97
5926	NASDAQ	KLIC	Thu, Dec 3, 2015	12.05	12.10	11.62	11.64
5925	NASDAQ	KLIC	Wed, Dec 2, 2015	11.83	12.12	11.81	11.99
5924	NASDAQ	KLIC	Tue, Dec 1, 2015	11.85	11.90	11.67	11.71
5923	NASDAQ	KLIC	Mon, Nov 30, 2015	11.59	11.83	11.57	11.81
5922	NASDAQ	KLIC	Fri, Nov 27, 2015	11.46	11.56	11.44	11.53
5921	NASDAQ	KLIC	Wed, Nov 25, 2015	11.46	11.61	11.35	11.50
5920	NASDAQ	KLIC	Tue, Nov 24, 2015	11.07	11.50	11.07	11.44
5919	NASDAQ	KLIC	Mon, Nov 23, 2015	11.30	11.40	11.07	11.13
5918	NASDAQ	KLIC	Fri, Nov 20, 2015	11.55	11.66	11.24	11.28
5917	NASDAQ	KLIC	Thu, Nov 19, 2015	10.93	11.71	10.55	11.55
5916	NASDAQ	KLIC	Wed, Nov 18, 2015	10.83	11.40	10.40	10.92
5915	NASDAQ	KLIC	Tue, Nov 17, 2015	10.26	10.71	9.57	10.70
5914	NASDAQ	KLIC	Mon, Nov 16, 2015	10.94	11.16	10.94	11.09
5913	NASDAQ	KLIC	Fri, Nov 13, 2015	10.98	11.10	10.90	10.99
5912	NASDAQ	KLIC	Thu, Nov 12, 2015	10.87	11.07	10.84	11.00
5911	NASDAQ	KLIC	Wed, Nov 11, 2015	10.67	10.96	10.53	10.87
5910	NASDAQ	KLIC	Tue, Nov 10, 2015	10.76	10.76	10.60	10.65
5909	NASDAQ	KLIC	Mon, Nov 9, 2015	10.86	10.86	10.42	10.80
5908	NASDAQ	KLIC	Fri, Nov 6, 2015	10.76	10.98	10.34	10.92
5907	NASDAQ	KLIC	Thu, Nov 5, 2015	10.45	10.82	10.45	10.76
5906	NASDAQ	KLIC	Wed, Nov 4, 2015	10.88	10.89	10.71	10.72
5905	NASDAQ	KLIC	Tue, Nov 3, 2015	10.75	10.91	10.72	10.86
5904	NASDAQ	KLIC	Mon, Nov 2, 2015	10.62	10.88	10.62	10.76
5903	NASDAQ	KLIC	Fri, Oct 30, 2015	10.59	10.67	10.52	10.60
5902	NASDAQ	KLIC	Thu, Oct 29, 2015	10.64	10.65	10.46	10.56
5901	NASDAQ	KLIC	Wed, Oct 28, 2015	10.47	10.81	10.44	10.80
5900	NASDAQ	KLIC	Tue, Oct 27, 2015	10.42	10.60	10.36	10.44
5899	NASDAQ	KLIC	Mon, Oct 26, 2015	10.54	10.59	10.41	10.51
5898	NASDAQ	KLIC	Fri, Oct 23, 2015	10.29	10.57	10.17	10.53
5897	NASDAQ	KLIC	Thu, Oct 22, 2015	10.22	10.39	10.14	10.21
5896	NASDAQ	KLIC	Wed, Oct 21, 2015	10.26	10.50	10.10	10.12
5895	NASDAQ	KLIC	Tue, Oct 20, 2015	10.02	10.14	10.00	10.11
5894	NASDAQ	KLIC	Mon, Oct 19, 2015	10.04	10.22	9.99	10.04
5893	NASDAQ	KLIC	Fri, Oct 16, 2015	10.38	10.38	10.04	10.06
5892	NASDAQ	KLIC	Thu, Oct 15, 2015	10.18	10.43	10.18	10.39
5891	NASDAQ	KLIC	Wed, Oct 14, 2015	9.83	10.28	9.83	10.16
5890	NASDAQ	KLIC	Tue, Oct 13, 2015	10.01	10.05	9.82	9.84
5889	NASDAQ	KLIC	Mon, Oct 12, 2015	10.04	10.10	9.95	10.03
5888	NASDAQ	KLIC	Fri, Oct 9, 2015	9.98	10.09	9.92	10.01
5887	NASDAQ	KLIC	Thu, Oct 8, 2015	9.86	10.06	9.59	10.03
5886	NASDAQ	KLIC	Wed, Oct 7, 2015	9.61	9.94	9.59	9.91
5885	NASDAQ	KLIC	Tue, Oct 6, 2015	9.43	9.63	9.40	9.58
5884	NASDAQ	KLIC	Mon, Oct 5, 2015	9.13	9.42	9.13	9.39
5883	NASDAQ	KLIC	Fri, Oct 2, 2015	9.03	9.30	9.00	9.22
5882	NASDAQ	KLIC	Thu, Oct 1, 2015	9.16	9.25	8.99	9.08
5881	NASDAQ	KLIC	Wed, Sep 30, 2015	9.07	9.29	9.07	9.18
5880	NASDAQ	KLIC	Tue, Sep 29, 2015	8.99	9.11	8.94	9.03
5879	NASDAQ	KLIC	Mon, Sep 28, 2015	9.08	9.11	8.98	9.02
5878	NASDAQ	KLIC	Fri, Sep 25, 2015	9.01	9.31	8.98	9.15
5877	NASDAQ	KLIC	Thu, Sep 24, 2015	8.94	9.09	8.85	8.97
5876	NASDAQ	KLIC	Wed, Sep 23, 2015	8.84	9.05	8.83	8.99
5875	NASDAQ	KLIC	Tue, Sep 22, 2015	8.96	9.03	8.80	8.85
5874	NASDAQ	KLIC	Mon, Sep 21, 2015	9.21	9.27	8.99	9.05
5873	NASDAQ	KLIC	Fri, Sep 18, 2015	9.25	9.30	9.11	9.14
5872	NASDAQ	KLIC	Thu, Sep 17, 2015	9.26	9.44	9.25	9.31
5871	NASDAQ	KLIC	Wed, Sep 16, 2015	9.36	9.40	9.26	9.35
5870	NASDAQ	KLIC	Tue, Sep 15, 2015	9.20	9.36	9.19	9.34
5869	NASDAQ	KLIC	Mon, Sep 14, 2015	9.09	9.30	9.09	9.16
5868	NASDAQ	KLIC	Fri, Sep 11, 2015	9.35	9.36	8.99	9.11
5867	NASDAQ	KLIC	Thu, Sep 10, 2015	9.88	9.90	9.21	9.36
5866	NASDAQ	KLIC	Wed, Sep 9, 2015	9.79	10.18	9.70	9.94
5865	NASDAQ	KLIC	Tue, Sep 8, 2015	10.72	10.84	10.62	10.69
5864	NASDAQ	KLIC	Fri, Sep 4, 2015	10.66	10.78	10.58	10.59
5863	NASDAQ	KLIC	Thu, Sep 3, 2015	10.66	10.88	10.66	10.74
5862	NASDAQ	KLIC	Wed, Sep 2, 2015	10.62	10.75	10.47	10.65
5861	NASDAQ	KLIC	Tue, Sep 1, 2015	10.45	10.92	10.42	10.59
5860	NASDAQ	KLIC	Mon, Aug 31, 2015	10.60	10.79	10.47	10.56
5859	NASDAQ	KLIC	Fri, Aug 28, 2015	10.42	10.70	10.42	10.56
5858	NASDAQ	KLIC	Thu, Aug 27, 2015	10.31	10.57	10.20	10.42
5857	NASDAQ	KLIC	Wed, Aug 26, 2015	10.17	10.26	10.03	10.21
5856	NASDAQ	KLIC	Tue, Aug 25, 2015	10.50	10.50	10.00	10.00
5855	NASDAQ	KLIC	Mon, Aug 24, 2015	10.03	10.46	9.68	10.15
5854	NASDAQ	KLIC	Fri, Aug 21, 2015	10.13	10.47	10.13	10.27
5853	NASDAQ	KLIC	Thu, Aug 20, 2015	10.20	10.33	10.07	10.20
5852	NASDAQ	KLIC	Wed, Aug 19, 2015	10.16	10.42	10.06	10.22
5851	NASDAQ	KLIC	Tue, Aug 18, 2015	10.21	10.37	10.17	10.18
5850	NASDAQ	KLIC	Mon, Aug 17, 2015	10.20	10.42	10.20	10.26
5849	NASDAQ	KLIC	Fri, Aug 14, 2015	10.24	10.31	10.17	10.25
5848	NASDAQ	KLIC	Thu, Aug 13, 2015	10.39	10.50	10.26	10.27
5847	NASDAQ	KLIC	Wed, Aug 12, 2015	10.25	10.47	10.15	10.40
5846	NASDAQ	KLIC	Tue, Aug 11, 2015	10.75	10.75	10.30	10.30
5845	NASDAQ	KLIC	Mon, Aug 10, 2015	10.32	10.73	10.32	10.58
5844	NASDAQ	KLIC	Fri, Aug 7, 2015	10.33	10.49	10.22	10.28
5843	NASDAQ	KLIC	Thu, Aug 6, 2015	10.28	10.40	10.17	10.35
5842	NASDAQ	KLIC	Wed, Aug 5, 2015	10.18	10.42	10.14	10.24
5841	NASDAQ	KLIC	Tue, Aug 4, 2015	9.85	10.28	9.72	10.14
5840	NASDAQ	KLIC	Mon, Aug 3, 2015	10.45	10.52	10.04	10.09
5839	NASDAQ	KLIC	Fri, Jul 31, 2015	10.49	10.49	10.35	10.41
5838	NASDAQ	KLIC	Thu, Jul 30, 2015	10.13	10.51	10.13	10.48
5837	NASDAQ	KLIC	Wed, Jul 29, 2015	10.50	10.50	10.15	10.15
5836	NASDAQ	KLIC	Tue, Jul 28, 2015	10.42	10.61	10.10	10.53
5835	NASDAQ	KLIC	Mon, Jul 27, 2015	10.18	10.53	10.02	10.44
5834	NASDAQ	KLIC	Fri, Jul 24, 2015	10.59	10.59	10.22	10.27
5833	NASDAQ	KLIC	Thu, Jul 23, 2015	10.46	10.74	10.46	10.56
5832	NASDAQ	KLIC	Wed, Jul 22, 2015	10.56	10.57	10.31	10.49
5831	NASDAQ	KLIC	Tue, Jul 21, 2015	10.71	10.88	10.66	10.71
5830	NASDAQ	KLIC	Mon, Jul 20, 2015	10.95	11.00	10.67	10.74
5829	NASDAQ	KLIC	Fri, Jul 17, 2015	11.00	11.01	10.79	10.92
5828	NASDAQ	KLIC	Thu, Jul 16, 2015	11.27	11.31	10.92	10.96
5827	NASDAQ	KLIC	Wed, Jul 15, 2015	11.58	11.64	11.15	11.18
5826	NASDAQ	KLIC	Tue, Jul 14, 2015	11.52	11.73	11.52	11.55
5825	NASDAQ	KLIC	Mon, Jul 13, 2015	11.69	11.69	11.55	11.61
5824	NASDAQ	KLIC	Fri, Jul 10, 2015	11.76	11.76	11.42	11.50
5823	NASDAQ	KLIC	Thu, Jul 9, 2015	11.67	11.71	11.33	11.51
5822	NASDAQ	KLIC	Wed, Jul 8, 2015	11.57	11.70	11.44	11.58
5821	NASDAQ	KLIC	Tue, Jul 7, 2015	11.66	11.72	11.35	11.70
5820	NASDAQ	KLIC	Mon, Jul 6, 2015	11.75	11.78	11.61	11.69
5819	NASDAQ	KLIC	Thu, Jul 2, 2015	11.80	11.91	11.77	11.83
5818	NASDAQ	KLIC	Wed, Jul 1, 2015	11.81	11.95	11.74	11.75
5817	NASDAQ	KLIC	Tue, Jun 30, 2015	11.95	11.99	11.66	11.71
5816	NASDAQ	KLIC	Mon, Jun 29, 2015	12.08	12.13	11.88	11.90
5815	NASDAQ	KLIC	Fri, Jun 26, 2015	12.26	12.39	12.16	12.21
5814	NASDAQ	KLIC	Thu, Jun 25, 2015	12.48	12.54	12.25	12.29
5813	NASDAQ	KLIC	Wed, Jun 24, 2015	12.46	12.59	12.37	12.40
5812	NASDAQ	KLIC	Tue, Jun 23, 2015	12.47	12.51	12.34	12.46
5811	NASDAQ	KLIC	Mon, Jun 22, 2015	12.51	12.58	12.36	12.41
5810	NASDAQ	KLIC	Fri, Jun 19, 2015	12.53	12.59	12.35	12.41
5809	NASDAQ	KLIC	Thu, Jun 18, 2015	12.46	12.58	12.41	12.49
5808	NASDAQ	KLIC	Wed, Jun 17, 2015	12.57	12.72	12.43	12.49
5807	NASDAQ	KLIC	Tue, Jun 16, 2015	12.56	12.69	12.52	12.60
5806	NASDAQ	KLIC	Mon, Jun 15, 2015	12.63	12.64	12.36	12.56
5805	NASDAQ	KLIC	Fri, Jun 12, 2015	12.79	12.85	12.71	12.71
5804	NASDAQ	KLIC	Thu, Jun 11, 2015	13.02	13.05	12.79	12.79
5803	NASDAQ	KLIC	Wed, Jun 10, 2015	12.91	13.04	12.82	12.95
5802	NASDAQ	KLIC	Tue, Jun 9, 2015	12.84	12.95	12.83	12.89
5801	NASDAQ	KLIC	Mon, Jun 8, 2015	13.10	13.15	12.88	12.90
5800	NASDAQ	KLIC	Fri, Jun 5, 2015	13.24	13.26	12.98	13.10
5799	NASDAQ	KLIC	Thu, Jun 4, 2015	13.40	13.47	13.24	13.25
5798	NASDAQ	KLIC	Wed, Jun 3, 2015	13.29	13.48	13.29	13.41
5797	NASDAQ	KLIC	Tue, Jun 2, 2015	13.06	13.36	12.97	13.21
5796	NASDAQ	KLIC	Mon, Jun 1, 2015	13.27	13.36	13.09	13.13
5795	NASDAQ	KLIC	Fri, May 29, 2015	13.22	13.40	13.11	13.26
5794	NASDAQ	KLIC	Thu, May 28, 2015	13.23	13.44	13.17	13.23
5793	NASDAQ	KLIC	Wed, May 27, 2015	13.09	13.42	13.05	13.29
5792	NASDAQ	KLIC	Tue, May 26, 2015	13.06	13.17	12.89	13.02
5791	NASDAQ	KLIC	Fri, May 22, 2015	13.08	13.32	13.07	13.19
5790	NASDAQ	KLIC	Thu, May 21, 2015	13.01	13.22	13.01	13.14
5789	NASDAQ	KLIC	Wed, May 20, 2015	13.09	13.15	12.88	13.05
5788	NASDAQ	KLIC	Tue, May 19, 2015	13.10	13.16	13.04	13.04
5787	NASDAQ	KLIC	Mon, May 18, 2015	13.12	13.20	13.04	13.13
5786	NASDAQ	KLIC	Fri, May 15, 2015	13.02	13.22	13.02	13.07
5785	NASDAQ	KLIC	Thu, May 14, 2015	12.85	13.08	12.75	13.07
5784	NASDAQ	KLIC	Wed, May 13, 2015	13.00	13.19	12.76	12.82
5783	NASDAQ	KLIC	Tue, May 12, 2015	13.51	13.51	13.00	13.02
5782	NASDAQ	KLIC	Mon, May 11, 2015	13.50	13.68	13.42	13.62
5781	NASDAQ	KLIC	Fri, May 8, 2015	13.42	13.59	13.37	13.51
5780	NASDAQ	KLIC	Thu, May 7, 2015	13.18	13.48	13.11	13.34
5779	NASDAQ	KLIC	Wed, May 6, 2015	13.61	13.71	13.17	13.21
5778	NASDAQ	KLIC	Tue, May 5, 2015	14.49	14.70	13.43	13.53
5777	NASDAQ	KLIC	Mon, May 4, 2015	15.60	15.68	15.44	15.58
5776	NASDAQ	KLIC	Fri, May 1, 2015	15.22	15.63	15.19	15.61
5775	NASDAQ	KLIC	Thu, Apr 30, 2015	15.28	15.35	15.08	15.11
5774	NASDAQ	KLIC	Wed, Apr 29, 2015	15.52	15.60	15.22	15.38
5773	NASDAQ	KLIC	Tue, Apr 28, 2015	15.43	15.62	15.23	15.55
5772	NASDAQ	KLIC	Mon, Apr 27, 2015	15.56	15.66	15.35	15.41
5771	NASDAQ	KLIC	Fri, Apr 24, 2015	15.65	15.72	15.41	15.49
5770	NASDAQ	KLIC	Thu, Apr 23, 2015	15.58	15.76	15.57	15.68
5769	NASDAQ	KLIC	Wed, Apr 22, 2015	15.68	15.73	15.50	15.66
5768	NASDAQ	KLIC	Tue, Apr 21, 2015	15.73	15.73	15.53	15.65
5767	NASDAQ	KLIC	Mon, Apr 20, 2015	15.66	15.76	15.57	15.61
5766	NASDAQ	KLIC	Fri, Apr 17, 2015	15.74	15.75	15.41	15.61
5765	NASDAQ	KLIC	Thu, Apr 16, 2015	15.85	15.91	15.73	15.86
5764	NASDAQ	KLIC	Wed, Apr 15, 2015	15.96	16.08	15.82	15.97
5763	NASDAQ	KLIC	Tue, Apr 14, 2015	15.84	15.95	15.70	15.93
5762	NASDAQ	KLIC	Mon, Apr 13, 2015	15.75	15.88	15.70	15.83
5761	NASDAQ	KLIC	Fri, Apr 10, 2015	15.70	15.88	15.68	15.79
5760	NASDAQ	KLIC	Thu, Apr 9, 2015	15.64	15.77	15.56	15.69
5759	NASDAQ	KLIC	Wed, Apr 8, 2015	15.53	15.79	15.44	15.69
5758	NASDAQ	KLIC	Tue, Apr 7, 2015	15.52	15.66	15.47	15.53
5757	NASDAQ	KLIC	Mon, Apr 6, 2015	15.69	15.76	15.53	15.58
5756	NASDAQ	KLIC	Thu, Apr 2, 2015	15.70	15.96	15.65	15.84
5755	NASDAQ	KLIC	Wed, Apr 1, 2015	15.60	15.78	15.41	15.67
5754	NASDAQ	KLIC	Tue, Mar 31, 2015	15.88	15.94	15.51	15.63
5753	NASDAQ	KLIC	Mon, Mar 30, 2015	15.58	15.92	15.43	15.83
5752	NASDAQ	KLIC	Fri, Mar 27, 2015	15.19	15.57	15.05	15.54
5751	NASDAQ	KLIC	Thu, Mar 26, 2015	15.35	15.53	14.67	15.32
5750	NASDAQ	KLIC	Wed, Mar 25, 2015	16.09	16.25	15.59	15.60
5749	NASDAQ	KLIC	Tue, Mar 24, 2015	16.32	16.32	16.02	16.10
5748	NASDAQ	KLIC	Mon, Mar 23, 2015	16.05	16.40	16.05	16.30
5747	NASDAQ	KLIC	Fri, Mar 20, 2015	16.25	16.25	15.92	16.09
5746	NASDAQ	KLIC	Thu, Mar 19, 2015	16.04	16.12	15.89	16.10
5745	NASDAQ	KLIC	Wed, Mar 18, 2015	15.94	16.07	15.76	16.06
5744	NASDAQ	KLIC	Tue, Mar 17, 2015	16.11	16.19	15.97	16.00
5743	NASDAQ	KLIC	Mon, Mar 16, 2015	16.21	16.37	16.04	16.20
5742	NASDAQ	KLIC	Fri, Mar 13, 2015	16.10	16.14	15.87	16.11
5741	NASDAQ	KLIC	Thu, Mar 12, 2015	15.88	16.08	15.80	16.06
5740	NASDAQ	KLIC	Wed, Mar 11, 2015	15.99	16.06	15.81	15.98
5739	NASDAQ	KLIC	Tue, Mar 10, 2015	15.98	16.16	15.82	15.99
5738	NASDAQ	KLIC	Mon, Mar 9, 2015	16.15	16.24	15.99	16.16
5737	NASDAQ	KLIC	Fri, Mar 6, 2015	15.96	16.17	15.96	16.11
5736	NASDAQ	KLIC	Thu, Mar 5, 2015	16.23	16.30	16.03	16.06
5735	NASDAQ	KLIC	Wed, Mar 4, 2015	16.12	16.29	15.99	16.20
5734	NASDAQ	KLIC	Tue, Mar 3, 2015	16.23	16.39	16.11	16.17
5733	NASDAQ	KLIC	Mon, Mar 2, 2015	16.09	16.53	15.99	16.33
5732	NASDAQ	KLIC	Fri, Feb 27, 2015	16.00	16.08	15.80	16.00
5731	NASDAQ	KLIC	Thu, Feb 26, 2015	16.28	16.35	16.02	16.10
5730	NASDAQ	KLIC	Wed, Feb 25, 2015	16.49	16.54	16.21	16.28
5729	NASDAQ	KLIC	Tue, Feb 24, 2015	16.15	16.53	16.10	16.51
5728	NASDAQ	KLIC	Mon, Feb 23, 2015	16.06	16.18	15.95	16.10
5727	NASDAQ	KLIC	Fri, Feb 20, 2015	15.85	16.10	15.84	16.06
5726	NASDAQ	KLIC	Thu, Feb 19, 2015	15.97	16.07	15.86	15.92
5725	NASDAQ	KLIC	Wed, Feb 18, 2015	15.99	16.06	15.74	16.04
5724	NASDAQ	KLIC	Tue, Feb 17, 2015	16.01	16.06	15.88	15.92
5723	NASDAQ	KLIC	Fri, Feb 13, 2015	16.27	16.39	15.96	16.00
5722	NASDAQ	KLIC	Thu, Feb 12, 2015	16.29	16.50	16.25	16.30
5721	NASDAQ	KLIC	Wed, Feb 11, 2015	16.32	16.36	15.98	16.25
5720	NASDAQ	KLIC	Tue, Feb 10, 2015	15.85	16.49	15.64	16.40
5719	NASDAQ	KLIC	Mon, Feb 9, 2015	15.85	15.99	15.59	15.76
5718	NASDAQ	KLIC	Fri, Feb 6, 2015	15.88	16.01	15.80	15.88
5717	NASDAQ	KLIC	Thu, Feb 5, 2015	15.95	15.98	15.75	15.92
5716	NASDAQ	KLIC	Wed, Feb 4, 2015	15.56	15.86	15.55	15.76
5715	NASDAQ	KLIC	Tue, Feb 3, 2015	15.65	15.86	15.60	15.78
5714	NASDAQ	KLIC	Mon, Feb 2, 2015	15.33	15.68	14.83	15.63
5713	NASDAQ	KLIC	Fri, Jan 30, 2015	15.73	15.90	15.14	15.17
5712	NASDAQ	KLIC	Thu, Jan 29, 2015	15.80	16.04	15.55	15.81
5711	NASDAQ	KLIC	Wed, Jan 28, 2015	15.10	15.99	15.10	15.75
5710	NASDAQ	KLIC	Tue, Jan 27, 2015	14.64	14.74	14.48	14.60
5709	NASDAQ	KLIC	Mon, Jan 26, 2015	14.53	14.87	14.48	14.84
5708	NASDAQ	KLIC	Fri, Jan 23, 2015	14.52	14.65	14.50	14.54
5707	NASDAQ	KLIC	Thu, Jan 22, 2015	14.25	14.59	14.05	14.53
5706	NASDAQ	KLIC	Wed, Jan 21, 2015	14.36	14.54	14.09	14.21
5705	NASDAQ	KLIC	Tue, Jan 20, 2015	14.43	14.53	14.36	14.36
5704	NASDAQ	KLIC	Fri, Jan 16, 2015	14.01	14.47	13.97	14.43
5703	NASDAQ	KLIC	Thu, Jan 15, 2015	14.17	14.32	14.03	14.04
5702	NASDAQ	KLIC	Wed, Jan 14, 2015	13.98	14.36	13.81	14.17
5701	NASDAQ	KLIC	Tue, Jan 13, 2015	14.61	14.77	14.07	14.27
5700	NASDAQ	KLIC	Mon, Jan 12, 2015	14.66	14.69	14.39	14.43
5699	NASDAQ	KLIC	Fri, Jan 9, 2015	14.55	14.66	14.30	14.45
5698	NASDAQ	KLIC	Thu, Jan 8, 2015	14.16	14.69	14.16	14.61
5697	NASDAQ	KLIC	Wed, Jan 7, 2015	14.05	14.09	13.95	14.07
5696	NASDAQ	KLIC	Tue, Jan 6, 2015	14.35	14.35	13.90	13.93
5695	NASDAQ	KLIC	Mon, Jan 5, 2015	14.27	14.28	14.04	14.27
5694	NASDAQ	KLIC	Fri, Jan 2, 2015	14.55	14.70	14.14	14.39
5693	NASDAQ	KLIC	Wed, Dec 31, 2014	14.70	14.70	14.42	14.46
5692	NASDAQ	KLIC	Tue, Dec 30, 2014	14.59	14.79	14.55	14.69
5691	NASDAQ	KLIC	Mon, Dec 29, 2014	14.48	14.58	14.41	14.52
5690	NASDAQ	KLIC	Fri, Dec 26, 2014	14.55	14.66	14.52	14.53
5689	NASDAQ	KLIC	Wed, Dec 24, 2014	14.70	14.82	14.56	14.56
5688	NASDAQ	KLIC	Tue, Dec 23, 2014	14.42	14.84	14.37	14.67
5687	NASDAQ	KLIC	Mon, Dec 22, 2014	13.89	14.44	13.87	14.39
5686	NASDAQ	KLIC	Fri, Dec 19, 2014	13.97	14.06	13.83	13.90
5685	NASDAQ	KLIC	Thu, Dec 18, 2014	13.96	14.15	13.82	13.91
5684	NASDAQ	KLIC	Wed, Dec 17, 2014	13.54	13.83	13.34	13.77
5683	NASDAQ	KLIC	Tue, Dec 16, 2014	13.37	13.62	13.25	13.47
5682	NASDAQ	KLIC	Mon, Dec 15, 2014	13.81	14.06	13.48	13.50
5681	NASDAQ	KLIC	Fri, Dec 12, 2014	13.80	13.95	13.69	13.78
5680	NASDAQ	KLIC	Thu, Dec 11, 2014	14.16	14.21	13.95	13.96
5679	NASDAQ	KLIC	Wed, Dec 10, 2014	13.98	14.15	13.95	14.06
5678	NASDAQ	KLIC	Tue, Dec 9, 2014	13.80	14.12	13.63	14.07
5677	NASDAQ	KLIC	Mon, Dec 8, 2014	14.07	14.09	13.87	13.98
5676	NASDAQ	KLIC	Fri, Dec 5, 2014	14.10	14.25	14.00	14.18
5675	NASDAQ	KLIC	Thu, Dec 4, 2014	14.18	14.25	14.00	14.10
5674	NASDAQ	KLIC	Wed, Dec 3, 2014	13.95	14.25	13.95	14.21
5673	NASDAQ	KLIC	Tue, Dec 2, 2014	13.96	14.02	13.89	14.00
5672	NASDAQ	KLIC	Mon, Dec 1, 2014	13.93	14.08	13.82	13.94
5671	NASDAQ	KLIC	Fri, Nov 28, 2014	14.06	14.06	13.85	13.98
5670	NASDAQ	KLIC	Wed, Nov 26, 2014	13.93	14.13	13.89	14.08
5669	NASDAQ	KLIC	Tue, Nov 25, 2014	13.97	14.05	13.86	13.98
5668	NASDAQ	KLIC	Mon, Nov 24, 2014	13.94	14.03	13.87	13.95
5667	NASDAQ	KLIC	Fri, Nov 21, 2014	14.07	14.10	13.91	13.95
5666	NASDAQ	KLIC	Thu, Nov 20, 2014	13.73	14.01	13.69	13.98
5665	NASDAQ	KLIC	Wed, Nov 19, 2014	13.99	13.99	13.67	13.75
5664	NASDAQ	KLIC	Tue, Nov 18, 2014	13.89	14.10	13.86	13.97
5663	NASDAQ	KLIC	Mon, Nov 17, 2014	13.90	13.99	13.63	13.85
5662	NASDAQ	KLIC	Fri, Nov 14, 2014	13.88	14.06	13.85	13.96
5661	NASDAQ	KLIC	Thu, Nov 13, 2014	14.00	14.24	13.98	14.17
5660	NASDAQ	KLIC	Wed, Nov 12, 2014	13.63	14.02	13.60	14.00
5659	NASDAQ	KLIC	Tue, Nov 11, 2014	13.51	13.64	13.45	13.56
5658	NASDAQ	KLIC	Mon, Nov 10, 2014	13.53	13.59	13.34	13.54
5657	NASDAQ	KLIC	Fri, Nov 7, 2014	13.80	14.05	13.45	13.56
5656	NASDAQ	KLIC	Thu, Nov 6, 2014	13.01	14.23	12.81	13.81
5655	NASDAQ	KLIC	Wed, Nov 5, 2014	14.42	14.45	14.19	14.41
5654	NASDAQ	KLIC	Tue, Nov 4, 2014	14.03	14.36	13.86	14.35
5653	NASDAQ	KLIC	Mon, Nov 3, 2014	14.39	14.39	14.12	14.17
5652	NASDAQ	KLIC	Fri, Oct 31, 2014	14.14	14.43	14.05	14.42
5651	NASDAQ	KLIC	Thu, Oct 30, 2014	13.90	14.08	13.73	14.00
5650	NASDAQ	KLIC	Wed, Oct 29, 2014	13.95	14.12	13.91	14.00
5649	NASDAQ	KLIC	Tue, Oct 28, 2014	13.84	14.07	13.83	14.05
5648	NASDAQ	KLIC	Mon, Oct 27, 2014	13.72	13.97	13.68	13.83
5647	NASDAQ	KLIC	Fri, Oct 24, 2014	13.76	13.94	13.71	13.85
5646	NASDAQ	KLIC	Thu, Oct 23, 2014	13.38	13.85	13.38	13.67
5645	NASDAQ	KLIC	Wed, Oct 22, 2014	13.43	13.55	13.21	13.29
5644	NASDAQ	KLIC	Tue, Oct 21, 2014	13.00	13.36	12.98	13.35
5643	NASDAQ	KLIC	Mon, Oct 20, 2014	12.72	12.99	12.66	12.98
5642	NASDAQ	KLIC	Fri, Oct 17, 2014	12.90	12.98	12.71	12.72
5641	NASDAQ	KLIC	Thu, Oct 16, 2014	12.64	12.95	12.62	12.80
5640	NASDAQ	KLIC	Wed, Oct 15, 2014	12.27	12.94	12.18	12.86
5639	NASDAQ	KLIC	Tue, Oct 14, 2014	12.45	12.75	12.36	12.51
5638	NASDAQ	KLIC	Mon, Oct 13, 2014	12.47	12.61	12.14	12.31
5637	NASDAQ	KLIC	Fri, Oct 10, 2014	13.17	13.19	12.55	12.57
5636	NASDAQ	KLIC	Thu, Oct 9, 2014	13.96	13.99	13.23	13.24
5635	NASDAQ	KLIC	Wed, Oct 8, 2014	13.75	14.04	13.47	14.02
5634	NASDAQ	KLIC	Tue, Oct 7, 2014	13.95	14.08	13.76	13.76
5633	NASDAQ	KLIC	Mon, Oct 6, 2014	14.23	14.30	13.96	14.04
5632	NASDAQ	KLIC	Fri, Oct 3, 2014	14.13	14.23	14.05	14.15
5631	NASDAQ	KLIC	Thu, Oct 2, 2014	14.01	14.14	13.94	14.07
5630	NASDAQ	KLIC	Wed, Oct 1, 2014	14.17	14.28	14.03	14.07
5629	NASDAQ	KLIC	Tue, Sep 30, 2014	14.28	14.33	14.12	14.23
5628	NASDAQ	KLIC	Mon, Sep 29, 2014	14.20	14.36	14.13	14.35
5627	NASDAQ	KLIC	Fri, Sep 26, 2014	14.23	14.35	14.23	14.31
5626	NASDAQ	KLIC	Thu, Sep 25, 2014	14.34	14.43	14.12	14.19
5625	NASDAQ	KLIC	Wed, Sep 24, 2014	14.24	14.39	14.17	14.36
5624	NASDAQ	KLIC	Tue, Sep 23, 2014	14.15	14.40	14.10	14.17
5623	NASDAQ	KLIC	Mon, Sep 22, 2014	14.60	14.61	14.17	14.19
5622	NASDAQ	KLIC	Fri, Sep 19, 2014	14.70	14.75	14.62	14.69
5621	NASDAQ	KLIC	Thu, Sep 18, 2014	14.52	14.77	14.52	14.62
5620	NASDAQ	KLIC	Wed, Sep 17, 2014	14.54	14.89	14.48	14.51
5619	NASDAQ	KLIC	Tue, Sep 16, 2014	14.32	14.64	14.32	14.61
5618	NASDAQ	KLIC	Mon, Sep 15, 2014	14.70	14.70	14.33	14.42
5617	NASDAQ	KLIC	Fri, Sep 12, 2014	14.93	14.93	14.65	14.70
5616	NASDAQ	KLIC	Thu, Sep 11, 2014	14.68	14.99	14.60	14.98
5615	NASDAQ	KLIC	Wed, Sep 10, 2014	14.71	14.81	14.51	14.71
5614	NASDAQ	KLIC	Tue, Sep 9, 2014	14.64	14.75	14.55	14.65
5613	NASDAQ	KLIC	Mon, Sep 8, 2014	14.91	15.23	14.70	14.70
5612	NASDAQ	KLIC	Fri, Sep 5, 2014	14.83	14.99	14.75	14.95
5611	NASDAQ	KLIC	Thu, Sep 4, 2014	14.74	14.87	14.73	14.83
5610	NASDAQ	KLIC	Wed, Sep 3, 2014	14.76	14.89	14.71	14.75
5609	NASDAQ	KLIC	Tue, Sep 2, 2014	14.69	14.79	14.61	14.74
5608	NASDAQ	KLIC	Fri, Aug 29, 2014	14.82	14.88	14.66	14.69
5607	NASDAQ	KLIC	Thu, Aug 28, 2014	14.80	14.95	14.70	14.72
5606	NASDAQ	KLIC	Wed, Aug 27, 2014	14.64	14.98	14.60	14.91
5605	NASDAQ	KLIC	Tue, Aug 26, 2014	14.24	14.37	14.23	14.32
5604	NASDAQ	KLIC	Mon, Aug 25, 2014	14.54	14.55	14.21	14.27
5603	NASDAQ	KLIC	Fri, Aug 22, 2014	14.52	14.67	14.45	14.45
5602	NASDAQ	KLIC	Thu, Aug 21, 2014	14.37	14.55	14.32	14.53
5601	NASDAQ	KLIC	Wed, Aug 20, 2014	14.39	14.45	14.31	14.39
5600	NASDAQ	KLIC	Tue, Aug 19, 2014	14.38	14.52	14.37	14.39
5599	NASDAQ	KLIC	Mon, Aug 18, 2014	14.20	14.40	14.20	14.37
5598	NASDAQ	KLIC	Fri, Aug 15, 2014	14.33	14.49	14.15	14.30
5597	NASDAQ	KLIC	Thu, Aug 14, 2014	14.21	14.43	14.19	14.26
5596	NASDAQ	KLIC	Wed, Aug 13, 2014	14.20	14.27	14.10	14.17
5595	NASDAQ	KLIC	Tue, Aug 12, 2014	14.18	14.29	14.04	14.17
5594	NASDAQ	KLIC	Mon, Aug 11, 2014	14.07	14.25	14.05	14.17
5593	NASDAQ	KLIC	Fri, Aug 8, 2014	13.87	14.03	13.85	14.00
5592	NASDAQ	KLIC	Thu, Aug 7, 2014	14.00	14.04	13.78	13.89
5591	NASDAQ	KLIC	Wed, Aug 6, 2014	13.83	13.95	13.80	13.93
5590	NASDAQ	KLIC	Tue, Aug 5, 2014	13.95	14.11	13.76	13.89
5589	NASDAQ	KLIC	Mon, Aug 4, 2014	13.85	14.01	13.78	13.97
5588	NASDAQ	KLIC	Fri, Aug 1, 2014	13.53	13.92	13.50	13.85
5587	NASDAQ	KLIC	Thu, Jul 31, 2014	13.79	13.85	13.60	13.62
5586	NASDAQ	KLIC	Wed, Jul 30, 2014	14.40	14.40	13.89	13.94
5585	NASDAQ	KLIC	Tue, Jul 29, 2014	14.12	14.28	13.90	14.20
5584	NASDAQ	KLIC	Mon, Jul 28, 2014	13.89	13.89	13.52	13.77
5583	NASDAQ	KLIC	Fri, Jul 25, 2014	13.87	13.99	13.44	13.94
5582	NASDAQ	KLIC	Thu, Jul 24, 2014	14.12	14.16	13.92	13.99
5581	NASDAQ	KLIC	Wed, Jul 23, 2014	14.40	14.46	14.05	14.15
5580	NASDAQ	KLIC	Tue, Jul 22, 2014	14.34	14.50	14.31	14.43
5579	NASDAQ	KLIC	Mon, Jul 21, 2014	14.27	14.33	14.16	14.31
5578	NASDAQ	KLIC	Fri, Jul 18, 2014	14.11	14.31	14.07	14.27
5577	NASDAQ	KLIC	Thu, Jul 17, 2014	14.17	14.22	13.98	14.09
5576	NASDAQ	KLIC	Wed, Jul 16, 2014	14.26	14.33	14.09	14.14
5575	NASDAQ	KLIC	Tue, Jul 15, 2014	14.43	14.47	14.17	14.22
5574	NASDAQ	KLIC	Mon, Jul 14, 2014	14.33	14.46	14.24	14.42
5573	NASDAQ	KLIC	Fri, Jul 11, 2014	14.25	14.35	14.15	14.21
5572	NASDAQ	KLIC	Thu, Jul 10, 2014	14.12	14.39	14.04	14.29
5571	NASDAQ	KLIC	Wed, Jul 9, 2014	14.15	14.32	14.01	14.32
5570	NASDAQ	KLIC	Tue, Jul 8, 2014	14.15	14.25	13.90	14.08
5569	NASDAQ	KLIC	Mon, Jul 7, 2014	14.42	14.45	14.14	14.23
5568	NASDAQ	KLIC	Thu, Jul 3, 2014	14.42	14.52	14.16	14.49
5567	NASDAQ	KLIC	Wed, Jul 2, 2014	14.50	14.54	14.26	14.36
5566	NASDAQ	KLIC	Tue, Jul 1, 2014	14.30	14.53	14.20	14.50
5565	NASDAQ	KLIC	Mon, Jun 30, 2014	14.20	14.37	14.15	14.26
5564	NASDAQ	KLIC	Fri, Jun 27, 2014	13.87	14.31	13.83	14.24
5563	NASDAQ	KLIC	Thu, Jun 26, 2014	14.10	14.10	13.77	13.95
5562	NASDAQ	KLIC	Wed, Jun 25, 2014	14.00	14.18	13.95	14.10
5561	NASDAQ	KLIC	Tue, Jun 24, 2014	14.10	14.35	14.03	14.03
5560	NASDAQ	KLIC	Mon, Jun 23, 2014	14.19	14.23	14.03	14.13
5559	NASDAQ	KLIC	Fri, Jun 20, 2014	14.28	14.44	14.17	14.23
5558	NASDAQ	KLIC	Thu, Jun 19, 2014	14.63	14.65	14.23	14.32
5557	NASDAQ	KLIC	Wed, Jun 18, 2014	14.93	15.01	14.52	14.57
5556	NASDAQ	KLIC	Tue, Jun 17, 2014	14.64	15.10	14.52	14.96
5555	NASDAQ	KLIC	Mon, Jun 16, 2014	14.45	15.04	14.33	14.66
5554	NASDAQ	KLIC	Fri, Jun 13, 2014	14.57	14.82	14.37	14.45
5553	NASDAQ	KLIC	Thu, Jun 12, 2014	14.60	14.75	14.42	14.49
5552	NASDAQ	KLIC	Wed, Jun 11, 2014	14.56	14.88	14.56	14.66
5551	NASDAQ	KLIC	Tue, Jun 10, 2014	14.43	14.72	14.41	14.68
5550	NASDAQ	KLIC	Mon, Jun 9, 2014	14.47	14.54	14.40	14.49
5549	NASDAQ	KLIC	Fri, Jun 6, 2014	14.71	14.77	14.45	14.47
5548	NASDAQ	KLIC	Thu, Jun 5, 2014	14.67	14.84	14.41	14.73
5547	NASDAQ	KLIC	Wed, Jun 4, 2014	14.07	14.67	14.00	14.64
5546	NASDAQ	KLIC	Tue, Jun 3, 2014	14.01	14.14	13.95	14.00
5545	NASDAQ	KLIC	Mon, Jun 2, 2014	14.08	14.18	13.98	14.03
5544	NASDAQ	KLIC	Fri, May 30, 2014	14.18	14.20	14.08	14.09
5543	NASDAQ	KLIC	Thu, May 29, 2014	14.24	14.30	14.16	14.18
5542	NASDAQ	KLIC	Wed, May 28, 2014	14.32	14.36	14.15	14.19
5541	NASDAQ	KLIC	Tue, May 27, 2014	14.35	14.49	14.24	14.32
5540	NASDAQ	KLIC	Fri, May 23, 2014	14.15	14.27	14.14	14.21
5539	NASDAQ	KLIC	Thu, May 22, 2014	13.83	14.30	13.79	14.14
5538	NASDAQ	KLIC	Wed, May 21, 2014	13.78	13.92	13.64	13.82
5537	NASDAQ	KLIC	Tue, May 20, 2014	13.79	13.87	13.69	13.79
5536	NASDAQ	KLIC	Mon, May 19, 2014	13.69	13.92	13.69	13.83
5535	NASDAQ	KLIC	Fri, May 16, 2014	13.94	13.95	13.71	13.83
5534	NASDAQ	KLIC	Thu, May 15, 2014	13.95	14.03	13.68	13.86
5533	NASDAQ	KLIC	Wed, May 14, 2014	14.14	14.18	13.92	13.98
5532	NASDAQ	KLIC	Tue, May 13, 2014	14.30	14.40	14.10	14.16
5531	NASDAQ	KLIC	Mon, May 12, 2014	14.14	14.35	14.04	14.29
5530	NASDAQ	KLIC	Fri, May 9, 2014	14.20	14.34	13.97	14.15
5529	NASDAQ	KLIC	Thu, May 8, 2014	14.17	14.58	14.12	14.29
5528	NASDAQ	KLIC	Wed, May 7, 2014	14.26	14.30	14.05	14.20
5527	NASDAQ	KLIC	Tue, May 6, 2014	14.38	14.55	14.28	14.29
5526	NASDAQ	KLIC	Mon, May 5, 2014	14.48	14.68	14.24	14.47
5525	NASDAQ	KLIC	Fri, May 2, 2014	14.42	14.68	14.27	14.48
5524	NASDAQ	KLIC	Thu, May 1, 2014	14.63	14.84	14.45	14.47
5523	NASDAQ	KLIC	Wed, Apr 30, 2014	13.60	14.85	13.40	14.71
5522	NASDAQ	KLIC	Tue, Apr 29, 2014	13.09	13.98	13.09	13.63
5521	NASDAQ	KLIC	Mon, Apr 28, 2014	12.91	12.96	12.46	12.63
5520	NASDAQ	KLIC	Fri, Apr 25, 2014	13.20	13.25	12.83	12.88
5519	NASDAQ	KLIC	Thu, Apr 24, 2014	13.43	13.62	13.25	13.28
5518	NASDAQ	KLIC	Wed, Apr 23, 2014	12.94	13.60	12.91	13.43
5517	NASDAQ	KLIC	Tue, Apr 22, 2014	12.23	13.24	12.23	13.00
5516	NASDAQ	KLIC	Mon, Apr 21, 2014	12.15	12.29	12.05	12.20
5515	NASDAQ	KLIC	Thu, Apr 17, 2014	12.10	12.24	12.05	12.14
5514	NASDAQ	KLIC	Wed, Apr 16, 2014	11.96	12.08	11.76	12.07
5513	NASDAQ	KLIC	Tue, Apr 15, 2014	12.00	12.08	11.74	11.96
5512	NASDAQ	KLIC	Mon, Apr 14, 2014	11.99	12.11	11.92	12.01
5511	NASDAQ	KLIC	Fri, Apr 11, 2014	11.96	12.14	11.81	11.96
5510	NASDAQ	KLIC	Thu, Apr 10, 2014	12.15	12.29	12.03	12.06
5509	NASDAQ	KLIC	Wed, Apr 9, 2014	12.22	12.24	12.04	12.20
5508	NASDAQ	KLIC	Tue, Apr 8, 2014	12.16	12.24	11.98	12.18
5507	NASDAQ	KLIC	Mon, Apr 7, 2014	12.22	12.24	11.75	12.12
5506	NASDAQ	KLIC	Fri, Apr 4, 2014	12.61	12.61	12.06	12.24
5505	NASDAQ	KLIC	Thu, Apr 3, 2014	12.57	12.70	12.37	12.53
5504	NASDAQ	KLIC	Wed, Apr 2, 2014	12.65	12.70	12.50	12.67
5503	NASDAQ	KLIC	Tue, Apr 1, 2014	12.59	12.67	12.36	12.62
5502	NASDAQ	KLIC	Mon, Mar 31, 2014	12.37	12.64	12.23	12.61
5501	NASDAQ	KLIC	Fri, Mar 28, 2014	12.18	12.42	12.13	12.31
5500	NASDAQ	KLIC	Thu, Mar 27, 2014	12.07	12.19	11.93	12.11
5499	NASDAQ	KLIC	Wed, Mar 26, 2014	12.62	12.73	12.08	12.12
5498	NASDAQ	KLIC	Tue, Mar 25, 2014	12.63	12.66	12.39	12.55
5497	NASDAQ	KLIC	Mon, Mar 24, 2014	12.70	12.70	12.31	12.52
5496	NASDAQ	KLIC	Fri, Mar 21, 2014	12.71	12.77	12.63	12.67
5495	NASDAQ	KLIC	Thu, Mar 20, 2014	12.42	12.80	12.28	12.72
5494	NASDAQ	KLIC	Wed, Mar 19, 2014	12.42	12.49	12.35	12.40
5493	NASDAQ	KLIC	Tue, Mar 18, 2014	12.26	12.48	12.16	12.47
5492	NASDAQ	KLIC	Mon, Mar 17, 2014	12.39	12.40	12.22	12.26
5491	NASDAQ	KLIC	Fri, Mar 14, 2014	11.98	12.41	11.92	12.33
5490	NASDAQ	KLIC	Thu, Mar 13, 2014	12.32	12.34	11.95	11.98
5489	NASDAQ	KLIC	Wed, Mar 12, 2014	11.82	12.31	11.75	12.28
5488	NASDAQ	KLIC	Tue, Mar 11, 2014	11.75	11.91	11.67	11.89
5487	NASDAQ	KLIC	Mon, Mar 10, 2014	11.78	11.90	11.57	11.76
5486	NASDAQ	KLIC	Fri, Mar 7, 2014	11.79	11.84	11.64	11.84
5485	NASDAQ	KLIC	Thu, Mar 6, 2014	11.47	11.78	11.45	11.73
5484	NASDAQ	KLIC	Wed, Mar 5, 2014	11.40	11.62	11.20	11.48
5483	NASDAQ	KLIC	Tue, Mar 4, 2014	11.54	11.54	11.13	11.45
5482	NASDAQ	KLIC	Mon, Mar 3, 2014	11.43	11.43	11.25	11.42
5481	NASDAQ	KLIC	Fri, Feb 28, 2014	11.56	11.70	11.46	11.54
5480	NASDAQ	KLIC	Thu, Feb 27, 2014	11.53	11.60	11.35	11.56
5479	NASDAQ	KLIC	Wed, Feb 26, 2014	11.53	11.71	11.40	11.57
5478	NASDAQ	KLIC	Tue, Feb 25, 2014	11.49	11.49	11.23	11.27
5477	NASDAQ	KLIC	Mon, Feb 24, 2014	11.55	11.62	11.42	11.50
5476	NASDAQ	KLIC	Fri, Feb 21, 2014	11.48	11.59	11.40	11.55
5475	NASDAQ	KLIC	Thu, Feb 20, 2014	11.48	11.54	11.39	11.53
5474	NASDAQ	KLIC	Wed, Feb 19, 2014	11.47	11.55	11.38	11.41
5473	NASDAQ	KLIC	Tue, Feb 18, 2014	11.58	11.58	11.33	11.50
5472	NASDAQ	KLIC	Fri, Feb 14, 2014	11.53	11.68	11.45	11.58
5471	NASDAQ	KLIC	Thu, Feb 13, 2014	11.46	11.58	11.36	11.58
5470	NASDAQ	KLIC	Wed, Feb 12, 2014	11.51	11.70	11.45	11.51
5469	NASDAQ	KLIC	Tue, Feb 11, 2014	11.38	11.57	11.35	11.53
5468	NASDAQ	KLIC	Mon, Feb 10, 2014	11.46	11.49	11.35	11.37
5467	NASDAQ	KLIC	Fri, Feb 7, 2014	11.62	11.69	11.43	11.49
5466	NASDAQ	KLIC	Thu, Feb 6, 2014	11.40	11.72	11.38	11.53
5465	NASDAQ	KLIC	Wed, Feb 5, 2014	11.37	11.41	11.23	11.34
5464	NASDAQ	KLIC	Tue, Feb 4, 2014	11.57	11.58	11.39	11.43
5463	NASDAQ	KLIC	Mon, Feb 3, 2014	11.67	11.69	11.45	11.51
5462	NASDAQ	KLIC	Fri, Jan 31, 2014	11.63	11.73	11.54	11.64
5461	NASDAQ	KLIC	Thu, Jan 30, 2014	12.00	12.00	11.75	11.77
5460	NASDAQ	KLIC	Wed, Jan 29, 2014	11.89	11.99	11.80	11.83
5459	NASDAQ	KLIC	Tue, Jan 28, 2014	11.35	12.07	11.28	12.03
5458	NASDAQ	KLIC	Mon, Jan 27, 2014	10.84	10.93	10.73	10.80
5457	NASDAQ	KLIC	Fri, Jan 24, 2014	11.11	11.17	10.76	10.83
5456	NASDAQ	KLIC	Thu, Jan 23, 2014	11.38	11.43	10.98	11.14
5455	NASDAQ	KLIC	Wed, Jan 22, 2014	11.13	11.45	11.11	11.39
5454	NASDAQ	KLIC	Tue, Jan 21, 2014	11.39	11.44	11.01	11.14
5453	NASDAQ	KLIC	Fri, Jan 17, 2014	11.40	11.43	11.21	11.35
5452	NASDAQ	KLIC	Thu, Jan 16, 2014	11.61	11.67	11.36	11.46
5451	NASDAQ	KLIC	Wed, Jan 15, 2014	12.03	12.03	11.42	11.70
5450	NASDAQ	KLIC	Tue, Jan 14, 2014	11.67	12.01	11.67	11.93
5449	NASDAQ	KLIC	Mon, Jan 13, 2014	12.53	12.55	11.65	11.67
5448	NASDAQ	KLIC	Fri, Jan 10, 2014	12.93	12.94	12.53	12.60
5447	NASDAQ	KLIC	Thu, Jan 9, 2014	13.06	13.10	12.81	12.92
5446	NASDAQ	KLIC	Wed, Jan 8, 2014	12.99	13.12	12.88	13.06
5445	NASDAQ	KLIC	Tue, Jan 7, 2014	13.01	13.22	12.93	12.95
5444	NASDAQ	KLIC	Mon, Jan 6, 2014	13.13	13.14	12.88	12.98
5443	NASDAQ	KLIC	Fri, Jan 3, 2014	13.01	13.16	12.98	13.13
5442	NASDAQ	KLIC	Thu, Jan 2, 2014	13.19	13.21	12.78	13.05
5441	NASDAQ	KLIC	Tue, Dec 31, 2013	13.22	13.30	13.20	13.30
5440	NASDAQ	KLIC	Mon, Dec 30, 2013	13.23	13.26	13.08	13.21
5439	NASDAQ	KLIC	Fri, Dec 27, 2013	13.24	13.24	13.10	13.22
5438	NASDAQ	KLIC	Thu, Dec 26, 2013	13.08	13.21	13.05	13.21
5437	NASDAQ	KLIC	Tue, Dec 24, 2013	13.13	13.20	13.00	13.10
5436	NASDAQ	KLIC	Mon, Dec 23, 2013	12.85	13.17	12.76	13.17
5435	NASDAQ	KLIC	Fri, Dec 20, 2013	12.56	12.98	12.54	12.95
5434	NASDAQ	KLIC	Thu, Dec 19, 2013	12.58	12.62	12.44	12.57
5433	NASDAQ	KLIC	Wed, Dec 18, 2013	12.54	12.59	12.40	12.57
5432	NASDAQ	KLIC	Tue, Dec 17, 2013	12.38	12.60	12.36	12.52
5431	NASDAQ	KLIC	Mon, Dec 16, 2013	12.49	12.54	12.35	12.42
5430	NASDAQ	KLIC	Fri, Dec 13, 2013	12.47	12.50	12.31	12.42
5429	NASDAQ	KLIC	Thu, Dec 12, 2013	12.53	12.54	12.34	12.42
5428	NASDAQ	KLIC	Wed, Dec 11, 2013	12.51	12.57	12.42	12.51
5427	NASDAQ	KLIC	Tue, Dec 10, 2013	12.11	12.51	12.11	12.46
5426	NASDAQ	KLIC	Mon, Dec 9, 2013	12.18	12.23	12.09	12.16
5425	NASDAQ	KLIC	Fri, Dec 6, 2013	12.19	12.28	12.10	12.21
5424	NASDAQ	KLIC	Thu, Dec 5, 2013	12.05	12.16	11.90	12.12
5423	NASDAQ	KLIC	Wed, Dec 4, 2013	11.94	12.13	11.90	12.01
5422	NASDAQ	KLIC	Tue, Dec 3, 2013	12.16	12.21	11.96	11.98
5421	NASDAQ	KLIC	Mon, Dec 2, 2013	12.55	12.55	12.24	12.26
5420	NASDAQ	KLIC	Fri, Nov 29, 2013	12.64	12.64	12.49	12.62
5419	NASDAQ	KLIC	Wed, Nov 27, 2013	12.55	12.60	12.49	12.60
5418	NASDAQ	KLIC	Tue, Nov 26, 2013	12.50	12.56	12.42	12.56
5417	NASDAQ	KLIC	Mon, Nov 25, 2013	12.52	12.54	12.26	12.45
5416	NASDAQ	KLIC	Fri, Nov 22, 2013	12.63	12.64	12.47	12.53
5415	NASDAQ	KLIC	Thu, Nov 21, 2013	12.48	12.74	12.46	12.63
5414	NASDAQ	KLIC	Wed, Nov 20, 2013	12.40	12.50	12.35	12.42
5413	NASDAQ	KLIC	Tue, Nov 19, 2013	12.56	12.57	12.27	12.34
5412	NASDAQ	KLIC	Mon, Nov 18, 2013	12.57	12.66	12.45	12.54
5411	NASDAQ	KLIC	Fri, Nov 15, 2013	12.54	12.69	12.45	12.55
5410	NASDAQ	KLIC	Thu, Nov 14, 2013	12.81	12.85	12.49	12.52
5409	NASDAQ	KLIC	Wed, Nov 13, 2013	12.46	12.86	12.28	12.86
5408	NASDAQ	KLIC	Tue, Nov 12, 2013	12.00	12.48	11.98	12.48
5407	NASDAQ	KLIC	Mon, Nov 11, 2013	11.90	12.06	11.77	12.03
5406	NASDAQ	KLIC	Fri, Nov 8, 2013	11.77	12.00	11.47	11.96
5405	NASDAQ	KLIC	Thu, Nov 7, 2013	12.02	12.50	11.74	11.77
5404	NASDAQ	KLIC	Wed, Nov 6, 2013	12.79	12.97	12.73	12.94
5403	NASDAQ	KLIC	Tue, Nov 5, 2013	12.83	12.90	12.71	12.73
5402	NASDAQ	KLIC	Mon, Nov 4, 2013	12.75	12.99	12.66	12.90
5401	NASDAQ	KLIC	Fri, Nov 1, 2013	12.96	13.02	12.69	12.70
5400	NASDAQ	KLIC	Thu, Oct 31, 2013	13.07	13.16	12.86	12.90
5399	NASDAQ	KLIC	Wed, Oct 30, 2013	13.66	13.68	13.06	13.10
5398	NASDAQ	KLIC	Tue, Oct 29, 2013	13.15	13.70	13.13	13.66
5397	NASDAQ	KLIC	Mon, Oct 28, 2013	13.15	13.20	13.09	13.17
5396	NASDAQ	KLIC	Fri, Oct 25, 2013	13.15	13.19	13.07	13.15
5395	NASDAQ	KLIC	Thu, Oct 24, 2013	13.17	13.29	13.11	13.16
5394	NASDAQ	KLIC	Wed, Oct 23, 2013	13.05	13.24	13.05	13.15
5393	NASDAQ	KLIC	Tue, Oct 22, 2013	13.34	13.50	13.11	13.25
5392	NASDAQ	KLIC	Mon, Oct 21, 2013	13.11	13.68	13.00	13.31
5391	NASDAQ	KLIC	Fri, Oct 18, 2013	13.00	13.09	12.87	13.02
5390	NASDAQ	KLIC	Thu, Oct 17, 2013	13.01	13.02	12.91	12.93
5389	NASDAQ	KLIC	Wed, Oct 16, 2013	13.18	13.19	12.93	13.05
5388	NASDAQ	KLIC	Tue, Oct 15, 2013	13.29	13.38	12.90	13.03
5387	NASDAQ	KLIC	Mon, Oct 14, 2013	12.80	13.39	12.62	13.24
5386	NASDAQ	KLIC	Fri, Oct 11, 2013	11.80	12.14	11.67	12.09
5385	NASDAQ	KLIC	Thu, Oct 10, 2013	11.55	11.85	11.52	11.73
5384	NASDAQ	KLIC	Wed, Oct 9, 2013	11.35	11.49	11.26	11.41
5383	NASDAQ	KLIC	Tue, Oct 8, 2013	11.47	11.51	11.19	11.29
5382	NASDAQ	KLIC	Mon, Oct 7, 2013	11.46	11.49	11.32	11.46
5381	NASDAQ	KLIC	Fri, Oct 4, 2013	11.33	11.60	11.27	11.54
5380	NASDAQ	KLIC	Thu, Oct 3, 2013	11.49	11.52	11.24	11.37
5379	NASDAQ	KLIC	Wed, Oct 2, 2013	11.56	11.60	11.44	11.51
5378	NASDAQ	KLIC	Tue, Oct 1, 2013	11.57	11.61	11.46	11.61
5377	NASDAQ	KLIC	Mon, Sep 30, 2013	11.45	11.61	11.30	11.55
5376	NASDAQ	KLIC	Fri, Sep 27, 2013	11.42	11.59	11.37	11.54
5375	NASDAQ	KLIC	Thu, Sep 26, 2013	11.55	11.55	11.37	11.45
5374	NASDAQ	KLIC	Wed, Sep 25, 2013	11.56	11.70	11.44	11.53
5373	NASDAQ	KLIC	Tue, Sep 24, 2013	11.50	11.59	11.36	11.56
5372	NASDAQ	KLIC	Mon, Sep 23, 2013	11.57	11.57	11.26	11.45
5371	NASDAQ	KLIC	Fri, Sep 20, 2013	11.62	11.66	11.49	11.52
5370	NASDAQ	KLIC	Thu, Sep 19, 2013	11.66	11.72	11.53	11.64
5369	NASDAQ	KLIC	Wed, Sep 18, 2013	11.66	11.74	11.47	11.59
5368	NASDAQ	KLIC	Tue, Sep 17, 2013	11.62	11.80	11.55	11.61
5367	NASDAQ	KLIC	Mon, Sep 16, 2013	11.66	11.66	11.51	11.57
5366	NASDAQ	KLIC	Fri, Sep 13, 2013	11.43	11.54	11.33	11.53
5365	NASDAQ	KLIC	Thu, Sep 12, 2013	11.58	11.58	11.32	11.37
5364	NASDAQ	KLIC	Wed, Sep 11, 2013	11.47	11.52	11.31	11.51
5363	NASDAQ	KLIC	Tue, Sep 10, 2013	11.48	11.58	11.41	11.52
5362	NASDAQ	KLIC	Mon, Sep 9, 2013	11.55	11.56	11.28	11.42
5361	NASDAQ	KLIC	Fri, Sep 6, 2013	11.41	11.54	11.16	11.48
5360	NASDAQ	KLIC	Thu, Sep 5, 2013	11.37	11.48	11.35	11.37
5359	NASDAQ	KLIC	Wed, Sep 4, 2013	11.16	11.37	11.07	11.32
5358	NASDAQ	KLIC	Tue, Sep 3, 2013	11.18	11.37	11.01	11.11
5357	NASDAQ	KLIC	Fri, Aug 30, 2013	11.26	11.26	11.02	11.06
5356	NASDAQ	KLIC	Thu, Aug 29, 2013	11.00	11.26	11.00	11.23
5355	NASDAQ	KLIC	Wed, Aug 28, 2013	11.09	11.20	10.99	10.99
5354	NASDAQ	KLIC	Tue, Aug 27, 2013	11.09	11.21	10.98	11.08
5353	NASDAQ	KLIC	Mon, Aug 26, 2013	11.15	11.22	11.04	11.21
5352	NASDAQ	KLIC	Fri, Aug 23, 2013	11.14	11.23	11.07	11.14
5351	NASDAQ	KLIC	Thu, Aug 22, 2013	11.13	11.28	11.08	11.14
5350	NASDAQ	KLIC	Wed, Aug 21, 2013	11.10	11.25	10.99	11.13
5349	NASDAQ	KLIC	Tue, Aug 20, 2013	11.10	11.22	11.05	11.12
5348	NASDAQ	KLIC	Mon, Aug 19, 2013	11.40	11.40	11.03	11.10
5347	NASDAQ	KLIC	Fri, Aug 16, 2013	11.37	11.51	11.31	11.39
5346	NASDAQ	KLIC	Thu, Aug 15, 2013	11.41	11.48	11.26	11.40
5345	NASDAQ	KLIC	Wed, Aug 14, 2013	11.51	11.60	11.46	11.48
5344	NASDAQ	KLIC	Tue, Aug 13, 2013	11.49	11.58	11.38	11.53
5343	NASDAQ	KLIC	Mon, Aug 12, 2013	11.25	11.54	11.25	11.51
5342	NASDAQ	KLIC	Fri, Aug 9, 2013	11.40	11.40	11.25	11.25
5341	NASDAQ	KLIC	Thu, Aug 8, 2013	11.47	11.54	11.37	11.41
5340	NASDAQ	KLIC	Wed, Aug 7, 2013	11.70	11.70	11.41	11.44
5339	NASDAQ	KLIC	Tue, Aug 6, 2013	11.59	11.80	11.59	11.69
5338	NASDAQ	KLIC	Mon, Aug 5, 2013	11.74	11.81	11.54	11.58
5337	NASDAQ	KLIC	Fri, Aug 2, 2013	12.17	12.21	11.82	11.84
5336	NASDAQ	KLIC	Thu, Aug 1, 2013	11.85	12.27	11.77	12.20
5335	NASDAQ	KLIC	Wed, Jul 31, 2013	11.70	11.91	11.60	11.67
5334	NASDAQ	KLIC	Tue, Jul 30, 2013	11.97	11.98	11.65	11.78
5333	NASDAQ	KLIC	Mon, Jul 29, 2013	11.19	11.50	11.15	11.40
5332	NASDAQ	KLIC	Fri, Jul 26, 2013	11.17	11.23	10.98	11.17
5331	NASDAQ	KLIC	Thu, Jul 25, 2013	11.44	11.50	11.10	11.26
5330	NASDAQ	KLIC	Wed, Jul 24, 2013	11.67	11.84	11.36	11.44
5329	NASDAQ	KLIC	Tue, Jul 23, 2013	11.88	12.00	11.54	11.57
5328	NASDAQ	KLIC	Mon, Jul 22, 2013	11.20	11.82	11.20	11.77
5327	NASDAQ	KLIC	Fri, Jul 19, 2013	11.20	11.23	11.13	11.13
5326	NASDAQ	KLIC	Thu, Jul 18, 2013	11.21	11.25	11.06	11.21
5325	NASDAQ	KLIC	Wed, Jul 17, 2013	11.32	11.32	11.20	11.22
5324	NASDAQ	KLIC	Tue, Jul 16, 2013	11.32	11.38	11.17	11.22
5323	NASDAQ	KLIC	Mon, Jul 15, 2013	11.32	11.38	11.14	11.27
5322	NASDAQ	KLIC	Fri, Jul 12, 2013	11.27	11.35	11.20	11.26
5321	NASDAQ	KLIC	Thu, Jul 11, 2013	11.32	11.42	11.19	11.19
5320	NASDAQ	KLIC	Wed, Jul 10, 2013	11.17	11.26	11.13	11.24
5319	NASDAQ	KLIC	Tue, Jul 9, 2013	11.05	11.24	10.99	11.18
5318	NASDAQ	KLIC	Mon, Jul 8, 2013	11.23	11.36	10.92	11.00
5317	NASDAQ	KLIC	Fri, Jul 5, 2013	11.12	11.28	11.07	11.23
5316	NASDAQ	KLIC	Wed, Jul 3, 2013	10.98	11.10	10.91	11.02
5315	NASDAQ	KLIC	Tue, Jul 2, 2013	11.03	11.11	10.92	10.98
5314	NASDAQ	KLIC	Mon, Jul 1, 2013	11.10	11.19	10.94	11.04
5313	NASDAQ	KLIC	Fri, Jun 28, 2013	11.03	11.08	10.77	11.06
5312	NASDAQ	KLIC	Thu, Jun 27, 2013	10.98	11.11	10.87	11.02
5311	NASDAQ	KLIC	Wed, Jun 26, 2013	11.01	11.10	10.81	10.81
5310	NASDAQ	KLIC	Tue, Jun 25, 2013	10.87	10.93	10.74	10.84
5309	NASDAQ	KLIC	Mon, Jun 24, 2013	10.69	10.79	10.44	10.69
5308	NASDAQ	KLIC	Fri, Jun 21, 2013	11.25	11.25	10.81	10.88
5307	NASDAQ	KLIC	Thu, Jun 20, 2013	11.31	11.46	11.15	11.21
5306	NASDAQ	KLIC	Wed, Jun 19, 2013	11.54	11.65	11.42	11.50
5305	NASDAQ	KLIC	Tue, Jun 18, 2013	11.42	11.54	11.33	11.50
5304	NASDAQ	KLIC	Mon, Jun 17, 2013	11.63	11.66	11.25	11.36
5303	NASDAQ	KLIC	Fri, Jun 14, 2013	11.58	11.73	11.39	11.48
5302	NASDAQ	KLIC	Thu, Jun 13, 2013	11.45	11.60	11.38	11.57
5301	NASDAQ	KLIC	Wed, Jun 12, 2013	11.81	11.84	11.48	11.50
5300	NASDAQ	KLIC	Tue, Jun 11, 2013	11.80	11.90	11.64	11.68
5299	NASDAQ	KLIC	Mon, Jun 10, 2013	12.05	12.05	11.89	11.98
5298	NASDAQ	KLIC	Fri, Jun 7, 2013	12.02	12.02	11.76	11.94
5297	NASDAQ	KLIC	Thu, Jun 6, 2013	11.99	12.00	11.64	11.86
5296	NASDAQ	KLIC	Wed, Jun 5, 2013	12.05	12.05	11.65	11.93
5295	NASDAQ	KLIC	Tue, Jun 4, 2013	12.32	12.32	11.91	12.10
5294	NASDAQ	KLIC	Mon, Jun 3, 2013	12.48	12.55	12.08	12.32
5293	NASDAQ	KLIC	Fri, May 31, 2013	12.29	12.56	12.28	12.40
5292	NASDAQ	KLIC	Thu, May 30, 2013	12.25	12.49	12.21	12.39
5291	NASDAQ	KLIC	Wed, May 29, 2013	12.07	12.35	12.02	12.30
5290	NASDAQ	KLIC	Tue, May 28, 2013	12.23	12.40	12.04	12.14
5289	NASDAQ	KLIC	Fri, May 24, 2013	11.79	12.16	11.73	12.00
5288	NASDAQ	KLIC	Thu, May 23, 2013	11.56	11.86	11.53	11.83
5287	NASDAQ	KLIC	Wed, May 22, 2013	12.05	12.06	11.52	11.65
5286	NASDAQ	KLIC	Tue, May 21, 2013	11.59	12.30	11.56	11.93
5285	NASDAQ	KLIC	Mon, May 20, 2013	11.62	11.75	11.50	11.55
5284	NASDAQ	KLIC	Fri, May 17, 2013	11.35	11.63	11.32	11.60
5283	NASDAQ	KLIC	Thu, May 16, 2013	11.28	11.44	11.27	11.34
5282	NASDAQ	KLIC	Wed, May 15, 2013	11.24	11.54	11.17	11.34
5281	NASDAQ	KLIC	Tue, May 14, 2013	11.31	11.40	11.25	11.34
5280	NASDAQ	KLIC	Mon, May 13, 2013	11.49	11.52	11.18	11.27
5279	NASDAQ	KLIC	Fri, May 10, 2013	11.52	11.56	11.42	11.55
5278	NASDAQ	KLIC	Thu, May 9, 2013	11.42	11.64	11.41	11.52
5277	NASDAQ	KLIC	Wed, May 8, 2013	11.51	11.60	11.42	11.50
5276	NASDAQ	KLIC	Tue, May 7, 2013	11.41	11.65	11.36	11.54
5275	NASDAQ	KLIC	Mon, May 6, 2013	11.38	11.54	11.30	11.40
5274	NASDAQ	KLIC	Fri, May 3, 2013	11.29	11.55	11.16	11.39
5273	NASDAQ	KLIC	Thu, May 2, 2013	11.27	11.27	10.97	11.08
5272	NASDAQ	KLIC	Wed, May 1, 2013	11.51	11.51	11.14	11.21
5271	NASDAQ	KLIC	Tue, Apr 30, 2013	11.10	11.97	11.02	11.56
5270	NASDAQ	KLIC	Mon, Apr 29, 2013	11.12	11.23	11.00	11.15
5269	NASDAQ	KLIC	Fri, Apr 26, 2013	11.16	11.21	11.00	11.04
5268	NASDAQ	KLIC	Thu, Apr 25, 2013	10.91	11.22	10.85	11.21
5267	NASDAQ	KLIC	Wed, Apr 24, 2013	10.76	10.94	10.70	10.84
5266	NASDAQ	KLIC	Tue, Apr 23, 2013	10.69	10.84	10.51	10.78
5265	NASDAQ	KLIC	Mon, Apr 22, 2013	10.46	10.59	10.08	10.56
5264	NASDAQ	KLIC	Fri, Apr 19, 2013	10.24	10.44	10.17	10.42
5263	NASDAQ	KLIC	Thu, Apr 18, 2013	10.43	10.45	10.08	10.14
5262	NASDAQ	KLIC	Wed, Apr 17, 2013	10.76	10.80	10.30	10.33
5261	NASDAQ	KLIC	Tue, Apr 16, 2013	10.69	10.95	10.63	10.82
5260	NASDAQ	KLIC	Mon, Apr 15, 2013	10.93	10.93	10.52	10.59
5259	NASDAQ	KLIC	Fri, Apr 12, 2013	10.89	11.08	10.80	11.00
5258	NASDAQ	KLIC	Thu, Apr 11, 2013	11.20	11.22	10.97	10.99
5257	NASDAQ	KLIC	Wed, Apr 10, 2013	10.96	11.24	10.90	11.22
5256	NASDAQ	KLIC	Tue, Apr 9, 2013	10.77	11.00	10.70	10.88
5255	NASDAQ	KLIC	Mon, Apr 8, 2013	10.50	10.81	10.44	10.76
5254	NASDAQ	KLIC	Fri, Apr 5, 2013	10.58	10.68	10.38	10.49
5253	NASDAQ	KLIC	Thu, Apr 4, 2013	10.48	10.83	10.32	10.75
5252	NASDAQ	KLIC	Wed, Apr 3, 2013	10.74	10.83	10.38	10.43
5251	NASDAQ	KLIC	Tue, Apr 2, 2013	11.37	11.37	10.61	10.66
5250	NASDAQ	KLIC	Mon, Apr 1, 2013	11.63	11.66	11.18	11.29
5249	NASDAQ	KLIC	Thu, Mar 28, 2013	11.33	11.61	11.33	11.56
5248	NASDAQ	KLIC	Wed, Mar 27, 2013	11.13	11.31	11.04	11.29
5247	NASDAQ	KLIC	Tue, Mar 26, 2013	10.99	11.22	10.96	11.19
5246	NASDAQ	KLIC	Mon, Mar 25, 2013	11.03	11.15	10.74	10.90
5245	NASDAQ	KLIC	Fri, Mar 22, 2013	10.94	11.05	10.90	10.94
5244	NASDAQ	KLIC	Thu, Mar 21, 2013	10.98	11.07	10.83	10.83
5243	NASDAQ	KLIC	Wed, Mar 20, 2013	11.02	11.17	10.96	11.04
5242	NASDAQ	KLIC	Tue, Mar 19, 2013	11.04	11.23	10.82	10.95
5241	NASDAQ	KLIC	Mon, Mar 18, 2013	10.90	11.09	10.80	11.04
5240	NASDAQ	KLIC	Fri, Mar 15, 2013	11.43	11.47	10.96	11.00
5239	NASDAQ	KLIC	Thu, Mar 14, 2013	11.40	11.62	11.29	11.45
5238	NASDAQ	KLIC	Wed, Mar 13, 2013	11.29	11.33	11.15	11.33
5237	NASDAQ	KLIC	Tue, Mar 12, 2013	11.09	11.40	11.06	11.29
5236	NASDAQ	KLIC	Mon, Mar 11, 2013	11.17	11.18	10.94	11.10
5235	NASDAQ	KLIC	Fri, Mar 8, 2013	11.19	11.22	11.03	11.14
5234	NASDAQ	KLIC	Thu, Mar 7, 2013	11.03	11.14	10.95	11.08
5233	NASDAQ	KLIC	Wed, Mar 6, 2013	10.91	10.99	10.85	10.97
5232	NASDAQ	KLIC	Tue, Mar 5, 2013	10.84	10.91	10.81	10.83
5231	NASDAQ	KLIC	Mon, Mar 4, 2013	10.67	10.83	10.58	10.71
5230	NASDAQ	KLIC	Fri, Mar 1, 2013	10.77	10.95	10.63	10.69
5229	NASDAQ	KLIC	Thu, Feb 28, 2013	10.80	11.01	10.67	10.82
5228	NASDAQ	KLIC	Wed, Feb 27, 2013	10.67	10.91	10.58	10.83
5227	NASDAQ	KLIC	Tue, Feb 26, 2013	10.82	10.89	10.59	10.66
5226	NASDAQ	KLIC	Mon, Feb 25, 2013	11.13	11.17	10.72	10.73
5225	NASDAQ	KLIC	Fri, Feb 22, 2013	11.03	11.20	10.87	11.00
5224	NASDAQ	KLIC	Thu, Feb 21, 2013	11.20	11.21	10.80	10.93
5223	NASDAQ	KLIC	Wed, Feb 20, 2013	11.47	11.52	11.23	11.23
5222	NASDAQ	KLIC	Tue, Feb 19, 2013	11.40	11.49	11.32	11.46
5221	NASDAQ	KLIC	Fri, Feb 15, 2013	11.55	11.58	11.42	11.48
5220	NASDAQ	KLIC	Thu, Feb 14, 2013	11.35	11.57	11.35	11.53
5219	NASDAQ	KLIC	Wed, Feb 13, 2013	11.50	11.50	11.25	11.41
5218	NASDAQ	KLIC	Tue, Feb 12, 2013	11.49	11.49	11.36	11.46
5217	NASDAQ	KLIC	Mon, Feb 11, 2013	11.52	11.53	11.38	11.44
5216	NASDAQ	KLIC	Fri, Feb 8, 2013	11.43	11.60	11.43	11.49
5215	NASDAQ	KLIC	Thu, Feb 7, 2013	11.48	11.54	11.29	11.44
5214	NASDAQ	KLIC	Wed, Feb 6, 2013	11.48	11.61	11.38	11.44
5213	NASDAQ	KLIC	Tue, Feb 5, 2013	11.49	11.66	11.45	11.61
5212	NASDAQ	KLIC	Mon, Feb 4, 2013	11.59	11.62	11.33	11.36
5211	NASDAQ	KLIC	Fri, Feb 1, 2013	11.34	11.69	11.33	11.65
5210	NASDAQ	KLIC	Thu, Jan 31, 2013	11.25	11.44	11.19	11.32
5209	NASDAQ	KLIC	Wed, Jan 30, 2013	11.53	11.66	11.05	11.31
5208	NASDAQ	KLIC	Tue, Jan 29, 2013	11.80	12.12	11.37	11.78
5207	NASDAQ	KLIC	Mon, Jan 28, 2013	12.75	12.95	12.67	12.85
5206	NASDAQ	KLIC	Fri, Jan 25, 2013	12.61	12.80	12.53	12.59
5205	NASDAQ	KLIC	Thu, Jan 24, 2013	12.42	12.74	12.34	12.51
5204	NASDAQ	KLIC	Wed, Jan 23, 2013	12.55	12.55	12.41	12.48
5203	NASDAQ	KLIC	Tue, Jan 22, 2013	12.56	12.65	12.43	12.48
5202	NASDAQ	KLIC	Fri, Jan 18, 2013	12.63	12.69	12.47	12.58
5201	NASDAQ	KLIC	Thu, Jan 17, 2013	12.58	12.81	12.40	12.66
5200	NASDAQ	KLIC	Wed, Jan 16, 2013	12.26	12.61	12.13	12.45
5199	NASDAQ	KLIC	Tue, Jan 15, 2013	12.36	12.36	12.19	12.23
5198	NASDAQ	KLIC	Mon, Jan 14, 2013	12.35	12.48	12.17	12.37
5197	NASDAQ	KLIC	Fri, Jan 11, 2013	12.35	12.51	12.23	12.34
5196	NASDAQ	KLIC	Thu, Jan 10, 2013	12.36	12.45	12.21	12.35
5195	NASDAQ	KLIC	Wed, Jan 9, 2013	11.96	12.42	11.81	12.20
5194	NASDAQ	KLIC	Tue, Jan 8, 2013	12.19	12.27	11.81	11.89
5193	NASDAQ	KLIC	Mon, Jan 7, 2013	12.36	12.41	12.10	12.15
5192	NASDAQ	KLIC	Fri, Jan 4, 2013	12.49	12.49	12.30	12.40
5191	NASDAQ	KLIC	Thu, Jan 3, 2013	12.62	12.62	12.38	12.44
5190	NASDAQ	KLIC	Wed, Jan 2, 2013	12.20	12.82	12.17	12.68
5189	NASDAQ	KLIC	Mon, Dec 31, 2012	11.57	11.99	11.57	11.99
5188	NASDAQ	KLIC	Fri, Dec 28, 2012	11.58	11.76	11.58	11.61
5187	NASDAQ	KLIC	Thu, Dec 27, 2012	11.69	11.74	11.54	11.64
5186	NASDAQ	KLIC	Wed, Dec 26, 2012	11.83	11.93	11.61	11.64
5185	NASDAQ	KLIC	Mon, Dec 24, 2012	11.86	11.94	11.73	11.83
5184	NASDAQ	KLIC	Fri, Dec 21, 2012	11.70	11.83	11.59	11.82
5183	NASDAQ	KLIC	Thu, Dec 20, 2012	11.88	12.04	11.75	12.04
5182	NASDAQ	KLIC	Wed, Dec 19, 2012	11.70	11.95	11.64	11.85
5181	NASDAQ	KLIC	Tue, Dec 18, 2012	11.50	11.74	11.46	11.64
5180	NASDAQ	KLIC	Mon, Dec 17, 2012	11.53	11.61	11.39	11.48
5179	NASDAQ	KLIC	Fri, Dec 14, 2012	11.58	11.68	11.37	11.50
5178	NASDAQ	KLIC	Thu, Dec 13, 2012	11.84	11.92	11.58	11.60
5177	NASDAQ	KLIC	Wed, Dec 12, 2012	11.88	11.92	11.71	11.88
5176	NASDAQ	KLIC	Tue, Dec 11, 2012	11.86	11.90	11.56	11.80
5175	NASDAQ	KLIC	Mon, Dec 10, 2012	11.60	11.93	11.60	11.79
5174	NASDAQ	KLIC	Fri, Dec 7, 2012	11.71	11.76	11.60	11.75
5173	NASDAQ	KLIC	Thu, Dec 6, 2012	11.36	11.71	11.36	11.68
5172	NASDAQ	KLIC	Wed, Dec 5, 2012	11.45	11.45	11.28	11.41
5171	NASDAQ	KLIC	Tue, Dec 4, 2012	11.35	11.49	11.27	11.43
5170	NASDAQ	KLIC	Mon, Dec 3, 2012	11.41	11.51	11.35	11.41
5169	NASDAQ	KLIC	Fri, Nov 30, 2012	11.28	11.44	11.28	11.43
5168	NASDAQ	KLIC	Thu, Nov 29, 2012	11.51	11.56	11.21	11.31
5167	NASDAQ	KLIC	Wed, Nov 28, 2012	10.85	11.57	10.75	11.46
5166	NASDAQ	KLIC	Tue, Nov 27, 2012	10.66	10.95	10.51	10.94
5165	NASDAQ	KLIC	Mon, Nov 26, 2012	10.62	10.73	10.49	10.70
5164	NASDAQ	KLIC	Fri, Nov 23, 2012	10.67	10.78	10.50	10.68
5163	NASDAQ	KLIC	Wed, Nov 21, 2012	10.37	10.65	10.33	10.60
5162	NASDAQ	KLIC	Tue, Nov 20, 2012	10.20	10.40	10.05	10.37
5161	NASDAQ	KLIC	Mon, Nov 19, 2012	10.28	10.41	10.09	10.26
5160	NASDAQ	KLIC	Fri, Nov 16, 2012	9.87	10.10	9.68	10.07
5159	NASDAQ	KLIC	Thu, Nov 15, 2012	9.96	10.06	9.77	9.82
5158	NASDAQ	KLIC	Wed, Nov 14, 2012	10.17	10.29	9.95	9.99
5157	NASDAQ	KLIC	Tue, Nov 13, 2012	10.20	10.40	10.01	10.13
5156	NASDAQ	KLIC	Mon, Nov 12, 2012	10.53	10.55	10.23	10.28
5155	NASDAQ	KLIC	Fri, Nov 9, 2012	10.24	10.66	10.11	10.53
5154	NASDAQ	KLIC	Thu, Nov 8, 2012	10.29	10.57	10.12	10.30
5153	NASDAQ	KLIC	Wed, Nov 7, 2012	10.75	10.80	10.46	10.76
5152	NASDAQ	KLIC	Tue, Nov 6, 2012	10.25	11.10	10.17	10.88
5151	NASDAQ	KLIC	Mon, Nov 5, 2012	10.30	10.48	10.16	10.23
5150	NASDAQ	KLIC	Fri, Nov 2, 2012	10.56	10.59	10.31	10.32
5149	NASDAQ	KLIC	Thu, Nov 1, 2012	10.23	10.61	9.99	10.60
5148	NASDAQ	KLIC	Wed, Oct 31, 2012	9.80	10.34	9.77	10.26
5147	NASDAQ	KLIC	Fri, Oct 26, 2012	9.99	10.20	9.73	9.89
5146	NASDAQ	KLIC	Thu, Oct 25, 2012	9.70	10.05	9.66	9.98
5145	NASDAQ	KLIC	Wed, Oct 24, 2012	9.83	9.83	9.60	9.67
5144	NASDAQ	KLIC	Tue, Oct 23, 2012	9.58	9.81	9.53	9.75
5143	NASDAQ	KLIC	Mon, Oct 22, 2012	9.46	9.68	9.43	9.65
5142	NASDAQ	KLIC	Fri, Oct 19, 2012	9.82	9.87	9.41	9.45
5141	NASDAQ	KLIC	Thu, Oct 18, 2012	9.78	10.01	9.73	9.82
5140	NASDAQ	KLIC	Wed, Oct 17, 2012	9.65	9.85	9.62	9.76
5139	NASDAQ	KLIC	Tue, Oct 16, 2012	9.69	9.76	9.64	9.68
5138	NASDAQ	KLIC	Mon, Oct 15, 2012	9.71	9.84	9.56	9.60
5137	NASDAQ	KLIC	Fri, Oct 12, 2012	9.74	9.78	9.60	9.65
5136	NASDAQ	KLIC	Thu, Oct 11, 2012	9.66	9.75	9.60	9.66
5135	NASDAQ	KLIC	Wed, Oct 10, 2012	9.97	10.02	9.49	9.54
5134	NASDAQ	KLIC	Tue, Oct 9, 2012	10.24	10.39	9.94	10.00
5133	NASDAQ	KLIC	Mon, Oct 8, 2012	10.25	10.32	10.12	10.27
5132	NASDAQ	KLIC	Fri, Oct 5, 2012	10.42	10.49	10.25	10.39
5131	NASDAQ	KLIC	Thu, Oct 4, 2012	10.45	10.49	10.17	10.30
5130	NASDAQ	KLIC	Wed, Oct 3, 2012	10.49	10.51	10.33	10.41
5129	NASDAQ	KLIC	Tue, Oct 2, 2012	10.52	10.63	10.37	10.49
5128	NASDAQ	KLIC	Mon, Oct 1, 2012	10.43	10.62	10.36	10.41
5127	NASDAQ	KLIC	Fri, Sep 28, 2012	10.33	10.46	10.27	10.41
5126	NASDAQ	KLIC	Thu, Sep 27, 2012	10.15	10.48	10.04	10.42
5125	NASDAQ	KLIC	Wed, Sep 26, 2012	10.22	10.28	9.99	10.09
5124	NASDAQ	KLIC	Tue, Sep 25, 2012	10.42	10.45	10.14	10.20
5123	NASDAQ	KLIC	Mon, Sep 24, 2012	10.54	10.65	10.23	10.31
5122	NASDAQ	KLIC	Fri, Sep 21, 2012	10.59	10.70	10.50	10.54
5121	NASDAQ	KLIC	Thu, Sep 20, 2012	10.71	10.80	10.45	10.48
5120	NASDAQ	KLIC	Wed, Sep 19, 2012	11.09	11.15	10.74	10.80
5119	NASDAQ	KLIC	Tue, Sep 18, 2012	11.50	11.50	11.17	11.20
5118	NASDAQ	KLIC	Mon, Sep 17, 2012	12.03	12.03	11.49	11.50
5117	NASDAQ	KLIC	Fri, Sep 14, 2012	11.79	12.07	11.67	12.00
5116	NASDAQ	KLIC	Thu, Sep 13, 2012	11.62	11.78	11.37	11.72
5115	NASDAQ	KLIC	Wed, Sep 12, 2012	11.48	11.70	11.33	11.57
5114	NASDAQ	KLIC	Tue, Sep 11, 2012	11.47	11.61	11.26	11.53
5113	NASDAQ	KLIC	Mon, Sep 10, 2012	11.35	11.55	11.30	11.47
5112	NASDAQ	KLIC	Fri, Sep 7, 2012	11.58	11.67	11.31	11.40
5111	NASDAQ	KLIC	Thu, Sep 6, 2012	11.36	11.86	11.27	11.68
5110	NASDAQ	KLIC	Wed, Sep 5, 2012	11.36	11.53	11.18	11.28
5109	NASDAQ	KLIC	Tue, Sep 4, 2012	11.28	11.45	11.02	11.36
5108	NASDAQ	KLIC	Fri, Aug 31, 2012	11.34	11.39	11.22	11.33
5107	NASDAQ	KLIC	Thu, Aug 30, 2012	11.34	11.43	11.17	11.21
5106	NASDAQ	KLIC	Wed, Aug 29, 2012	11.38	11.48	11.22	11.43
5105	NASDAQ	KLIC	Tue, Aug 28, 2012	11.35	11.43	11.20	11.38
5104	NASDAQ	KLIC	Mon, Aug 27, 2012	11.45	11.58	11.25	11.38
5103	NASDAQ	KLIC	Fri, Aug 24, 2012	11.24	11.46	11.22	11.43
5102	NASDAQ	KLIC	Thu, Aug 23, 2012	11.34	11.38	11.14	11.22
5101	NASDAQ	KLIC	Wed, Aug 22, 2012	11.57	11.64	11.31	11.36
5100	NASDAQ	KLIC	Tue, Aug 21, 2012	11.62	11.91	11.48	11.54
5099	NASDAQ	KLIC	Mon, Aug 20, 2012	11.50	11.80	11.05	11.48
5098	NASDAQ	KLIC	Fri, Aug 17, 2012	11.96	12.05	11.90	11.96
5097	NASDAQ	KLIC	Thu, Aug 16, 2012	11.78	11.97	11.55	11.96
5096	NASDAQ	KLIC	Wed, Aug 15, 2012	11.44	11.97	11.42	11.83
5095	NASDAQ	KLIC	Tue, Aug 14, 2012	11.60	11.73	11.24	11.48
5094	NASDAQ	KLIC	Mon, Aug 13, 2012	11.46	11.66	11.27	11.59
5093	NASDAQ	KLIC	Fri, Aug 10, 2012	11.53	11.70	11.33	11.50
5092	NASDAQ	KLIC	Thu, Aug 9, 2012	11.32	11.67	11.20	11.58
5091	NASDAQ	KLIC	Wed, Aug 8, 2012	11.04	11.37	11.04	11.25
5090	NASDAQ	KLIC	Tue, Aug 7, 2012	11.18	11.30	11.00	11.08
5089	NASDAQ	KLIC	Mon, Aug 6, 2012	10.73	11.26	10.68	11.17
5088	NASDAQ	KLIC	Fri, Aug 3, 2012	10.85	10.94	10.58	10.69
5087	NASDAQ	KLIC	Thu, Aug 2, 2012	10.65	10.92	10.55	10.59
5086	NASDAQ	KLIC	Wed, Aug 1, 2012	10.93	11.12	10.73	10.87
5085	NASDAQ	KLIC	Tue, Jul 31, 2012	11.20	11.94	10.43	11.07
5084	NASDAQ	KLIC	Mon, Jul 30, 2012	9.60	9.83	9.50	9.83
5083	NASDAQ	KLIC	Fri, Jul 27, 2012	9.10	9.71	9.10	9.61
5082	NASDAQ	KLIC	Thu, Jul 26, 2012	8.98	9.17	8.93	9.06
5081	NASDAQ	KLIC	Wed, Jul 25, 2012	8.57	8.92	8.57	8.79
5080	NASDAQ	KLIC	Tue, Jul 24, 2012	8.55	8.61	8.36	8.57
5079	NASDAQ	KLIC	Mon, Jul 23, 2012	8.38	8.57	8.27	8.57
5078	NASDAQ	KLIC	Fri, Jul 20, 2012	8.67	8.77	8.49	8.58
5077	NASDAQ	KLIC	Thu, Jul 19, 2012	8.67	8.89	8.57	8.76
5076	NASDAQ	KLIC	Wed, Jul 18, 2012	8.42	8.73	8.30	8.57
5075	NASDAQ	KLIC	Tue, Jul 17, 2012	8.42	8.54	8.21	8.37
5074	NASDAQ	KLIC	Mon, Jul 16, 2012	8.44	8.49	8.24	8.36
5073	NASDAQ	KLIC	Fri, Jul 13, 2012	8.35	8.62	8.32	8.49
5072	NASDAQ	KLIC	Thu, Jul 12, 2012	8.25	8.36	8.05	8.29
5071	NASDAQ	KLIC	Wed, Jul 11, 2012	8.51	8.52	8.25	8.35
5070	NASDAQ	KLIC	Tue, Jul 10, 2012	8.65	8.80	8.46	8.49
5069	NASDAQ	KLIC	Mon, Jul 9, 2012	8.77	8.82	8.56	8.58
5068	NASDAQ	KLIC	Fri, Jul 6, 2012	8.85	8.89	8.58	8.78
5067	NASDAQ	KLIC	Thu, Jul 5, 2012	9.05	9.07	8.80	8.93
5066	NASDAQ	KLIC	Tue, Jul 3, 2012	8.96	9.09	8.81	9.07
5065	NASDAQ	KLIC	Mon, Jul 2, 2012	8.92	8.92	8.69	8.90
5064	NASDAQ	KLIC	Fri, Jun 29, 2012	8.81	9.13	8.80	8.92
5063	NASDAQ	KLIC	Thu, Jun 28, 2012	8.64	8.70	8.39	8.55
5062	NASDAQ	KLIC	Wed, Jun 27, 2012	8.70	8.76	8.57	8.73
5061	NASDAQ	KLIC	Tue, Jun 26, 2012	8.64	8.78	8.30	8.70
5060	NASDAQ	KLIC	Mon, Jun 25, 2012	9.06	9.18	8.62	8.65
5059	NASDAQ	KLIC	Fri, Jun 22, 2012	9.23	9.37	9.12	9.20
5058	NASDAQ	KLIC	Thu, Jun 21, 2012	9.49	9.60	9.12	9.16
5057	NASDAQ	KLIC	Wed, Jun 20, 2012	9.62	9.69	9.36	9.46
5056	NASDAQ	KLIC	Tue, Jun 19, 2012	9.18	9.72	9.18	9.60
5055	NASDAQ	KLIC	Mon, Jun 18, 2012	9.12	9.36	9.05	9.10
5054	NASDAQ	KLIC	Fri, Jun 15, 2012	9.28	9.40	9.16	9.24
5053	NASDAQ	KLIC	Thu, Jun 14, 2012	9.32	9.50	9.07	9.31
5052	NASDAQ	KLIC	Wed, Jun 13, 2012	9.74	9.98	9.25	9.28
5051	NASDAQ	KLIC	Tue, Jun 12, 2012	9.20	9.86	9.16	9.79
5050	NASDAQ	KLIC	Mon, Jun 11, 2012	10.14	10.14	8.97	9.10
5049	NASDAQ	KLIC	Fri, Jun 8, 2012	9.96	10.14	9.79	9.97
5048	NASDAQ	KLIC	Thu, Jun 7, 2012	10.82	10.82	9.98	10.00
5047	NASDAQ	KLIC	Wed, Jun 6, 2012	10.26	10.66	10.23	10.66
5046	NASDAQ	KLIC	Tue, Jun 5, 2012	9.87	10.20	9.85	10.18
5045	NASDAQ	KLIC	Mon, Jun 4, 2012	10.02	10.20	9.81	9.94
5044	NASDAQ	KLIC	Fri, Jun 1, 2012	10.26	10.32	9.91	9.94
5043	NASDAQ	KLIC	Thu, May 31, 2012	10.69	10.82	10.39	10.52
5042	NASDAQ	KLIC	Wed, May 30, 2012	10.75	10.91	10.60	10.63
5041	NASDAQ	KLIC	Tue, May 29, 2012	10.96	11.08	10.78	10.89
5040	NASDAQ	KLIC	Fri, May 25, 2012	10.75	10.91	10.65	10.82
5039	NASDAQ	KLIC	Thu, May 24, 2012	11.08	11.12	10.61	10.77
5038	NASDAQ	KLIC	Wed, May 23, 2012	10.85	11.08	10.82	11.08
5037	NASDAQ	KLIC	Tue, May 22, 2012	11.08	11.17	10.91	11.02
5036	NASDAQ	KLIC	Mon, May 21, 2012	10.85	11.18	10.67	11.10
5035	NASDAQ	KLIC	Fri, May 18, 2012	11.00	11.13	10.77	10.83
5034	NASDAQ	KLIC	Thu, May 17, 2012	11.47	11.49	10.99	11.00
5033	NASDAQ	KLIC	Wed, May 16, 2012	11.66	11.80	11.46	11.48
5032	NASDAQ	KLIC	Tue, May 15, 2012	11.81	11.95	11.58	11.64
5031	NASDAQ	KLIC	Mon, May 14, 2012	11.62	11.98	11.53	11.79
5030	NASDAQ	KLIC	Fri, May 11, 2012	11.70	12.02	11.67	11.81
5029	NASDAQ	KLIC	Thu, May 10, 2012	11.86	11.92	11.66	11.83
5028	NASDAQ	KLIC	Wed, May 9, 2012	11.62	11.87	11.53	11.70
5027	NASDAQ	KLIC	Tue, May 8, 2012	11.84	11.94	11.55	11.82
5026	NASDAQ	KLIC	Mon, May 7, 2012	12.04	12.18	11.87	11.97
5025	NASDAQ	KLIC	Fri, May 4, 2012	12.28	12.40	12.08	12.12
5024	NASDAQ	KLIC	Thu, May 3, 2012	12.88	12.92	12.30	12.39
5023	NASDAQ	KLIC	Wed, May 2, 2012	12.93	12.95	12.66	12.86
5022	NASDAQ	KLIC	Tue, May 1, 2012	13.32	13.69	12.56	12.99
5021	NASDAQ	KLIC	Mon, Apr 30, 2012	13.22	13.29	13.07	13.10
5020	NASDAQ	KLIC	Fri, Apr 27, 2012	12.98	13.39	12.83	13.24
5019	NASDAQ	KLIC	Thu, Apr 26, 2012	12.76	13.06	12.70	12.86
5018	NASDAQ	KLIC	Wed, Apr 25, 2012	12.44	12.75	12.28	12.73
5017	NASDAQ	KLIC	Tue, Apr 24, 2012	12.21	12.45	12.15	12.24
5016	NASDAQ	KLIC	Mon, Apr 23, 2012	12.02	12.26	11.81	12.22
5015	NASDAQ	KLIC	Fri, Apr 20, 2012	12.69	12.69	12.20	12.27
5014	NASDAQ	KLIC	Thu, Apr 19, 2012	12.62	12.85	12.37	12.54
5013	NASDAQ	KLIC	Wed, Apr 18, 2012	12.54	12.71	12.43	12.64
5012	NASDAQ	KLIC	Tue, Apr 17, 2012	12.52	12.76	12.32	12.66
5011	NASDAQ	KLIC	Mon, Apr 16, 2012	12.34	12.51	12.13	12.42
5010	NASDAQ	KLIC	Fri, Apr 13, 2012	12.46	12.46	12.22	12.28
5009	NASDAQ	KLIC	Thu, Apr 12, 2012	12.26	12.61	12.17	12.47
5008	NASDAQ	KLIC	Wed, Apr 11, 2012	12.26	12.29	12.10	12.23
5007	NASDAQ	KLIC	Tue, Apr 10, 2012	12.22	12.34	12.04	12.10
5006	NASDAQ	KLIC	Mon, Apr 9, 2012	12.18	12.33	12.03	12.26
5005	NASDAQ	KLIC	Thu, Apr 5, 2012	12.14	12.45	12.14	12.42
5004	NASDAQ	KLIC	Wed, Apr 4, 2012	12.23	12.51	12.12	12.26
5003	NASDAQ	KLIC	Tue, Apr 3, 2012	12.63	12.63	12.37	12.43
5002	NASDAQ	KLIC	Mon, Apr 2, 2012	12.34	12.66	12.18	12.65
5001	NASDAQ	KLIC	Fri, Mar 30, 2012	12.53	12.54	12.20	12.43
5000	NASDAQ	KLIC	Thu, Mar 29, 2012	12.12	12.43	11.91	12.42
4999	NASDAQ	KLIC	Wed, Mar 28, 2012	12.46	12.48	12.10	12.26
4998	NASDAQ	KLIC	Tue, Mar 27, 2012	12.74	12.76	12.38	12.40
4997	NASDAQ	KLIC	Mon, Mar 26, 2012	12.49	12.78	12.39	12.75
4996	NASDAQ	KLIC	Fri, Mar 23, 2012	12.16	12.39	12.11	12.37
4995	NASDAQ	KLIC	Thu, Mar 22, 2012	12.01	12.24	11.96	12.19
4994	NASDAQ	KLIC	Wed, Mar 21, 2012	12.14	12.25	12.01	12.17
4993	NASDAQ	KLIC	Tue, Mar 20, 2012	11.91	12.26	11.85	12.08
4992	NASDAQ	KLIC	Mon, Mar 19, 2012	11.82	12.10	11.80	12.01
4991	NASDAQ	KLIC	Fri, Mar 16, 2012	11.94	12.00	11.77	11.91
4990	NASDAQ	KLIC	Thu, Mar 15, 2012	11.72	11.99	11.60	11.90
4989	NASDAQ	KLIC	Wed, Mar 14, 2012	11.81	11.94	11.57	11.64
4988	NASDAQ	KLIC	Tue, Mar 13, 2012	11.74	11.88	11.64	11.87
4987	NASDAQ	KLIC	Mon, Mar 12, 2012	11.75	11.87	11.52	11.63
4986	NASDAQ	KLIC	Fri, Mar 9, 2012	11.57	11.81	11.37	11.75
4985	NASDAQ	KLIC	Thu, Mar 8, 2012	11.40	11.57	11.23	11.55
4984	NASDAQ	KLIC	Wed, Mar 7, 2012	10.85	11.29	10.80	11.26
4983	NASDAQ	KLIC	Tue, Mar 6, 2012	10.74	11.00	10.60	10.80
4982	NASDAQ	KLIC	Mon, Mar 5, 2012	11.03	11.10	10.86	10.91
4981	NASDAQ	KLIC	Fri, Mar 2, 2012	11.46	11.58	11.05	11.07
4980	NASDAQ	KLIC	Thu, Mar 1, 2012	11.28	11.67	11.22	11.44
4979	NASDAQ	KLIC	Wed, Feb 29, 2012	11.61	11.65	11.24	11.26
4978	NASDAQ	KLIC	Tue, Feb 28, 2012	11.70	11.78	11.45	11.60
4977	NASDAQ	KLIC	Mon, Feb 27, 2012	11.17	11.94	11.05	11.71
4976	NASDAQ	KLIC	Fri, Feb 24, 2012	11.19	11.36	10.99	11.24
4975	NASDAQ	KLIC	Thu, Feb 23, 2012	11.24	11.24	10.87	11.15
4974	NASDAQ	KLIC	Wed, Feb 22, 2012	11.40	11.69	11.24	11.24
4973	NASDAQ	KLIC	Tue, Feb 21, 2012	11.47	11.66	11.30	11.41
4972	NASDAQ	KLIC	Fri, Feb 17, 2012	11.46	11.55	11.27	11.46
4971	NASDAQ	KLIC	Thu, Feb 16, 2012	11.18	11.47	11.13	11.35
4970	NASDAQ	KLIC	Wed, Feb 15, 2012	11.30	11.53	11.16	11.19
4969	NASDAQ	KLIC	Tue, Feb 14, 2012	11.24	11.42	11.13	11.24
4968	NASDAQ	KLIC	Mon, Feb 13, 2012	11.34	11.40	11.12	11.37
4967	NASDAQ	KLIC	Fri, Feb 10, 2012	11.18	11.46	11.10	11.23
4966	NASDAQ	KLIC	Thu, Feb 9, 2012	11.55	11.61	11.31	11.37
4965	NASDAQ	KLIC	Wed, Feb 8, 2012	11.57	11.73	11.44	11.54
4964	NASDAQ	KLIC	Tue, Feb 7, 2012	11.50	11.72	11.42	11.55
4963	NASDAQ	KLIC	Mon, Feb 6, 2012	11.60	11.63	11.35	11.53
4962	NASDAQ	KLIC	Fri, Feb 3, 2012	11.52	11.74	11.49	11.63
4961	NASDAQ	KLIC	Thu, Feb 2, 2012	11.28	11.50	11.18	11.39
4960	NASDAQ	KLIC	Wed, Feb 1, 2012	10.96	11.38	10.94	11.31
4959	NASDAQ	KLIC	Tue, Jan 31, 2012	10.79	11.17	10.61	10.81
4958	NASDAQ	KLIC	Mon, Jan 30, 2012	11.04	11.25	10.97	11.21
4957	NASDAQ	KLIC	Fri, Jan 27, 2012	11.05	11.32	11.05	11.16
4956	NASDAQ	KLIC	Thu, Jan 26, 2012	11.27	11.33	10.99	11.07
4955	NASDAQ	KLIC	Wed, Jan 25, 2012	11.27	11.27	11.06	11.17
4954	NASDAQ	KLIC	Tue, Jan 24, 2012	11.06	11.33	10.96	11.24
4953	NASDAQ	KLIC	Mon, Jan 23, 2012	11.10	11.47	11.00	11.17
4952	NASDAQ	KLIC	Fri, Jan 20, 2012	11.08	11.17	10.92	11.15
4951	NASDAQ	KLIC	Thu, Jan 19, 2012	11.00	11.24	10.92	11.13
4950	NASDAQ	KLIC	Wed, Jan 18, 2012	10.49	11.01	10.43	10.97
4949	NASDAQ	KLIC	Tue, Jan 17, 2012	10.47	10.65	10.37	10.48
4948	NASDAQ	KLIC	Fri, Jan 13, 2012	10.46	10.68	10.39	10.48
4947	NASDAQ	KLIC	Thu, Jan 12, 2012	10.65	10.84	10.50	10.69
4946	NASDAQ	KLIC	Wed, Jan 11, 2012	10.22	10.78	10.03	10.66
4945	NASDAQ	KLIC	Tue, Jan 10, 2012	10.48	10.50	10.21	10.30
4944	NASDAQ	KLIC	Mon, Jan 9, 2012	10.25	10.48	9.97	10.37
4943	NASDAQ	KLIC	Fri, Jan 6, 2012	9.78	10.35	9.55	10.32
4942	NASDAQ	KLIC	Thu, Jan 5, 2012	9.53	9.79	9.47	9.77
4941	NASDAQ	KLIC	Wed, Jan 4, 2012	9.41	9.64	9.32	9.59
4940	NASDAQ	KLIC	Tue, Jan 3, 2012	9.52	9.74	9.41	9.50
4939	NASDAQ	KLIC	Fri, Dec 30, 2011	9.31	9.42	9.25	9.25
4938	NASDAQ	KLIC	Thu, Dec 29, 2011	9.25	9.42	9.19	9.34
4937	NASDAQ	KLIC	Wed, Dec 28, 2011	9.45	9.72	9.19	9.21
4936	NASDAQ	KLIC	Tue, Dec 27, 2011	9.33	9.58	9.30	9.48
4935	NASDAQ	KLIC	Fri, Dec 23, 2011	9.27	9.44	9.11	9.38
4934	NASDAQ	KLIC	Thu, Dec 22, 2011	9.21	9.45	9.21	9.26
4933	NASDAQ	KLIC	Wed, Dec 21, 2011	9.25	9.25	8.90	9.20
4932	NASDAQ	KLIC	Tue, Dec 20, 2011	8.89	9.27	8.81	9.25
4931	NASDAQ	KLIC	Mon, Dec 19, 2011	8.69	8.98	8.61	8.62
4930	NASDAQ	KLIC	Fri, Dec 16, 2011	8.86	9.08	8.57	8.61
4929	NASDAQ	KLIC	Thu, Dec 15, 2011	8.75	9.00	8.67	8.76
4928	NASDAQ	KLIC	Wed, Dec 14, 2011	8.64	8.74	8.52	8.56
4927	NASDAQ	KLIC	Tue, Dec 13, 2011	9.18	9.30	8.58	8.74
4926	NASDAQ	KLIC	Mon, Dec 12, 2011	9.20	9.26	8.94	9.09
4925	NASDAQ	KLIC	Fri, Dec 9, 2011	9.08	9.52	8.90	9.43
4924	NASDAQ	KLIC	Thu, Dec 8, 2011	9.32	9.49	9.00	9.03
4923	NASDAQ	KLIC	Wed, Dec 7, 2011	9.33	9.49	9.12	9.43
4922	NASDAQ	KLIC	Tue, Dec 6, 2011	9.54	9.60	9.32	9.42
4921	NASDAQ	KLIC	Mon, Dec 5, 2011	9.49	9.73	9.26	9.52
4920	NASDAQ	KLIC	Fri, Dec 2, 2011	9.20	9.49	9.12	9.26
4919	NASDAQ	KLIC	Thu, Dec 1, 2011	9.06	9.17	8.77	9.06
4918	NASDAQ	KLIC	Wed, Nov 30, 2011	8.98	9.14	8.78	9.10
4917	NASDAQ	KLIC	Tue, Nov 29, 2011	8.38	8.61	8.24	8.52
4916	NASDAQ	KLIC	Mon, Nov 28, 2011	8.67	8.83	8.09	8.36
4915	NASDAQ	KLIC	Fri, Nov 25, 2011	8.63	8.74	8.27	8.29
4914	NASDAQ	KLIC	Wed, Nov 23, 2011	9.00	9.14	8.68	8.68
4913	NASDAQ	KLIC	Tue, Nov 22, 2011	9.45	9.58	9.09	9.11
4912	NASDAQ	KLIC	Mon, Nov 21, 2011	9.52	9.79	9.23	9.50
4911	NASDAQ	KLIC	Fri, Nov 18, 2011	9.92	10.02	9.69	9.80
4910	NASDAQ	KLIC	Thu, Nov 17, 2011	10.31	10.31	9.70	9.92
4909	NASDAQ	KLIC	Wed, Nov 16, 2011	10.52	10.69	10.32	10.36
4908	NASDAQ	KLIC	Tue, Nov 15, 2011	10.68	10.95	10.45	10.68
4907	NASDAQ	KLIC	Mon, Nov 14, 2011	10.49	11.10	10.31	10.75
4906	NASDAQ	KLIC	Fri, Nov 11, 2011	9.71	10.70	9.70	10.52
4905	NASDAQ	KLIC	Thu, Nov 10, 2011	8.89	9.89	8.65	9.59
4904	NASDAQ	KLIC	Wed, Nov 9, 2011	9.35	9.57	9.10	9.14
4903	NASDAQ	KLIC	Tue, Nov 8, 2011	9.76	9.89	9.43	9.71
4902	NASDAQ	KLIC	Mon, Nov 7, 2011	9.80	9.80	9.43	9.64
4901	NASDAQ	KLIC	Fri, Nov 4, 2011	9.40	9.92	9.40	9.80
4900	NASDAQ	KLIC	Thu, Nov 3, 2011	9.73	9.88	9.30	9.80
4899	NASDAQ	KLIC	Wed, Nov 2, 2011	9.51	9.67	9.27	9.56
4898	NASDAQ	KLIC	Tue, Nov 1, 2011	9.23	9.55	9.02	9.29
4897	NASDAQ	KLIC	Mon, Oct 31, 2011	9.84	9.95	9.64	9.65
4896	NASDAQ	KLIC	Fri, Oct 28, 2011	10.48	10.54	9.89	10.04
4895	NASDAQ	KLIC	Thu, Oct 27, 2011	10.18	10.60	10.01	10.54
4894	NASDAQ	KLIC	Wed, Oct 26, 2011	9.94	10.11	9.52	9.78
4893	NASDAQ	KLIC	Tue, Oct 25, 2011	9.80	10.21	9.72	9.78
4892	NASDAQ	KLIC	Mon, Oct 24, 2011	9.10	9.80	9.10	9.76
4891	NASDAQ	KLIC	Fri, Oct 21, 2011	9.16	9.30	8.92	9.07
4890	NASDAQ	KLIC	Thu, Oct 20, 2011	8.75	9.04	8.60	9.00
4889	NASDAQ	KLIC	Wed, Oct 19, 2011	9.01	9.17	8.73	8.88
4888	NASDAQ	KLIC	Tue, Oct 18, 2011	8.69	9.04	8.48	9.02
4887	NASDAQ	KLIC	Mon, Oct 17, 2011	8.93	8.97	8.56	8.67
4886	NASDAQ	KLIC	Fri, Oct 14, 2011	9.08	9.16	8.82	9.09
4885	NASDAQ	KLIC	Thu, Oct 13, 2011	8.89	8.97	8.67	8.95
4884	NASDAQ	KLIC	Wed, Oct 12, 2011	8.68	9.13	8.68	8.99
4883	NASDAQ	KLIC	Tue, Oct 11, 2011	8.60	8.67	8.37	8.56
4882	NASDAQ	KLIC	Mon, Oct 10, 2011	8.42	8.73	8.38	8.71
4881	NASDAQ	KLIC	Fri, Oct 7, 2011	8.40	8.61	8.10	8.17
4880	NASDAQ	KLIC	Thu, Oct 6, 2011	7.91	8.33	7.81	8.32
4879	NASDAQ	KLIC	Wed, Oct 5, 2011	7.71	8.10	7.50	7.93
4878	NASDAQ	KLIC	Tue, Oct 4, 2011	6.76	7.73	6.71	7.67
4877	NASDAQ	KLIC	Mon, Oct 3, 2011	7.48	7.56	6.85	6.87
4876	NASDAQ	KLIC	Fri, Sep 30, 2011	7.72	7.90	7.45	7.46
4875	NASDAQ	KLIC	Thu, Sep 29, 2011	7.99	8.02	7.42	7.89
4874	NASDAQ	KLIC	Wed, Sep 28, 2011	8.40	8.56	7.77	7.78
4873	NASDAQ	KLIC	Tue, Sep 27, 2011	8.39	8.72	8.31	8.41
4872	NASDAQ	KLIC	Mon, Sep 26, 2011	8.29	8.29	7.90	8.24
4871	NASDAQ	KLIC	Fri, Sep 23, 2011	8.00	8.33	7.88	8.20
4870	NASDAQ	KLIC	Thu, Sep 22, 2011	8.06	8.27	7.86	8.04
4869	NASDAQ	KLIC	Wed, Sep 21, 2011	8.56	8.74	8.27	8.28
4868	NASDAQ	KLIC	Tue, Sep 20, 2011	8.86	8.92	8.46	8.52
4867	NASDAQ	KLIC	Mon, Sep 19, 2011	8.81	8.93	8.45	8.81
4866	NASDAQ	KLIC	Fri, Sep 16, 2011	9.20	9.26	8.90	8.97
4865	NASDAQ	KLIC	Thu, Sep 15, 2011	9.29	9.29	8.85	9.14
4864	NASDAQ	KLIC	Wed, Sep 14, 2011	8.92	9.29	8.84	9.13
4863	NASDAQ	KLIC	Tue, Sep 13, 2011	8.58	8.86	8.46	8.81
4862	NASDAQ	KLIC	Mon, Sep 12, 2011	8.07	8.59	8.07	8.58
4861	NASDAQ	KLIC	Fri, Sep 9, 2011	8.24	8.56	8.09	8.20
4860	NASDAQ	KLIC	Thu, Sep 8, 2011	8.62	8.80	8.36	8.44
4859	NASDAQ	KLIC	Wed, Sep 7, 2011	8.22	8.71	8.09	8.69
4858	NASDAQ	KLIC	Tue, Sep 6, 2011	7.70	8.01	7.63	7.94
4857	NASDAQ	KLIC	Fri, Sep 2, 2011	8.14	8.31	7.93	7.98
4856	NASDAQ	KLIC	Thu, Sep 1, 2011	8.69	8.79	8.31	8.33
4855	NASDAQ	KLIC	Wed, Aug 31, 2011	9.03	9.16	8.61	8.70
4854	NASDAQ	KLIC	Tue, Aug 30, 2011	9.06	9.22	8.87	9.01
4853	NASDAQ	KLIC	Mon, Aug 29, 2011	8.83	9.19	8.75	9.16
4852	NASDAQ	KLIC	Fri, Aug 26, 2011	8.22	8.70	8.13	8.65
4851	NASDAQ	KLIC	Thu, Aug 25, 2011	8.71	8.71	8.28	8.28
4850	NASDAQ	KLIC	Wed, Aug 24, 2011	8.66	8.80	8.37	8.59
4849	NASDAQ	KLIC	Tue, Aug 23, 2011	8.21	8.73	8.16	8.69
4848	NASDAQ	KLIC	Mon, Aug 22, 2011	8.08	8.21	7.87	8.11
4847	NASDAQ	KLIC	Fri, Aug 19, 2011	7.95	8.35	7.78	7.86
4846	NASDAQ	KLIC	Thu, Aug 18, 2011	8.16	8.28	7.97	8.08
4845	NASDAQ	KLIC	Wed, Aug 17, 2011	8.70	8.86	8.44	8.53
4844	NASDAQ	KLIC	Tue, Aug 16, 2011	8.72	8.89	8.54	8.65
4843	NASDAQ	KLIC	Mon, Aug 15, 2011	8.72	8.97	8.55	8.91
4842	NASDAQ	KLIC	Fri, Aug 12, 2011	8.98	8.98	8.57	8.64
4841	NASDAQ	KLIC	Thu, Aug 11, 2011	8.07	8.93	7.95	8.77
4840	NASDAQ	KLIC	Wed, Aug 10, 2011	8.09	8.55	7.90	7.95
4839	NASDAQ	KLIC	Tue, Aug 9, 2011	8.22	8.38	7.54	8.38
4838	NASDAQ	KLIC	Mon, Aug 8, 2011	8.18	8.58	7.87	7.89
4837	NASDAQ	KLIC	Fri, Aug 5, 2011	8.96	9.11	8.24	8.60
4836	NASDAQ	KLIC	Thu, Aug 4, 2011	8.82	9.17	8.69	8.79
4835	NASDAQ	KLIC	Wed, Aug 3, 2011	8.58	9.06	8.53	9.01
4834	NASDAQ	KLIC	Tue, Aug 2, 2011	8.70	9.17	8.32	8.63
4833	NASDAQ	KLIC	Mon, Aug 1, 2011	9.47	9.74	9.10	9.27
4832	NASDAQ	KLIC	Fri, Jul 29, 2011	9.36	9.41	9.11	9.20
4831	NASDAQ	KLIC	Thu, Jul 28, 2011	9.43	9.83	9.35	9.55
4830	NASDAQ	KLIC	Wed, Jul 27, 2011	9.63	9.74	9.37	9.44
4829	NASDAQ	KLIC	Tue, Jul 26, 2011	9.90	10.01	9.70	9.85
4828	NASDAQ	KLIC	Mon, Jul 25, 2011	10.13	10.17	9.88	9.90
4827	NASDAQ	KLIC	Fri, Jul 22, 2011	10.19	10.44	10.08	10.30
4826	NASDAQ	KLIC	Thu, Jul 21, 2011	9.54	9.90	9.49	9.70
4825	NASDAQ	KLIC	Wed, Jul 20, 2011	10.10	10.10	9.40	9.49
4824	NASDAQ	KLIC	Tue, Jul 19, 2011	9.40	10.11	9.40	10.02
4823	NASDAQ	KLIC	Mon, Jul 18, 2011	9.42	9.51	9.23	9.30
4822	NASDAQ	KLIC	Fri, Jul 15, 2011	9.70	9.75	9.50	9.60
4821	NASDAQ	KLIC	Thu, Jul 14, 2011	9.88	10.03	9.56	9.64
4820	NASDAQ	KLIC	Wed, Jul 13, 2011	9.85	10.00	9.72	9.86
4819	NASDAQ	KLIC	Tue, Jul 12, 2011	10.57	10.59	9.61	9.70
4818	NASDAQ	KLIC	Mon, Jul 11, 2011	11.16	11.22	10.65	10.69
4817	NASDAQ	KLIC	Fri, Jul 8, 2011	11.50	11.64	11.23	11.34
4816	NASDAQ	KLIC	Thu, Jul 7, 2011	11.43	11.90	11.42	11.75
4815	NASDAQ	KLIC	Wed, Jul 6, 2011	11.42	11.48	11.08	11.30
4814	NASDAQ	KLIC	Tue, Jul 5, 2011	11.54	11.67	11.25	11.38
4813	NASDAQ	KLIC	Fri, Jul 1, 2011	11.19	11.53	11.00	11.41
4812	NASDAQ	KLIC	Thu, Jun 30, 2011	10.80	11.22	10.80	11.14
4811	NASDAQ	KLIC	Wed, Jun 29, 2011	10.71	10.88	10.62	10.71
4810	NASDAQ	KLIC	Tue, Jun 28, 2011	10.80	10.93	10.56	10.64
4809	NASDAQ	KLIC	Mon, Jun 27, 2011	10.96	11.00	10.72	10.81
4808	NASDAQ	KLIC	Fri, Jun 24, 2011	10.90	11.24	10.80	11.01
4807	NASDAQ	KLIC	Thu, Jun 23, 2011	10.52	10.90	10.33	10.86
4806	NASDAQ	KLIC	Wed, Jun 22, 2011	10.87	10.97	10.72	10.77
4805	NASDAQ	KLIC	Tue, Jun 21, 2011	10.39	10.97	10.31	10.91
4804	NASDAQ	KLIC	Mon, Jun 20, 2011	10.08	10.39	10.08	10.30
4803	NASDAQ	KLIC	Fri, Jun 17, 2011	10.39	10.55	10.07	10.20
4802	NASDAQ	KLIC	Thu, Jun 16, 2011	10.52	10.65	10.09	10.26
4801	NASDAQ	KLIC	Wed, Jun 15, 2011	10.87	11.07	10.45	10.53
4800	NASDAQ	KLIC	Tue, Jun 14, 2011	10.45	11.14	10.45	11.01
4799	NASDAQ	KLIC	Mon, Jun 13, 2011	10.58	10.71	10.27	10.31
4798	NASDAQ	KLIC	Fri, Jun 10, 2011	10.62	10.67	10.07	10.48
4797	NASDAQ	KLIC	Thu, Jun 9, 2011	10.82	11.12	10.70	10.75
4796	NASDAQ	KLIC	Wed, Jun 8, 2011	11.08	11.14	10.67	10.71
4795	NASDAQ	KLIC	Tue, Jun 7, 2011	11.20	11.37	11.14	11.15
4794	NASDAQ	KLIC	Mon, Jun 6, 2011	11.65	11.65	11.09	11.11
4793	NASDAQ	KLIC	Fri, Jun 3, 2011	11.33	11.53	11.06	11.19
4792	NASDAQ	KLIC	Thu, Jun 2, 2011	11.64	11.84	11.56	11.58
4791	NASDAQ	KLIC	Wed, Jun 1, 2011	12.05	12.10	11.60	11.66
4790	NASDAQ	KLIC	Tue, May 31, 2011	11.77	12.18	11.66	12.15
4789	NASDAQ	KLIC	Fri, May 27, 2011	11.65	11.89	11.53	11.59
4788	NASDAQ	KLIC	Thu, May 26, 2011	11.54	11.71	11.29	11.61
4787	NASDAQ	KLIC	Wed, May 25, 2011	11.44	11.78	11.42	11.59
4786	NASDAQ	KLIC	Tue, May 24, 2011	11.69	11.78	11.47	11.48
4785	NASDAQ	KLIC	Mon, May 23, 2011	11.58	11.80	11.46	11.51
4784	NASDAQ	KLIC	Fri, May 20, 2011	11.93	12.10	11.75	11.87
4783	NASDAQ	KLIC	Thu, May 19, 2011	12.15	12.18	11.86	11.87
4782	NASDAQ	KLIC	Wed, May 18, 2011	11.76	12.25	11.72	12.16
4781	NASDAQ	KLIC	Tue, May 17, 2011	11.89	11.98	11.61	11.72
4780	NASDAQ	KLIC	Mon, May 16, 2011	12.15	12.48	11.96	11.98
4779	NASDAQ	KLIC	Fri, May 13, 2011	12.38	12.56	12.09	12.18
4778	NASDAQ	KLIC	Thu, May 12, 2011	12.00	12.72	11.88	12.37
4777	NASDAQ	KLIC	Wed, May 11, 2011	12.37	12.38	11.90	12.00
4776	NASDAQ	KLIC	Tue, May 10, 2011	12.57	12.70	12.29	12.47
4775	NASDAQ	KLIC	Mon, May 9, 2011	12.05	12.53	11.84	12.46
4774	NASDAQ	KLIC	Fri, May 6, 2011	11.54	12.04	11.25	11.98
4773	NASDAQ	KLIC	Thu, May 5, 2011	10.49	11.62	10.40	11.45
4772	NASDAQ	KLIC	Wed, May 4, 2011	10.20	10.78	10.20	10.65
4771	NASDAQ	KLIC	Tue, May 3, 2011	10.33	10.53	9.95	10.20
4770	NASDAQ	KLIC	Mon, May 2, 2011	9.10	9.18	8.99	9.03
4769	NASDAQ	KLIC	Fri, Apr 29, 2011	8.72	9.07	8.71	9.06
4768	NASDAQ	KLIC	Thu, Apr 28, 2011	9.07	9.07	8.64	8.76
4767	NASDAQ	KLIC	Wed, Apr 27, 2011	9.01	9.12	8.91	9.09
4766	NASDAQ	KLIC	Tue, Apr 26, 2011	8.68	9.06	8.64	9.00
4765	NASDAQ	KLIC	Mon, Apr 25, 2011	8.76	8.76	8.51	8.61
4764	NASDAQ	KLIC	Thu, Apr 21, 2011	8.68	8.77	8.51	8.76
4763	NASDAQ	KLIC	Wed, Apr 20, 2011	8.39	8.62	8.36	8.59
4762	NASDAQ	KLIC	Tue, Apr 19, 2011	8.06	8.13	7.92	8.12
4761	NASDAQ	KLIC	Mon, Apr 18, 2011	8.16	8.21	7.93	8.06
4760	NASDAQ	KLIC	Fri, Apr 15, 2011	8.39	8.40	8.22	8.38
4759	NASDAQ	KLIC	Thu, Apr 14, 2011	8.13	8.41	8.05	8.41
4758	NASDAQ	KLIC	Wed, Apr 13, 2011	8.31	8.35	8.12	8.26
4757	NASDAQ	KLIC	Tue, Apr 12, 2011	8.54	8.58	8.18	8.25
4756	NASDAQ	KLIC	Mon, Apr 11, 2011	9.32	10.42	8.60	8.64
4755	NASDAQ	KLIC	Fri, Apr 8, 2011	9.04	9.06	8.77	8.82
4754	NASDAQ	KLIC	Thu, Apr 7, 2011	9.15	9.15	8.95	8.99
4753	NASDAQ	KLIC	Wed, Apr 6, 2011	9.12	9.25	9.08	9.18
4752	NASDAQ	KLIC	Tue, Apr 5, 2011	8.97	9.23	8.91	9.10
4751	NASDAQ	KLIC	Mon, Apr 4, 2011	9.28	9.30	8.87	8.95
4750	NASDAQ	KLIC	Fri, Apr 1, 2011	9.46	9.48	9.08	9.17
4749	NASDAQ	KLIC	Thu, Mar 31, 2011	9.28	9.40	9.22	9.35
4748	NASDAQ	KLIC	Wed, Mar 30, 2011	9.44	9.48	9.22	9.30
4747	NASDAQ	KLIC	Tue, Mar 29, 2011	9.44	9.53	9.27	9.36
4746	NASDAQ	KLIC	Mon, Mar 28, 2011	9.54	9.60	9.31	9.41
4745	NASDAQ	KLIC	Fri, Mar 25, 2011	9.21	9.70	9.21	9.54
4744	NASDAQ	KLIC	Thu, Mar 24, 2011	8.99	9.35	8.96	9.17
4743	NASDAQ	KLIC	Wed, Mar 23, 2011	8.78	8.97	8.65	8.90
4742	NASDAQ	KLIC	Tue, Mar 22, 2011	8.80	8.88	8.69	8.82
4741	NASDAQ	KLIC	Mon, Mar 21, 2011	8.75	8.88	8.69	8.84
4740	NASDAQ	KLIC	Fri, Mar 18, 2011	8.54	8.63	8.41	8.60
4739	NASDAQ	KLIC	Thu, Mar 17, 2011	8.50	8.61	8.38	8.39
4738	NASDAQ	KLIC	Wed, Mar 16, 2011	8.42	8.69	8.20	8.27
4737	NASDAQ	KLIC	Tue, Mar 15, 2011	8.26	8.54	8.05	8.46
4736	NASDAQ	KLIC	Mon, Mar 14, 2011	8.60	8.74	8.48	8.59
4735	NASDAQ	KLIC	Fri, Mar 11, 2011	8.61	8.82	8.50	8.71
4734	NASDAQ	KLIC	Thu, Mar 10, 2011	8.92	8.93	8.56	8.67
4733	NASDAQ	KLIC	Wed, Mar 9, 2011	9.37	9.37	9.06	9.07
4732	NASDAQ	KLIC	Tue, Mar 8, 2011	9.21	9.55	9.09	9.39
4731	NASDAQ	KLIC	Mon, Mar 7, 2011	9.75	9.75	9.12	9.25
4730	NASDAQ	KLIC	Fri, Mar 4, 2011	9.92	9.92	9.57	9.71
4729	NASDAQ	KLIC	Thu, Mar 3, 2011	9.66	9.97	9.66	9.84
4728	NASDAQ	KLIC	Wed, Mar 2, 2011	9.20	9.67	9.17	9.54
4727	NASDAQ	KLIC	Tue, Mar 1, 2011	9.62	9.78	9.17	9.19
4726	NASDAQ	KLIC	Mon, Feb 28, 2011	9.82	9.84	9.43	9.59
4725	NASDAQ	KLIC	Fri, Feb 25, 2011	9.39	9.73	9.35	9.73
4724	NASDAQ	KLIC	Thu, Feb 24, 2011	9.18	9.40	9.06	9.31
4723	NASDAQ	KLIC	Wed, Feb 23, 2011	9.53	9.58	9.01	9.18
4722	NASDAQ	KLIC	Tue, Feb 22, 2011	9.93	10.19	9.53	9.53
4721	NASDAQ	KLIC	Fri, Feb 18, 2011	10.32	10.35	10.02	10.04
4720	NASDAQ	KLIC	Thu, Feb 17, 2011	9.89	10.35	9.87	10.24
4719	NASDAQ	KLIC	Wed, Feb 16, 2011	9.82	10.00	9.80	9.87
4718	NASDAQ	KLIC	Tue, Feb 15, 2011	9.84	9.89	9.69	9.78
4717	NASDAQ	KLIC	Mon, Feb 14, 2011	9.79	9.97	9.61	9.93
4716	NASDAQ	KLIC	Fri, Feb 11, 2011	9.81	9.97	9.79	9.85
4715	NASDAQ	KLIC	Thu, Feb 10, 2011	9.59	9.91	9.56	9.86
4714	NASDAQ	KLIC	Wed, Feb 9, 2011	9.96	10.00	9.68	9.75
4713	NASDAQ	KLIC	Tue, Feb 8, 2011	9.98	10.07	9.78	10.00
4712	NASDAQ	KLIC	Mon, Feb 7, 2011	9.70	10.20	9.68	9.97
4711	NASDAQ	KLIC	Fri, Feb 4, 2011	10.04	10.14	9.62	9.66
4710	NASDAQ	KLIC	Thu, Feb 3, 2011	10.29	10.31	9.99	10.06
4709	NASDAQ	KLIC	Wed, Feb 2, 2011	10.23	10.43	10.08	10.28
4708	NASDAQ	KLIC	Tue, Feb 1, 2011	10.00	10.58	9.85	10.29
4707	NASDAQ	KLIC	Mon, Jan 31, 2011	9.50	9.85	9.45	9.75
4706	NASDAQ	KLIC	Fri, Jan 28, 2011	9.99	10.00	9.40	9.41
4705	NASDAQ	KLIC	Thu, Jan 27, 2011	9.54	10.00	9.48	9.98
4704	NASDAQ	KLIC	Wed, Jan 26, 2011	9.03	9.53	9.03	9.47
4703	NASDAQ	KLIC	Tue, Jan 25, 2011	9.14	9.23	8.81	8.89
4702	NASDAQ	KLIC	Mon, Jan 24, 2011	9.02	9.34	8.96	9.25
4701	NASDAQ	KLIC	Fri, Jan 21, 2011	9.20	9.30	8.94	8.95
4700	NASDAQ	KLIC	Thu, Jan 20, 2011	9.06	9.17	8.77	9.12
4699	NASDAQ	KLIC	Wed, Jan 19, 2011	9.66	9.66	9.11	9.18
4698	NASDAQ	KLIC	Tue, Jan 18, 2011	9.80	9.83	9.51	9.62
4697	NASDAQ	KLIC	Fri, Jan 14, 2011	9.38	9.91	9.38	9.79
4696	NASDAQ	KLIC	Thu, Jan 13, 2011	9.49	9.50	9.31	9.41
4695	NASDAQ	KLIC	Wed, Jan 12, 2011	9.15	9.53	9.09	9.45
4694	NASDAQ	KLIC	Tue, Jan 11, 2011	9.13	9.35	9.00	9.03
4693	NASDAQ	KLIC	Mon, Jan 10, 2011	8.75	9.24	8.60	9.18
4692	NASDAQ	KLIC	Fri, Jan 7, 2011	8.02	8.75	7.99	8.66
4691	NASDAQ	KLIC	Thu, Jan 6, 2011	7.27	7.64	7.25	7.64
4690	NASDAQ	KLIC	Wed, Jan 5, 2011	7.30	7.32	7.20	7.28
4689	NASDAQ	KLIC	Tue, Jan 4, 2011	7.28	7.39	7.16	7.31
4688	NASDAQ	KLIC	Mon, Jan 3, 2011	7.28	7.54	7.18	7.20
4687	NASDAQ	KLIC	Fri, Dec 31, 2010	7.21	7.35	7.18	7.20
4686	NASDAQ	KLIC	Thu, Dec 30, 2010	7.31	7.38	7.22	7.22
4685	NASDAQ	KLIC	Wed, Dec 29, 2010	7.50	7.51	7.31	7.34
4684	NASDAQ	KLIC	Tue, Dec 28, 2010	7.62	7.68	7.48	7.49
4683	NASDAQ	KLIC	Mon, Dec 27, 2010	7.42	7.65	7.37	7.62
4682	NASDAQ	KLIC	Thu, Dec 23, 2010	7.47	7.50	7.41	7.44
4681	NASDAQ	KLIC	Wed, Dec 22, 2010	7.55	7.56	7.43	7.47
4680	NASDAQ	KLIC	Tue, Dec 21, 2010	7.50	7.60	7.45	7.52
4679	NASDAQ	KLIC	Mon, Dec 20, 2010	7.45	7.59	7.38	7.47
4678	NASDAQ	KLIC	Fri, Dec 17, 2010	7.29	7.46	7.17	7.46
4677	NASDAQ	KLIC	Thu, Dec 16, 2010	7.20	7.35	7.14	7.24
4676	NASDAQ	KLIC	Wed, Dec 15, 2010	7.42	7.42	7.18	7.18
4675	NASDAQ	KLIC	Tue, Dec 14, 2010	7.55	7.64	7.43	7.46
4674	NASDAQ	KLIC	Mon, Dec 13, 2010	7.82	7.82	7.51	7.51
4673	NASDAQ	KLIC	Fri, Dec 10, 2010	7.73	7.82	7.61	7.75
4672	NASDAQ	KLIC	Thu, Dec 9, 2010	7.60	7.74	7.51	7.68
4671	NASDAQ	KLIC	Wed, Dec 8, 2010	7.41	7.60	7.36	7.53
4670	NASDAQ	KLIC	Tue, Dec 7, 2010	7.50	7.64	7.38	7.41
4669	NASDAQ	KLIC	Mon, Dec 6, 2010	7.10	7.54	7.06	7.41
4668	NASDAQ	KLIC	Fri, Dec 3, 2010	7.05	7.15	7.00	7.12
4667	NASDAQ	KLIC	Thu, Dec 2, 2010	7.00	7.16	6.82	7.14
4666	NASDAQ	KLIC	Wed, Dec 1, 2010	6.79	7.04	6.71	7.00
4665	NASDAQ	KLIC	Tue, Nov 30, 2010	6.58	6.70	6.47	6.65
4664	NASDAQ	KLIC	Mon, Nov 29, 2010	6.74	6.87	6.63	6.75
4663	NASDAQ	KLIC	Fri, Nov 26, 2010	6.58	6.73	6.52	6.68
4662	NASDAQ	KLIC	Wed, Nov 24, 2010	6.38	6.68	6.38	6.66
4661	NASDAQ	KLIC	Tue, Nov 23, 2010	6.23	6.38	6.12	6.32
4660	NASDAQ	KLIC	Mon, Nov 22, 2010	6.19	6.34	6.09	6.32
4659	NASDAQ	KLIC	Fri, Nov 19, 2010	5.94	6.22	5.90	6.19
4658	NASDAQ	KLIC	Thu, Nov 18, 2010	5.73	6.00	5.72	5.94
4657	NASDAQ	KLIC	Wed, Nov 17, 2010	5.79	5.80	5.63	5.64
4656	NASDAQ	KLIC	Tue, Nov 16, 2010	5.82	5.88	5.65	5.75
4655	NASDAQ	KLIC	Mon, Nov 15, 2010	6.01	6.06	5.86	5.88
4654	NASDAQ	KLIC	Fri, Nov 12, 2010	6.15	6.25	5.85	5.95
4653	NASDAQ	KLIC	Thu, Nov 11, 2010	5.95	6.31	5.90	6.27
4652	NASDAQ	KLIC	Wed, Nov 10, 2010	6.39	6.46	6.17	6.37
4651	NASDAQ	KLIC	Tue, Nov 9, 2010	6.64	6.70	6.40	6.43
4650	NASDAQ	KLIC	Mon, Nov 8, 2010	6.61	6.69	6.57	6.62
4649	NASDAQ	KLIC	Fri, Nov 5, 2010	6.56	6.78	6.47	6.61
4648	NASDAQ	KLIC	Thu, Nov 4, 2010	6.30	6.61	6.27	6.61
4647	NASDAQ	KLIC	Wed, Nov 3, 2010	6.17	6.22	6.01	6.22
4646	NASDAQ	KLIC	Tue, Nov 2, 2010	6.05	6.17	5.98	6.12
4645	NASDAQ	KLIC	Mon, Nov 1, 2010	6.24	6.30	5.98	6.00
4644	NASDAQ	KLIC	Fri, Oct 29, 2010	6.20	6.34	6.18	6.22
4643	NASDAQ	KLIC	Thu, Oct 28, 2010	6.35	6.35	6.12	6.22
4642	NASDAQ	KLIC	Wed, Oct 27, 2010	6.09	6.33	6.09	6.33
4641	NASDAQ	KLIC	Tue, Oct 26, 2010	6.05	6.19	6.01	6.12
4640	NASDAQ	KLIC	Mon, Oct 25, 2010	6.07	6.17	6.02	6.09
4639	NASDAQ	KLIC	Fri, Oct 22, 2010	5.82	6.02	5.79	5.99
4638	NASDAQ	KLIC	Thu, Oct 21, 2010	5.97	6.04	5.75	5.80
4637	NASDAQ	KLIC	Wed, Oct 20, 2010	6.12	6.19	5.94	5.95
4636	NASDAQ	KLIC	Tue, Oct 19, 2010	6.09	6.28	6.00	6.12
4635	NASDAQ	KLIC	Mon, Oct 18, 2010	6.20	6.28	6.05	6.21
4634	NASDAQ	KLIC	Fri, Oct 15, 2010	5.97	6.20	5.83	6.17
4633	NASDAQ	KLIC	Thu, Oct 14, 2010	5.83	5.91	5.77	5.88
4632	NASDAQ	KLIC	Wed, Oct 13, 2010	5.90	6.00	5.82	5.82
4631	NASDAQ	KLIC	Tue, Oct 12, 2010	5.61	5.89	5.58	5.86
4630	NASDAQ	KLIC	Mon, Oct 11, 2010	5.87	5.87	5.70	5.71
4629	NASDAQ	KLIC	Fri, Oct 8, 2010	5.58	5.98	5.51	5.85
4628	NASDAQ	KLIC	Thu, Oct 7, 2010	6.39	6.56	6.34	6.49
4627	NASDAQ	KLIC	Wed, Oct 6, 2010	6.28	6.39	6.19	6.33
4626	NASDAQ	KLIC	Tue, Oct 5, 2010	6.15	6.35	6.00	6.29
4625	NASDAQ	KLIC	Mon, Oct 4, 2010	6.22	6.25	6.01	6.04
4624	NASDAQ	KLIC	Fri, Oct 1, 2010	6.25	6.33	6.21	6.27
4623	NASDAQ	KLIC	Thu, Sep 30, 2010	6.34	6.40	5.98	6.19
4622	NASDAQ	KLIC	Wed, Sep 29, 2010	6.11	6.39	6.10	6.29
4621	NASDAQ	KLIC	Tue, Sep 28, 2010	6.01	6.17	5.82	6.16
4620	NASDAQ	KLIC	Mon, Sep 27, 2010	6.00	6.05	5.88	5.96
4619	NASDAQ	KLIC	Fri, Sep 24, 2010	5.80	5.98	5.77	5.98
4618	NASDAQ	KLIC	Thu, Sep 23, 2010	5.71	5.92	5.63	5.70
4617	NASDAQ	KLIC	Wed, Sep 22, 2010	5.97	6.01	5.72	5.77
4616	NASDAQ	KLIC	Tue, Sep 21, 2010	5.93	6.08	5.83	6.00
4615	NASDAQ	KLIC	Mon, Sep 20, 2010	5.61	5.95	5.56	5.92
4614	NASDAQ	KLIC	Fri, Sep 17, 2010	5.60	5.68	5.50	5.57
4613	NASDAQ	KLIC	Thu, Sep 16, 2010	5.44	5.52	5.41	5.50
4612	NASDAQ	KLIC	Wed, Sep 15, 2010	5.46	5.50	5.27	5.48
4611	NASDAQ	KLIC	Tue, Sep 14, 2010	5.40	5.72	5.36	5.52
4610	NASDAQ	KLIC	Mon, Sep 13, 2010	5.56	5.79	5.56	5.66
4609	NASDAQ	KLIC	Fri, Sep 10, 2010	5.64	5.65	5.30	5.44
4608	NASDAQ	KLIC	Thu, Sep 9, 2010	5.80	5.86	5.55	5.60
4607	NASDAQ	KLIC	Wed, Sep 8, 2010	5.77	5.90	5.70	5.72
4606	NASDAQ	KLIC	Tue, Sep 7, 2010	6.13	6.13	5.70	5.72
4605	NASDAQ	KLIC	Fri, Sep 3, 2010	6.01	6.26	5.98	6.18
4604	NASDAQ	KLIC	Thu, Sep 2, 2010	5.90	5.93	5.76	5.90
4603	NASDAQ	KLIC	Wed, Sep 1, 2010	5.87	5.92	5.64	5.86
4602	NASDAQ	KLIC	Tue, Aug 31, 2010	5.76	5.87	5.65	5.75
4601	NASDAQ	KLIC	Mon, Aug 30, 2010	6.02	6.06	5.80	5.80
4600	NASDAQ	KLIC	Fri, Aug 27, 2010	5.78	6.07	5.65	6.03
4599	NASDAQ	KLIC	Thu, Aug 26, 2010	6.16	6.17	5.62	5.65
4598	NASDAQ	KLIC	Wed, Aug 25, 2010	5.94	6.14	5.85	6.12
4597	NASDAQ	KLIC	Tue, Aug 24, 2010	5.91	6.09	5.80	6.02
4596	NASDAQ	KLIC	Mon, Aug 23, 2010	6.21	6.27	6.04	6.05
4595	NASDAQ	KLIC	Fri, Aug 20, 2010	6.06	6.19	6.05	6.13
4594	NASDAQ	KLIC	Thu, Aug 19, 2010	6.21	6.29	6.02	6.07
4593	NASDAQ	KLIC	Wed, Aug 18, 2010	5.99	6.33	5.95	6.27
4592	NASDAQ	KLIC	Tue, Aug 17, 2010	5.77	6.09	5.72	5.95
4591	NASDAQ	KLIC	Mon, Aug 16, 2010	5.67	5.77	5.58	5.64
4590	NASDAQ	KLIC	Fri, Aug 13, 2010	5.74	5.85	5.69	5.69
4589	NASDAQ	KLIC	Thu, Aug 12, 2010	5.82	5.83	5.65	5.67
4588	NASDAQ	KLIC	Wed, Aug 11, 2010	6.07	6.15	5.76	5.88
4587	NASDAQ	KLIC	Tue, Aug 10, 2010	6.60	6.61	6.23	6.28
4586	NASDAQ	KLIC	Mon, Aug 9, 2010	6.86	6.90	6.66	6.68
4585	NASDAQ	KLIC	Fri, Aug 6, 2010	7.32	7.32	6.65	6.79
4584	NASDAQ	KLIC	Thu, Aug 5, 2010	8.06	8.07	7.49	7.62
4583	NASDAQ	KLIC	Wed, Aug 4, 2010	6.93	7.28	6.93	7.20
4582	NASDAQ	KLIC	Tue, Aug 3, 2010	6.85	6.94	6.75	6.90
4581	NASDAQ	KLIC	Mon, Aug 2, 2010	6.89	7.00	6.82	6.86
4580	NASDAQ	KLIC	Fri, Jul 30, 2010	6.80	6.88	6.55	6.72
4579	NASDAQ	KLIC	Thu, Jul 29, 2010	6.84	7.02	6.72	6.95
4578	NASDAQ	KLIC	Wed, Jul 28, 2010	7.23	7.29	6.76	6.79
4577	NASDAQ	KLIC	Tue, Jul 27, 2010	7.37	7.44	7.16	7.27
4576	NASDAQ	KLIC	Mon, Jul 26, 2010	7.16	7.31	7.01	7.31
4575	NASDAQ	KLIC	Fri, Jul 23, 2010	7.00	7.18	6.83	7.17
4574	NASDAQ	KLIC	Thu, Jul 22, 2010	6.77	7.00	6.72	7.00
4573	NASDAQ	KLIC	Wed, Jul 21, 2010	7.01	7.01	6.59	6.59
4572	NASDAQ	KLIC	Tue, Jul 20, 2010	6.65	6.96	6.55	6.93
4571	NASDAQ	KLIC	Mon, Jul 19, 2010	6.95	6.98	6.55	6.81
4570	NASDAQ	KLIC	Fri, Jul 16, 2010	6.92	7.08	6.83	6.89
4569	NASDAQ	KLIC	Thu, Jul 15, 2010	7.98	7.98	6.88	6.95
4568	NASDAQ	KLIC	Wed, Jul 14, 2010	8.87	8.87	7.75	7.99
4567	NASDAQ	KLIC	Tue, Jul 13, 2010	8.54	8.70	8.40	8.66
4566	NASDAQ	KLIC	Mon, Jul 12, 2010	8.51	8.53	8.07	8.39
4565	NASDAQ	KLIC	Fri, Jul 9, 2010	7.59	8.34	7.59	8.32
4564	NASDAQ	KLIC	Thu, Jul 8, 2010	7.72	7.76	7.45	7.59
4563	NASDAQ	KLIC	Wed, Jul 7, 2010	7.35	7.62	7.17	7.58
4562	NASDAQ	KLIC	Tue, Jul 6, 2010	7.27	7.50	7.21	7.32
4561	NASDAQ	KLIC	Fri, Jul 2, 2010	7.28	7.28	6.90	7.01
4560	NASDAQ	KLIC	Thu, Jul 1, 2010	7.02	7.25	6.74	7.21
4559	NASDAQ	KLIC	Wed, Jun 30, 2010	7.23	7.42	6.97	7.02
4558	NASDAQ	KLIC	Tue, Jun 29, 2010	7.48	7.57	7.14	7.21
4557	NASDAQ	KLIC	Mon, Jun 28, 2010	7.52	7.90	7.45	7.74
4556	NASDAQ	KLIC	Fri, Jun 25, 2010	7.50	7.53	7.09	7.50
4555	NASDAQ	KLIC	Thu, Jun 24, 2010	7.48	7.65	7.30	7.47
4554	NASDAQ	KLIC	Wed, Jun 23, 2010	7.65	7.78	7.41	7.58
4553	NASDAQ	KLIC	Tue, Jun 22, 2010	7.98	8.15	7.63	7.66
4552	NASDAQ	KLIC	Mon, Jun 21, 2010	8.40	8.40	7.85	7.94
4551	NASDAQ	KLIC	Fri, Jun 18, 2010	8.17	8.31	8.06	8.18
4550	NASDAQ	KLIC	Thu, Jun 17, 2010	8.23	8.23	7.93	8.10
4549	NASDAQ	KLIC	Wed, Jun 16, 2010	8.10	8.25	7.94	8.14
4548	NASDAQ	KLIC	Tue, Jun 15, 2010	7.54	8.19	7.50	8.14
4547	NASDAQ	KLIC	Mon, Jun 14, 2010	7.69	7.80	7.51	7.58
4546	NASDAQ	KLIC	Fri, Jun 11, 2010	7.00	7.60	6.91	7.59
4545	NASDAQ	KLIC	Thu, Jun 10, 2010	6.78	7.19	6.68	7.18
4544	NASDAQ	KLIC	Wed, Jun 9, 2010	6.40	6.89	6.40	6.59
4543	NASDAQ	KLIC	Tue, Jun 8, 2010	6.37	6.47	6.13	6.28
4542	NASDAQ	KLIC	Mon, Jun 7, 2010	6.72	6.82	6.33	6.34
4541	NASDAQ	KLIC	Fri, Jun 4, 2010	6.85	6.97	6.63	6.64
4540	NASDAQ	KLIC	Thu, Jun 3, 2010	7.05	7.21	7.00	7.15
4539	NASDAQ	KLIC	Wed, Jun 2, 2010	6.83	7.12	6.73	7.05
4538	NASDAQ	KLIC	Tue, Jun 1, 2010	6.89	7.07	6.71	6.73
4537	NASDAQ	KLIC	Fri, May 28, 2010	7.32	7.32	6.96	6.96
4536	NASDAQ	KLIC	Thu, May 27, 2010	6.81	7.35	6.80	7.35
4535	NASDAQ	KLIC	Wed, May 26, 2010	6.66	6.97	6.49	6.57
4534	NASDAQ	KLIC	Tue, May 25, 2010	6.51	6.64	6.30	6.61
4533	NASDAQ	KLIC	Mon, May 24, 2010	6.63	7.02	6.56	6.80
4532	NASDAQ	KLIC	Fri, May 21, 2010	6.41	6.97	6.36	6.73
4531	NASDAQ	KLIC	Thu, May 20, 2010	6.86	6.86	6.39	6.56
4530	NASDAQ	KLIC	Wed, May 19, 2010	6.85	7.19	6.76	7.02
4529	NASDAQ	KLIC	Tue, May 18, 2010	7.50	7.55	6.83	6.85
4528	NASDAQ	KLIC	Mon, May 17, 2010	7.34	7.50	6.96	7.39
4527	NASDAQ	KLIC	Fri, May 14, 2010	7.50	7.50	7.14	7.30
4526	NASDAQ	KLIC	Thu, May 13, 2010	7.72	7.97	7.54	7.65
4525	NASDAQ	KLIC	Wed, May 12, 2010	7.40	7.83	7.27	7.80
4524	NASDAQ	KLIC	Tue, May 11, 2010	7.43	7.70	7.21	7.38
4523	NASDAQ	KLIC	Mon, May 10, 2010	7.63	7.70	7.36	7.51
4522	NASDAQ	KLIC	Fri, May 7, 2010	7.61	7.81	6.84	7.10
4521	NASDAQ	KLIC	Thu, May 6, 2010	8.11	8.34	6.62	7.55
4520	NASDAQ	KLIC	Wed, May 5, 2010	8.12	8.43	7.91	7.99
4519	NASDAQ	KLIC	Tue, May 4, 2010	8.41	8.45	8.12	8.22
4518	NASDAQ	KLIC	Mon, May 3, 2010	8.25	8.73	8.25	8.64
4517	NASDAQ	KLIC	Fri, Apr 30, 2010	8.79	8.80	8.18	8.18
4516	NASDAQ	KLIC	Thu, Apr 29, 2010	8.69	8.88	8.43	8.82
4515	NASDAQ	KLIC	Wed, Apr 28, 2010	8.51	8.66	8.27	8.65
4514	NASDAQ	KLIC	Tue, Apr 27, 2010	8.73	8.97	8.40	8.41
4513	NASDAQ	KLIC	Mon, Apr 26, 2010	8.63	8.81	8.56	8.69
4512	NASDAQ	KLIC	Fri, Apr 23, 2010	8.80	8.91	8.50	8.63
4511	NASDAQ	KLIC	Thu, Apr 22, 2010	8.27	8.86	8.17	8.82
4510	NASDAQ	KLIC	Wed, Apr 21, 2010	8.91	8.97	8.35	8.44
4509	NASDAQ	KLIC	Tue, Apr 20, 2010	8.34	8.90	8.21	8.90
4508	NASDAQ	KLIC	Mon, Apr 19, 2010	8.77	8.77	7.96	8.18
4507	NASDAQ	KLIC	Fri, Apr 16, 2010	8.77	8.78	8.41	8.63
4506	NASDAQ	KLIC	Thu, Apr 15, 2010	9.41	9.48	8.65	8.76
4505	NASDAQ	KLIC	Wed, Apr 14, 2010	9.14	9.58	9.10	9.37
4504	NASDAQ	KLIC	Tue, Apr 13, 2010	8.09	8.12	7.86	7.86
4503	NASDAQ	KLIC	Mon, Apr 12, 2010	7.88	8.23	7.83	8.12
4502	NASDAQ	KLIC	Fri, Apr 9, 2010	7.52	7.88	7.38	7.83
4501	NASDAQ	KLIC	Thu, Apr 8, 2010	7.55	7.64	7.34	7.50
4500	NASDAQ	KLIC	Wed, Apr 7, 2010	7.31	7.68	7.19	7.58
4499	NASDAQ	KLIC	Tue, Apr 6, 2010	7.39	7.39	7.05	7.15
4498	NASDAQ	KLIC	Mon, Apr 5, 2010	7.39	7.39	7.20	7.36
4497	NASDAQ	KLIC	Thu, Apr 1, 2010	7.28	7.45	7.20	7.35
4496	NASDAQ	KLIC	Wed, Mar 31, 2010	7.20	7.43	7.15	7.25
4495	NASDAQ	KLIC	Tue, Mar 30, 2010	7.11	7.30	7.07	7.27
4494	NASDAQ	KLIC	Mon, Mar 29, 2010	7.29	7.33	7.08	7.12
4493	NASDAQ	KLIC	Fri, Mar 26, 2010	7.33	7.40	7.09	7.25
4492	NASDAQ	KLIC	Thu, Mar 25, 2010	7.08	7.47	7.00	7.27
4491	NASDAQ	KLIC	Wed, Mar 24, 2010	6.94	7.16	6.80	7.02
4490	NASDAQ	KLIC	Tue, Mar 23, 2010	6.81	7.06	6.68	7.01
4489	NASDAQ	KLIC	Mon, Mar 22, 2010	6.55	6.85	6.38	6.83
4488	NASDAQ	KLIC	Fri, Mar 19, 2010	7.01	7.01	6.52	6.61
4487	NASDAQ	KLIC	Thu, Mar 18, 2010	7.12	7.13	6.90	6.96
4486	NASDAQ	KLIC	Wed, Mar 17, 2010	7.17	7.28	6.99	7.16
4485	NASDAQ	KLIC	Tue, Mar 16, 2010	6.99	7.21	6.78	7.18
4484	NASDAQ	KLIC	Mon, Mar 15, 2010	7.16	7.24	6.88	6.97
4483	NASDAQ	KLIC	Fri, Mar 12, 2010	7.43	7.48	7.10	7.32
4482	NASDAQ	KLIC	Thu, Mar 11, 2010	7.42	7.51	7.19	7.42
4481	NASDAQ	KLIC	Wed, Mar 10, 2010	7.56	7.67	7.25	7.52
4480	NASDAQ	KLIC	Tue, Mar 9, 2010	7.14	7.57	7.02	7.44
4479	NASDAQ	KLIC	Mon, Mar 8, 2010	6.88	7.20	6.88	7.08
4478	NASDAQ	KLIC	Fri, Mar 5, 2010	6.64	6.89	6.55	6.87
4477	NASDAQ	KLIC	Thu, Mar 4, 2010	6.96	6.96	6.59	6.62
4476	NASDAQ	KLIC	Wed, Mar 3, 2010	7.20	7.24	6.77	6.96
4475	NASDAQ	KLIC	Tue, Mar 2, 2010	7.06	7.15	6.95	7.14
4474	NASDAQ	KLIC	Mon, Mar 1, 2010	6.65	7.02	6.64	7.01
4473	NASDAQ	KLIC	Fri, Feb 26, 2010	6.72	6.72	6.51	6.58
4472	NASDAQ	KLIC	Thu, Feb 25, 2010	6.61	6.79	6.41	6.73
4471	NASDAQ	KLIC	Wed, Feb 24, 2010	6.75	6.98	6.55	6.73
4470	NASDAQ	KLIC	Tue, Feb 23, 2010	7.10	7.14	6.72	6.73
4469	NASDAQ	KLIC	Mon, Feb 22, 2010	7.16	7.21	7.00	7.16
4468	NASDAQ	KLIC	Fri, Feb 19, 2010	7.12	7.31	6.83	7.16
4467	NASDAQ	KLIC	Thu, Feb 18, 2010	7.21	7.22	6.90	7.18
4466	NASDAQ	KLIC	Wed, Feb 17, 2010	7.38	7.44	7.03	7.26
4465	NASDAQ	KLIC	Tue, Feb 16, 2010	7.02	7.59	6.84	7.46
4464	NASDAQ	KLIC	Fri, Feb 12, 2010	6.66	7.02	6.49	7.01
4463	NASDAQ	KLIC	Thu, Feb 11, 2010	6.62	6.83	6.41	6.75
4462	NASDAQ	KLIC	Wed, Feb 10, 2010	6.58	6.69	6.45	6.69
4461	NASDAQ	KLIC	Tue, Feb 9, 2010	6.42	6.77	6.25	6.68
4460	NASDAQ	KLIC	Mon, Feb 8, 2010	6.17	6.49	6.01	6.45
4459	NASDAQ	KLIC	Fri, Feb 5, 2010	5.67	6.36	5.56	6.31
4458	NASDAQ	KLIC	Thu, Feb 4, 2010	5.74	5.85	5.32	5.71
4457	NASDAQ	KLIC	Wed, Feb 3, 2010	5.19	5.29	5.08	5.21
4456	NASDAQ	KLIC	Tue, Feb 2, 2010	4.93	5.32	4.93	5.21
4455	NASDAQ	KLIC	Mon, Feb 1, 2010	4.65	5.00	4.65	4.91
4454	NASDAQ	KLIC	Fri, Jan 29, 2010	4.78	5.00	4.55	4.61
4453	NASDAQ	KLIC	Thu, Jan 28, 2010	5.13	5.13	4.74	4.74
4452	NASDAQ	KLIC	Wed, Jan 27, 2010	4.78	5.14	4.78	5.13
4451	NASDAQ	KLIC	Tue, Jan 26, 2010	4.98	5.04	4.80	4.81
4450	NASDAQ	KLIC	Mon, Jan 25, 2010	5.07	5.19	4.92	4.99
4449	NASDAQ	KLIC	Fri, Jan 22, 2010	5.28	5.36	4.98	5.00
4448	NASDAQ	KLIC	Thu, Jan 21, 2010	5.35	5.51	5.20	5.27
4447	NASDAQ	KLIC	Wed, Jan 20, 2010	5.27	5.39	5.20	5.29
4446	NASDAQ	KLIC	Tue, Jan 19, 2010	5.40	5.43	5.13	5.34
4445	NASDAQ	KLIC	Fri, Jan 15, 2010	5.67	5.67	5.30	5.40
4444	NASDAQ	KLIC	Thu, Jan 14, 2010	5.69	5.69	5.53	5.65
4443	NASDAQ	KLIC	Wed, Jan 13, 2010	5.55	5.80	5.48	5.73
4442	NASDAQ	KLIC	Tue, Jan 12, 2010	5.80	5.85	5.47	5.54
4441	NASDAQ	KLIC	Mon, Jan 11, 2010	6.00	6.00	5.81	5.87
4440	NASDAQ	KLIC	Fri, Jan 8, 2010	5.94	5.97	5.73	5.95
4439	NASDAQ	KLIC	Thu, Jan 7, 2010	6.04	6.07	5.77	5.96
4438	NASDAQ	KLIC	Wed, Jan 6, 2010	5.50	6.10	5.47	6.08
4437	NASDAQ	KLIC	Tue, Jan 5, 2010	5.57	5.61	5.43	5.48
4436	NASDAQ	KLIC	Mon, Jan 4, 2010	5.50	5.53	5.32	5.49
4435	NASDAQ	KLIC	Thu, Dec 31, 2009	5.43	5.50	5.38	5.39
4434	NASDAQ	KLIC	Wed, Dec 30, 2009	5.36	5.44	5.32	5.42
4433	NASDAQ	KLIC	Tue, Dec 29, 2009	5.46	5.49	5.37	5.39
4432	NASDAQ	KLIC	Mon, Dec 28, 2009	5.63	5.63	5.30	5.45
4431	NASDAQ	KLIC	Thu, Dec 24, 2009	5.69	5.70	5.45	5.64
4430	NASDAQ	KLIC	Wed, Dec 23, 2009	5.75	5.75	5.45	5.67
4429	NASDAQ	KLIC	Tue, Dec 22, 2009	5.48	5.77	5.46	5.74
4428	NASDAQ	KLIC	Mon, Dec 21, 2009	5.43	5.55	5.33	5.46
4427	NASDAQ	KLIC	Fri, Dec 18, 2009	5.47	5.50	5.31	5.39
4426	NASDAQ	KLIC	Thu, Dec 17, 2009	5.43	5.61	5.34	5.39
4425	NASDAQ	KLIC	Wed, Dec 16, 2009	5.39	5.56	5.39	5.50
4424	NASDAQ	KLIC	Tue, Dec 15, 2009	5.23	5.41	5.21	5.30
4423	NASDAQ	KLIC	Mon, Dec 14, 2009	5.15	5.32	5.11	5.24
4422	NASDAQ	KLIC	Fri, Dec 11, 2009	5.15	5.20	5.07	5.10
4421	NASDAQ	KLIC	Thu, Dec 10, 2009	5.21	5.22	5.06	5.12
4420	NASDAQ	KLIC	Wed, Dec 9, 2009	5.10	5.26	5.07	5.16
4419	NASDAQ	KLIC	Tue, Dec 8, 2009	5.11	5.22	4.96	5.16
4418	NASDAQ	KLIC	Mon, Dec 7, 2009	4.97	5.20	4.90	5.20
4417	NASDAQ	KLIC	Fri, Dec 4, 2009	4.97	5.10	4.79	5.00
4416	NASDAQ	KLIC	Thu, Dec 3, 2009	4.89	4.97	4.81	4.82
4415	NASDAQ	KLIC	Wed, Dec 2, 2009	4.80	4.99	4.77	4.86
4414	NASDAQ	KLIC	Tue, Dec 1, 2009	4.59	4.87	4.55	4.79
4413	NASDAQ	KLIC	Mon, Nov 30, 2009	4.55	4.59	4.35	4.54
4412	NASDAQ	KLIC	Fri, Nov 27, 2009	4.64	4.70	4.54	4.58
4411	NASDAQ	KLIC	Wed, Nov 25, 2009	4.74	4.83	4.73	4.77
4410	NASDAQ	KLIC	Tue, Nov 24, 2009	4.68	4.77	4.61	4.73
4409	NASDAQ	KLIC	Mon, Nov 23, 2009	4.52	4.74	4.45	4.70
4408	NASDAQ	KLIC	Fri, Nov 20, 2009	4.60	4.73	4.28	4.38
4407	NASDAQ	KLIC	Thu, Nov 19, 2009	5.28	5.28	4.50	4.64
4406	NASDAQ	KLIC	Wed, Nov 18, 2009	5.28	5.33	5.20	5.30
4405	NASDAQ	KLIC	Tue, Nov 17, 2009	5.27	5.32	5.18	5.27
4404	NASDAQ	KLIC	Mon, Nov 16, 2009	5.00	5.30	5.00	5.30
4403	NASDAQ	KLIC	Fri, Nov 13, 2009	4.95	5.06	4.84	4.92
4402	NASDAQ	KLIC	Thu, Nov 12, 2009	5.08	5.23	4.90	4.91
4401	NASDAQ	KLIC	Wed, Nov 11, 2009	5.04	5.23	4.89	5.08
4400	NASDAQ	KLIC	Tue, Nov 10, 2009	5.00	5.15	4.84	4.92
4399	NASDAQ	KLIC	Mon, Nov 9, 2009	4.75	5.12	4.75	5.06
4398	NASDAQ	KLIC	Fri, Nov 6, 2009	4.64	4.98	4.58	4.68
4397	NASDAQ	KLIC	Thu, Nov 5, 2009	4.30	4.73	4.30	4.73
4396	NASDAQ	KLIC	Wed, Nov 4, 2009	4.31	4.56	4.24	4.25
4395	NASDAQ	KLIC	Tue, Nov 3, 2009	4.33	4.37	4.03	4.26
4394	NASDAQ	KLIC	Mon, Nov 2, 2009	4.64	4.78	4.34	4.42
4393	NASDAQ	KLIC	Fri, Oct 30, 2009	4.88	4.90	4.65	4.65
4392	NASDAQ	KLIC	Thu, Oct 29, 2009	4.67	5.01	4.62	4.93
4391	NASDAQ	KLIC	Wed, Oct 28, 2009	4.79	4.85	4.56	4.60
4390	NASDAQ	KLIC	Tue, Oct 27, 2009	4.97	5.09	4.81	4.83
4389	NASDAQ	KLIC	Mon, Oct 26, 2009	5.08	5.26	4.95	4.96
4388	NASDAQ	KLIC	Fri, Oct 23, 2009	5.38	5.43	5.03	5.06
4387	NASDAQ	KLIC	Thu, Oct 22, 2009	5.23	5.46	5.20	5.32
4386	NASDAQ	KLIC	Wed, Oct 21, 2009	5.36	5.63	5.26	5.27
4385	NASDAQ	KLIC	Tue, Oct 20, 2009	5.61	5.68	5.39	5.40
4384	NASDAQ	KLIC	Mon, Oct 19, 2009	5.58	5.70	5.55	5.58
4383	NASDAQ	KLIC	Fri, Oct 16, 2009	5.88	5.90	5.58	5.58
4382	NASDAQ	KLIC	Thu, Oct 15, 2009	6.00	6.03	5.85	5.95
4381	NASDAQ	KLIC	Wed, Oct 14, 2009	6.09	6.16	6.02	6.07
4380	NASDAQ	KLIC	Tue, Oct 13, 2009	6.10	6.14	5.89	5.95
4379	NASDAQ	KLIC	Mon, Oct 12, 2009	6.13	6.30	6.03	6.09
4378	NASDAQ	KLIC	Fri, Oct 9, 2009	6.01	6.12	5.96	6.12
4377	NASDAQ	KLIC	Thu, Oct 8, 2009	6.20	6.23	5.98	6.04
4376	NASDAQ	KLIC	Wed, Oct 7, 2009	6.12	6.26	6.04	6.15
4375	NASDAQ	KLIC	Tue, Oct 6, 2009	5.99	6.30	5.99	6.19
4374	NASDAQ	KLIC	Mon, Oct 5, 2009	5.52	5.95	5.52	5.94
4373	NASDAQ	KLIC	Fri, Oct 2, 2009	5.53	5.72	5.46	5.46
4372	NASDAQ	KLIC	Thu, Oct 1, 2009	5.96	6.02	5.61	5.61
4371	NASDAQ	KLIC	Wed, Sep 30, 2009	6.05	6.16	5.88	6.03
4370	NASDAQ	KLIC	Tue, Sep 29, 2009	6.19	6.36	6.02	6.04
4369	NASDAQ	KLIC	Mon, Sep 28, 2009	5.99	6.24	5.95	6.20
4368	NASDAQ	KLIC	Fri, Sep 25, 2009	6.03	6.12	5.87	5.95
4367	NASDAQ	KLIC	Thu, Sep 24, 2009	6.47	6.47	6.00	6.06
4366	NASDAQ	KLIC	Wed, Sep 23, 2009	6.44	6.68	6.37	6.43
4365	NASDAQ	KLIC	Tue, Sep 22, 2009	6.40	6.48	6.34	6.41
4364	NASDAQ	KLIC	Mon, Sep 21, 2009	6.33	6.44	6.28	6.33
4363	NASDAQ	KLIC	Fri, Sep 18, 2009	6.45	6.53	6.32	6.44
4362	NASDAQ	KLIC	Thu, Sep 17, 2009	6.50	6.57	6.36	6.41
4361	NASDAQ	KLIC	Wed, Sep 16, 2009	6.63	6.66	6.33	6.51
4360	NASDAQ	KLIC	Tue, Sep 15, 2009	6.17	6.37	6.11	6.29
4359	NASDAQ	KLIC	Mon, Sep 14, 2009	6.12	6.21	5.95	6.20
4358	NASDAQ	KLIC	Fri, Sep 11, 2009	6.17	6.25	5.90	6.24
4357	NASDAQ	KLIC	Thu, Sep 10, 2009	5.53	6.19	5.46	6.16
4356	NASDAQ	KLIC	Wed, Sep 9, 2009	5.45	5.65	5.35	5.54
4355	NASDAQ	KLIC	Tue, Sep 8, 2009	5.53	5.58	5.34	5.50
4354	NASDAQ	KLIC	Fri, Sep 4, 2009	5.18	5.41	5.18	5.40
4353	NASDAQ	KLIC	Thu, Sep 3, 2009	5.09	5.24	5.06	5.21
4352	NASDAQ	KLIC	Wed, Sep 2, 2009	4.90	5.16	4.90	5.06
4351	NASDAQ	KLIC	Tue, Sep 1, 2009	5.24	5.50	4.87	4.91
4350	NASDAQ	KLIC	Mon, Aug 31, 2009	5.44	5.49	5.23	5.26
4349	NASDAQ	KLIC	Fri, Aug 28, 2009	5.37	5.60	5.37	5.50
4348	NASDAQ	KLIC	Thu, Aug 27, 2009	5.32	5.40	5.12	5.28
4347	NASDAQ	KLIC	Wed, Aug 26, 2009	5.38	5.55	5.26	5.38
4346	NASDAQ	KLIC	Tue, Aug 25, 2009	5.37	5.47	5.27	5.40
4345	NASDAQ	KLIC	Mon, Aug 24, 2009	5.33	5.48	5.31	5.34
4344	NASDAQ	KLIC	Fri, Aug 21, 2009	5.29	5.40	5.20	5.32
4343	NASDAQ	KLIC	Thu, Aug 20, 2009	5.12	5.24	5.08	5.19
4342	NASDAQ	KLIC	Wed, Aug 19, 2009	5.09	5.25	5.01	5.14
4341	NASDAQ	KLIC	Tue, Aug 18, 2009	5.04	5.22	4.97	5.20
4340	NASDAQ	KLIC	Mon, Aug 17, 2009	5.17	5.22	4.98	5.01
4339	NASDAQ	KLIC	Fri, Aug 14, 2009	5.45	5.52	5.24	5.38
4338	NASDAQ	KLIC	Thu, Aug 13, 2009	5.57	5.60	5.32	5.55
4337	NASDAQ	KLIC	Wed, Aug 12, 2009	5.00	5.62	5.00	5.51
4336	NASDAQ	KLIC	Tue, Aug 11, 2009	5.10	5.15	4.94	5.01
4335	NASDAQ	KLIC	Mon, Aug 10, 2009	5.32	5.37	5.10	5.14
4334	NASDAQ	KLIC	Fri, Aug 7, 2009	5.40	5.68	5.35	5.39
4333	NASDAQ	KLIC	Thu, Aug 6, 2009	5.50	5.70	5.12	5.30
4332	NASDAQ	KLIC	Wed, Aug 5, 2009	5.89	5.89	5.59	5.68
4331	NASDAQ	KLIC	Tue, Aug 4, 2009	5.90	5.95	5.68	5.83
4330	NASDAQ	KLIC	Mon, Aug 3, 2009	5.94	6.14	5.90	5.94
4329	NASDAQ	KLIC	Fri, Jul 31, 2009	5.77	6.00	5.54	5.87
4328	NASDAQ	KLIC	Thu, Jul 30, 2009	5.89	5.96	5.74	5.85
4327	NASDAQ	KLIC	Wed, Jul 29, 2009	5.10	5.82	5.07	5.77
4326	NASDAQ	KLIC	Tue, Jul 28, 2009	4.91	5.00	4.86	4.99
4325	NASDAQ	KLIC	Mon, Jul 27, 2009	4.91	4.99	4.72	4.95
4324	NASDAQ	KLIC	Fri, Jul 24, 2009	4.71	4.91	4.58	4.91
4323	NASDAQ	KLIC	Thu, Jul 23, 2009	4.44	4.79	4.37	4.78
4322	NASDAQ	KLIC	Wed, Jul 22, 2009	4.28	4.54	4.10	4.46
4321	NASDAQ	KLIC	Tue, Jul 21, 2009	4.25	4.34	4.07	4.32
4320	NASDAQ	KLIC	Mon, Jul 20, 2009	4.26	4.38	3.96	4.22
4319	NASDAQ	KLIC	Fri, Jul 17, 2009	3.93	4.27	3.90	4.25
4318	NASDAQ	KLIC	Thu, Jul 16, 2009	3.35	4.11	3.35	3.98
4317	NASDAQ	KLIC	Wed, Jul 15, 2009	3.29	3.62	3.23	3.39
4316	NASDAQ	KLIC	Tue, Jul 14, 2009	3.15	3.20	3.08	3.15
4315	NASDAQ	KLIC	Mon, Jul 13, 2009	3.12	3.19	3.06	3.15
4314	NASDAQ	KLIC	Fri, Jul 10, 2009	3.05	3.16	3.00	3.11
4313	NASDAQ	KLIC	Thu, Jul 9, 2009	3.19	3.28	3.05	3.07
4312	NASDAQ	KLIC	Wed, Jul 8, 2009	3.35	3.43	3.10	3.11
4311	NASDAQ	KLIC	Tue, Jul 7, 2009	3.52	3.64	3.31	3.31
4310	NASDAQ	KLIC	Mon, Jul 6, 2009	3.51	3.62	3.47	3.51
4309	NASDAQ	KLIC	Thu, Jul 2, 2009	3.82	3.82	3.56	3.58
4308	NASDAQ	KLIC	Wed, Jul 1, 2009	3.53	3.83	3.48	3.82
4307	NASDAQ	KLIC	Tue, Jun 30, 2009	3.77	3.89	3.40	3.40
4306	NASDAQ	KLIC	Mon, Jun 29, 2009	3.93	3.94	3.66	3.75
4305	NASDAQ	KLIC	Fri, Jun 26, 2009	3.58	3.98	3.54	3.98
4304	NASDAQ	KLIC	Thu, Jun 25, 2009	3.47	3.63	3.47	3.63
4303	NASDAQ	KLIC	Wed, Jun 24, 2009	3.49	3.70	3.46	3.49
4302	NASDAQ	KLIC	Tue, Jun 23, 2009	3.41	3.52	3.35	3.43
4301	NASDAQ	KLIC	Mon, Jun 22, 2009	3.61	3.75	3.40	3.41
4300	NASDAQ	KLIC	Fri, Jun 19, 2009	3.76	3.94	3.63	3.65
4299	NASDAQ	KLIC	Thu, Jun 18, 2009	3.75	3.77	3.65	3.67
4298	NASDAQ	KLIC	Wed, Jun 17, 2009	3.81	3.84	3.65	3.77
4297	NASDAQ	KLIC	Tue, Jun 16, 2009	3.81	3.98	3.75	3.81
4296	NASDAQ	KLIC	Mon, Jun 15, 2009	4.09	4.09	3.66	3.79
4295	NASDAQ	KLIC	Fri, Jun 12, 2009	4.23	4.27	4.05	4.15
4294	NASDAQ	KLIC	Thu, Jun 11, 2009	4.33	4.47	4.28	4.28
4293	NASDAQ	KLIC	Wed, Jun 10, 2009	4.42	4.45	4.19	4.31
4292	NASDAQ	KLIC	Tue, Jun 9, 2009	4.30	4.46	4.21	4.39
4291	NASDAQ	KLIC	Mon, Jun 8, 2009	4.49	4.50	4.15	4.25
4290	NASDAQ	KLIC	Fri, Jun 5, 2009	4.67	4.68	4.45	4.50
4289	NASDAQ	KLIC	Thu, Jun 4, 2009	4.49	4.67	4.45	4.59
4288	NASDAQ	KLIC	Wed, Jun 3, 2009	4.71	4.73	4.39	4.43
4287	NASDAQ	KLIC	Tue, Jun 2, 2009	4.89	4.89	4.70	4.79
4286	NASDAQ	KLIC	Mon, Jun 1, 2009	4.70	5.04	4.64	4.91
4285	NASDAQ	KLIC	Fri, May 29, 2009	4.60	4.68	4.47	4.61
4284	NASDAQ	KLIC	Thu, May 28, 2009	4.68	4.81	4.46	4.52
4283	NASDAQ	KLIC	Wed, May 27, 2009	4.71	4.98	4.64	4.64
4282	NASDAQ	KLIC	Tue, May 26, 2009	4.57	5.00	4.53	4.75
4281	NASDAQ	KLIC	Fri, May 22, 2009	4.58	4.87	4.58	4.68
4280	NASDAQ	KLIC	Thu, May 21, 2009	4.61	4.69	4.45	4.55
4279	NASDAQ	KLIC	Wed, May 20, 2009	4.66	4.95	4.53	4.79
4278	NASDAQ	KLIC	Tue, May 19, 2009	4.13	4.77	4.12	4.62
4277	NASDAQ	KLIC	Mon, May 18, 2009	3.44	3.71	3.44	3.70
4276	NASDAQ	KLIC	Fri, May 15, 2009	3.50	3.57	3.33	3.36
4275	NASDAQ	KLIC	Thu, May 14, 2009	3.25	3.53	3.25	3.51
4274	NASDAQ	KLIC	Wed, May 13, 2009	3.43	3.46	3.23	3.28
4273	NASDAQ	KLIC	Tue, May 12, 2009	3.82	3.88	3.21	3.50
4272	NASDAQ	KLIC	Mon, May 11, 2009	3.58	3.86	3.58	3.81
4271	NASDAQ	KLIC	Fri, May 8, 2009	3.78	3.96	3.66	3.95
4270	NASDAQ	KLIC	Thu, May 7, 2009	4.14	4.20	3.64	3.69
4269	NASDAQ	KLIC	Wed, May 6, 2009	4.24	4.40	4.05	4.13
4268	NASDAQ	KLIC	Tue, May 5, 2009	4.08	4.23	4.01	4.20
4267	NASDAQ	KLIC	Mon, May 4, 2009	3.87	4.25	3.87	4.15
4266	NASDAQ	KLIC	Fri, May 1, 2009	4.00	4.00	3.81	3.94
4265	NASDAQ	KLIC	Thu, Apr 30, 2009	3.77	4.06	3.70	4.00
4264	NASDAQ	KLIC	Wed, Apr 29, 2009	3.76	3.93	3.57	3.72
4263	NASDAQ	KLIC	Tue, Apr 28, 2009	3.29	3.76	3.25	3.74
4262	NASDAQ	KLIC	Mon, Apr 27, 2009	3.46	3.55	3.34	3.34
4261	NASDAQ	KLIC	Fri, Apr 24, 2009	3.53	3.68	3.46	3.63
4260	NASDAQ	KLIC	Thu, Apr 23, 2009	3.77	3.78	3.50	3.58
4259	NASDAQ	KLIC	Wed, Apr 22, 2009	3.40	3.87	3.38	3.66
4258	NASDAQ	KLIC	Tue, Apr 21, 2009	3.30	3.60	3.07	3.46
4257	NASDAQ	KLIC	Mon, Apr 20, 2009	3.56	3.65	3.36	3.39
4256	NASDAQ	KLIC	Fri, Apr 17, 2009	3.82	3.85	3.68	3.76
4255	NASDAQ	KLIC	Thu, Apr 16, 2009	3.50	3.83	3.41	3.80
4254	NASDAQ	KLIC	Wed, Apr 15, 2009	3.28	3.47	3.26	3.47
4253	NASDAQ	KLIC	Tue, Apr 14, 2009	3.40	3.50	3.27	3.32
4252	NASDAQ	KLIC	Mon, Apr 13, 2009	3.39	3.50	3.27	3.48
4251	NASDAQ	KLIC	Thu, Apr 9, 2009	3.13	3.46	3.12	3.46
4250	NASDAQ	KLIC	Wed, Apr 8, 2009	2.80	3.05	2.80	3.05
4249	NASDAQ	KLIC	Tue, Apr 7, 2009	2.78	2.88	2.73	2.78
4248	NASDAQ	KLIC	Mon, Apr 6, 2009	3.00	3.00	2.75	2.88
4247	NASDAQ	KLIC	Fri, Apr 3, 2009	3.09	3.22	2.95	3.05
4246	NASDAQ	KLIC	Thu, Apr 2, 2009	2.65	3.25	2.61	3.10
4245	NASDAQ	KLIC	Wed, Apr 1, 2009	2.60	2.77	2.50	2.77
4244	NASDAQ	KLIC	Tue, Mar 31, 2009	2.50	2.77	2.45	2.62
4243	NASDAQ	KLIC	Mon, Mar 30, 2009	2.41	2.49	2.11	2.45
4242	NASDAQ	KLIC	Fri, Mar 27, 2009	2.62	2.66	2.50	2.56
4241	NASDAQ	KLIC	Thu, Mar 26, 2009	2.34	2.67	2.34	2.67
4240	NASDAQ	KLIC	Wed, Mar 25, 2009	2.21	2.32	2.07	2.29
4239	NASDAQ	KLIC	Tue, Mar 24, 2009	1.99	2.14	1.95	2.11
4238	NASDAQ	KLIC	Mon, Mar 23, 2009	1.74	2.10	1.55	2.06
4237	NASDAQ	KLIC	Fri, Mar 20, 2009	1.75	1.75	1.60	1.67
4236	NASDAQ	KLIC	Thu, Mar 19, 2009	1.75	1.75	1.60	1.74
4235	NASDAQ	KLIC	Wed, Mar 18, 2009	1.76	1.80	1.62	1.75
4234	NASDAQ	KLIC	Tue, Mar 17, 2009	1.49	1.78	1.39	1.77
4233	NASDAQ	KLIC	Mon, Mar 16, 2009	1.79	1.79	1.45	1.49
4232	NASDAQ	KLIC	Fri, Mar 13, 2009	1.50	1.58	1.42	1.55
4231	NASDAQ	KLIC	Thu, Mar 12, 2009	1.34	1.50	1.27	1.49
4230	NASDAQ	KLIC	Wed, Mar 11, 2009	1.48	1.48	1.21	1.35
4229	NASDAQ	KLIC	Tue, Mar 10, 2009	1.18	1.47	1.18	1.47
4228	NASDAQ	KLIC	Mon, Mar 9, 2009	1.20	1.21	1.15	1.15
4227	NASDAQ	KLIC	Fri, Mar 6, 2009	1.20	1.25	1.16	1.22
4226	NASDAQ	KLIC	Thu, Mar 5, 2009	1.24	1.26	1.15	1.15
4225	NASDAQ	KLIC	Wed, Mar 4, 2009	1.33	1.33	1.25	1.29
4224	NASDAQ	KLIC	Tue, Mar 3, 2009	1.26	1.31	1.24	1.29
4223	NASDAQ	KLIC	Mon, Mar 2, 2009	1.32	1.32	1.20	1.22
4222	NASDAQ	KLIC	Fri, Feb 27, 2009	1.45	1.50	1.35	1.35
4221	NASDAQ	KLIC	Thu, Feb 26, 2009	1.30	1.59	1.30	1.53
4220	NASDAQ	KLIC	Wed, Feb 25, 2009	1.37	1.38	1.27	1.27
4219	NASDAQ	KLIC	Tue, Feb 24, 2009	1.29	1.35	1.29	1.35
4218	NASDAQ	KLIC	Mon, Feb 23, 2009	1.42	1.43	1.26	1.26
4217	NASDAQ	KLIC	Fri, Feb 20, 2009	1.38	1.44	1.35	1.40
4216	NASDAQ	KLIC	Thu, Feb 19, 2009	1.54	1.59	1.35	1.38
4215	NASDAQ	KLIC	Wed, Feb 18, 2009	1.60	1.73	1.51	1.52
4214	NASDAQ	KLIC	Tue, Feb 17, 2009	1.66	1.69	1.62	1.62
4213	NASDAQ	KLIC	Fri, Feb 13, 2009	1.71	1.80	1.70	1.75
4212	NASDAQ	KLIC	Thu, Feb 12, 2009	1.72	1.76	1.69	1.71
4211	NASDAQ	KLIC	Wed, Feb 11, 2009	1.68	1.76	1.65	1.75
4210	NASDAQ	KLIC	Tue, Feb 10, 2009	1.74	1.76	1.66	1.70
4209	NASDAQ	KLIC	Mon, Feb 9, 2009	1.68	1.75	1.68	1.75
4208	NASDAQ	KLIC	Fri, Feb 6, 2009	1.67	1.71	1.62	1.70
4207	NASDAQ	KLIC	Thu, Feb 5, 2009	1.53	1.67	1.50	1.65
4206	NASDAQ	KLIC	Wed, Feb 4, 2009	1.53	1.64	1.51	1.56
4205	NASDAQ	KLIC	Tue, Feb 3, 2009	1.50	1.56	1.42	1.54
4204	NASDAQ	KLIC	Mon, Feb 2, 2009	1.50	1.52	1.39	1.44
4203	NASDAQ	KLIC	Fri, Jan 30, 2009	1.50	1.57	1.43	1.53
4202	NASDAQ	KLIC	Thu, Jan 29, 2009	1.60	1.62	1.52	1.53
4201	NASDAQ	KLIC	Wed, Jan 28, 2009	1.72	1.72	1.62	1.62
4200	NASDAQ	KLIC	Tue, Jan 27, 2009	1.68	1.72	1.61	1.69
4199	NASDAQ	KLIC	Mon, Jan 26, 2009	1.60	1.70	1.55	1.68
4198	NASDAQ	KLIC	Fri, Jan 23, 2009	1.52	1.62	1.50	1.59
4197	NASDAQ	KLIC	Thu, Jan 22, 2009	1.43	1.63	1.43	1.55
4196	NASDAQ	KLIC	Wed, Jan 21, 2009	1.49	1.66	1.41	1.66
4195	NASDAQ	KLIC	Tue, Jan 20, 2009	1.64	1.64	1.49	1.49
4194	NASDAQ	KLIC	Fri, Jan 16, 2009	1.62	1.69	1.50	1.67
4193	NASDAQ	KLIC	Thu, Jan 15, 2009	1.59	1.63	1.47	1.60
4192	NASDAQ	KLIC	Wed, Jan 14, 2009	1.72	1.75	1.59	1.59
4191	NASDAQ	KLIC	Tue, Jan 13, 2009	1.86	1.94	1.78	1.78
4190	NASDAQ	KLIC	Mon, Jan 12, 2009	2.12	2.22	1.89	1.89
4189	NASDAQ	KLIC	Fri, Jan 9, 2009	2.20	2.30	2.06	2.11
4188	NASDAQ	KLIC	Thu, Jan 8, 2009	2.04	2.25	1.92	2.23
4187	NASDAQ	KLIC	Wed, Jan 7, 2009	2.03	2.10	1.97	2.04
4186	NASDAQ	KLIC	Tue, Jan 6, 2009	1.96	2.22	1.89	2.20
4185	NASDAQ	KLIC	Mon, Jan 5, 2009	1.86	1.98	1.80	1.89
4184	NASDAQ	KLIC	Fri, Jan 2, 2009	1.75	1.87	1.74	1.85
4183	NASDAQ	KLIC	Wed, Dec 31, 2008	1.67	1.77	1.61	1.70
4182	NASDAQ	KLIC	Tue, Dec 30, 2008	1.51	1.69	1.50	1.66
4181	NASDAQ	KLIC	Mon, Dec 29, 2008	1.52	1.52	1.44	1.50
4180	NASDAQ	KLIC	Fri, Dec 26, 2008	1.54	1.56	1.46	1.52
4179	NASDAQ	KLIC	Wed, Dec 24, 2008	1.61	1.67	1.55	1.58
4178	NASDAQ	KLIC	Tue, Dec 23, 2008	1.64	1.68	1.57	1.62
4177	NASDAQ	KLIC	Mon, Dec 22, 2008	1.69	1.73	1.49	1.62
4176	NASDAQ	KLIC	Fri, Dec 19, 2008	1.79	1.84	1.69	1.69
4175	NASDAQ	KLIC	Thu, Dec 18, 2008	1.83	1.87	1.68	1.70
4174	NASDAQ	KLIC	Wed, Dec 17, 2008	1.65	1.86	1.64	1.79
4173	NASDAQ	KLIC	Tue, Dec 16, 2008	1.61	1.68	1.50	1.68
4172	NASDAQ	KLIC	Mon, Dec 15, 2008	1.68	1.68	1.54	1.55
4171	NASDAQ	KLIC	Fri, Dec 12, 2008	1.40	1.69	1.40	1.69
4170	NASDAQ	KLIC	Thu, Dec 11, 2008	1.62	1.67	1.41	1.42
4169	NASDAQ	KLIC	Wed, Dec 10, 2008	1.68	1.74	1.50	1.63
4168	NASDAQ	KLIC	Tue, Dec 9, 2008	1.60	1.81	1.50	1.65
4167	NASDAQ	KLIC	Mon, Dec 8, 2008	1.36	1.55	1.32	1.55
4166	NASDAQ	KLIC	Fri, Dec 5, 2008	1.25	1.32	1.20	1.32
4165	NASDAQ	KLIC	Thu, Dec 4, 2008	1.25	1.35	1.23	1.24
4164	NASDAQ	KLIC	Wed, Dec 3, 2008	1.26	1.35	1.21	1.25
4163	NASDAQ	KLIC	Tue, Dec 2, 2008	1.32	1.36	1.22	1.29
4162	NASDAQ	KLIC	Mon, Dec 1, 2008	1.38	1.39	1.20	1.21
4161	NASDAQ	KLIC	Fri, Nov 28, 2008	1.32	1.46	1.31	1.41
4160	NASDAQ	KLIC	Wed, Nov 26, 2008	1.25	1.28	1.19	1.26
4159	NASDAQ	KLIC	Tue, Nov 25, 2008	1.22	1.27	1.11	1.26
4158	NASDAQ	KLIC	Mon, Nov 24, 2008	1.29	1.35	1.15	1.20
4157	NASDAQ	KLIC	Fri, Nov 21, 2008	1.30	1.30	1.15	1.27
4156	NASDAQ	KLIC	Thu, Nov 20, 2008	1.31	1.47	1.13	1.14
4155	NASDAQ	KLIC	Wed, Nov 19, 2008	1.66	1.67	1.13	1.27
4154	NASDAQ	KLIC	Tue, Nov 18, 2008	1.85	1.88	1.65	1.67
4153	NASDAQ	KLIC	Mon, Nov 17, 2008	2.01	2.24	1.76	1.79
4152	NASDAQ	KLIC	Fri, Nov 14, 2008	2.49	2.49	2.01	2.02
4151	NASDAQ	KLIC	Thu, Nov 13, 2008	1.92	2.71	1.83	2.48
4150	NASDAQ	KLIC	Wed, Nov 12, 2008	2.25	2.41	1.96	2.06
4149	NASDAQ	KLIC	Tue, Nov 11, 2008	2.45	2.46	2.25	2.26
4148	NASDAQ	KLIC	Mon, Nov 10, 2008	2.65	2.81	2.38	2.46
4147	NASDAQ	KLIC	Fri, Nov 7, 2008	2.57	2.71	2.50	2.60
4146	NASDAQ	KLIC	Thu, Nov 6, 2008	2.95	2.95	2.54	2.55
4145	NASDAQ	KLIC	Wed, Nov 5, 2008	3.20	3.22	2.89	2.96
4144	NASDAQ	KLIC	Tue, Nov 4, 2008	3.20	3.29	3.15	3.23
4143	NASDAQ	KLIC	Mon, Nov 3, 2008	2.99	3.17	2.85	3.06
4142	NASDAQ	KLIC	Fri, Oct 31, 2008	2.58	2.96	2.51	2.94
4141	NASDAQ	KLIC	Thu, Oct 30, 2008	2.50	2.65	2.45	2.62
4140	NASDAQ	KLIC	Wed, Oct 29, 2008	2.55	2.55	2.37	2.45
4139	NASDAQ	KLIC	Tue, Oct 28, 2008	2.50	2.68	2.40	2.53
4138	NASDAQ	KLIC	Mon, Oct 27, 2008	2.56	2.67	2.41	2.42
4137	NASDAQ	KLIC	Fri, Oct 24, 2008	2.59	2.72	2.50	2.56
4136	NASDAQ	KLIC	Thu, Oct 23, 2008	3.02	3.02	2.66	2.80
4135	NASDAQ	KLIC	Wed, Oct 22, 2008	3.28	3.45	2.98	3.04
4134	NASDAQ	KLIC	Tue, Oct 21, 2008	3.43	3.49	3.30	3.31
4133	NASDAQ	KLIC	Mon, Oct 20, 2008	3.34	3.51	3.31	3.51
4132	NASDAQ	KLIC	Fri, Oct 17, 2008	3.23	3.55	3.22	3.30
4131	NASDAQ	KLIC	Thu, Oct 16, 2008	3.09	3.39	3.00	3.36
4130	NASDAQ	KLIC	Wed, Oct 15, 2008	3.39	3.57	3.06	3.07
4129	NASDAQ	KLIC	Tue, Oct 14, 2008	3.73	3.73	3.35	3.36
4128	NASDAQ	KLIC	Mon, Oct 13, 2008	3.39	3.58	3.25	3.53
4127	NASDAQ	KLIC	Fri, Oct 10, 2008	3.13	3.30	2.79	3.13
4126	NASDAQ	KLIC	Thu, Oct 9, 2008	3.55	3.69	3.17	3.18
4125	NASDAQ	KLIC	Wed, Oct 8, 2008	3.50	3.69	3.33	3.55
4124	NASDAQ	KLIC	Tue, Oct 7, 2008	3.53	3.80	3.50	3.54
4123	NASDAQ	KLIC	Mon, Oct 6, 2008	3.78	3.87	3.50	3.77
4122	NASDAQ	KLIC	Fri, Oct 3, 2008	4.17	4.27	3.80	3.82
4121	NASDAQ	KLIC	Thu, Oct 2, 2008	4.34	4.40	4.10	4.10
4120	NASDAQ	KLIC	Wed, Oct 1, 2008	4.53	4.53	4.33	4.39
4119	NASDAQ	KLIC	Tue, Sep 30, 2008	4.49	4.61	4.42	4.51
4118	NASDAQ	KLIC	Mon, Sep 29, 2008	4.58	4.71	4.37	4.41
4117	NASDAQ	KLIC	Fri, Sep 26, 2008	4.53	4.87	4.53	4.82
4116	NASDAQ	KLIC	Thu, Sep 25, 2008	4.56	4.79	4.56	4.63
4115	NASDAQ	KLIC	Wed, Sep 24, 2008	4.81	4.85	4.61	4.61
4114	NASDAQ	KLIC	Tue, Sep 23, 2008	4.99	5.03	4.72	4.79
4113	NASDAQ	KLIC	Mon, Sep 22, 2008	5.08	5.11	4.84	5.00
4112	NASDAQ	KLIC	Fri, Sep 19, 2008	5.03	5.18	4.76	5.01
4111	NASDAQ	KLIC	Thu, Sep 18, 2008	4.71	4.80	4.55	4.79
4110	NASDAQ	KLIC	Wed, Sep 17, 2008	4.73	4.80	4.60	4.63
4109	NASDAQ	KLIC	Tue, Sep 16, 2008	4.75	4.81	4.63	4.74
4108	NASDAQ	KLIC	Mon, Sep 15, 2008	4.80	4.98	4.76	4.77
4107	NASDAQ	KLIC	Fri, Sep 12, 2008	4.97	5.05	4.85	4.93
4106	NASDAQ	KLIC	Thu, Sep 11, 2008	4.87	4.96	4.85	4.95
4105	NASDAQ	KLIC	Wed, Sep 10, 2008	5.04	5.10	4.95	5.03
4104	NASDAQ	KLIC	Tue, Sep 9, 2008	5.10	5.16	4.90	4.97
4103	NASDAQ	KLIC	Mon, Sep 8, 2008	5.15	5.27	4.97	5.08
4102	NASDAQ	KLIC	Fri, Sep 5, 2008	5.05	5.07	4.95	5.01
4101	NASDAQ	KLIC	Thu, Sep 4, 2008	5.03	5.10	4.89	5.03
4100	NASDAQ	KLIC	Wed, Sep 3, 2008	5.21	5.28	5.03	5.06
4099	NASDAQ	KLIC	Tue, Sep 2, 2008	5.27	5.35	5.13	5.21
4098	NASDAQ	KLIC	Fri, Aug 29, 2008	5.16	5.18	5.07	5.14
4097	NASDAQ	KLIC	Thu, Aug 28, 2008	5.15	5.19	5.09	5.17
4096	NASDAQ	KLIC	Wed, Aug 27, 2008	5.10	5.24	5.08	5.14
4095	NASDAQ	KLIC	Tue, Aug 26, 2008	5.15	5.16	5.05	5.07
4094	NASDAQ	KLIC	Mon, Aug 25, 2008	5.13	5.15	5.01	5.14
4093	NASDAQ	KLIC	Fri, Aug 22, 2008	5.18	5.22	5.11	5.15
4092	NASDAQ	KLIC	Thu, Aug 21, 2008	5.27	5.29	5.12	5.13
4091	NASDAQ	KLIC	Wed, Aug 20, 2008	5.46	5.51	5.26	5.33
4090	NASDAQ	KLIC	Tue, Aug 19, 2008	5.51	5.58	5.39	5.40
4089	NASDAQ	KLIC	Mon, Aug 18, 2008	5.75	5.77	5.43	5.55
4088	NASDAQ	KLIC	Fri, Aug 15, 2008	6.03	6.06	5.65	5.75
4087	NASDAQ	KLIC	Thu, Aug 14, 2008	5.95	6.12	5.92	5.95
4086	NASDAQ	KLIC	Wed, Aug 13, 2008	5.87	6.05	5.79	6.02
4085	NASDAQ	KLIC	Tue, Aug 12, 2008	5.95	5.95	5.70	5.80
4084	NASDAQ	KLIC	Mon, Aug 11, 2008	5.71	6.11	5.70	5.94
4083	NASDAQ	KLIC	Fri, Aug 8, 2008	5.71	5.82	5.61	5.73
4082	NASDAQ	KLIC	Thu, Aug 7, 2008	5.49	5.83	5.45	5.64
4081	NASDAQ	KLIC	Wed, Aug 6, 2008	6.30	6.56	5.23	5.51
4080	NASDAQ	KLIC	Tue, Aug 5, 2008	6.70	6.70	6.51	6.64
4079	NASDAQ	KLIC	Mon, Aug 4, 2008	6.36	6.60	6.25	6.52
4078	NASDAQ	KLIC	Fri, Aug 1, 2008	6.39	6.58	6.19	6.23
4077	NASDAQ	KLIC	Thu, Jul 31, 2008	6.55	6.60	6.33	6.36
4076	NASDAQ	KLIC	Wed, Jul 30, 2008	6.75	6.83	6.47	6.66
4075	NASDAQ	KLIC	Tue, Jul 29, 2008	6.55	6.85	6.51	6.70
4074	NASDAQ	KLIC	Mon, Jul 28, 2008	6.63	6.63	6.36	6.51
4073	NASDAQ	KLIC	Fri, Jul 25, 2008	6.59	6.80	6.50	6.67
4072	NASDAQ	KLIC	Thu, Jul 24, 2008	6.79	6.88	6.50	6.57
4071	NASDAQ	KLIC	Wed, Jul 23, 2008	6.58	6.89	6.43	6.76
4070	NASDAQ	KLIC	Tue, Jul 22, 2008	6.58	6.65	6.45	6.55
4069	NASDAQ	KLIC	Mon, Jul 21, 2008	6.41	6.68	6.35	6.61
4068	NASDAQ	KLIC	Fri, Jul 18, 2008	6.82	6.82	6.30	6.40
4067	NASDAQ	KLIC	Thu, Jul 17, 2008	6.79	6.89	6.64	6.82
4066	NASDAQ	KLIC	Wed, Jul 16, 2008	6.46	6.83	6.44	6.76
4065	NASDAQ	KLIC	Tue, Jul 15, 2008	6.23	6.66	6.20	6.42
4064	NASDAQ	KLIC	Mon, Jul 14, 2008	6.41	6.50	6.26	6.32
4063	NASDAQ	KLIC	Fri, Jul 11, 2008	6.38	6.44	6.06	6.35
4062	NASDAQ	KLIC	Thu, Jul 10, 2008	6.40	6.59	6.31	6.44
4061	NASDAQ	KLIC	Wed, Jul 9, 2008	6.68	6.72	6.40	6.40
4060	NASDAQ	KLIC	Tue, Jul 8, 2008	6.48	6.69	6.39	6.69
4059	NASDAQ	KLIC	Mon, Jul 7, 2008	6.72	6.80	6.46	6.48
4058	NASDAQ	KLIC	Thu, Jul 3, 2008	7.03	7.13	6.66	6.67
4057	NASDAQ	KLIC	Wed, Jul 2, 2008	7.47	7.48	6.98	7.03
4056	NASDAQ	KLIC	Tue, Jul 1, 2008	7.25	7.49	7.16	7.48
4055	NASDAQ	KLIC	Mon, Jun 30, 2008	7.10	7.41	7.06	7.29
4054	NASDAQ	KLIC	Fri, Jun 27, 2008	7.28	7.38	7.06	7.08
4053	NASDAQ	KLIC	Thu, Jun 26, 2008	7.63	7.63	7.20	7.28
4052	NASDAQ	KLIC	Wed, Jun 25, 2008	7.39	7.75	7.39	7.72
4051	NASDAQ	KLIC	Tue, Jun 24, 2008	7.40	7.53	7.26	7.36
4050	NASDAQ	KLIC	Mon, Jun 23, 2008	7.65	7.75	7.43	7.49
4049	NASDAQ	KLIC	Fri, Jun 20, 2008	7.68	7.71	7.31	7.63
4048	NASDAQ	KLIC	Thu, Jun 19, 2008	7.79	7.95	7.60	7.74
4047	NASDAQ	KLIC	Wed, Jun 18, 2008	7.50	7.90	7.47	7.82
4046	NASDAQ	KLIC	Tue, Jun 17, 2008	7.24	7.66	7.21	7.57
4045	NASDAQ	KLIC	Mon, Jun 16, 2008	6.83	7.28	6.74	7.17
4044	NASDAQ	KLIC	Fri, Jun 13, 2008	6.30	6.65	6.30	6.55
4043	NASDAQ	KLIC	Thu, Jun 12, 2008	6.58	6.74	6.27	6.30
4042	NASDAQ	KLIC	Wed, Jun 11, 2008	6.82	6.84	6.54	6.54
4041	NASDAQ	KLIC	Tue, Jun 10, 2008	6.83	6.97	6.78	6.82
4040	NASDAQ	KLIC	Mon, Jun 9, 2008	6.95	7.07	6.77	6.92
4039	NASDAQ	KLIC	Fri, Jun 6, 2008	6.99	7.14	6.90	6.90
4038	NASDAQ	KLIC	Thu, Jun 5, 2008	6.90	7.10	6.89	7.05
4037	NASDAQ	KLIC	Wed, Jun 4, 2008	6.86	7.00	6.84	6.89
4036	NASDAQ	KLIC	Tue, Jun 3, 2008	6.95	7.00	6.79	6.90
4035	NASDAQ	KLIC	Mon, Jun 2, 2008	7.01	7.06	6.85	6.95
4034	NASDAQ	KLIC	Fri, May 30, 2008	6.97	7.11	6.96	7.08
4033	NASDAQ	KLIC	Thu, May 29, 2008	6.84	7.06	6.83	6.98
4032	NASDAQ	KLIC	Wed, May 28, 2008	6.66	6.88	6.65	6.85
4031	NASDAQ	KLIC	Tue, May 27, 2008	6.41	6.80	6.40	6.77
4030	NASDAQ	KLIC	Fri, May 23, 2008	6.71	6.83	6.56	6.65
4029	NASDAQ	KLIC	Thu, May 22, 2008	6.82	7.00	6.76	6.85
4028	NASDAQ	KLIC	Wed, May 21, 2008	6.85	7.00	6.75	6.82
4027	NASDAQ	KLIC	Tue, May 20, 2008	6.90	7.01	6.73	6.89
4026	NASDAQ	KLIC	Mon, May 19, 2008	6.96	7.09	6.83	6.95
4025	NASDAQ	KLIC	Fri, May 16, 2008	6.86	6.95	6.64	6.92
4024	NASDAQ	KLIC	Thu, May 15, 2008	6.89	6.89	6.73	6.81
4023	NASDAQ	KLIC	Wed, May 14, 2008	6.89	6.99	6.79	6.82
4022	NASDAQ	KLIC	Tue, May 13, 2008	6.96	7.11	6.83	6.87
4021	NASDAQ	KLIC	Mon, May 12, 2008	6.84	6.99	6.81	6.96
4020	NASDAQ	KLIC	Fri, May 9, 2008	6.66	6.87	6.60	6.80
4019	NASDAQ	KLIC	Thu, May 8, 2008	6.78	6.92	6.64	6.76
4018	NASDAQ	KLIC	Wed, May 7, 2008	6.81	6.95	6.69	6.71
4017	NASDAQ	KLIC	Tue, May 6, 2008	6.67	6.85	6.64	6.79
4016	NASDAQ	KLIC	Mon, May 5, 2008	6.81	6.96	6.66	6.71
4015	NASDAQ	KLIC	Fri, May 2, 2008	6.80	6.98	6.69	6.91
4014	NASDAQ	KLIC	Thu, May 1, 2008	6.60	6.85	6.58	6.73
4013	NASDAQ	KLIC	Wed, Apr 30, 2008	6.67	6.75	6.49	6.59
4012	NASDAQ	KLIC	Tue, Apr 29, 2008	6.14	6.62	6.02	6.62
4011	NASDAQ	KLIC	Mon, Apr 28, 2008	6.00	6.15	5.93	6.12
4010	NASDAQ	KLIC	Fri, Apr 25, 2008	5.61	6.07	5.61	6.02
4009	NASDAQ	KLIC	Thu, Apr 24, 2008	5.52	5.84	5.27	5.60
4008	NASDAQ	KLIC	Wed, Apr 23, 2008	5.53	5.58	5.36	5.57
4007	NASDAQ	KLIC	Tue, Apr 22, 2008	5.67	5.69	5.35	5.51
4006	NASDAQ	KLIC	Mon, Apr 21, 2008	5.77	5.78	5.63	5.69
4005	NASDAQ	KLIC	Fri, Apr 18, 2008	5.72	5.90	5.62	5.83
4004	NASDAQ	KLIC	Thu, Apr 17, 2008	5.61	5.65	5.44	5.61
4003	NASDAQ	KLIC	Wed, Apr 16, 2008	5.40	5.74	5.40	5.66
4002	NASDAQ	KLIC	Tue, Apr 15, 2008	5.32	5.32	5.15	5.29
4001	NASDAQ	KLIC	Mon, Apr 14, 2008	5.30	5.33	5.21	5.27
4000	NASDAQ	KLIC	Fri, Apr 11, 2008	5.45	5.53	5.26	5.29
3999	NASDAQ	KLIC	Thu, Apr 10, 2008	5.34	5.54	5.27	5.49
3998	NASDAQ	KLIC	Wed, Apr 9, 2008	5.52	5.55	5.32	5.33
3997	NASDAQ	KLIC	Tue, Apr 8, 2008	5.55	5.68	5.46	5.52
3996	NASDAQ	KLIC	Mon, Apr 7, 2008	5.69	5.77	5.63	5.65
3995	NASDAQ	KLIC	Fri, Apr 4, 2008	5.50	5.59	5.40	5.56
3994	NASDAQ	KLIC	Thu, Apr 3, 2008	5.30	5.54	5.21	5.51
3993	NASDAQ	KLIC	Wed, Apr 2, 2008	5.01	5.33	5.00	5.32
3992	NASDAQ	KLIC	Tue, Apr 1, 2008	4.83	5.02	4.83	5.02
3991	NASDAQ	KLIC	Mon, Mar 31, 2008	4.85	4.85	4.66	4.78
3990	NASDAQ	KLIC	Fri, Mar 28, 2008	4.80	4.87	4.69	4.70
3989	NASDAQ	KLIC	Thu, Mar 27, 2008	4.84	4.92	4.79	4.79
3988	NASDAQ	KLIC	Wed, Mar 26, 2008	5.08	5.09	4.76	4.80
3987	NASDAQ	KLIC	Tue, Mar 25, 2008	5.10	5.16	4.99	5.11
3986	NASDAQ	KLIC	Mon, Mar 24, 2008	4.95	5.16	4.95	5.09
3985	NASDAQ	KLIC	Thu, Mar 20, 2008	4.73	4.96	4.64	4.91
3984	NASDAQ	KLIC	Wed, Mar 19, 2008	4.92	4.93	4.65	4.65
3983	NASDAQ	KLIC	Tue, Mar 18, 2008	4.74	4.87	4.62	4.87
3982	NASDAQ	KLIC	Mon, Mar 17, 2008	4.58	4.71	4.57	4.63
3981	NASDAQ	KLIC	Fri, Mar 14, 2008	4.91	4.95	4.65	4.68
3980	NASDAQ	KLIC	Thu, Mar 13, 2008	4.65	4.93	4.55	4.87
3979	NASDAQ	KLIC	Wed, Mar 12, 2008	4.99	5.09	4.69	4.70
3978	NASDAQ	KLIC	Tue, Mar 11, 2008	4.76	5.02	4.67	5.01
3977	NASDAQ	KLIC	Mon, Mar 10, 2008	4.76	4.80	4.62	4.62
3976	NASDAQ	KLIC	Fri, Mar 7, 2008	4.72	4.83	4.60	4.73
3975	NASDAQ	KLIC	Thu, Mar 6, 2008	4.99	5.08	4.75	4.79
3974	NASDAQ	KLIC	Wed, Mar 5, 2008	4.95	5.04	4.88	4.96
3973	NASDAQ	KLIC	Tue, Mar 4, 2008	4.95	4.98	4.80	4.92
3972	NASDAQ	KLIC	Mon, Mar 3, 2008	5.14	5.16	4.91	4.99
3971	NASDAQ	KLIC	Fri, Feb 29, 2008	5.26	5.29	5.15	5.15
3970	NASDAQ	KLIC	Thu, Feb 28, 2008	5.45	5.45	5.27	5.33
3969	NASDAQ	KLIC	Wed, Feb 27, 2008	5.36	5.46	5.31	5.46
3968	NASDAQ	KLIC	Tue, Feb 26, 2008	5.20	5.42	5.19	5.33
3967	NASDAQ	KLIC	Mon, Feb 25, 2008	5.28	5.41	5.18	5.22
3966	NASDAQ	KLIC	Fri, Feb 22, 2008	5.34	5.40	5.17	5.26
3965	NASDAQ	KLIC	Thu, Feb 21, 2008	5.50	5.63	5.31	5.34
3964	NASDAQ	KLIC	Wed, Feb 20, 2008	5.25	5.50	5.21	5.43
3963	NASDAQ	KLIC	Tue, Feb 19, 2008	5.29	5.37	5.21	5.28
3962	NASDAQ	KLIC	Fri, Feb 15, 2008	5.31	5.38	5.15	5.21
3961	NASDAQ	KLIC	Thu, Feb 14, 2008	5.37	5.45	5.33	5.35
3960	NASDAQ	KLIC	Wed, Feb 13, 2008	5.57	5.59	5.31	5.34
3959	NASDAQ	KLIC	Tue, Feb 12, 2008	5.42	5.57	5.34	5.49
3958	NASDAQ	KLIC	Mon, Feb 11, 2008	5.45	5.52	5.32	5.40
3957	NASDAQ	KLIC	Fri, Feb 8, 2008	5.40	5.55	5.24	5.41
3956	NASDAQ	KLIC	Thu, Feb 7, 2008	5.15	5.41	5.08	5.38
3955	NASDAQ	KLIC	Wed, Feb 6, 2008	5.38	5.49	5.09	5.14
3954	NASDAQ	KLIC	Tue, Feb 5, 2008	5.61	5.68	5.32	5.32
3953	NASDAQ	KLIC	Mon, Feb 4, 2008	5.74	5.74	5.52	5.73
3952	NASDAQ	KLIC	Fri, Feb 1, 2008	5.45	5.71	5.23	5.65
3951	NASDAQ	KLIC	Thu, Jan 31, 2008	5.36	5.46	5.25	5.39
3950	NASDAQ	KLIC	Wed, Jan 30, 2008	5.51	5.59	5.32	5.39
3949	NASDAQ	KLIC	Tue, Jan 29, 2008	5.76	5.78	5.50	5.58
3948	NASDAQ	KLIC	Mon, Jan 28, 2008	5.77	5.77	5.54	5.70
3947	NASDAQ	KLIC	Fri, Jan 25, 2008	6.17	6.17	5.69	5.77
3946	NASDAQ	KLIC	Thu, Jan 24, 2008	6.00	6.23	5.83	6.06
3945	NASDAQ	KLIC	Wed, Jan 23, 2008	5.75	6.00	5.53	5.98
3944	NASDAQ	KLIC	Tue, Jan 22, 2008	5.57	5.91	5.50	5.79
3943	NASDAQ	KLIC	Fri, Jan 18, 2008	5.77	5.95	5.71	5.77
3942	NASDAQ	KLIC	Thu, Jan 17, 2008	5.82	5.90	5.73	5.76
3941	NASDAQ	KLIC	Wed, Jan 16, 2008	5.46	5.88	5.45	5.79
3940	NASDAQ	KLIC	Tue, Jan 15, 2008	5.64	5.68	5.27	5.57
3939	NASDAQ	KLIC	Mon, Jan 14, 2008	5.72	5.83	5.61	5.68
3938	NASDAQ	KLIC	Fri, Jan 11, 2008	5.84	5.88	5.58	5.68
3937	NASDAQ	KLIC	Thu, Jan 10, 2008	5.66	5.96	5.48	5.85
3936	NASDAQ	KLIC	Wed, Jan 9, 2008	6.02	6.02	5.44	5.62
3935	NASDAQ	KLIC	Tue, Jan 8, 2008	6.02	6.22	5.91	6.02
3934	NASDAQ	KLIC	Mon, Jan 7, 2008	5.85	6.29	5.85	6.07
3933	NASDAQ	KLIC	Fri, Jan 4, 2008	6.46	6.50	5.76	5.84
3932	NASDAQ	KLIC	Thu, Jan 3, 2008	6.61	6.66	6.50	6.51
3931	NASDAQ	KLIC	Wed, Jan 2, 2008	6.92	6.93	6.44	6.62
3930	NASDAQ	KLIC	Mon, Dec 31, 2007	6.84	6.87	6.70	6.86
3929	NASDAQ	KLIC	Fri, Dec 28, 2007	6.90	7.01	6.84	6.84
3928	NASDAQ	KLIC	Thu, Dec 27, 2007	7.16	7.20	6.84	6.87
3927	NASDAQ	KLIC	Wed, Dec 26, 2007	7.19	7.23	7.08	7.19
3926	NASDAQ	KLIC	Mon, Dec 24, 2007	7.12	7.23	7.06	7.18
3925	NASDAQ	KLIC	Fri, Dec 21, 2007	7.03	7.19	7.02	7.08
3924	NASDAQ	KLIC	Thu, Dec 20, 2007	6.92	6.98	6.82	6.98
3923	NASDAQ	KLIC	Wed, Dec 19, 2007	6.65	6.91	6.65	6.87
3922	NASDAQ	KLIC	Tue, Dec 18, 2007	6.70	6.71	6.58	6.69
3921	NASDAQ	KLIC	Mon, Dec 17, 2007	6.68	6.78	6.57	6.61
3920	NASDAQ	KLIC	Fri, Dec 14, 2007	6.71	6.84	6.64	6.73
3919	NASDAQ	KLIC	Thu, Dec 13, 2007	6.80	6.87	6.68	6.82
3918	NASDAQ	KLIC	Wed, Dec 12, 2007	7.12	7.12	6.74	6.87
3917	NASDAQ	KLIC	Tue, Dec 11, 2007	7.20	7.20	6.92	6.95
3916	NASDAQ	KLIC	Mon, Dec 10, 2007	7.16	7.22	7.13	7.17
3915	NASDAQ	KLIC	Fri, Dec 7, 2007	7.14	7.25	7.11	7.15
3914	NASDAQ	KLIC	Thu, Dec 6, 2007	7.07	7.24	6.98	7.22
3913	NASDAQ	KLIC	Wed, Dec 5, 2007	7.05	7.16	6.97	7.08
3912	NASDAQ	KLIC	Tue, Dec 4, 2007	7.03	7.11	6.96	6.96
3911	NASDAQ	KLIC	Mon, Dec 3, 2007	7.09	7.15	7.04	7.08
3910	NASDAQ	KLIC	Fri, Nov 30, 2007	7.56	7.56	7.08	7.08
3909	NASDAQ	KLIC	Thu, Nov 29, 2007	7.41	7.48	7.38	7.41
3908	NASDAQ	KLIC	Wed, Nov 28, 2007	7.34	7.50	7.28	7.43
3907	NASDAQ	KLIC	Tue, Nov 27, 2007	7.21	7.31	7.13	7.25
3906	NASDAQ	KLIC	Mon, Nov 26, 2007	7.38	7.43	7.07	7.16
3905	NASDAQ	KLIC	Fri, Nov 23, 2007	7.22	7.40	7.16	7.40
3904	NASDAQ	KLIC	Wed, Nov 21, 2007	7.23	7.29	7.03	7.17
3903	NASDAQ	KLIC	Tue, Nov 20, 2007	7.36	7.46	7.11	7.29
3902	NASDAQ	KLIC	Mon, Nov 19, 2007	7.22	7.50	7.11	7.36
3901	NASDAQ	KLIC	Fri, Nov 16, 2007	7.49	7.59	7.28	7.38
3900	NASDAQ	KLIC	Thu, Nov 15, 2007	7.50	7.85	7.31	7.47
3899	NASDAQ	KLIC	Wed, Nov 14, 2007	6.74	7.00	6.72	6.78
3898	NASDAQ	KLIC	Tue, Nov 13, 2007	6.75	6.76	6.62	6.71
3897	NASDAQ	KLIC	Mon, Nov 12, 2007	6.60	6.76	6.47	6.71
3896	NASDAQ	KLIC	Fri, Nov 9, 2007	6.56	6.58	6.49	6.51
3895	NASDAQ	KLIC	Thu, Nov 8, 2007	6.70	6.72	6.48	6.62
3894	NASDAQ	KLIC	Wed, Nov 7, 2007	6.95	7.02	6.67	6.67
3893	NASDAQ	KLIC	Tue, Nov 6, 2007	7.20	7.20	6.89	7.06
3892	NASDAQ	KLIC	Mon, Nov 5, 2007	7.30	7.30	7.11	7.13
3891	NASDAQ	KLIC	Fri, Nov 2, 2007	7.37	7.37	7.24	7.28
3890	NASDAQ	KLIC	Thu, Nov 1, 2007	7.50	7.57	7.27	7.29
3889	NASDAQ	KLIC	Wed, Oct 31, 2007	7.71	7.76	7.50	7.57
3888	NASDAQ	KLIC	Tue, Oct 30, 2007	7.50	7.78	7.50	7.65
3887	NASDAQ	KLIC	Mon, Oct 29, 2007	7.69	7.69	7.48	7.51
3886	NASDAQ	KLIC	Fri, Oct 26, 2007	7.58	7.58	7.46	7.54
3885	NASDAQ	KLIC	Thu, Oct 25, 2007	7.68	7.68	7.43	7.46
3884	NASDAQ	KLIC	Wed, Oct 24, 2007	7.80	7.80	7.52	7.65
3883	NASDAQ	KLIC	Tue, Oct 23, 2007	7.72	7.78	7.60	7.68
3882	NASDAQ	KLIC	Mon, Oct 22, 2007	7.74	7.93	7.55	7.63
3881	NASDAQ	KLIC	Fri, Oct 19, 2007	8.10	8.10	7.77	7.78
3880	NASDAQ	KLIC	Thu, Oct 18, 2007	8.09	8.17	8.05	8.10
3879	NASDAQ	KLIC	Wed, Oct 17, 2007	8.15	8.26	8.03	8.15
3878	NASDAQ	KLIC	Tue, Oct 16, 2007	8.33	8.37	8.02	8.03
3877	NASDAQ	KLIC	Mon, Oct 15, 2007	8.56	8.57	8.24	8.37
3876	NASDAQ	KLIC	Fri, Oct 12, 2007	8.43	8.62	8.43	8.56
3875	NASDAQ	KLIC	Thu, Oct 11, 2007	8.80	8.80	8.44	8.44
3874	NASDAQ	KLIC	Wed, Oct 10, 2007	8.70	8.82	8.60	8.74
3873	NASDAQ	KLIC	Tue, Oct 9, 2007	8.78	8.78	8.45	8.66
3872	NASDAQ	KLIC	Mon, Oct 8, 2007	8.89	8.89	8.65	8.72
3871	NASDAQ	KLIC	Fri, Oct 5, 2007	8.65	8.85	8.55	8.83
3870	NASDAQ	KLIC	Thu, Oct 4, 2007	8.62	8.62	8.46	8.57
3869	NASDAQ	KLIC	Wed, Oct 3, 2007	8.70	8.76	8.52	8.55
3868	NASDAQ	KLIC	Tue, Oct 2, 2007	8.88	8.88	8.66	8.74
3867	NASDAQ	KLIC	Mon, Oct 1, 2007	8.51	8.85	8.48	8.84
3866	NASDAQ	KLIC	Fri, Sep 28, 2007	8.52	8.64	8.46	8.48
3865	NASDAQ	KLIC	Thu, Sep 27, 2007	8.47	8.51	8.33	8.50
3864	NASDAQ	KLIC	Wed, Sep 26, 2007	8.52	8.59	8.35	8.41
3863	NASDAQ	KLIC	Tue, Sep 25, 2007	8.48	8.61	8.37	8.46
3862	NASDAQ	KLIC	Mon, Sep 24, 2007	8.69	8.86	8.44	8.54
3861	NASDAQ	KLIC	Fri, Sep 21, 2007	8.69	8.81	8.61	8.66
3860	NASDAQ	KLIC	Thu, Sep 20, 2007	8.60	8.69	8.48	8.61
3859	NASDAQ	KLIC	Wed, Sep 19, 2007	8.55	8.68	8.50	8.60
3858	NASDAQ	KLIC	Tue, Sep 18, 2007	8.27	8.52	8.20	8.50
3857	NASDAQ	KLIC	Mon, Sep 17, 2007	8.13	8.25	8.13	8.21
3856	NASDAQ	KLIC	Fri, Sep 14, 2007	8.18	8.23	8.14	8.19
3855	NASDAQ	KLIC	Thu, Sep 13, 2007	8.25	8.35	8.12	8.20
3854	NASDAQ	KLIC	Wed, Sep 12, 2007	8.21	8.41	8.18	8.18
3853	NASDAQ	KLIC	Tue, Sep 11, 2007	8.19	8.32	8.17	8.22
3852	NASDAQ	KLIC	Mon, Sep 10, 2007	8.37	8.40	8.14	8.22
3851	NASDAQ	KLIC	Fri, Sep 7, 2007	8.44	8.47	8.18	8.28
3850	NASDAQ	KLIC	Thu, Sep 6, 2007	8.72	8.77	8.47	8.51
3849	NASDAQ	KLIC	Wed, Sep 5, 2007	9.00	9.05	8.69	8.71
3848	NASDAQ	KLIC	Tue, Sep 4, 2007	8.83	9.35	8.77	9.04
3847	NASDAQ	KLIC	Fri, Aug 31, 2007	8.49	8.62	8.35	8.54
3846	NASDAQ	KLIC	Thu, Aug 30, 2007	8.23	8.52	8.13	8.33
3845	NASDAQ	KLIC	Wed, Aug 29, 2007	7.99	8.28	7.92	8.19
3844	NASDAQ	KLIC	Tue, Aug 28, 2007	8.19	8.28	7.88	7.92
3843	NASDAQ	KLIC	Mon, Aug 27, 2007	8.20	8.28	8.13	8.23
3842	NASDAQ	KLIC	Fri, Aug 24, 2007	8.21	8.32	8.10	8.26
3841	NASDAQ	KLIC	Thu, Aug 23, 2007	8.22	8.31	8.06	8.22
3840	NASDAQ	KLIC	Wed, Aug 22, 2007	8.26	8.32	8.15	8.20
3839	NASDAQ	KLIC	Tue, Aug 21, 2007	8.43	8.48	8.18	8.23
3838	NASDAQ	KLIC	Mon, Aug 20, 2007	8.35	8.51	8.27	8.46
3837	NASDAQ	KLIC	Fri, Aug 17, 2007	8.32	8.45	8.12	8.33
3836	NASDAQ	KLIC	Thu, Aug 16, 2007	7.90	8.05	7.56	8.01
3835	NASDAQ	KLIC	Wed, Aug 15, 2007	8.35	8.53	7.96	7.96
3834	NASDAQ	KLIC	Tue, Aug 14, 2007	8.51	8.83	8.37	8.38
3833	NASDAQ	KLIC	Mon, Aug 13, 2007	8.71	9.15	8.42	8.51
3832	NASDAQ	KLIC	Fri, Aug 10, 2007	7.40	8.90	7.34	8.69
3831	NASDAQ	KLIC	Thu, Aug 9, 2007	7.98	8.05	7.47	7.65
3830	NASDAQ	KLIC	Wed, Aug 8, 2007	8.43	8.54	7.94	8.11
3829	NASDAQ	KLIC	Tue, Aug 7, 2007	8.32	8.41	8.04	8.32
3828	NASDAQ	KLIC	Mon, Aug 6, 2007	8.62	8.65	8.22	8.36
3827	NASDAQ	KLIC	Fri, Aug 3, 2007	8.95	9.03	8.53	8.55
3826	NASDAQ	KLIC	Thu, Aug 2, 2007	9.13	9.22	8.81	8.93
3825	NASDAQ	KLIC	Wed, Aug 1, 2007	9.29	9.36	8.94	9.11
3824	NASDAQ	KLIC	Tue, Jul 31, 2007	9.62	9.79	9.30	9.36
3823	NASDAQ	KLIC	Mon, Jul 30, 2007	9.60	9.68	9.38	9.62
3822	NASDAQ	KLIC	Fri, Jul 27, 2007	9.91	10.02	9.54	9.56
3821	NASDAQ	KLIC	Thu, Jul 26, 2007	10.46	10.46	9.66	9.91
3820	NASDAQ	KLIC	Wed, Jul 25, 2007	11.10	11.26	10.65	10.77
3819	NASDAQ	KLIC	Tue, Jul 24, 2007	11.26	11.32	11.03	11.06
3818	NASDAQ	KLIC	Mon, Jul 23, 2007	11.50	11.50	11.24	11.44
3817	NASDAQ	KLIC	Fri, Jul 20, 2007	11.75	11.77	11.41	11.50
3816	NASDAQ	KLIC	Thu, Jul 19, 2007	12.21	12.46	11.68	11.78
3815	NASDAQ	KLIC	Wed, Jul 18, 2007	11.75	11.96	11.45	11.89
3814	NASDAQ	KLIC	Tue, Jul 17, 2007	11.80	11.95	11.70	11.82
3813	NASDAQ	KLIC	Mon, Jul 16, 2007	11.10	11.65	11.06	11.65
3812	NASDAQ	KLIC	Fri, Jul 13, 2007	10.99	11.10	10.88	11.05
3811	NASDAQ	KLIC	Thu, Jul 12, 2007	10.71	11.06	10.69	11.05
3810	NASDAQ	KLIC	Wed, Jul 11, 2007	10.54	10.68	10.51	10.66
3809	NASDAQ	KLIC	Tue, Jul 10, 2007	10.68	10.75	10.49	10.54
3808	NASDAQ	KLIC	Mon, Jul 9, 2007	10.82	10.86	10.59	10.77
3807	NASDAQ	KLIC	Fri, Jul 6, 2007	10.68	10.75	10.57	10.72
3806	NASDAQ	KLIC	Thu, Jul 5, 2007	10.75	10.75	10.54	10.64
3805	NASDAQ	KLIC	Tue, Jul 3, 2007	10.60	10.71	10.60	10.68
3804	NASDAQ	KLIC	Mon, Jul 2, 2007	10.56	10.63	10.50	10.55
3803	NASDAQ	KLIC	Fri, Jun 29, 2007	10.38	10.58	10.30	10.47
3802	NASDAQ	KLIC	Thu, Jun 28, 2007	10.44	10.44	10.21	10.35
3801	NASDAQ	KLIC	Wed, Jun 27, 2007	10.29	10.51	10.20	10.43
3800	NASDAQ	KLIC	Tue, Jun 26, 2007	10.26	10.41	10.05	10.34
3799	NASDAQ	KLIC	Mon, Jun 25, 2007	10.56	10.60	10.13	10.23
3798	NASDAQ	KLIC	Fri, Jun 22, 2007	10.94	11.00	10.52	10.53
3797	NASDAQ	KLIC	Thu, Jun 21, 2007	10.65	11.00	10.57	10.95
3796	NASDAQ	KLIC	Wed, Jun 20, 2007	10.69	10.84	10.60	10.67
3795	NASDAQ	KLIC	Tue, Jun 19, 2007	10.69	10.79	10.60	10.73
3794	NASDAQ	KLIC	Mon, Jun 18, 2007	10.86	10.95	10.65	10.79
3793	NASDAQ	KLIC	Fri, Jun 15, 2007	10.98	11.04	10.81	10.90
3792	NASDAQ	KLIC	Thu, Jun 14, 2007	10.44	10.87	10.32	10.81
3791	NASDAQ	KLIC	Wed, Jun 13, 2007	10.08	10.18	9.93	10.10
3790	NASDAQ	KLIC	Tue, Jun 12, 2007	9.74	10.24	9.64	10.00
3789	NASDAQ	KLIC	Mon, Jun 11, 2007	9.54	9.73	9.43	9.69
3788	NASDAQ	KLIC	Fri, Jun 8, 2007	9.61	9.74	9.52	9.63
3787	NASDAQ	KLIC	Thu, Jun 7, 2007	9.77	9.89	9.63	9.65
3786	NASDAQ	KLIC	Wed, Jun 6, 2007	9.77	9.86	9.70	9.79
3785	NASDAQ	KLIC	Tue, Jun 5, 2007	9.74	9.93	9.68	9.83
3784	NASDAQ	KLIC	Mon, Jun 4, 2007	9.62	9.82	9.59	9.81
3783	NASDAQ	KLIC	Fri, Jun 1, 2007	9.54	9.81	9.52	9.64
3782	NASDAQ	KLIC	Thu, May 31, 2007	9.53	9.92	9.51	9.57
3781	NASDAQ	KLIC	Wed, May 30, 2007	9.55	9.61	9.45	9.59
3780	NASDAQ	KLIC	Tue, May 29, 2007	9.52	9.74	9.52	9.66
3779	NASDAQ	KLIC	Fri, May 25, 2007	9.51	9.62	9.44	9.50
3778	NASDAQ	KLIC	Thu, May 24, 2007	9.58	9.81	9.40	9.47
3777	NASDAQ	KLIC	Wed, May 23, 2007	9.84	9.91	9.62	9.62
3776	NASDAQ	KLIC	Tue, May 22, 2007	9.67	9.88	9.62	9.79
3775	NASDAQ	KLIC	Mon, May 21, 2007	9.68	9.94	9.63	9.69
3774	NASDAQ	KLIC	Fri, May 18, 2007	9.56	9.77	9.44	9.67
3773	NASDAQ	KLIC	Thu, May 17, 2007	9.33	9.62	9.28	9.54
3772	NASDAQ	KLIC	Wed, May 16, 2007	9.38	9.47	9.25	9.40
3771	NASDAQ	KLIC	Tue, May 15, 2007	9.64	9.71	9.40	9.42
3770	NASDAQ	KLIC	Mon, May 14, 2007	9.74	9.82	9.56	9.67
3769	NASDAQ	KLIC	Fri, May 11, 2007	9.60	9.80	9.42	9.76
3768	NASDAQ	KLIC	Thu, May 10, 2007	9.76	9.84	9.50	9.52
3767	NASDAQ	KLIC	Wed, May 9, 2007	9.81	9.90	9.71	9.84
3766	NASDAQ	KLIC	Tue, May 8, 2007	9.90	9.93	9.61	9.89
3765	NASDAQ	KLIC	Mon, May 7, 2007	10.08	10.08	9.86	9.99
3764	NASDAQ	KLIC	Fri, May 4, 2007	10.04	10.15	9.93	10.09
3763	NASDAQ	KLIC	Thu, May 3, 2007	9.90	10.06	9.75	10.00
3762	NASDAQ	KLIC	Wed, May 2, 2007	9.84	9.96	9.78	9.91
3761	NASDAQ	KLIC	Tue, May 1, 2007	10.10	10.15	9.75	9.87
3760	NASDAQ	KLIC	Mon, Apr 30, 2007	10.00	10.74	9.82	9.98
3759	NASDAQ	KLIC	Fri, Apr 27, 2007	9.83	9.99	9.74	9.80
3758	NASDAQ	KLIC	Thu, Apr 26, 2007	9.76	10.00	9.76	9.97
3757	NASDAQ	KLIC	Wed, Apr 25, 2007	9.77	9.90	9.65	9.86
3756	NASDAQ	KLIC	Tue, Apr 24, 2007	9.71	9.91	9.65	9.72
3755	NASDAQ	KLIC	Mon, Apr 23, 2007	9.77	9.81	9.65	9.72
3754	NASDAQ	KLIC	Fri, Apr 20, 2007	9.93	9.93	9.68	9.81
3753	NASDAQ	KLIC	Thu, Apr 19, 2007	9.69	9.91	9.63	9.78
3752	NASDAQ	KLIC	Wed, Apr 18, 2007	9.61	9.87	9.60	9.74
3751	NASDAQ	KLIC	Tue, Apr 17, 2007	9.84	9.84	9.54	9.65
3750	NASDAQ	KLIC	Mon, Apr 16, 2007	9.73	9.83	9.65	9.80
3749	NASDAQ	KLIC	Fri, Apr 13, 2007	9.66	9.72	9.34	9.69
3748	NASDAQ	KLIC	Thu, Apr 12, 2007	9.56	9.71	9.45	9.65
3747	NASDAQ	KLIC	Wed, Apr 11, 2007	9.82	9.88	9.53	9.56
3746	NASDAQ	KLIC	Tue, Apr 10, 2007	9.71	9.83	9.66	9.80
3745	NASDAQ	KLIC	Mon, Apr 9, 2007	9.93	9.93	9.71	9.74
3744	NASDAQ	KLIC	Thu, Apr 5, 2007	9.72	9.93	9.72	9.93
3743	NASDAQ	KLIC	Wed, Apr 4, 2007	9.75	9.87	9.68	9.72
3742	NASDAQ	KLIC	Tue, Apr 3, 2007	9.24	9.81	9.24	9.77
3741	NASDAQ	KLIC	Mon, Apr 2, 2007	9.24	9.34	9.11	9.20
3740	NASDAQ	KLIC	Fri, Mar 30, 2007	9.30	9.34	9.14	9.25
3739	NASDAQ	KLIC	Thu, Mar 29, 2007	9.33	9.36	9.12	9.27
3738	NASDAQ	KLIC	Wed, Mar 28, 2007	9.28	9.43	9.13	9.25
3737	NASDAQ	KLIC	Tue, Mar 27, 2007	9.39	9.40	9.28	9.35
3736	NASDAQ	KLIC	Mon, Mar 26, 2007	9.35	9.43	9.23	9.43
3735	NASDAQ	KLIC	Fri, Mar 23, 2007	9.39	9.47	9.26	9.35
3734	NASDAQ	KLIC	Thu, Mar 22, 2007	9.50	9.52	9.30	9.40
3733	NASDAQ	KLIC	Wed, Mar 21, 2007	9.28	9.53	9.25	9.48
3732	NASDAQ	KLIC	Tue, Mar 20, 2007	9.17	9.38	9.09	9.28
3731	NASDAQ	KLIC	Mon, Mar 19, 2007	9.05	9.21	9.05	9.17
3730	NASDAQ	KLIC	Fri, Mar 16, 2007	9.12	9.14	8.92	9.01
3729	NASDAQ	KLIC	Thu, Mar 15, 2007	9.04	9.21	9.03	9.14
3728	NASDAQ	KLIC	Wed, Mar 14, 2007	8.91	9.04	8.78	9.03
3727	NASDAQ	KLIC	Tue, Mar 13, 2007	9.17	9.21	8.91	8.92
3726	NASDAQ	KLIC	Mon, Mar 12, 2007	9.15	9.31	9.12	9.25
3725	NASDAQ	KLIC	Fri, Mar 9, 2007	9.27	9.38	8.99	9.11
3724	NASDAQ	KLIC	Thu, Mar 8, 2007	9.13	9.29	9.10	9.20
3723	NASDAQ	KLIC	Wed, Mar 7, 2007	9.07	9.25	8.93	9.05
3722	NASDAQ	KLIC	Tue, Mar 6, 2007	8.87	9.19	8.87	9.11
3721	NASDAQ	KLIC	Mon, Mar 5, 2007	9.01	9.18	8.79	8.80
3720	NASDAQ	KLIC	Fri, Mar 2, 2007	9.30	9.47	9.13	9.14
3719	NASDAQ	KLIC	Thu, Mar 1, 2007	9.20	9.59	9.19	9.40
3718	NASDAQ	KLIC	Wed, Feb 28, 2007	9.36	9.65	9.36	9.50
3717	NASDAQ	KLIC	Tue, Feb 27, 2007	9.91	9.91	9.36	9.36
3716	NASDAQ	KLIC	Mon, Feb 26, 2007	9.94	10.07	9.86	10.06
3715	NASDAQ	KLIC	Fri, Feb 23, 2007	9.80	9.98	9.80	9.91
3714	NASDAQ	KLIC	Thu, Feb 22, 2007	9.71	9.96	9.65	9.82
3713	NASDAQ	KLIC	Wed, Feb 21, 2007	9.56	9.77	9.56	9.71
3712	NASDAQ	KLIC	Tue, Feb 20, 2007	9.76	9.86	9.56	9.65
3711	NASDAQ	KLIC	Fri, Feb 16, 2007	9.88	10.03	9.74	9.92
3710	NASDAQ	KLIC	Thu, Feb 15, 2007	9.94	10.19	9.84	9.89
3709	NASDAQ	KLIC	Wed, Feb 14, 2007	9.63	10.00	9.63	9.95
3708	NASDAQ	KLIC	Tue, Feb 13, 2007	9.52	9.73	9.46	9.57
3707	NASDAQ	KLIC	Mon, Feb 12, 2007	9.61	9.73	9.41	9.49
3706	NASDAQ	KLIC	Fri, Feb 9, 2007	9.83	9.93	9.59	9.62
3705	NASDAQ	KLIC	Thu, Feb 8, 2007	9.78	9.94	9.65	9.87
3704	NASDAQ	KLIC	Wed, Feb 7, 2007	9.67	9.95	9.66	9.80
3703	NASDAQ	KLIC	Tue, Feb 6, 2007	9.50	9.65	9.41	9.62
3702	NASDAQ	KLIC	Mon, Feb 5, 2007	9.12	9.61	9.12	9.50
3701	NASDAQ	KLIC	Fri, Feb 2, 2007	9.34	9.42	9.13	9.16
3700	NASDAQ	KLIC	Thu, Feb 1, 2007	9.30	9.43	9.25	9.34
3699	NASDAQ	KLIC	Wed, Jan 31, 2007	9.34	9.36	9.13	9.28
3698	NASDAQ	KLIC	Tue, Jan 30, 2007	9.17	9.37	9.15	9.34
3697	NASDAQ	KLIC	Mon, Jan 29, 2007	9.02	9.21	9.02	9.18
3696	NASDAQ	KLIC	Fri, Jan 26, 2007	8.69	9.15	8.66	9.11
3695	NASDAQ	KLIC	Thu, Jan 25, 2007	8.29	8.80	8.26	8.69
3694	NASDAQ	KLIC	Wed, Jan 24, 2007	8.39	8.61	8.36	8.53
3693	NASDAQ	KLIC	Tue, Jan 23, 2007	8.29	8.56	8.23	8.36
3692	NASDAQ	KLIC	Mon, Jan 22, 2007	8.40	8.41	8.17	8.30
3691	NASDAQ	KLIC	Fri, Jan 19, 2007	8.34	8.57	8.30	8.42
3690	NASDAQ	KLIC	Thu, Jan 18, 2007	8.71	8.75	8.30	8.38
3689	NASDAQ	KLIC	Wed, Jan 17, 2007	8.85	8.89	8.73	8.80
3688	NASDAQ	KLIC	Tue, Jan 16, 2007	9.09	9.09	8.79	8.85
3687	NASDAQ	KLIC	Fri, Jan 12, 2007	9.01	9.09	8.97	9.09
3686	NASDAQ	KLIC	Thu, Jan 11, 2007	9.05	9.20	8.97	9.01
3685	NASDAQ	KLIC	Wed, Jan 10, 2007	8.86	9.08	8.81	9.00
3684	NASDAQ	KLIC	Tue, Jan 9, 2007	8.66	8.92	8.60	8.86
3683	NASDAQ	KLIC	Mon, Jan 8, 2007	8.52	8.72	8.43	8.68
3682	NASDAQ	KLIC	Fri, Jan 5, 2007	8.59	8.74	8.39	8.47
3681	NASDAQ	KLIC	Thu, Jan 4, 2007	8.38	8.68	8.38	8.67
3680	NASDAQ	KLIC	Wed, Jan 3, 2007	8.45	8.59	8.32	8.43
3679	NASDAQ	KLIC	Fri, Dec 29, 2006	8.19	8.51	8.19	8.40
3678	NASDAQ	KLIC	Thu, Dec 28, 2006	8.20	8.31	8.19	8.20
3677	NASDAQ	KLIC	Wed, Dec 27, 2006	8.17	8.29	8.16	8.25
3676	NASDAQ	KLIC	Tue, Dec 26, 2006	8.01	8.25	8.01	8.18
3675	NASDAQ	KLIC	Fri, Dec 22, 2006	8.08	8.14	8.00	8.03
3674	NASDAQ	KLIC	Thu, Dec 21, 2006	8.09	8.25	8.05	8.07
3673	NASDAQ	KLIC	Wed, Dec 20, 2006	8.04	8.27	8.04	8.12
3672	NASDAQ	KLIC	Tue, Dec 19, 2006	8.10	8.10	7.99	8.04
3671	NASDAQ	KLIC	Mon, Dec 18, 2006	8.15	8.42	8.11	8.16
3670	NASDAQ	KLIC	Fri, Dec 15, 2006	8.06	8.34	8.06	8.28
3669	NASDAQ	KLIC	Thu, Dec 14, 2006	8.07	8.18	8.03	8.05
3668	NASDAQ	KLIC	Wed, Dec 13, 2006	8.23	8.23	7.99	8.03
3667	NASDAQ	KLIC	Tue, Dec 12, 2006	8.13	8.23	8.08	8.17
3666	NASDAQ	KLIC	Mon, Dec 11, 2006	8.07	8.25	8.06	8.11
3665	NASDAQ	KLIC	Fri, Dec 8, 2006	8.05	8.21	8.01	8.07
3664	NASDAQ	KLIC	Thu, Dec 7, 2006	8.28	8.35	8.12	8.12
3663	NASDAQ	KLIC	Wed, Dec 6, 2006	8.25	8.37	8.08	8.28
3662	NASDAQ	KLIC	Tue, Dec 5, 2006	8.19	8.34	8.15	8.27
3661	NASDAQ	KLIC	Mon, Dec 4, 2006	8.04	8.22	7.97	8.14
3660	NASDAQ	KLIC	Fri, Dec 1, 2006	8.14	8.31	7.96	8.10
3659	NASDAQ	KLIC	Thu, Nov 30, 2006	8.07	8.39	7.98	8.19
3658	NASDAQ	KLIC	Wed, Nov 29, 2006	8.28	8.31	8.00	8.10
3657	NASDAQ	KLIC	Tue, Nov 28, 2006	7.97	8.21	7.92	8.20
3656	NASDAQ	KLIC	Mon, Nov 27, 2006	8.38	8.38	7.95	8.01
3655	NASDAQ	KLIC	Fri, Nov 24, 2006	8.20	8.41	8.20	8.38
3654	NASDAQ	KLIC	Wed, Nov 22, 2006	8.28	8.33	8.24	8.28
3653	NASDAQ	KLIC	Tue, Nov 21, 2006	8.21	8.33	8.21	8.26
3652	NASDAQ	KLIC	Mon, Nov 20, 2006	8.30	8.44	8.15	8.23
3651	NASDAQ	KLIC	Fri, Nov 17, 2006	8.39	8.39	8.18	8.36
3650	NASDAQ	KLIC	Thu, Nov 16, 2006	8.51	8.83	8.14	8.47
3649	NASDAQ	KLIC	Wed, Nov 15, 2006	8.97	9.19	8.80	8.93
3648	NASDAQ	KLIC	Tue, Nov 14, 2006	8.65	8.98	8.45	8.95
3647	NASDAQ	KLIC	Mon, Nov 13, 2006	8.52	8.69	8.41	8.60
3646	NASDAQ	KLIC	Fri, Nov 10, 2006	8.36	8.54	8.29	8.50
3645	NASDAQ	KLIC	Thu, Nov 9, 2006	8.79	8.80	8.30	8.39
3644	NASDAQ	KLIC	Wed, Nov 8, 2006	8.59	8.75	8.48	8.72
3643	NASDAQ	KLIC	Tue, Nov 7, 2006	8.51	8.85	8.50	8.62
3642	NASDAQ	KLIC	Mon, Nov 6, 2006	8.53	8.66	8.43	8.54
3641	NASDAQ	KLIC	Fri, Nov 3, 2006	8.43	8.58	8.19	8.46
3640	NASDAQ	KLIC	Thu, Nov 2, 2006	8.48	8.61	8.30	8.38
3639	NASDAQ	KLIC	Wed, Nov 1, 2006	8.55	8.80	8.49	8.57
3638	NASDAQ	KLIC	Tue, Oct 31, 2006	8.88	9.09	8.88	8.98
3637	NASDAQ	KLIC	Mon, Oct 30, 2006	8.89	8.95	8.84	8.87
3636	NASDAQ	KLIC	Fri, Oct 27, 2006	8.95	9.22	8.87	8.93
3635	NASDAQ	KLIC	Thu, Oct 26, 2006	8.93	9.01	8.80	8.98
3634	NASDAQ	KLIC	Wed, Oct 25, 2006	8.62	8.91	8.62	8.87
3633	NASDAQ	KLIC	Tue, Oct 24, 2006	8.65	8.78	8.60	8.62
3632	NASDAQ	KLIC	Mon, Oct 23, 2006	8.72	8.79	8.66	8.70
3631	NASDAQ	KLIC	Fri, Oct 20, 2006	8.74	8.85	8.64	8.78
3630	NASDAQ	KLIC	Thu, Oct 19, 2006	8.75	8.95	8.57	8.72
3629	NASDAQ	KLIC	Wed, Oct 18, 2006	9.54	9.59	8.76	8.79
3628	NASDAQ	KLIC	Tue, Oct 17, 2006	9.52	9.62	9.24	9.50
3627	NASDAQ	KLIC	Mon, Oct 16, 2006	9.55	9.67	9.50	9.54
3626	NASDAQ	KLIC	Fri, Oct 13, 2006	9.33	9.62	9.28	9.49
3625	NASDAQ	KLIC	Thu, Oct 12, 2006	9.20	9.37	9.04	9.35
3624	NASDAQ	KLIC	Wed, Oct 11, 2006	9.00	9.37	9.00	9.22
3623	NASDAQ	KLIC	Tue, Oct 10, 2006	8.96	9.16	8.88	9.10
3622	NASDAQ	KLIC	Mon, Oct 9, 2006	8.80	9.07	8.73	9.00
3621	NASDAQ	KLIC	Fri, Oct 6, 2006	9.10	9.14	8.86	9.01
3620	NASDAQ	KLIC	Thu, Oct 5, 2006	8.88	9.16	8.81	9.14
3619	NASDAQ	KLIC	Wed, Oct 4, 2006	8.50	8.90	8.46	8.86
3618	NASDAQ	KLIC	Tue, Oct 3, 2006	8.52	8.65	8.35	8.50
3617	NASDAQ	KLIC	Mon, Oct 2, 2006	8.79	8.90	8.58	8.59
3616	NASDAQ	KLIC	Fri, Sep 29, 2006	9.03	9.03	8.80	8.84
3615	NASDAQ	KLIC	Thu, Sep 28, 2006	9.01	9.05	8.82	8.96
3614	NASDAQ	KLIC	Wed, Sep 27, 2006	8.97	9.18	8.95	9.01
3613	NASDAQ	KLIC	Tue, Sep 26, 2006	8.87	8.99	8.59	8.95
3612	NASDAQ	KLIC	Mon, Sep 25, 2006	8.78	8.95	8.57	8.88
3611	NASDAQ	KLIC	Fri, Sep 22, 2006	8.58	8.80	8.49	8.76
3610	NASDAQ	KLIC	Thu, Sep 21, 2006	8.72	8.74	8.55	8.58
3609	NASDAQ	KLIC	Wed, Sep 20, 2006	8.55	8.72	8.44	8.66
3608	NASDAQ	KLIC	Tue, Sep 19, 2006	8.59	8.60	8.23	8.46
3607	NASDAQ	KLIC	Mon, Sep 18, 2006	8.57	8.64	8.40	8.52
3606	NASDAQ	KLIC	Fri, Sep 15, 2006	8.75	8.83	8.40	8.52
3605	NASDAQ	KLIC	Thu, Sep 14, 2006	8.63	8.69	8.45	8.65
3604	NASDAQ	KLIC	Wed, Sep 13, 2006	8.85	8.89	8.50	8.69
3603	NASDAQ	KLIC	Tue, Sep 12, 2006	8.42	8.89	8.40	8.81
3602	NASDAQ	KLIC	Mon, Sep 11, 2006	8.25	8.50	8.00	8.38
3601	NASDAQ	KLIC	Fri, Sep 8, 2006	8.19	8.28	8.04	8.26
3600	NASDAQ	KLIC	Thu, Sep 7, 2006	7.97	8.14	7.63	8.07
3599	NASDAQ	KLIC	Wed, Sep 6, 2006	7.83	7.85	7.51	7.51
3598	NASDAQ	KLIC	Tue, Sep 5, 2006	7.82	7.93	7.56	7.92
3597	NASDAQ	KLIC	Fri, Sep 1, 2006	7.95	8.05	7.75	7.76
3596	NASDAQ	KLIC	Thu, Aug 31, 2006	8.14	8.14	7.67	7.88
3595	NASDAQ	KLIC	Wed, Aug 30, 2006	7.89	8.20	7.84	8.12
3594	NASDAQ	KLIC	Tue, Aug 29, 2006	7.85	7.95	7.59	7.91
3593	NASDAQ	KLIC	Mon, Aug 28, 2006	7.80	7.93	7.72	7.85
3592	NASDAQ	KLIC	Fri, Aug 25, 2006	7.62	7.85	7.54	7.79
3591	NASDAQ	KLIC	Thu, Aug 24, 2006	7.50	7.71	7.50	7.62
3590	NASDAQ	KLIC	Wed, Aug 23, 2006	7.53	7.69	7.38	7.43
3589	NASDAQ	KLIC	Tue, Aug 22, 2006	7.52	7.72	7.44	7.54
3588	NASDAQ	KLIC	Mon, Aug 21, 2006	7.70	7.78	7.53	7.57
3587	NASDAQ	KLIC	Fri, Aug 18, 2006	7.79	7.83	7.52	7.82
3586	NASDAQ	KLIC	Thu, Aug 17, 2006	7.51	7.96	7.51	7.77
3585	NASDAQ	KLIC	Wed, Aug 16, 2006	7.19	7.56	7.16	7.52
3584	NASDAQ	KLIC	Tue, Aug 15, 2006	6.79	7.19	6.76	7.13
3583	NASDAQ	KLIC	Mon, Aug 14, 2006	6.63	6.85	6.56	6.71
3582	NASDAQ	KLIC	Fri, Aug 11, 2006	6.66	6.66	6.51	6.53
3581	NASDAQ	KLIC	Thu, Aug 10, 2006	6.55	6.85	6.51	6.67
3580	NASDAQ	KLIC	Wed, Aug 9, 2006	6.90	6.93	6.59	6.60
3579	NASDAQ	KLIC	Tue, Aug 8, 2006	7.13	7.13	6.74	6.78
3578	NASDAQ	KLIC	Mon, Aug 7, 2006	7.23	7.29	7.02	7.06
3577	NASDAQ	KLIC	Fri, Aug 4, 2006	7.40	7.57	7.07	7.23
3576	NASDAQ	KLIC	Thu, Aug 3, 2006	7.07	7.39	7.02	7.34
3575	NASDAQ	KLIC	Wed, Aug 2, 2006	7.14	7.26	7.00	7.15
3574	NASDAQ	KLIC	Tue, Aug 1, 2006	7.31	7.37	7.00	7.05
3573	NASDAQ	KLIC	Mon, Jul 31, 2006	7.29	7.40	7.21	7.39
3572	NASDAQ	KLIC	Fri, Jul 28, 2006	7.26	7.35	7.11	7.28
3571	NASDAQ	KLIC	Thu, Jul 27, 2006	6.53	7.57	6.50	7.20
3570	NASDAQ	KLIC	Wed, Jul 26, 2006	6.69	6.89	6.58	6.77
3569	NASDAQ	KLIC	Tue, Jul 25, 2006	6.74	7.00	6.69	6.77
3568	NASDAQ	KLIC	Mon, Jul 24, 2006	6.66	6.86	6.61	6.80
3567	NASDAQ	KLIC	Fri, Jul 21, 2006	7.00	7.00	6.60	6.61
3566	NASDAQ	KLIC	Thu, Jul 20, 2006	7.33	7.36	7.00	7.02
3565	NASDAQ	KLIC	Wed, Jul 19, 2006	6.98	7.39	6.98	7.31
3564	NASDAQ	KLIC	Tue, Jul 18, 2006	7.00	7.08	6.82	6.99
3563	NASDAQ	KLIC	Mon, Jul 17, 2006	7.01	7.13	6.95	6.96
3562	NASDAQ	KLIC	Fri, Jul 14, 2006	7.09	7.18	6.93	7.00
3561	NASDAQ	KLIC	Thu, Jul 13, 2006	7.05	7.40	6.92	7.09
3560	NASDAQ	KLIC	Wed, Jul 12, 2006	7.44	7.52	7.07	7.08
3559	NASDAQ	KLIC	Tue, Jul 11, 2006	7.25	7.55	7.20	7.47
3558	NASDAQ	KLIC	Mon, Jul 10, 2006	7.69	7.80	7.25	7.28
3557	NASDAQ	KLIC	Fri, Jul 7, 2006	7.75	7.81	7.52	7.64
3556	NASDAQ	KLIC	Thu, Jul 6, 2006	7.47	7.77	7.45	7.75
3555	NASDAQ	KLIC	Wed, Jul 5, 2006	7.64	7.64	7.30	7.44
3554	NASDAQ	KLIC	Mon, Jul 3, 2006	7.32	7.70	7.32	7.60
3553	NASDAQ	KLIC	Fri, Jun 30, 2006	7.51	7.60	7.36	7.41
3552	NASDAQ	KLIC	Thu, Jun 29, 2006	7.16	7.50	7.10	7.45
3551	NASDAQ	KLIC	Wed, Jun 28, 2006	7.35	7.36	7.07	7.11
3550	NASDAQ	KLIC	Tue, Jun 27, 2006	7.54	7.55	7.26	7.30
3549	NASDAQ	KLIC	Mon, Jun 26, 2006	7.28	7.50	7.25	7.50
3548	NASDAQ	KLIC	Fri, Jun 23, 2006	7.53	7.64	7.21	7.26
3547	NASDAQ	KLIC	Thu, Jun 22, 2006	7.63	7.73	7.48	7.61
3546	NASDAQ	KLIC	Wed, Jun 21, 2006	7.25	7.67	7.20	7.61
3545	NASDAQ	KLIC	Tue, Jun 20, 2006	7.16	7.45	7.05	7.23
3544	NASDAQ	KLIC	Mon, Jun 19, 2006	7.34	7.43	7.11	7.14
3543	NASDAQ	KLIC	Fri, Jun 16, 2006	7.51	7.69	7.26	7.28
3542	NASDAQ	KLIC	Thu, Jun 15, 2006	7.41	7.65	7.31	7.55
3541	NASDAQ	KLIC	Wed, Jun 14, 2006	7.10	7.43	7.05	7.27
3540	NASDAQ	KLIC	Tue, Jun 13, 2006	7.25	7.43	7.05	7.08
3539	NASDAQ	KLIC	Mon, Jun 12, 2006	7.54	7.60	7.21	7.23
3538	NASDAQ	KLIC	Fri, Jun 9, 2006	7.60	7.74	7.41	7.46
3537	NASDAQ	KLIC	Thu, Jun 8, 2006	7.90	7.95	7.19	7.52
3536	NASDAQ	KLIC	Wed, Jun 7, 2006	8.25	8.57	8.02	8.30
3535	NASDAQ	KLIC	Tue, Jun 6, 2006	8.64	8.64	8.14	8.26
3534	NASDAQ	KLIC	Mon, Jun 5, 2006	8.59	8.62	8.24	8.36
3533	NASDAQ	KLIC	Fri, Jun 2, 2006	8.61	8.69	8.30	8.57
3532	NASDAQ	KLIC	Thu, Jun 1, 2006	8.12	8.44	8.02	8.37
3531	NASDAQ	KLIC	Wed, May 31, 2006	8.27	8.40	8.02	8.07
3530	NASDAQ	KLIC	Tue, May 30, 2006	8.71	8.75	8.18	8.19
3529	NASDAQ	KLIC	Fri, May 26, 2006	8.50	8.69	8.37	8.58
3528	NASDAQ	KLIC	Thu, May 25, 2006	8.35	8.50	8.20	8.46
3527	NASDAQ	KLIC	Wed, May 24, 2006	8.12	8.37	8.00	8.32
3526	NASDAQ	KLIC	Tue, May 23, 2006	8.43	8.58	8.11	8.13
3525	NASDAQ	KLIC	Mon, May 22, 2006	8.38	8.38	8.10	8.29
3524	NASDAQ	KLIC	Fri, May 19, 2006	8.12	8.47	8.10	8.42
3523	NASDAQ	KLIC	Thu, May 18, 2006	8.41	8.50	8.15	8.18
3522	NASDAQ	KLIC	Wed, May 17, 2006	8.58	8.75	8.30	8.36
3521	NASDAQ	KLIC	Tue, May 16, 2006	8.66	8.87	8.53	8.70
3520	NASDAQ	KLIC	Mon, May 15, 2006	8.76	8.87	8.59	8.66
3519	NASDAQ	KLIC	Fri, May 12, 2006	9.00	9.00	8.75	8.90
3518	NASDAQ	KLIC	Thu, May 11, 2006	9.27	9.31	8.95	8.98
3517	NASDAQ	KLIC	Wed, May 10, 2006	9.50	9.60	9.24	9.29
3516	NASDAQ	KLIC	Tue, May 9, 2006	9.60	9.67	9.35	9.51
3515	NASDAQ	KLIC	Mon, May 8, 2006	9.45	9.71	9.43	9.63
3514	NASDAQ	KLIC	Fri, May 5, 2006	9.38	9.54	9.27	9.52
3513	NASDAQ	KLIC	Thu, May 4, 2006	9.25	9.49	9.25	9.40
3512	NASDAQ	KLIC	Wed, May 3, 2006	9.07	9.28	8.95	9.27
3511	NASDAQ	KLIC	Tue, May 2, 2006	8.85	9.09	8.80	9.04
3510	NASDAQ	KLIC	Mon, May 1, 2006	9.10	9.22	8.77	8.77
3509	NASDAQ	KLIC	Fri, Apr 28, 2006	9.53	9.57	9.06	9.06
3508	NASDAQ	KLIC	Thu, Apr 27, 2006	10.07	10.22	9.54	9.55
3507	NASDAQ	KLIC	Wed, Apr 26, 2006	9.53	10.23	9.52	10.10
3506	NASDAQ	KLIC	Tue, Apr 25, 2006	9.23	9.60	9.20	9.54
3505	NASDAQ	KLIC	Mon, Apr 24, 2006	9.50	9.55	9.15	9.20
3504	NASDAQ	KLIC	Fri, Apr 21, 2006	9.69	9.78	9.40	9.56
3503	NASDAQ	KLIC	Thu, Apr 20, 2006	9.70	9.75	9.46	9.69
3502	NASDAQ	KLIC	Wed, Apr 19, 2006	9.78	9.89	9.55	9.70
3501	NASDAQ	KLIC	Tue, Apr 18, 2006	9.25	9.75	9.17	9.72
3500	NASDAQ	KLIC	Mon, Apr 17, 2006	9.44	9.60	9.01	9.25
3499	NASDAQ	KLIC	Thu, Apr 13, 2006	9.15	9.45	9.06	9.42
3498	NASDAQ	KLIC	Wed, Apr 12, 2006	9.03	9.21	9.01	9.05
3497	NASDAQ	KLIC	Tue, Apr 11, 2006	9.25	9.40	9.08	9.11
3496	NASDAQ	KLIC	Mon, Apr 10, 2006	9.33	9.47	9.17	9.20
3495	NASDAQ	KLIC	Fri, Apr 7, 2006	9.94	10.07	9.47	9.50
3494	NASDAQ	KLIC	Thu, Apr 6, 2006	9.75	9.94	9.74	9.90
3493	NASDAQ	KLIC	Wed, Apr 5, 2006	9.77	9.89	9.66	9.76
3492	NASDAQ	KLIC	Tue, Apr 4, 2006	9.74	9.87	9.63	9.71
3491	NASDAQ	KLIC	Mon, Apr 3, 2006	9.56	9.87	9.48	9.71
3490	NASDAQ	KLIC	Fri, Mar 31, 2006	9.65	9.70	9.40	9.54
3489	NASDAQ	KLIC	Thu, Mar 30, 2006	9.43	9.82	9.43	9.62
3488	NASDAQ	KLIC	Wed, Mar 29, 2006	9.21	9.45	9.04	9.43
3487	NASDAQ	KLIC	Tue, Mar 28, 2006	9.45	9.50	9.09	9.15
3486	NASDAQ	KLIC	Mon, Mar 27, 2006	9.49	9.60	9.37	9.46
3485	NASDAQ	KLIC	Fri, Mar 24, 2006	9.27	9.52	9.23	9.49
3484	NASDAQ	KLIC	Thu, Mar 23, 2006	9.35	9.43	9.20	9.21
3483	NASDAQ	KLIC	Wed, Mar 22, 2006	8.96	9.44	8.92	9.30
3482	NASDAQ	KLIC	Tue, Mar 21, 2006	8.82	9.36	8.82	8.96
3481	NASDAQ	KLIC	Mon, Mar 20, 2006	8.85	8.97	8.75	8.84
3480	NASDAQ	KLIC	Fri, Mar 17, 2006	9.10	9.10	8.65	8.81
3479	NASDAQ	KLIC	Thu, Mar 16, 2006	10.70	10.70	8.87	8.99
3478	NASDAQ	KLIC	Wed, Mar 15, 2006	10.97	11.50	10.94	11.28
3477	NASDAQ	KLIC	Tue, Mar 14, 2006	10.46	10.97	10.45	10.97
3476	NASDAQ	KLIC	Mon, Mar 13, 2006	10.47	10.70	10.41	10.43
3475	NASDAQ	KLIC	Fri, Mar 10, 2006	10.48	10.68	10.35	10.42
3474	NASDAQ	KLIC	Thu, Mar 9, 2006	10.62	10.92	10.36	10.44
3473	NASDAQ	KLIC	Wed, Mar 8, 2006	10.52	10.77	10.34	10.61
3472	NASDAQ	KLIC	Tue, Mar 7, 2006	11.01	11.14	10.56	10.61
3471	NASDAQ	KLIC	Mon, Mar 6, 2006	11.53	11.62	11.02	11.06
3470	NASDAQ	KLIC	Fri, Mar 3, 2006	11.60	11.73	11.42	11.55
3469	NASDAQ	KLIC	Thu, Mar 2, 2006	11.66	11.98	11.56	11.74
3468	NASDAQ	KLIC	Wed, Mar 1, 2006	11.29	11.70	11.20	11.67
3467	NASDAQ	KLIC	Tue, Feb 28, 2006	11.25	11.29	10.88	11.20
3466	NASDAQ	KLIC	Mon, Feb 27, 2006	11.48	11.70	11.32	11.35
3465	NASDAQ	KLIC	Fri, Feb 24, 2006	11.65	11.75	11.45	11.47
3464	NASDAQ	KLIC	Thu, Feb 23, 2006	11.61	12.00	11.46	11.65
3463	NASDAQ	KLIC	Wed, Feb 22, 2006	11.60	11.85	11.40	11.64
3462	NASDAQ	KLIC	Tue, Feb 21, 2006	12.20	12.26	11.59	11.60
3461	NASDAQ	KLIC	Fri, Feb 17, 2006	12.09	12.25	12.05	12.18
3460	NASDAQ	KLIC	Thu, Feb 16, 2006	12.21	12.37	11.91	12.13
3459	NASDAQ	KLIC	Wed, Feb 15, 2006	11.63	12.10	11.57	12.07
3458	NASDAQ	KLIC	Tue, Feb 14, 2006	11.65	11.74	11.36	11.64
3457	NASDAQ	KLIC	Mon, Feb 13, 2006	11.95	12.18	11.75	11.76
3456	NASDAQ	KLIC	Fri, Feb 10, 2006	12.15	12.18	11.65	12.00
3455	NASDAQ	KLIC	Thu, Feb 9, 2006	12.34	12.50	11.98	12.07
3454	NASDAQ	KLIC	Wed, Feb 8, 2006	11.80	12.37	11.80	12.20
3453	NASDAQ	KLIC	Tue, Feb 7, 2006	11.71	12.04	11.66	11.69
3452	NASDAQ	KLIC	Mon, Feb 6, 2006	11.26	11.84	11.24	11.76
3451	NASDAQ	KLIC	Fri, Feb 3, 2006	11.02	11.40	10.78	11.30
3450	NASDAQ	KLIC	Thu, Feb 2, 2006	11.61	11.75	11.15	11.15
3449	NASDAQ	KLIC	Wed, Feb 1, 2006	11.11	11.70	11.10	11.63
3448	NASDAQ	KLIC	Tue, Jan 31, 2006	11.09	11.35	11.06	11.19
3447	NASDAQ	KLIC	Mon, Jan 30, 2006	11.20	11.39	11.09	11.13
3446	NASDAQ	KLIC	Fri, Jan 27, 2006	11.18	11.57	11.01	11.21
3445	NASDAQ	KLIC	Thu, Jan 26, 2006	11.01	11.55	10.75	11.21
3444	NASDAQ	KLIC	Wed, Jan 25, 2006	9.82	10.04	9.50	9.99
3443	NASDAQ	KLIC	Tue, Jan 24, 2006	9.40	9.86	9.37	9.80
3442	NASDAQ	KLIC	Mon, Jan 23, 2006	9.38	9.45	9.20	9.40
3441	NASDAQ	KLIC	Fri, Jan 20, 2006	9.89	9.90	9.27	9.34
3440	NASDAQ	KLIC	Thu, Jan 19, 2006	9.19	9.90	9.19	9.86
3439	NASDAQ	KLIC	Wed, Jan 18, 2006	8.95	9.27	8.74	9.14
3438	NASDAQ	KLIC	Tue, Jan 17, 2006	9.32	9.34	9.05	9.17
3437	NASDAQ	KLIC	Fri, Jan 13, 2006	9.58	9.67	9.33	9.38
3436	NASDAQ	KLIC	Thu, Jan 12, 2006	9.89	9.98	9.50	9.62
3435	NASDAQ	KLIC	Wed, Jan 11, 2006	9.80	9.97	9.79	9.97
3434	NASDAQ	KLIC	Tue, Jan 10, 2006	9.55	9.85	9.35	9.81
3433	NASDAQ	KLIC	Mon, Jan 9, 2006	9.73	9.85	9.55	9.66
3432	NASDAQ	KLIC	Fri, Jan 6, 2006	9.44	9.62	9.28	9.47
3431	NASDAQ	KLIC	Thu, Jan 5, 2006	9.01	9.50	8.99	9.42
3430	NASDAQ	KLIC	Wed, Jan 4, 2006	9.07	9.20	8.88	9.08
3429	NASDAQ	KLIC	Tue, Jan 3, 2006	8.86	9.07	8.47	9.02
3428	NASDAQ	KLIC	Fri, Dec 30, 2005	8.85	8.97	8.70	8.84
3427	NASDAQ	KLIC	Thu, Dec 29, 2005	8.85	9.14	8.80	8.92
3426	NASDAQ	KLIC	Wed, Dec 28, 2005	8.87	8.97	8.62	8.90
3425	NASDAQ	KLIC	Tue, Dec 27, 2005	9.31	9.31	8.82	8.88
3424	NASDAQ	KLIC	Fri, Dec 23, 2005	9.14	9.32	9.04	9.28
3423	NASDAQ	KLIC	Thu, Dec 22, 2005	8.88	9.33	8.83	9.17
3422	NASDAQ	KLIC	Wed, Dec 21, 2005	8.62	8.86	8.62	8.82
3421	NASDAQ	KLIC	Tue, Dec 20, 2005	8.70	8.88	8.52	8.66
3420	NASDAQ	KLIC	Mon, Dec 19, 2005	8.85	8.95	8.66	8.73
3419	NASDAQ	KLIC	Fri, Dec 16, 2005	8.58	8.84	8.40	8.48
3418	NASDAQ	KLIC	Thu, Dec 15, 2005	8.59	8.72	8.40	8.55
3417	NASDAQ	KLIC	Wed, Dec 14, 2005	8.80	8.83	8.53	8.60
3416	NASDAQ	KLIC	Tue, Dec 13, 2005	8.83	8.92	8.74	8.76
3415	NASDAQ	KLIC	Mon, Dec 12, 2005	8.85	9.19	8.74	8.85
3414	NASDAQ	KLIC	Fri, Dec 9, 2005	8.57	8.87	8.51	8.82
3413	NASDAQ	KLIC	Thu, Dec 8, 2005	8.49	8.83	8.49	8.61
3412	NASDAQ	KLIC	Wed, Dec 7, 2005	8.74	8.90	8.45	8.49
3411	NASDAQ	KLIC	Tue, Dec 6, 2005	8.73	8.90	8.68	8.72
3410	NASDAQ	KLIC	Mon, Dec 5, 2005	8.72	8.75	8.47	8.66
3409	NASDAQ	KLIC	Fri, Dec 2, 2005	8.82	8.98	8.73	8.76
3408	NASDAQ	KLIC	Thu, Dec 1, 2005	8.50	8.91	8.50	8.83
3407	NASDAQ	KLIC	Wed, Nov 30, 2005	8.15	8.50	8.02	8.45
3406	NASDAQ	KLIC	Tue, Nov 29, 2005	8.25	8.40	8.12	8.18
3405	NASDAQ	KLIC	Mon, Nov 28, 2005	8.64	8.80	8.20	8.23
3404	NASDAQ	KLIC	Fri, Nov 25, 2005	8.36	8.60	8.36	8.60
3403	NASDAQ	KLIC	Wed, Nov 23, 2005	8.40	8.66	8.35	8.40
3402	NASDAQ	KLIC	Tue, Nov 22, 2005	8.34	8.65	8.13	8.36
3401	NASDAQ	KLIC	Mon, Nov 21, 2005	8.56	8.60	8.07	8.39
3400	NASDAQ	KLIC	Fri, Nov 18, 2005	8.37	8.87	8.31	8.57
3399	NASDAQ	KLIC	Thu, Nov 17, 2005	7.58	8.29	7.41	8.27
3398	NASDAQ	KLIC	Wed, Nov 16, 2005	7.03	7.23	6.90	7.07
3397	NASDAQ	KLIC	Tue, Nov 15, 2005	7.14	7.24	6.94	6.98
3396	NASDAQ	KLIC	Mon, Nov 14, 2005	7.11	7.25	7.02	7.12
3395	NASDAQ	KLIC	Fri, Nov 11, 2005	6.84	7.12	6.79	7.06
3394	NASDAQ	KLIC	Thu, Nov 10, 2005	6.86	6.95	6.66	6.89
3393	NASDAQ	KLIC	Wed, Nov 9, 2005	6.93	6.98	6.75	6.83
3392	NASDAQ	KLIC	Tue, Nov 8, 2005	6.93	7.09	6.68	6.96
3391	NASDAQ	KLIC	Mon, Nov 7, 2005	6.79	6.92	6.74	6.91
3390	NASDAQ	KLIC	Fri, Nov 4, 2005	6.74	6.82	6.70	6.75
3389	NASDAQ	KLIC	Thu, Nov 3, 2005	6.50	6.83	6.43	6.67
3388	NASDAQ	KLIC	Wed, Nov 2, 2005	6.01	6.35	5.99	6.34
3387	NASDAQ	KLIC	Tue, Nov 1, 2005	6.29	6.29	5.99	6.01
3386	NASDAQ	KLIC	Mon, Oct 31, 2005	6.25	6.40	6.21	6.27
3385	NASDAQ	KLIC	Fri, Oct 28, 2005	6.06	6.31	5.95	6.22
3384	NASDAQ	KLIC	Thu, Oct 27, 2005	6.41	6.43	6.06	6.07
3383	NASDAQ	KLIC	Wed, Oct 26, 2005	6.77	6.77	6.42	6.42
3382	NASDAQ	KLIC	Tue, Oct 25, 2005	6.72	6.95	6.67	6.77
3381	NASDAQ	KLIC	Mon, Oct 24, 2005	6.78	6.79	6.61	6.70
3380	NASDAQ	KLIC	Fri, Oct 21, 2005	6.54	6.78	6.54	6.67
3379	NASDAQ	KLIC	Thu, Oct 20, 2005	6.68	6.77	6.51	6.54
3378	NASDAQ	KLIC	Wed, Oct 19, 2005	6.47	6.74	6.25	6.71
3377	NASDAQ	KLIC	Tue, Oct 18, 2005	6.59	6.73	6.44	6.50
3376	NASDAQ	KLIC	Mon, Oct 17, 2005	6.75	6.89	6.59	6.63
3375	NASDAQ	KLIC	Fri, Oct 14, 2005	6.63	6.87	6.63	6.76
3374	NASDAQ	KLIC	Thu, Oct 13, 2005	6.26	6.62	6.17	6.56
3373	NASDAQ	KLIC	Wed, Oct 12, 2005	6.31	6.39	6.16	6.27
3372	NASDAQ	KLIC	Tue, Oct 11, 2005	6.61	6.70	6.32	6.36
3371	NASDAQ	KLIC	Mon, Oct 10, 2005	6.58	6.83	6.55	6.56
3370	NASDAQ	KLIC	Fri, Oct 7, 2005	6.66	6.68	6.51	6.60
3369	NASDAQ	KLIC	Thu, Oct 6, 2005	6.88	6.98	6.54	6.62
3368	NASDAQ	KLIC	Wed, Oct 5, 2005	7.10	7.12	6.89	6.91
3367	NASDAQ	KLIC	Tue, Oct 4, 2005	7.34	7.42	7.09	7.16
3366	NASDAQ	KLIC	Mon, Oct 3, 2005	7.29	7.44	7.26	7.31
3365	NASDAQ	KLIC	Fri, Sep 30, 2005	7.12	7.36	7.12	7.25
3364	NASDAQ	KLIC	Thu, Sep 29, 2005	7.01	7.15	6.91	7.13
3363	NASDAQ	KLIC	Wed, Sep 28, 2005	6.80	7.08	6.80	6.91
3362	NASDAQ	KLIC	Tue, Sep 27, 2005	6.94	7.00	6.74	6.83
3361	NASDAQ	KLIC	Mon, Sep 26, 2005	7.18	7.31	6.89	6.94
3360	NASDAQ	KLIC	Fri, Sep 23, 2005	7.09	7.34	6.91	7.13
3359	NASDAQ	KLIC	Thu, Sep 22, 2005	7.14	7.18	6.96	7.10
3358	NASDAQ	KLIC	Wed, Sep 21, 2005	7.39	7.41	7.15	7.15
3357	NASDAQ	KLIC	Tue, Sep 20, 2005	7.55	7.58	7.38	7.41
3356	NASDAQ	KLIC	Mon, Sep 19, 2005	7.90	7.91	7.40	7.53
3355	NASDAQ	KLIC	Fri, Sep 16, 2005	7.72	7.85	7.52	7.83
3354	NASDAQ	KLIC	Thu, Sep 15, 2005	8.21	8.30	7.64	7.65
3353	NASDAQ	KLIC	Wed, Sep 14, 2005	8.17	8.31	7.98	7.98
3352	NASDAQ	KLIC	Tue, Sep 13, 2005	8.40	8.45	7.90	8.18
3351	NASDAQ	KLIC	Mon, Sep 12, 2005	8.73	8.82	8.58	8.62
3350	NASDAQ	KLIC	Fri, Sep 9, 2005	8.47	8.95	8.41	8.67
3349	NASDAQ	KLIC	Thu, Sep 8, 2005	7.96	8.32	7.95	8.27
3348	NASDAQ	KLIC	Wed, Sep 7, 2005	8.11	8.11	7.74	8.01
3347	NASDAQ	KLIC	Tue, Sep 6, 2005	8.15	8.25	8.01	8.10
3346	NASDAQ	KLIC	Fri, Sep 2, 2005	8.15	8.28	8.07	8.15
3345	NASDAQ	KLIC	Thu, Sep 1, 2005	8.36	8.42	8.06	8.17
3344	NASDAQ	KLIC	Wed, Aug 31, 2005	8.23	8.42	8.14	8.36
3343	NASDAQ	KLIC	Tue, Aug 30, 2005	8.30	8.34	8.10	8.23
3342	NASDAQ	KLIC	Mon, Aug 29, 2005	8.28	8.33	8.12	8.30
3341	NASDAQ	KLIC	Fri, Aug 26, 2005	8.45	8.45	7.97	8.32
3340	NASDAQ	KLIC	Thu, Aug 25, 2005	8.36	8.50	8.30	8.49
3339	NASDAQ	KLIC	Wed, Aug 24, 2005	8.73	8.73	8.33	8.39
3338	NASDAQ	KLIC	Tue, Aug 23, 2005	8.84	8.96	8.70	8.73
3337	NASDAQ	KLIC	Mon, Aug 22, 2005	8.88	9.00	8.74	8.91
3336	NASDAQ	KLIC	Fri, Aug 19, 2005	8.99	8.99	8.75	8.85
3335	NASDAQ	KLIC	Thu, Aug 18, 2005	9.03	9.12	8.81	8.92
3334	NASDAQ	KLIC	Wed, Aug 17, 2005	9.00	9.16	8.95	9.12
3333	NASDAQ	KLIC	Tue, Aug 16, 2005	9.01	9.06	8.74	8.97
3332	NASDAQ	KLIC	Mon, Aug 15, 2005	8.73	9.27	8.73	9.03
3331	NASDAQ	KLIC	Fri, Aug 12, 2005	9.00	9.04	8.71	8.75
3330	NASDAQ	KLIC	Thu, Aug 11, 2005	8.95	9.08	8.75	9.02
3329	NASDAQ	KLIC	Wed, Aug 10, 2005	8.83	9.02	8.67	8.97
3328	NASDAQ	KLIC	Tue, Aug 9, 2005	8.87	8.88	8.68	8.74
3327	NASDAQ	KLIC	Mon, Aug 8, 2005	8.90	9.00	8.70	8.75
3326	NASDAQ	KLIC	Fri, Aug 5, 2005	8.91	9.00	8.61	8.90
3325	NASDAQ	KLIC	Thu, Aug 4, 2005	9.39	9.45	8.92	8.94
3324	NASDAQ	KLIC	Wed, Aug 3, 2005	9.53	9.60	9.38	9.46
3323	NASDAQ	KLIC	Tue, Aug 2, 2005	9.41	9.65	9.22	9.60
3322	NASDAQ	KLIC	Mon, Aug 1, 2005	9.68	9.73	9.27	9.45
3321	NASDAQ	KLIC	Fri, Jul 29, 2005	9.60	9.89	9.60	9.68
3320	NASDAQ	KLIC	Thu, Jul 28, 2005	10.30	10.60	9.56	9.65
3319	NASDAQ	KLIC	Wed, Jul 27, 2005	9.59	10.07	9.40	10.04
3318	NASDAQ	KLIC	Tue, Jul 26, 2005	9.65	9.76	9.41	9.59
3317	NASDAQ	KLIC	Mon, Jul 25, 2005	9.71	10.02	9.65	9.65
3316	NASDAQ	KLIC	Fri, Jul 22, 2005	9.50	9.85	9.43	9.76
3315	NASDAQ	KLIC	Thu, Jul 21, 2005	9.85	9.85	9.40	9.44
3314	NASDAQ	KLIC	Wed, Jul 20, 2005	8.81	9.99	8.81	9.85
3313	NASDAQ	KLIC	Tue, Jul 19, 2005	8.88	9.24	8.88	9.11
3312	NASDAQ	KLIC	Mon, Jul 18, 2005	8.99	8.99	8.79	8.86
3311	NASDAQ	KLIC	Fri, Jul 15, 2005	8.94	9.03	8.80	8.98
3310	NASDAQ	KLIC	Thu, Jul 14, 2005	8.98	9.15	8.84	9.00
3309	NASDAQ	KLIC	Wed, Jul 13, 2005	8.60	8.89	8.40	8.78
3308	NASDAQ	KLIC	Tue, Jul 12, 2005	8.48	8.74	8.44	8.61
3307	NASDAQ	KLIC	Mon, Jul 11, 2005	8.22	8.55	8.22	8.45
3306	NASDAQ	KLIC	Fri, Jul 8, 2005	8.00	8.24	7.98	8.20
3305	NASDAQ	KLIC	Thu, Jul 7, 2005	8.09	8.09	7.77	8.00
3304	NASDAQ	KLIC	Wed, Jul 6, 2005	8.00	8.16	7.94	8.12
3303	NASDAQ	KLIC	Tue, Jul 5, 2005	7.87	8.09	7.79	7.98
3302	NASDAQ	KLIC	Fri, Jul 1, 2005	7.97	8.14	7.81	7.89
3301	NASDAQ	KLIC	Thu, Jun 30, 2005	7.86	8.34	7.81	7.91
3300	NASDAQ	KLIC	Wed, Jun 29, 2005	7.75	7.88	7.52	7.79
3299	NASDAQ	KLIC	Tue, Jun 28, 2005	7.54	7.84	7.54	7.80
3298	NASDAQ	KLIC	Mon, Jun 27, 2005	7.69	7.80	7.52	7.52
3297	NASDAQ	KLIC	Fri, Jun 24, 2005	7.85	7.94	7.66	7.80
3296	NASDAQ	KLIC	Thu, Jun 23, 2005	8.11	8.33	7.82	7.85
3295	NASDAQ	KLIC	Wed, Jun 22, 2005	7.85	8.44	7.74	8.22
3294	NASDAQ	KLIC	Tue, Jun 21, 2005	7.30	7.95	7.22	7.91
3293	NASDAQ	KLIC	Mon, Jun 20, 2005	7.25	7.32	7.15	7.27
3292	NASDAQ	KLIC	Fri, Jun 17, 2005	7.22	7.35	7.21	7.27
3291	NASDAQ	KLIC	Thu, Jun 16, 2005	7.00	7.32	6.99	7.16
3290	NASDAQ	KLIC	Wed, Jun 15, 2005	6.81	6.99	6.64	6.98
3289	NASDAQ	KLIC	Tue, Jun 14, 2005	6.88	7.01	6.81	6.81
3288	NASDAQ	KLIC	Mon, Jun 13, 2005	6.86	7.01	6.77	6.86
3287	NASDAQ	KLIC	Fri, Jun 10, 2005	7.14	7.16	6.82	6.96
3286	NASDAQ	KLIC	Thu, Jun 9, 2005	6.98	7.14	6.89	7.13
3285	NASDAQ	KLIC	Wed, Jun 8, 2005	6.85	7.13	6.79	6.95
3284	NASDAQ	KLIC	Tue, Jun 7, 2005	6.65	6.92	6.65	6.77
3283	NASDAQ	KLIC	Mon, Jun 6, 2005	6.55	6.72	6.44	6.63
3282	NASDAQ	KLIC	Fri, Jun 3, 2005	6.65	6.72	6.45	6.49
3281	NASDAQ	KLIC	Thu, Jun 2, 2005	6.09	6.62	6.02	6.62
3280	NASDAQ	KLIC	Wed, Jun 1, 2005	5.74	6.07	5.74	6.07
3279	NASDAQ	KLIC	Tue, May 31, 2005	5.90	5.95	5.81	5.81
3278	NASDAQ	KLIC	Fri, May 27, 2005	5.91	5.91	5.75	5.83
3277	NASDAQ	KLIC	Thu, May 26, 2005	5.70	5.95	5.70	5.89
3276	NASDAQ	KLIC	Wed, May 25, 2005	6.00	6.00	5.68	5.71
3275	NASDAQ	KLIC	Tue, May 24, 2005	5.74	5.95	5.66	5.93
3274	NASDAQ	KLIC	Mon, May 23, 2005	5.89	5.98	5.75	5.79
3273	NASDAQ	KLIC	Fri, May 20, 2005	5.75	5.91	5.73	5.90
3272	NASDAQ	KLIC	Thu, May 19, 2005	5.45	5.85	5.45	5.81
3271	NASDAQ	KLIC	Wed, May 18, 2005	5.43	5.50	5.33	5.48
3270	NASDAQ	KLIC	Tue, May 17, 2005	5.35	5.45	5.26	5.43
3269	NASDAQ	KLIC	Mon, May 16, 2005	5.50	5.53	5.27	5.38
3268	NASDAQ	KLIC	Fri, May 13, 2005	5.11	5.55	5.11	5.49
3267	NASDAQ	KLIC	Thu, May 12, 2005	5.02	5.13	4.99	5.07
3266	NASDAQ	KLIC	Wed, May 11, 2005	5.12	5.15	4.94	5.05
3265	NASDAQ	KLIC	Tue, May 10, 2005	5.29	5.29	5.09	5.11
3264	NASDAQ	KLIC	Mon, May 9, 2005	5.40	5.44	5.16	5.30
3263	NASDAQ	KLIC	Fri, May 6, 2005	5.40	5.49	5.31	5.40
3262	NASDAQ	KLIC	Thu, May 5, 2005	5.20	5.37	5.15	5.36
3261	NASDAQ	KLIC	Wed, May 4, 2005	5.09	5.26	5.03	5.24
3260	NASDAQ	KLIC	Tue, May 3, 2005	5.10	5.18	4.99	5.10
3259	NASDAQ	KLIC	Mon, May 2, 2005	5.16	5.19	5.01	5.13
3258	NASDAQ	KLIC	Fri, Apr 29, 2005	5.23	5.31	5.04	5.11
3257	NASDAQ	KLIC	Thu, Apr 28, 2005	5.08	5.41	5.02	5.15
3256	NASDAQ	KLIC	Wed, Apr 27, 2005	5.12	5.18	4.98	5.13
3255	NASDAQ	KLIC	Tue, Apr 26, 2005	5.22	5.45	5.12	5.13
3254	NASDAQ	KLIC	Mon, Apr 25, 2005	5.33	5.40	5.26	5.28
3253	NASDAQ	KLIC	Fri, Apr 22, 2005	5.45	5.52	5.24	5.34
3252	NASDAQ	KLIC	Thu, Apr 21, 2005	5.49	5.60	5.41	5.50
3251	NASDAQ	KLIC	Wed, Apr 20, 2005	5.56	5.63	5.38	5.46
3250	NASDAQ	KLIC	Tue, Apr 19, 2005	5.31	5.40	5.20	5.36
3249	NASDAQ	KLIC	Mon, Apr 18, 2005	5.23	5.34	5.12	5.21
3248	NASDAQ	KLIC	Fri, Apr 15, 2005	5.44	5.45	5.15	5.22
3247	NASDAQ	KLIC	Thu, Apr 14, 2005	5.44	5.47	5.32	5.39
3246	NASDAQ	KLIC	Wed, Apr 13, 2005	5.60	5.68	5.42	5.45
3245	NASDAQ	KLIC	Tue, Apr 12, 2005	5.81	5.87	5.56	5.70
3244	NASDAQ	KLIC	Mon, Apr 11, 2005	5.95	5.97	5.81	5.84
3243	NASDAQ	KLIC	Fri, Apr 8, 2005	6.07	6.09	5.87	5.91
3242	NASDAQ	KLIC	Thu, Apr 7, 2005	5.85	6.07	5.84	6.02
3241	NASDAQ	KLIC	Wed, Apr 6, 2005	5.78	6.00	5.78	5.84
3240	NASDAQ	KLIC	Tue, Apr 5, 2005	5.89	5.96	5.75	5.78
3239	NASDAQ	KLIC	Mon, Apr 4, 2005	6.04	6.04	5.79	5.86
3238	NASDAQ	KLIC	Fri, Apr 1, 2005	6.42	6.42	5.95	6.01
3237	NASDAQ	KLIC	Thu, Mar 31, 2005	6.39	6.41	6.21	6.29
3236	NASDAQ	KLIC	Wed, Mar 30, 2005	6.18	6.40	6.18	6.40
3235	NASDAQ	KLIC	Tue, Mar 29, 2005	6.37	6.48	6.18	6.22
3234	NASDAQ	KLIC	Mon, Mar 28, 2005	6.44	6.65	6.35	6.41
3233	NASDAQ	KLIC	Thu, Mar 24, 2005	6.43	6.61	6.39	6.48
3232	NASDAQ	KLIC	Wed, Mar 23, 2005	6.29	6.48	6.29	6.40
3231	NASDAQ	KLIC	Tue, Mar 22, 2005	6.50	6.68	6.29	6.34
3230	NASDAQ	KLIC	Mon, Mar 21, 2005	6.64	6.76	6.48	6.56
3229	NASDAQ	KLIC	Fri, Mar 18, 2005	6.96	7.07	6.55	6.76
3228	NASDAQ	KLIC	Thu, Mar 17, 2005	6.87	7.02	6.84	7.00
3227	NASDAQ	KLIC	Wed, Mar 16, 2005	6.90	7.11	6.79	6.85
3226	NASDAQ	KLIC	Tue, Mar 15, 2005	7.06	7.20	6.96	7.00
3225	NASDAQ	KLIC	Mon, Mar 14, 2005	6.84	7.14	6.81	7.09
3224	NASDAQ	KLIC	Fri, Mar 11, 2005	7.11	7.27	7.00	7.01
3223	NASDAQ	KLIC	Thu, Mar 10, 2005	7.08	7.29	7.07	7.14
3222	NASDAQ	KLIC	Wed, Mar 9, 2005	7.18	7.35	7.10	7.14
3221	NASDAQ	KLIC	Tue, Mar 8, 2005	7.33	7.45	7.15	7.16
3220	NASDAQ	KLIC	Mon, Mar 7, 2005	7.24	7.48	7.24	7.28
3219	NASDAQ	KLIC	Fri, Mar 4, 2005	7.40	7.50	7.15	7.24
3218	NASDAQ	KLIC	Thu, Mar 3, 2005	7.08	7.33	6.87	7.27
3217	NASDAQ	KLIC	Wed, Mar 2, 2005	6.90	6.92	6.69	6.83
3216	NASDAQ	KLIC	Tue, Mar 1, 2005	6.60	7.01	6.50	6.93
3215	NASDAQ	KLIC	Mon, Feb 28, 2005	6.52	6.78	6.41	6.48
3214	NASDAQ	KLIC	Fri, Feb 25, 2005	6.53	6.67	6.48	6.63
3213	NASDAQ	KLIC	Thu, Feb 24, 2005	6.40	6.65	6.35	6.57
3212	NASDAQ	KLIC	Wed, Feb 23, 2005	6.60	6.73	6.39	6.41
3211	NASDAQ	KLIC	Tue, Feb 22, 2005	6.75	6.99	6.58	6.60
3210	NASDAQ	KLIC	Fri, Feb 18, 2005	6.84	6.90	6.55	6.82
3209	NASDAQ	KLIC	Thu, Feb 17, 2005	7.07	7.11	6.70	6.70
3208	NASDAQ	KLIC	Wed, Feb 16, 2005	7.10	7.20	6.97	7.03
3207	NASDAQ	KLIC	Tue, Feb 15, 2005	6.85	7.23	6.82	7.20
3206	NASDAQ	KLIC	Mon, Feb 14, 2005	7.05	7.07	6.70	6.82
3205	NASDAQ	KLIC	Fri, Feb 11, 2005	6.74	7.10	6.55	7.01
3204	NASDAQ	KLIC	Thu, Feb 10, 2005	6.70	6.78	6.44	6.70
3203	NASDAQ	KLIC	Wed, Feb 9, 2005	6.80	6.87	6.59	6.61
3202	NASDAQ	KLIC	Tue, Feb 8, 2005	6.78	6.81	6.60	6.80
3201	NASDAQ	KLIC	Mon, Feb 7, 2005	6.83	6.89	6.60	6.63
3200	NASDAQ	KLIC	Fri, Feb 4, 2005	6.38	6.83	6.37	6.81
3199	NASDAQ	KLIC	Thu, Feb 3, 2005	6.66	6.66	6.40	6.48
3198	NASDAQ	KLIC	Wed, Feb 2, 2005	6.73	6.75	6.54	6.65
3197	NASDAQ	KLIC	Tue, Feb 1, 2005	6.70	6.76	6.44	6.69
3196	NASDAQ	KLIC	Mon, Jan 31, 2005	6.67	6.74	6.53	6.67
3195	NASDAQ	KLIC	Fri, Jan 28, 2005	6.66	6.66	6.28	6.43
3194	NASDAQ	KLIC	Thu, Jan 27, 2005	6.10	6.70	5.90	6.55
3193	NASDAQ	KLIC	Wed, Jan 26, 2005	6.25	6.47	6.21	6.44
3192	NASDAQ	KLIC	Tue, Jan 25, 2005	6.26	6.47	6.18	6.20
3191	NASDAQ	KLIC	Mon, Jan 24, 2005	6.42	6.49	6.16	6.23
3190	NASDAQ	KLIC	Fri, Jan 21, 2005	6.50	6.64	6.30	6.42
3189	NASDAQ	KLIC	Thu, Jan 20, 2005	6.55	6.72	6.38	6.46
3188	NASDAQ	KLIC	Wed, Jan 19, 2005	7.16	7.16	6.67	6.73
3187	NASDAQ	KLIC	Tue, Jan 18, 2005	6.99	7.16	6.93	7.09
3186	NASDAQ	KLIC	Fri, Jan 14, 2005	7.00	7.20	7.00	7.03
3185	NASDAQ	KLIC	Thu, Jan 13, 2005	7.25	7.28	6.98	7.01
3184	NASDAQ	KLIC	Wed, Jan 12, 2005	7.05	7.26	7.04	7.21
3183	NASDAQ	KLIC	Tue, Jan 11, 2005	7.01	7.04	6.81	6.88
3182	NASDAQ	KLIC	Mon, Jan 10, 2005	7.28	7.35	7.03	7.09
3181	NASDAQ	KLIC	Fri, Jan 7, 2005	7.40	7.50	7.25	7.31
3180	NASDAQ	KLIC	Thu, Jan 6, 2005	7.55	7.68	7.30	7.41
3179	NASDAQ	KLIC	Wed, Jan 5, 2005	7.55	7.78	7.45	7.55
3178	NASDAQ	KLIC	Tue, Jan 4, 2005	8.29	8.35	7.64	7.75
3177	NASDAQ	KLIC	Mon, Jan 3, 2005	8.63	8.68	8.09	8.28
3176	NASDAQ	KLIC	Fri, Dec 31, 2004	8.56	8.82	8.55	8.62
3175	NASDAQ	KLIC	Thu, Dec 30, 2004	8.61	8.76	8.57	8.68
3174	NASDAQ	KLIC	Wed, Dec 29, 2004	8.66	8.80	8.29	8.62
3173	NASDAQ	KLIC	Tue, Dec 28, 2004	8.77	8.83	8.66	8.71
3172	NASDAQ	KLIC	Mon, Dec 27, 2004	8.80	8.98	8.66	8.73
3171	NASDAQ	KLIC	Thu, Dec 23, 2004	8.61	8.83	8.58	8.64
3170	NASDAQ	KLIC	Wed, Dec 22, 2004	8.58	8.70	8.42	8.54
3169	NASDAQ	KLIC	Tue, Dec 21, 2004	8.32	8.65	8.32	8.58
3168	NASDAQ	KLIC	Mon, Dec 20, 2004	8.25	8.45	8.25	8.34
3167	NASDAQ	KLIC	Fri, Dec 17, 2004	8.42	8.42	8.15	8.30
3166	NASDAQ	KLIC	Thu, Dec 16, 2004	8.60	8.85	8.34	8.41
3165	NASDAQ	KLIC	Wed, Dec 15, 2004	8.84	9.03	8.77	8.90
3164	NASDAQ	KLIC	Tue, Dec 14, 2004	8.45	8.79	8.45	8.75
3163	NASDAQ	KLIC	Mon, Dec 13, 2004	8.50	8.56	8.35	8.51
3162	NASDAQ	KLIC	Fri, Dec 10, 2004	8.31	8.49	8.28	8.33
3161	NASDAQ	KLIC	Thu, Dec 9, 2004	8.44	8.60	8.11	8.41
3160	NASDAQ	KLIC	Wed, Dec 8, 2004	8.75	8.82	8.54	8.65
3159	NASDAQ	KLIC	Tue, Dec 7, 2004	9.10	9.30	8.73	8.78
3158	NASDAQ	KLIC	Mon, Dec 6, 2004	9.00	9.21	8.92	9.09
3157	NASDAQ	KLIC	Fri, Dec 3, 2004	8.70	9.18	8.60	9.10
3156	NASDAQ	KLIC	Thu, Dec 2, 2004	8.03	8.75	7.90	8.44
3155	NASDAQ	KLIC	Wed, Dec 1, 2004	7.46	7.84	7.45	7.84
3154	NASDAQ	KLIC	Tue, Nov 30, 2004	7.34	7.51	7.29	7.48
3153	NASDAQ	KLIC	Mon, Nov 29, 2004	7.34	7.40	7.15	7.30
3152	NASDAQ	KLIC	Fri, Nov 26, 2004	7.18	7.26	7.10	7.10
3151	NASDAQ	KLIC	Wed, Nov 24, 2004	7.28	7.31	7.15	7.19
3150	NASDAQ	KLIC	Tue, Nov 23, 2004	7.29	7.36	7.10	7.17
3149	NASDAQ	KLIC	Mon, Nov 22, 2004	7.30	7.55	7.18	7.40
3148	NASDAQ	KLIC	Fri, Nov 19, 2004	7.72	7.76	7.43	7.44
3147	NASDAQ	KLIC	Thu, Nov 18, 2004	7.50	7.70	7.45	7.60
3146	NASDAQ	KLIC	Wed, Nov 17, 2004	7.32	7.75	6.81	7.61
3145	NASDAQ	KLIC	Tue, Nov 16, 2004	7.29	7.40	7.15	7.21
3144	NASDAQ	KLIC	Mon, Nov 15, 2004	6.97	7.49	6.85	7.43
3143	NASDAQ	KLIC	Fri, Nov 12, 2004	6.75	6.88	6.66	6.88
3142	NASDAQ	KLIC	Thu, Nov 11, 2004	6.72	6.80	6.62	6.74
3141	NASDAQ	KLIC	Wed, Nov 10, 2004	6.94	6.94	6.61	6.69
3140	NASDAQ	KLIC	Tue, Nov 9, 2004	6.80	6.92	6.79	6.89
3139	NASDAQ	KLIC	Mon, Nov 8, 2004	7.03	7.09	6.77	6.85
3138	NASDAQ	KLIC	Fri, Nov 5, 2004	7.05	7.15	6.97	7.04
3137	NASDAQ	KLIC	Thu, Nov 4, 2004	7.10	7.10	6.91	6.96
3136	NASDAQ	KLIC	Wed, Nov 3, 2004	7.36	7.52	7.05	7.21
3135	NASDAQ	KLIC	Tue, Nov 2, 2004	7.22	7.28	7.07	7.16
3134	NASDAQ	KLIC	Mon, Nov 1, 2004	7.24	7.29	7.10	7.18
3133	NASDAQ	KLIC	Fri, Oct 29, 2004	7.15	7.25	7.07	7.14
3132	NASDAQ	KLIC	Thu, Oct 28, 2004	7.13	7.29	7.04	7.20
3131	NASDAQ	KLIC	Wed, Oct 27, 2004	6.82	7.29	6.70	7.17
3130	NASDAQ	KLIC	Tue, Oct 26, 2004	6.83	6.92	6.71	6.81
3129	NASDAQ	KLIC	Mon, Oct 25, 2004	6.76	6.98	6.50	6.95
3128	NASDAQ	KLIC	Fri, Oct 22, 2004	7.21	7.23	6.86	6.91
3127	NASDAQ	KLIC	Thu, Oct 21, 2004	6.49	7.18	6.44	7.11
3126	NASDAQ	KLIC	Wed, Oct 20, 2004	6.16	6.49	6.07	6.47
3125	NASDAQ	KLIC	Tue, Oct 19, 2004	6.26	6.42	6.15	6.20
3124	NASDAQ	KLIC	Mon, Oct 18, 2004	5.95	6.12	5.79	6.07
3123	NASDAQ	KLIC	Fri, Oct 15, 2004	5.99	6.11	5.86	5.88
3122	NASDAQ	KLIC	Thu, Oct 14, 2004	6.12	6.19	5.96	6.00
3121	NASDAQ	KLIC	Wed, Oct 13, 2004	6.45	6.50	6.14	6.14
3120	NASDAQ	KLIC	Tue, Oct 12, 2004	6.07	6.33	6.00	6.27
3119	NASDAQ	KLIC	Mon, Oct 11, 2004	6.27	6.34	6.07	6.23
3118	NASDAQ	KLIC	Fri, Oct 8, 2004	6.30	6.45	6.24	6.24
3117	NASDAQ	KLIC	Thu, Oct 7, 2004	6.45	6.52	6.37	6.43
3116	NASDAQ	KLIC	Wed, Oct 6, 2004	6.43	6.48	6.27	6.43
3115	NASDAQ	KLIC	Tue, Oct 5, 2004	6.33	6.65	6.28	6.46
3114	NASDAQ	KLIC	Mon, Oct 4, 2004	6.23	6.50	6.15	6.33
3113	NASDAQ	KLIC	Fri, Oct 1, 2004	5.71	6.09	5.70	6.03
3112	NASDAQ	KLIC	Thu, Sep 30, 2004	5.58	5.80	5.58	5.65
3111	NASDAQ	KLIC	Wed, Sep 29, 2004	5.53	5.86	5.48	5.67
3110	NASDAQ	KLIC	Tue, Sep 28, 2004	5.54	5.55	5.31	5.42
3109	NASDAQ	KLIC	Mon, Sep 27, 2004	5.37	5.63	5.35	5.45
3108	NASDAQ	KLIC	Fri, Sep 24, 2004	5.73	5.75	5.45	5.51
3107	NASDAQ	KLIC	Thu, Sep 23, 2004	5.69	5.84	5.67	5.73
3106	NASDAQ	KLIC	Wed, Sep 22, 2004	5.83	5.90	5.70	5.72
3105	NASDAQ	KLIC	Tue, Sep 21, 2004	5.99	6.07	5.76	5.92
3104	NASDAQ	KLIC	Mon, Sep 20, 2004	5.75	6.19	5.70	5.99
3103	NASDAQ	KLIC	Fri, Sep 17, 2004	5.81	5.91	5.49	5.77
3102	NASDAQ	KLIC	Thu, Sep 16, 2004	5.87	6.00	5.68	5.74
3101	NASDAQ	KLIC	Wed, Sep 15, 2004	5.88	5.88	5.65	5.76
3100	NASDAQ	KLIC	Tue, Sep 14, 2004	5.95	5.95	5.73	5.88
3099	NASDAQ	KLIC	Mon, Sep 13, 2004	5.90	5.97	5.67	5.92
3098	NASDAQ	KLIC	Fri, Sep 10, 2004	5.69	5.94	5.61	5.82
3097	NASDAQ	KLIC	Thu, Sep 9, 2004	5.45	5.69	5.38	5.64
3096	NASDAQ	KLIC	Wed, Sep 8, 2004	5.33	5.49	5.28	5.39
3095	NASDAQ	KLIC	Tue, Sep 7, 2004	5.51	5.58	5.27	5.29
3094	NASDAQ	KLIC	Fri, Sep 3, 2004	5.53	5.63	5.40	5.48
3093	NASDAQ	KLIC	Thu, Sep 2, 2004	5.45	5.64	5.33	5.63
3092	NASDAQ	KLIC	Wed, Sep 1, 2004	5.47	6.11	5.41	5.44
3091	NASDAQ	KLIC	Tue, Aug 31, 2004	5.59	5.62	5.35	5.48
3090	NASDAQ	KLIC	Mon, Aug 30, 2004	5.74	5.75	5.50	5.57
3089	NASDAQ	KLIC	Fri, Aug 27, 2004	5.84	5.85	5.68	5.69
3088	NASDAQ	KLIC	Thu, Aug 26, 2004	5.71	5.86	5.70	5.76
3087	NASDAQ	KLIC	Wed, Aug 25, 2004	5.53	5.82	5.46	5.74
3086	NASDAQ	KLIC	Tue, Aug 24, 2004	5.74	5.75	5.49	5.53
3085	NASDAQ	KLIC	Mon, Aug 23, 2004	5.83	5.90	5.57	5.63
3084	NASDAQ	KLIC	Fri, Aug 20, 2004	5.52	5.76	5.50	5.74
3083	NASDAQ	KLIC	Thu, Aug 19, 2004	5.53	5.63	5.42	5.51
3082	NASDAQ	KLIC	Wed, Aug 18, 2004	5.15	5.48	5.14	5.48
3081	NASDAQ	KLIC	Tue, Aug 17, 2004	5.17	5.28	5.12	5.25
3080	NASDAQ	KLIC	Mon, Aug 16, 2004	5.11	5.25	5.06	5.07
3079	NASDAQ	KLIC	Fri, Aug 13, 2004	5.17	5.25	4.80	5.05
3078	NASDAQ	KLIC	Thu, Aug 12, 2004	5.31	5.34	5.04	5.15
3077	NASDAQ	KLIC	Wed, Aug 11, 2004	5.43	5.52	5.15	5.26
3076	NASDAQ	KLIC	Tue, Aug 10, 2004	7.04	7.14	6.85	7.02
3075	NASDAQ	KLIC	Mon, Aug 9, 2004	6.96	7.16	6.96	7.03
3074	NASDAQ	KLIC	Fri, Aug 6, 2004	7.09	7.24	6.93	6.98
3073	NASDAQ	KLIC	Thu, Aug 5, 2004	7.38	7.46	7.20	7.22
3072	NASDAQ	KLIC	Wed, Aug 4, 2004	7.43	7.50	7.16	7.40
3071	NASDAQ	KLIC	Tue, Aug 3, 2004	7.68	7.76	7.32	7.38
3070	NASDAQ	KLIC	Mon, Aug 2, 2004	7.87	7.90	7.53	7.73
3069	NASDAQ	KLIC	Fri, Jul 30, 2004	7.66	8.03	7.66	7.81
3068	NASDAQ	KLIC	Thu, Jul 29, 2004	7.52	7.85	7.50	7.77
3067	NASDAQ	KLIC	Wed, Jul 28, 2004	7.70	7.73	7.21	7.36
3066	NASDAQ	KLIC	Tue, Jul 27, 2004	7.71	7.92	7.65	7.89
3065	NASDAQ	KLIC	Mon, Jul 26, 2004	7.65	7.83	7.45	7.62
3064	NASDAQ	KLIC	Fri, Jul 23, 2004	8.18	8.30	7.60	7.67
3063	NASDAQ	KLIC	Thu, Jul 22, 2004	8.32	8.45	7.94	8.29
3062	NASDAQ	KLIC	Wed, Jul 21, 2004	8.97	9.23	8.27	8.27
3061	NASDAQ	KLIC	Tue, Jul 20, 2004	8.41	8.71	8.35	8.67
3060	NASDAQ	KLIC	Mon, Jul 19, 2004	8.32	8.56	8.32	8.33
3059	NASDAQ	KLIC	Fri, Jul 16, 2004	8.49	8.70	8.32	8.36
3058	NASDAQ	KLIC	Thu, Jul 15, 2004	8.51	8.80	8.37	8.50
3057	NASDAQ	KLIC	Wed, Jul 14, 2004	8.69	8.75	8.40	8.49
3056	NASDAQ	KLIC	Tue, Jul 13, 2004	8.76	9.06	8.76	8.87
3055	NASDAQ	KLIC	Mon, Jul 12, 2004	9.13	9.14	8.62	8.86
3054	NASDAQ	KLIC	Fri, Jul 9, 2004	9.33	9.55	9.23	9.27
3053	NASDAQ	KLIC	Thu, Jul 8, 2004	9.29	9.55	9.11	9.28
3052	NASDAQ	KLIC	Wed, Jul 7, 2004	9.45	9.75	9.31	9.33
3051	NASDAQ	KLIC	Tue, Jul 6, 2004	9.91	9.91	9.20	9.38
3050	NASDAQ	KLIC	Fri, Jul 2, 2004	10.26	10.35	9.91	10.03
3049	NASDAQ	KLIC	Thu, Jul 1, 2004	10.92	10.95	10.21	10.27
3048	NASDAQ	KLIC	Wed, Jun 30, 2004	10.73	10.97	10.64	10.96
3047	NASDAQ	KLIC	Tue, Jun 29, 2004	10.27	10.66	10.27	10.65
3046	NASDAQ	KLIC	Mon, Jun 28, 2004	10.66	10.69	10.27	10.32
3045	NASDAQ	KLIC	Fri, Jun 25, 2004	10.36	10.84	10.17	10.60
3044	NASDAQ	KLIC	Thu, Jun 24, 2004	10.55	10.59	10.05	10.44
3043	NASDAQ	KLIC	Wed, Jun 23, 2004	10.60	10.87	10.36	10.83
3042	NASDAQ	KLIC	Tue, Jun 22, 2004	10.07	10.56	10.01	10.56
3041	NASDAQ	KLIC	Mon, Jun 21, 2004	10.14	10.43	10.01	10.09
3040	NASDAQ	KLIC	Fri, Jun 18, 2004	10.00	10.36	9.95	10.14
3039	NASDAQ	KLIC	Thu, Jun 17, 2004	10.48	10.48	10.09	10.09
3038	NASDAQ	KLIC	Wed, Jun 16, 2004	10.75	10.75	10.42	10.52
3037	NASDAQ	KLIC	Tue, Jun 15, 2004	10.79	10.79	10.60	10.73
3036	NASDAQ	KLIC	Mon, Jun 14, 2004	10.56	10.62	10.44	10.56
3035	NASDAQ	KLIC	Thu, Jun 10, 2004	10.69	10.82	10.50	10.69
3034	NASDAQ	KLIC	Wed, Jun 9, 2004	11.25	11.31	10.51	10.57
3033	NASDAQ	KLIC	Tue, Jun 8, 2004	11.10	11.10	10.80	10.84
3032	NASDAQ	KLIC	Mon, Jun 7, 2004	11.05	11.17	10.83	11.08
3031	NASDAQ	KLIC	Fri, Jun 4, 2004	10.68	10.95	10.65	10.89
3030	NASDAQ	KLIC	Thu, Jun 3, 2004	10.82	10.83	10.42	10.42
3029	NASDAQ	KLIC	Wed, Jun 2, 2004	11.43	11.43	10.79	10.85
3028	NASDAQ	KLIC	Tue, Jun 1, 2004	11.25	11.37	11.01	11.35
3027	NASDAQ	KLIC	Fri, May 28, 2004	11.26	11.48	11.10	11.45
3026	NASDAQ	KLIC	Thu, May 27, 2004	11.11	11.27	11.01	11.14
3025	NASDAQ	KLIC	Wed, May 26, 2004	10.93	11.11	10.57	11.06
3024	NASDAQ	KLIC	Tue, May 25, 2004	10.50	10.93	10.32	10.90
3023	NASDAQ	KLIC	Mon, May 24, 2004	10.39	10.61	10.32	10.50
3022	NASDAQ	KLIC	Fri, May 21, 2004	10.38	10.50	10.06	10.19
3021	NASDAQ	KLIC	Thu, May 20, 2004	10.29	10.42	10.05	10.15
3020	NASDAQ	KLIC	Wed, May 19, 2004	10.47	10.71	10.18	10.24
3019	NASDAQ	KLIC	Tue, May 18, 2004	10.05	10.28	10.01	10.22
3018	NASDAQ	KLIC	Mon, May 17, 2004	9.80	10.15	9.77	9.87
3017	NASDAQ	KLIC	Fri, May 14, 2004	10.75	10.95	10.25	10.26
3016	NASDAQ	KLIC	Thu, May 13, 2004	10.95	11.10	10.62	10.74
3015	NASDAQ	KLIC	Wed, May 12, 2004	11.18	11.20	10.50	10.89
3014	NASDAQ	KLIC	Tue, May 11, 2004	10.91	11.20	10.77	11.19
3013	NASDAQ	KLIC	Mon, May 10, 2004	10.59	10.94	10.55	10.63
3012	NASDAQ	KLIC	Fri, May 7, 2004	10.46	11.27	10.40	10.73
3011	NASDAQ	KLIC	Thu, May 6, 2004	10.20	10.37	10.05	10.25
3010	NASDAQ	KLIC	Wed, May 5, 2004	10.26	10.53	10.20	10.33
3009	NASDAQ	KLIC	Tue, May 4, 2004	10.01	10.59	10.01	10.21
3008	NASDAQ	KLIC	Mon, May 3, 2004	10.00	10.25	9.61	9.92
3007	NASDAQ	KLIC	Fri, Apr 30, 2004	10.16	10.23	9.74	9.84
3006	NASDAQ	KLIC	Thu, Apr 29, 2004	10.52	10.57	9.90	10.02
3005	NASDAQ	KLIC	Wed, Apr 28, 2004	10.56	10.77	10.33	10.53
3004	NASDAQ	KLIC	Tue, Apr 27, 2004	10.95	11.11	10.56	10.57
3003	NASDAQ	KLIC	Mon, Apr 26, 2004	11.39	11.44	10.88	10.94
3002	NASDAQ	KLIC	Fri, Apr 23, 2004	10.87	11.33	10.84	11.31
3001	NASDAQ	KLIC	Thu, Apr 22, 2004	11.12	11.30	10.69	10.84
3000	NASDAQ	KLIC	Wed, Apr 21, 2004	11.36	11.36	10.81	11.11
2999	NASDAQ	KLIC	Tue, Apr 20, 2004	11.53	11.63	10.79	10.85
2998	NASDAQ	KLIC	Mon, Apr 19, 2004	10.96	11.56	10.87	11.50
2997	NASDAQ	KLIC	Fri, Apr 16, 2004	11.55	11.66	10.95	10.95
2996	NASDAQ	KLIC	Thu, Apr 15, 2004	11.94	12.24	11.26	11.54
2995	NASDAQ	KLIC	Wed, Apr 14, 2004	11.96	12.44	11.85	11.94
2994	NASDAQ	KLIC	Tue, Apr 13, 2004	12.52	12.72	12.06	12.20
2993	NASDAQ	KLIC	Mon, Apr 12, 2004	12.37	12.65	12.30	12.50
2992	NASDAQ	KLIC	Thu, Apr 8, 2004	12.58	12.71	12.29	12.44
2991	NASDAQ	KLIC	Wed, Apr 7, 2004	12.26	12.57	11.86	12.27
2990	NASDAQ	KLIC	Tue, Apr 6, 2004	12.54	12.67	12.23	12.31
2989	NASDAQ	KLIC	Mon, Apr 5, 2004	12.66	12.80	12.48	12.74
2988	NASDAQ	KLIC	Fri, Apr 2, 2004	12.25	12.55	12.18	12.55
2987	NASDAQ	KLIC	Thu, Apr 1, 2004	11.59	12.31	11.51	11.81
2986	NASDAQ	KLIC	Wed, Mar 31, 2004	11.78	11.84	11.60	11.70
2985	NASDAQ	KLIC	Tue, Mar 30, 2004	11.72	11.91	11.50	11.75
2984	NASDAQ	KLIC	Mon, Mar 29, 2004	11.84	12.11	11.63	11.84
2983	NASDAQ	KLIC	Fri, Mar 26, 2004	11.55	11.80	11.42	11.62
2982	NASDAQ	KLIC	Thu, Mar 25, 2004	11.09	11.62	11.00	11.51
2981	NASDAQ	KLIC	Wed, Mar 24, 2004	10.59	11.20	10.58	10.93
2980	NASDAQ	KLIC	Tue, Mar 23, 2004	11.00	11.17	10.51	10.66
2979	NASDAQ	KLIC	Mon, Mar 22, 2004	10.95	11.10	10.70	10.84
2978	NASDAQ	KLIC	Fri, Mar 19, 2004	11.55	11.69	11.06	11.17
2977	NASDAQ	KLIC	Thu, Mar 18, 2004	11.52	11.69	11.17	11.45
2976	NASDAQ	KLIC	Wed, Mar 17, 2004	11.40	11.62	11.23	11.57
2975	NASDAQ	KLIC	Tue, Mar 16, 2004	11.43	11.53	10.84	11.12
2974	NASDAQ	KLIC	Mon, Mar 15, 2004	11.73	11.78	11.12	11.25
2973	NASDAQ	KLIC	Fri, Mar 12, 2004	11.64	12.00	11.58	11.87
2972	NASDAQ	KLIC	Thu, Mar 11, 2004	11.30	12.03	11.25	11.38
2971	NASDAQ	KLIC	Wed, Mar 10, 2004	11.98	12.27	11.34	11.49
2970	NASDAQ	KLIC	Tue, Mar 9, 2004	12.19	12.36	11.79	12.01
2969	NASDAQ	KLIC	Mon, Mar 8, 2004	12.77	12.94	12.09	12.10
2968	NASDAQ	KLIC	Fri, Mar 5, 2004	12.58	13.02	12.50	12.72
2967	NASDAQ	KLIC	Thu, Mar 4, 2004	12.38	13.05	12.36	12.85
2966	NASDAQ	KLIC	Wed, Mar 3, 2004	12.68	12.72	12.33	12.41
2965	NASDAQ	KLIC	Tue, Mar 2, 2004	12.88	13.20	12.70	12.75
2964	NASDAQ	KLIC	Mon, Mar 1, 2004	12.50	12.91	12.26	12.89
2963	NASDAQ	KLIC	Fri, Feb 27, 2004	12.93	12.97	12.35	12.45
2962	NASDAQ	KLIC	Thu, Feb 26, 2004	12.58	12.99	12.51	12.78
2961	NASDAQ	KLIC	Wed, Feb 25, 2004	12.24	12.90	12.24	12.76
2960	NASDAQ	KLIC	Tue, Feb 24, 2004	12.74	12.75	12.20	12.24
2959	NASDAQ	KLIC	Mon, Feb 23, 2004	13.69	13.83	12.82	12.96
2958	NASDAQ	KLIC	Fri, Feb 20, 2004	14.15	14.20	13.50	13.72
2957	NASDAQ	KLIC	Thu, Feb 19, 2004	15.05	15.19	14.13	14.13
2956	NASDAQ	KLIC	Wed, Feb 18, 2004	14.86	15.00	14.56	14.61
2955	NASDAQ	KLIC	Tue, Feb 17, 2004	14.40	15.09	14.40	14.94
2954	NASDAQ	KLIC	Fri, Feb 13, 2004	14.70	14.93	14.23	14.29
2953	NASDAQ	KLIC	Thu, Feb 12, 2004	14.37	14.90	14.37	14.53
2952	NASDAQ	KLIC	Wed, Feb 11, 2004	14.00	14.47	14.00	14.45
2951	NASDAQ	KLIC	Tue, Feb 10, 2004	14.28	14.30	13.72	13.98
2950	NASDAQ	KLIC	Mon, Feb 9, 2004	14.22	14.44	14.02	14.31
2949	NASDAQ	KLIC	Fri, Feb 6, 2004	13.69	14.20	13.51	14.20
2948	NASDAQ	KLIC	Thu, Feb 5, 2004	13.59	13.68	13.10	13.53
2947	NASDAQ	KLIC	Wed, Feb 4, 2004	13.78	14.04	13.30	13.30
2946	NASDAQ	KLIC	Tue, Feb 3, 2004	14.36	14.46	13.95	14.06
2945	NASDAQ	KLIC	Mon, Feb 2, 2004	14.75	14.87	13.93	14.46
2944	NASDAQ	KLIC	Fri, Jan 30, 2004	13.96	14.75	13.84	14.67
2943	NASDAQ	KLIC	Thu, Jan 29, 2004	14.11	14.36	13.26	13.83
2942	NASDAQ	KLIC	Wed, Jan 28, 2004	14.23	14.47	13.69	13.82
2941	NASDAQ	KLIC	Tue, Jan 27, 2004	14.46	14.55	13.96	14.00
2940	NASDAQ	KLIC	Mon, Jan 26, 2004	14.47	14.58	14.15	14.55
2939	NASDAQ	KLIC	Fri, Jan 23, 2004	15.11	15.15	13.97	14.22
2938	NASDAQ	KLIC	Thu, Jan 22, 2004	15.82	15.98	14.77	14.78
2937	NASDAQ	KLIC	Wed, Jan 21, 2004	16.40	16.40	15.21	15.60
2936	NASDAQ	KLIC	Tue, Jan 20, 2004	15.39	16.72	15.03	16.64
2935	NASDAQ	KLIC	Fri, Jan 16, 2004	14.88	15.53	14.88	15.20
2934	NASDAQ	KLIC	Thu, Jan 15, 2004	14.62	15.10	14.40	14.85
2933	NASDAQ	KLIC	Wed, Jan 14, 2004	15.03	15.16	14.51	14.70
2932	NASDAQ	KLIC	Tue, Jan 13, 2004	15.32	15.45	14.76	14.94
2931	NASDAQ	KLIC	Mon, Jan 12, 2004	15.20	15.49	14.90	15.47
2930	NASDAQ	KLIC	Fri, Jan 9, 2004	14.85	15.50	14.61	15.10
2929	NASDAQ	KLIC	Thu, Jan 8, 2004	15.75	15.80	14.51	14.95
2928	NASDAQ	KLIC	Wed, Jan 7, 2004	15.10	15.52	14.60	15.50
2927	NASDAQ	KLIC	Tue, Jan 6, 2004	15.00	15.40	14.35	15.15
2926	NASDAQ	KLIC	Mon, Jan 5, 2004	14.27	14.98	14.12	14.93
2925	NASDAQ	KLIC	Fri, Jan 2, 2004	14.29	14.55	14.05	14.05
2924	NASDAQ	KLIC	Wed, Dec 31, 2003	14.46	14.70	13.95	14.38
2923	NASDAQ	KLIC	Tue, Dec 30, 2003	14.60	14.87	14.45	14.55
2922	NASDAQ	KLIC	Mon, Dec 29, 2003	14.36	14.60	14.30	14.58
2921	NASDAQ	KLIC	Fri, Dec 26, 2003	14.10	14.32	14.02	14.16
2920	NASDAQ	KLIC	Wed, Dec 24, 2003	14.09	14.18	13.91	14.00
2919	NASDAQ	KLIC	Tue, Dec 23, 2003	13.84	14.17	13.68	14.01
2918	NASDAQ	KLIC	Mon, Dec 22, 2003	14.00	14.24	13.67	13.80
2917	NASDAQ	KLIC	Fri, Dec 19, 2003	14.25	14.40	13.90	14.10
2916	NASDAQ	KLIC	Thu, Dec 18, 2003	13.53	14.44	13.51	14.27
2915	NASDAQ	KLIC	Wed, Dec 17, 2003	13.84	13.91	13.36	13.66
2914	NASDAQ	KLIC	Tue, Dec 16, 2003	13.70	13.90	13.36	13.76
2913	NASDAQ	KLIC	Mon, Dec 15, 2003	15.43	15.46	13.48	13.50
2912	NASDAQ	KLIC	Fri, Dec 12, 2003	14.43	14.57	14.15	14.51
2911	NASDAQ	KLIC	Thu, Dec 11, 2003	13.53	14.30	13.28	14.30
2910	NASDAQ	KLIC	Wed, Dec 10, 2003	13.70	14.20	13.28	13.55
2909	NASDAQ	KLIC	Tue, Dec 9, 2003	14.65	14.88	13.77	14.00
2908	NASDAQ	KLIC	Mon, Dec 8, 2003	14.46	14.71	14.09	14.48
2907	NASDAQ	KLIC	Fri, Dec 5, 2003	14.61	14.61	14.01	14.25
2906	NASDAQ	KLIC	Thu, Dec 4, 2003	15.55	15.60	14.55	14.88
2905	NASDAQ	KLIC	Wed, Dec 3, 2003	16.42	16.56	15.30	15.39
2904	NASDAQ	KLIC	Tue, Dec 2, 2003	16.42	16.50	16.18	16.25
2903	NASDAQ	KLIC	Mon, Dec 1, 2003	16.89	16.94	16.13	16.48
2902	NASDAQ	KLIC	Fri, Nov 28, 2003	16.24	16.50	16.00	16.44
2901	NASDAQ	KLIC	Wed, Nov 26, 2003	16.41	16.70	15.91	16.22
2900	NASDAQ	KLIC	Tue, Nov 25, 2003	16.17	16.44	16.05	16.15
2899	NASDAQ	KLIC	Mon, Nov 24, 2003	15.70	16.20	15.56	16.17
2898	NASDAQ	KLIC	Fri, Nov 21, 2003	15.50	15.74	15.22	15.36
2897	NASDAQ	KLIC	Thu, Nov 20, 2003	16.37	16.97	15.97	16.06
2896	NASDAQ	KLIC	Wed, Nov 19, 2003	16.49	16.68	16.25	16.64
2895	NASDAQ	KLIC	Tue, Nov 18, 2003	17.01	17.18	16.15	16.33
2894	NASDAQ	KLIC	Mon, Nov 17, 2003	16.44	17.07	15.69	16.90
2893	NASDAQ	KLIC	Fri, Nov 14, 2003	16.33	16.71	15.75	15.94
2892	NASDAQ	KLIC	Thu, Nov 13, 2003	16.37	17.20	16.00	16.41
2891	NASDAQ	KLIC	Wed, Nov 12, 2003	15.56	16.70	15.56	16.56
2890	NASDAQ	KLIC	Tue, Nov 11, 2003	15.24	15.80	15.11	15.56
2889	NASDAQ	KLIC	Mon, Nov 10, 2003	16.30	16.39	15.29	15.33
2888	NASDAQ	KLIC	Fri, Nov 7, 2003	16.90	16.90	15.08	16.35
2887	NASDAQ	KLIC	Thu, Nov 6, 2003	16.70	16.94	16.45	16.86
2886	NASDAQ	KLIC	Wed, Nov 5, 2003	16.21	16.88	15.90	16.70
2885	NASDAQ	KLIC	Tue, Nov 4, 2003	15.35	16.86	15.25	16.42
2884	NASDAQ	KLIC	Mon, Nov 3, 2003	14.92	15.61	14.88	15.44
2883	NASDAQ	KLIC	Fri, Oct 31, 2003	15.00	15.19	14.40	14.73
2882	NASDAQ	KLIC	Thu, Oct 30, 2003	15.00	15.60	14.48	15.07
2881	NASDAQ	KLIC	Wed, Oct 29, 2003	13.68	14.80	13.46	14.79
2880	NASDAQ	KLIC	Tue, Oct 28, 2003	13.14	14.00	13.05	14.00
2879	NASDAQ	KLIC	Mon, Oct 27, 2003	12.35	12.75	12.35	12.64
2878	NASDAQ	KLIC	Fri, Oct 24, 2003	11.94	12.36	11.80	12.27
2877	NASDAQ	KLIC	Thu, Oct 23, 2003	12.05	12.23	11.81	12.01
2876	NASDAQ	KLIC	Wed, Oct 22, 2003	13.30	13.30	12.46	12.65
2875	NASDAQ	KLIC	Tue, Oct 21, 2003	12.90	13.62	12.66	13.47
2874	NASDAQ	KLIC	Mon, Oct 20, 2003	12.55	12.70	12.42	12.59
2873	NASDAQ	KLIC	Fri, Oct 17, 2003	12.87	12.93	12.45	12.47
2872	NASDAQ	KLIC	Thu, Oct 16, 2003	12.36	13.07	12.34	13.04
2871	NASDAQ	KLIC	Wed, Oct 15, 2003	12.18	13.00	12.12	12.58
2870	NASDAQ	KLIC	Tue, Oct 14, 2003	12.00	12.30	12.00	12.21
2869	NASDAQ	KLIC	Mon, Oct 13, 2003	12.09	12.55	12.05	12.33
2868	NASDAQ	KLIC	Fri, Oct 10, 2003	12.07	12.14	11.74	11.96
2867	NASDAQ	KLIC	Thu, Oct 9, 2003	12.15	12.30	11.83	12.03
2866	NASDAQ	KLIC	Wed, Oct 8, 2003	12.05	12.28	11.66	11.88
2865	NASDAQ	KLIC	Tue, Oct 7, 2003	11.43	12.29	11.43	12.05
2864	NASDAQ	KLIC	Mon, Oct 6, 2003	11.72	11.98	11.66	11.75
2863	NASDAQ	KLIC	Fri, Oct 3, 2003	11.41	12.24	11.36	11.87
2862	NASDAQ	KLIC	Thu, Oct 2, 2003	11.01	11.51	10.95	11.13
2861	NASDAQ	KLIC	Wed, Oct 1, 2003	10.88	11.29	10.83	11.10
2860	NASDAQ	KLIC	Tue, Sep 30, 2003	11.46	11.50	10.82	10.85
2859	NASDAQ	KLIC	Mon, Sep 29, 2003	10.65	11.47	10.62	11.29
2858	NASDAQ	KLIC	Fri, Sep 26, 2003	11.05	11.24	10.47	10.47
2857	NASDAQ	KLIC	Thu, Sep 25, 2003	11.62	11.76	10.95	11.02
2856	NASDAQ	KLIC	Wed, Sep 24, 2003	12.24	12.45	11.41	11.46
2855	NASDAQ	KLIC	Tue, Sep 23, 2003	12.10	12.45	11.93	12.42
2854	NASDAQ	KLIC	Mon, Sep 22, 2003	12.08	12.15	11.71	11.99
2853	NASDAQ	KLIC	Fri, Sep 19, 2003	12.30	12.52	12.24	12.30
2852	NASDAQ	KLIC	Thu, Sep 18, 2003	12.20	12.52	12.16	12.45
2851	NASDAQ	KLIC	Wed, Sep 17, 2003	12.70	12.92	12.46	12.52
2850	NASDAQ	KLIC	Tue, Sep 16, 2003	12.40	12.75	12.36	12.73
2849	NASDAQ	KLIC	Mon, Sep 15, 2003	13.06	13.16	12.19	12.23
2848	NASDAQ	KLIC	Fri, Sep 12, 2003	11.39	11.99	11.32	11.89
2847	NASDAQ	KLIC	Thu, Sep 11, 2003	11.57	11.76	11.08	11.66
2846	NASDAQ	KLIC	Wed, Sep 10, 2003	12.18	12.40	11.50	11.55
2845	NASDAQ	KLIC	Tue, Sep 9, 2003	12.86	13.25	12.65	12.90
2844	NASDAQ	KLIC	Mon, Sep 8, 2003	12.40	12.98	12.40	12.95
2843	NASDAQ	KLIC	Fri, Sep 5, 2003	12.24	12.61	11.96	12.39
2842	NASDAQ	KLIC	Thu, Sep 4, 2003	12.60	12.71	12.26	12.30
2841	NASDAQ	KLIC	Wed, Sep 3, 2003	11.65	12.73	11.49	12.38
2840	NASDAQ	KLIC	Tue, Sep 2, 2003	11.80	11.94	11.48	11.64
2839	NASDAQ	KLIC	Fri, Aug 29, 2003	11.90	12.00	11.65	11.74
2838	NASDAQ	KLIC	Thu, Aug 28, 2003	11.49	12.01	11.44	11.93
2837	NASDAQ	KLIC	Wed, Aug 27, 2003	10.83	11.48	10.81	11.36
2836	NASDAQ	KLIC	Tue, Aug 26, 2003	10.88	11.06	10.55	10.89
2835	NASDAQ	KLIC	Mon, Aug 25, 2003	11.39	11.62	11.02	11.12
2834	NASDAQ	KLIC	Fri, Aug 22, 2003	11.55	12.45	11.46	11.56
2833	NASDAQ	KLIC	Thu, Aug 21, 2003	10.83	11.48	10.79	11.40
2832	NASDAQ	KLIC	Wed, Aug 20, 2003	10.04	10.94	9.99	10.66
2831	NASDAQ	KLIC	Tue, Aug 19, 2003	10.19	10.43	9.90	10.40
2830	NASDAQ	KLIC	Mon, Aug 18, 2003	9.39	10.19	9.31	10.13
2829	NASDAQ	KLIC	Fri, Aug 15, 2003	9.25	9.60	8.85	9.32
2828	NASDAQ	KLIC	Thu, Aug 14, 2003	9.01	9.33	9.01	9.20
2827	NASDAQ	KLIC	Wed, Aug 13, 2003	8.83	9.28	8.75	9.19
2826	NASDAQ	KLIC	Tue, Aug 12, 2003	8.61	8.85	8.45	8.83
2825	NASDAQ	KLIC	Mon, Aug 11, 2003	8.15	8.71	8.15	8.52
2824	NASDAQ	KLIC	Fri, Aug 8, 2003	8.75	8.75	8.07	8.18
2823	NASDAQ	KLIC	Thu, Aug 7, 2003	9.16	9.31	8.52	8.64
2822	NASDAQ	KLIC	Wed, Aug 6, 2003	9.13	9.46	8.97	9.22
2821	NASDAQ	KLIC	Tue, Aug 5, 2003	9.43	9.58	9.02	9.06
2820	NASDAQ	KLIC	Mon, Aug 4, 2003	9.10	9.43	8.90	9.37
2819	NASDAQ	KLIC	Fri, Aug 1, 2003	8.53	8.81	8.45	8.69
2818	NASDAQ	KLIC	Thu, Jul 31, 2003	8.55	8.94	8.47	8.67
2817	NASDAQ	KLIC	Wed, Jul 30, 2003	8.96	8.99	8.28	8.28
2816	NASDAQ	KLIC	Tue, Jul 29, 2003	8.93	9.10	8.65	8.94
2815	NASDAQ	KLIC	Mon, Jul 28, 2003	8.75	9.10	8.71	8.99
2814	NASDAQ	KLIC	Fri, Jul 25, 2003	9.05	9.07	8.55	8.76
2813	NASDAQ	KLIC	Thu, Jul 24, 2003	8.40	9.20	8.25	8.44
2812	NASDAQ	KLIC	Wed, Jul 23, 2003	7.55	8.16	7.50	8.15
2811	NASDAQ	KLIC	Tue, Jul 22, 2003	7.30	7.61	7.16	7.48
2810	NASDAQ	KLIC	Mon, Jul 21, 2003	7.62	7.65	7.05	7.21
2809	NASDAQ	KLIC	Fri, Jul 18, 2003	7.75	7.85	7.41	7.50
2808	NASDAQ	KLIC	Thu, Jul 17, 2003	8.25	8.39	7.71	7.73
2807	NASDAQ	KLIC	Wed, Jul 16, 2003	8.75	8.80	8.21	8.52
2806	NASDAQ	KLIC	Tue, Jul 15, 2003	8.30	8.85	8.29	8.62
2805	NASDAQ	KLIC	Mon, Jul 14, 2003	7.72	8.35	7.71	8.13
2804	NASDAQ	KLIC	Fri, Jul 11, 2003	7.55	7.73	7.38	7.54
2803	NASDAQ	KLIC	Thu, Jul 10, 2003	7.58	7.85	7.44	7.57
2802	NASDAQ	KLIC	Wed, Jul 9, 2003	7.13	7.91	6.97	7.73
2801	NASDAQ	KLIC	Tue, Jul 8, 2003	6.94	7.37	6.91	7.14
2800	NASDAQ	KLIC	Mon, Jul 7, 2003	6.34	7.07	6.32	7.04
2799	NASDAQ	KLIC	Thu, Jul 3, 2003	6.34	6.50	6.25	6.25
2798	NASDAQ	KLIC	Wed, Jul 2, 2003	6.23	6.53	6.17	6.46
2797	NASDAQ	KLIC	Tue, Jul 1, 2003	6.34	6.35	5.99	6.19
2796	NASDAQ	KLIC	Mon, Jun 30, 2003	6.33	6.52	6.19	6.39
2795	NASDAQ	KLIC	Fri, Jun 27, 2003	6.18	6.50	6.16	6.29
2794	NASDAQ	KLIC	Thu, Jun 26, 2003	6.03	6.25	5.94	6.22
2793	NASDAQ	KLIC	Wed, Jun 25, 2003	5.65	6.13	5.64	5.96
2792	NASDAQ	KLIC	Tue, Jun 24, 2003	5.85	5.86	5.50	5.67
2791	NASDAQ	KLIC	Mon, Jun 23, 2003	6.30	6.50	5.75	5.75
2790	NASDAQ	KLIC	Fri, Jun 20, 2003	6.55	6.65	6.18	6.26
2789	NASDAQ	KLIC	Thu, Jun 19, 2003	6.60	6.90	6.50	6.57
2788	NASDAQ	KLIC	Wed, Jun 18, 2003	6.37	6.64	6.22	6.57
2787	NASDAQ	KLIC	Tue, Jun 17, 2003	6.41	6.45	6.11	6.35
2786	NASDAQ	KLIC	Mon, Jun 16, 2003	6.23	6.33	5.99	6.32
2785	NASDAQ	KLIC	Fri, Jun 13, 2003	6.67	6.68	6.18	6.22
2784	NASDAQ	KLIC	Thu, Jun 12, 2003	6.65	6.70	6.47	6.58
2783	NASDAQ	KLIC	Wed, Jun 11, 2003	6.59	6.69	6.44	6.58
2782	NASDAQ	KLIC	Tue, Jun 10, 2003	6.50	6.74	6.42	6.67
2781	NASDAQ	KLIC	Mon, Jun 9, 2003	7.21	7.21	6.70	6.77
2780	NASDAQ	KLIC	Fri, Jun 6, 2003	7.84	8.00	7.08	7.21
2779	NASDAQ	KLIC	Thu, Jun 5, 2003	6.70	7.73	6.20	7.46
2778	NASDAQ	KLIC	Wed, Jun 4, 2003	6.43	6.75	6.21	6.70
2777	NASDAQ	KLIC	Tue, Jun 3, 2003	6.13	6.38	6.13	6.26
2776	NASDAQ	KLIC	Mon, Jun 2, 2003	6.23	6.55	6.15	6.20
2775	NASDAQ	KLIC	Fri, May 30, 2003	6.64	6.69	6.11	6.30
2774	NASDAQ	KLIC	Thu, May 29, 2003	6.01	6.39	6.00	6.23
2773	NASDAQ	KLIC	Wed, May 28, 2003	6.25	6.28	5.98	6.00
2772	NASDAQ	KLIC	Tue, May 27, 2003	5.55	6.47	5.50	6.26
2771	NASDAQ	KLIC	Fri, May 23, 2003	5.85	5.85	5.50	5.62
2770	NASDAQ	KLIC	Thu, May 22, 2003	5.20	5.96	5.20	5.76
2769	NASDAQ	KLIC	Wed, May 21, 2003	5.25	5.30	5.18	5.21
2768	NASDAQ	KLIC	Tue, May 20, 2003	5.22	5.30	5.12	5.29
2767	NASDAQ	KLIC	Mon, May 19, 2003	5.30	5.30	5.09	5.10
2766	NASDAQ	KLIC	Fri, May 16, 2003	5.26	5.48	5.20	5.26
2765	NASDAQ	KLIC	Thu, May 15, 2003	5.71	5.78	5.30	5.48
2764	NASDAQ	KLIC	Wed, May 14, 2003	5.63	5.73	5.45	5.71
2763	NASDAQ	KLIC	Tue, May 13, 2003	5.54	5.74	5.43	5.65
2762	NASDAQ	KLIC	Mon, May 12, 2003	5.40	5.60	5.39	5.56
2761	NASDAQ	KLIC	Fri, May 9, 2003	5.43	5.59	5.41	5.45
2760	NASDAQ	KLIC	Thu, May 8, 2003	5.45	5.48	5.30	5.37
2759	NASDAQ	KLIC	Wed, May 7, 2003	5.63	5.66	5.35	5.45
2758	NASDAQ	KLIC	Tue, May 6, 2003	5.66	5.94	5.59	5.73
2757	NASDAQ	KLIC	Mon, May 5, 2003	5.37	5.73	5.34	5.69
2756	NASDAQ	KLIC	Fri, May 2, 2003	5.12	5.44	5.07	5.35
2755	NASDAQ	KLIC	Thu, May 1, 2003	5.22	5.29	5.01	5.07
2754	NASDAQ	KLIC	Wed, Apr 30, 2003	5.25	5.40	5.15	5.18
2753	NASDAQ	KLIC	Tue, Apr 29, 2003	5.31	5.47	5.10	5.24
2752	NASDAQ	KLIC	Mon, Apr 28, 2003	5.05	5.24	5.00	5.19
2751	NASDAQ	KLIC	Fri, Apr 25, 2003	5.30	5.31	4.92	5.04
2750	NASDAQ	KLIC	Thu, Apr 24, 2003	5.54	5.61	5.31	5.35
2749	NASDAQ	KLIC	Wed, Apr 23, 2003	5.74	5.75	5.28	5.63
2748	NASDAQ	KLIC	Tue, Apr 22, 2003	6.03	6.25	5.73	6.20
2747	NASDAQ	KLIC	Mon, Apr 21, 2003	5.50	6.19	5.45	6.04
2746	NASDAQ	KLIC	Thu, Apr 17, 2003	5.15	5.43	4.99	5.37
2745	NASDAQ	KLIC	Wed, Apr 16, 2003	5.15	5.25	4.98	5.03
2744	NASDAQ	KLIC	Tue, Apr 15, 2003	4.95	5.20	4.80	4.95
2743	NASDAQ	KLIC	Mon, Apr 14, 2003	5.09	5.12	4.77	4.96
2742	NASDAQ	KLIC	Fri, Apr 11, 2003	5.00	5.23	4.95	4.99
2741	NASDAQ	KLIC	Thu, Apr 10, 2003	5.05	5.06	4.84	4.95
2740	NASDAQ	KLIC	Wed, Apr 9, 2003	5.25	5.27	4.98	5.00
2739	NASDAQ	KLIC	Tue, Apr 8, 2003	5.21	5.28	5.08	5.24
2738	NASDAQ	KLIC	Mon, Apr 7, 2003	5.40	5.50	5.24	5.31
2737	NASDAQ	KLIC	Fri, Apr 4, 2003	4.95	5.14	4.90	5.08
2736	NASDAQ	KLIC	Thu, Apr 3, 2003	5.05	5.09	4.89	4.89
2735	NASDAQ	KLIC	Wed, Apr 2, 2003	4.86	5.14	4.85	5.04
2734	NASDAQ	KLIC	Tue, Apr 1, 2003	4.71	4.85	4.61	4.72
2733	NASDAQ	KLIC	Mon, Mar 31, 2003	4.91	5.00	4.75	4.75
2732	NASDAQ	KLIC	Fri, Mar 28, 2003	5.20	5.23	5.00	5.05
2731	NASDAQ	KLIC	Thu, Mar 27, 2003	5.30	5.34	5.20	5.25
2730	NASDAQ	KLIC	Wed, Mar 26, 2003	5.50	5.60	5.21	5.37
2729	NASDAQ	KLIC	Tue, Mar 25, 2003	5.46	5.59	5.30	5.45
2728	NASDAQ	KLIC	Mon, Mar 24, 2003	5.45	5.60	5.40	5.47
2727	NASDAQ	KLIC	Fri, Mar 21, 2003	5.76	5.79	5.56	5.68
2726	NASDAQ	KLIC	Thu, Mar 20, 2003	5.23	5.72	5.05	5.59
2725	NASDAQ	KLIC	Wed, Mar 19, 2003	5.56	5.65	5.48	5.55
2724	NASDAQ	KLIC	Tue, Mar 18, 2003	5.60	5.64	5.42	5.62
2723	NASDAQ	KLIC	Mon, Mar 17, 2003	4.90	5.55	4.90	5.35
2722	NASDAQ	KLIC	Fri, Mar 14, 2003	5.15	5.29	4.97	5.04
2721	NASDAQ	KLIC	Thu, Mar 13, 2003	4.78	5.14	4.75	5.06
2720	NASDAQ	KLIC	Wed, Mar 12, 2003	4.55	4.60	4.39	4.46
2719	NASDAQ	KLIC	Tue, Mar 11, 2003	4.42	4.64	4.40	4.53
2718	NASDAQ	KLIC	Mon, Mar 10, 2003	4.53	4.58	4.42	4.42
2717	NASDAQ	KLIC	Fri, Mar 7, 2003	4.57	4.69	4.47	4.57
2716	NASDAQ	KLIC	Thu, Mar 6, 2003	4.80	4.87	4.60	4.67
2715	NASDAQ	KLIC	Wed, Mar 5, 2003	4.96	5.00	4.60	4.80
2714	NASDAQ	KLIC	Tue, Mar 4, 2003	5.28	5.33	4.92	4.96
2713	NASDAQ	KLIC	Mon, Mar 3, 2003	5.55	5.70	5.25	5.27
2712	NASDAQ	KLIC	Fri, Feb 28, 2003	5.60	5.73	5.30	5.53
2711	NASDAQ	KLIC	Thu, Feb 27, 2003	5.15	5.65	5.05	5.54
2710	NASDAQ	KLIC	Wed, Feb 26, 2003	5.35	5.35	5.08	5.12
2709	NASDAQ	KLIC	Tue, Feb 25, 2003	5.38	5.42	5.15	5.34
2708	NASDAQ	KLIC	Mon, Feb 24, 2003	5.35	5.53	5.26	5.45
2707	NASDAQ	KLIC	Fri, Feb 21, 2003	5.54	5.59	5.25	5.38
2706	NASDAQ	KLIC	Thu, Feb 20, 2003	5.36	5.53	5.35	5.43
2705	NASDAQ	KLIC	Wed, Feb 19, 2003	5.39	5.51	5.27	5.35
2704	NASDAQ	KLIC	Tue, Feb 18, 2003	5.25	5.45	5.20	5.38
2703	NASDAQ	KLIC	Fri, Feb 14, 2003	4.87	5.16	4.84	5.15
2702	NASDAQ	KLIC	Thu, Feb 13, 2003	5.03	5.03	4.75	4.86
2701	NASDAQ	KLIC	Wed, Feb 12, 2003	4.85	4.94	4.79	4.88
2700	NASDAQ	KLIC	Tue, Feb 11, 2003	4.75	4.99	4.75	4.83
2699	NASDAQ	KLIC	Mon, Feb 10, 2003	4.67	4.78	4.51	4.72
2698	NASDAQ	KLIC	Fri, Feb 7, 2003	4.83	4.94	4.57	4.63
2697	NASDAQ	KLIC	Thu, Feb 6, 2003	4.77	4.98	4.67	4.76
2696	NASDAQ	KLIC	Wed, Feb 5, 2003	5.02	5.12	4.72	4.74
2695	NASDAQ	KLIC	Tue, Feb 4, 2003	5.06	5.09	4.81	4.91
2694	NASDAQ	KLIC	Mon, Feb 3, 2003	5.19	5.30	5.00	5.10
2693	NASDAQ	KLIC	Fri, Jan 31, 2003	5.32	5.39	4.98	5.27
2692	NASDAQ	KLIC	Thu, Jan 30, 2003	6.32	6.43	5.60	5.66
2691	NASDAQ	KLIC	Wed, Jan 29, 2003	6.10	6.40	6.05	6.26
2690	NASDAQ	KLIC	Tue, Jan 28, 2003	6.26	6.40	6.01	6.24
2689	NASDAQ	KLIC	Mon, Jan 27, 2003	6.18	6.47	6.15	6.21
2688	NASDAQ	KLIC	Fri, Jan 24, 2003	6.38	6.45	6.19	6.32
2687	NASDAQ	KLIC	Thu, Jan 23, 2003	6.64	6.74	6.21	6.45
2686	NASDAQ	KLIC	Wed, Jan 22, 2003	6.55	6.65	6.13	6.33
2685	NASDAQ	KLIC	Tue, Jan 21, 2003	5.95	6.17	5.83	6.09
2684	NASDAQ	KLIC	Fri, Jan 17, 2003	6.05	6.23	5.80	5.92
2683	NASDAQ	KLIC	Thu, Jan 16, 2003	6.80	6.90	6.33	6.36
2682	NASDAQ	KLIC	Wed, Jan 15, 2003	6.85	7.00	6.41	6.71
2681	NASDAQ	KLIC	Tue, Jan 14, 2003	6.99	7.31	6.80	7.02
2680	NASDAQ	KLIC	Mon, Jan 13, 2003	7.32	7.59	6.93	6.94
2679	NASDAQ	KLIC	Fri, Jan 10, 2003	6.23	7.24	6.16	7.22
2678	NASDAQ	KLIC	Thu, Jan 9, 2003	6.60	6.82	6.44	6.49
2677	NASDAQ	KLIC	Wed, Jan 8, 2003	6.31	6.39	6.15	6.22
2676	NASDAQ	KLIC	Tue, Jan 7, 2003	6.69	6.80	6.38	6.40
2675	NASDAQ	KLIC	Mon, Jan 6, 2003	6.28	6.83	6.25	6.63
2674	NASDAQ	KLIC	Fri, Jan 3, 2003	6.05	6.44	6.02	6.25
2673	NASDAQ	KLIC	Thu, Jan 2, 2003	5.77	6.11	5.68	6.08
2672	NASDAQ	KLIC	Tue, Dec 31, 2002	5.55	5.96	5.55	5.72
2671	NASDAQ	KLIC	Mon, Dec 30, 2002	5.94	6.02	5.50	5.60
2670	NASDAQ	KLIC	Fri, Dec 27, 2002	5.98	6.13	5.92	5.92
2669	NASDAQ	KLIC	Thu, Dec 26, 2002	6.05	6.24	5.93	5.95
2668	NASDAQ	KLIC	Tue, Dec 24, 2002	6.05	6.10	5.92	6.06
2667	NASDAQ	KLIC	Mon, Dec 23, 2002	5.83	6.21	5.77	6.10
2666	NASDAQ	KLIC	Fri, Dec 20, 2002	5.89	6.25	5.87	5.94
2665	NASDAQ	KLIC	Thu, Dec 19, 2002	5.60	6.00	5.50	5.98
2664	NASDAQ	KLIC	Wed, Dec 18, 2002	5.61	5.78	5.51	5.77
2663	NASDAQ	KLIC	Tue, Dec 17, 2002	5.53	5.82	5.43	5.70
2662	NASDAQ	KLIC	Mon, Dec 16, 2002	5.66	5.71	5.43	5.44
2661	NASDAQ	KLIC	Fri, Dec 13, 2002	6.07	6.07	5.43	5.54
2660	NASDAQ	KLIC	Thu, Dec 12, 2002	5.71	6.43	5.46	6.23
2659	NASDAQ	KLIC	Wed, Dec 11, 2002	4.88	5.42	4.66	5.37
2658	NASDAQ	KLIC	Tue, Dec 10, 2002	4.20	4.96	4.14	4.92
2657	NASDAQ	KLIC	Mon, Dec 9, 2002	4.56	4.63	3.99	4.18
2656	NASDAQ	KLIC	Fri, Dec 6, 2002	4.65	4.73	4.48	4.51
2655	NASDAQ	KLIC	Thu, Dec 5, 2002	5.19	5.35	4.68	4.68
2654	NASDAQ	KLIC	Wed, Dec 4, 2002	4.91	5.23	4.65	5.06
2653	NASDAQ	KLIC	Tue, Dec 3, 2002	5.95	6.00	5.41	5.48
2652	NASDAQ	KLIC	Mon, Dec 2, 2002	6.30	6.37	5.85	6.06
2651	NASDAQ	KLIC	Fri, Nov 29, 2002	6.17	6.31	5.85	5.85
2650	NASDAQ	KLIC	Wed, Nov 27, 2002	5.99	6.39	5.99	6.17
2649	NASDAQ	KLIC	Tue, Nov 26, 2002	6.02	6.10	5.60	5.82
2648	NASDAQ	KLIC	Mon, Nov 25, 2002	6.31	6.74	5.46	6.08
2647	NASDAQ	KLIC	Fri, Nov 22, 2002	4.71	6.20	4.60	6.17
2646	NASDAQ	KLIC	Thu, Nov 21, 2002	4.06	4.96	4.05	4.87
2645	NASDAQ	KLIC	Wed, Nov 20, 2002	3.57	4.04	3.55	3.95
2644	NASDAQ	KLIC	Tue, Nov 19, 2002	3.77	3.85	3.48	3.62
2643	NASDAQ	KLIC	Mon, Nov 18, 2002	4.10	4.24	3.80	3.80
2642	NASDAQ	KLIC	Fri, Nov 15, 2002	3.54	4.37	3.40	4.01
2641	NASDAQ	KLIC	Thu, Nov 14, 2002	3.36	3.81	3.34	3.77
2640	NASDAQ	KLIC	Wed, Nov 13, 2002	3.27	3.36	3.21	3.26
2639	NASDAQ	KLIC	Tue, Nov 12, 2002	3.54	3.60	3.26	3.31
2638	NASDAQ	KLIC	Mon, Nov 11, 2002	4.00	4.03	3.35	3.42
2637	NASDAQ	KLIC	Fri, Nov 8, 2002	3.99	4.06	3.76	4.02
2636	NASDAQ	KLIC	Thu, Nov 7, 2002	4.14	4.16	3.90	3.94
2635	NASDAQ	KLIC	Wed, Nov 6, 2002	3.88	4.30	3.76	4.24
2634	NASDAQ	KLIC	Tue, Nov 5, 2002	3.93	3.93	3.68	3.75
2633	NASDAQ	KLIC	Mon, Nov 4, 2002	4.01	4.46	3.86	3.86
2632	NASDAQ	KLIC	Fri, Nov 1, 2002	3.71	3.85	3.51	3.80
2631	NASDAQ	KLIC	Thu, Oct 31, 2002	4.01	4.04	3.72	3.75
2630	NASDAQ	KLIC	Wed, Oct 30, 2002	3.35	4.09	3.35	4.00
2629	NASDAQ	KLIC	Tue, Oct 29, 2002	3.60	3.66	3.19	3.37
2628	NASDAQ	KLIC	Mon, Oct 28, 2002	3.37	3.76	3.36	3.60
2627	NASDAQ	KLIC	Fri, Oct 25, 2002	2.93	3.34	2.90	3.32
2626	NASDAQ	KLIC	Thu, Oct 24, 2002	2.83	3.18	2.82	2.97
2625	NASDAQ	KLIC	Wed, Oct 23, 2002	2.62	2.89	2.57	2.81
2624	NASDAQ	KLIC	Tue, Oct 22, 2002	2.99	3.00	2.64	2.65
2623	NASDAQ	KLIC	Mon, Oct 21, 2002	2.75	3.04	2.60	3.00
2622	NASDAQ	KLIC	Fri, Oct 18, 2002	2.78	2.92	2.58	2.76
2621	NASDAQ	KLIC	Thu, Oct 17, 2002	2.54	2.80	2.51	2.75
2620	NASDAQ	KLIC	Wed, Oct 16, 2002	2.20	2.34	2.02	2.29
2619	NASDAQ	KLIC	Tue, Oct 15, 2002	2.27	2.58	2.27	2.54
2618	NASDAQ	KLIC	Mon, Oct 14, 2002	2.13	2.25	2.04	2.12
2617	NASDAQ	KLIC	Fri, Oct 11, 2002	2.17	2.34	2.08	2.11
2616	NASDAQ	KLIC	Thu, Oct 10, 2002	2.04	2.13	1.92	2.09
2615	NASDAQ	KLIC	Wed, Oct 9, 2002	2.04	2.05	1.94	1.95
2614	NASDAQ	KLIC	Tue, Oct 8, 2002	2.19	2.21	1.91	2.10
2613	NASDAQ	KLIC	Mon, Oct 7, 2002	2.36	2.37	1.98	1.99
2612	NASDAQ	KLIC	Fri, Oct 4, 2002	3.15	3.15	2.27	2.38
2611	NASDAQ	KLIC	Thu, Oct 3, 2002	3.08	3.15	2.87	2.95
2610	NASDAQ	KLIC	Wed, Oct 2, 2002	2.88	3.36	2.88	3.13
2609	NASDAQ	KLIC	Tue, Oct 1, 2002	3.01	3.15	2.85	3.07
2608	NASDAQ	KLIC	Mon, Sep 30, 2002	2.91	3.10	2.85	3.00
2607	NASDAQ	KLIC	Fri, Sep 27, 2002	3.05	3.23	2.93	2.93
2606	NASDAQ	KLIC	Thu, Sep 26, 2002	3.33	3.35	2.90	3.12
2605	NASDAQ	KLIC	Wed, Sep 25, 2002	3.37	3.45	3.19	3.22
2604	NASDAQ	KLIC	Tue, Sep 24, 2002	3.11	3.39	2.99	3.21
2603	NASDAQ	KLIC	Mon, Sep 23, 2002	3.43	3.43	3.12	3.14
2602	NASDAQ	KLIC	Fri, Sep 20, 2002	3.65	3.75	3.20	3.39
2601	NASDAQ	KLIC	Thu, Sep 19, 2002	3.87	3.92	3.63	3.66
2600	NASDAQ	KLIC	Wed, Sep 18, 2002	3.96	4.12	3.78	3.79
2599	NASDAQ	KLIC	Tue, Sep 17, 2002	4.32	4.35	4.00	4.05
2598	NASDAQ	KLIC	Mon, Sep 16, 2002	4.25	4.30	4.06	4.21
2597	NASDAQ	KLIC	Fri, Sep 13, 2002	4.20	4.42	4.14	4.25
2596	NASDAQ	KLIC	Thu, Sep 12, 2002	4.67	4.68	4.17	4.28
2595	NASDAQ	KLIC	Wed, Sep 11, 2002	4.74	4.85	4.47	4.58
2594	NASDAQ	KLIC	Tue, Sep 10, 2002	4.29	4.57	4.09	4.56
2593	NASDAQ	KLIC	Mon, Sep 9, 2002	4.10	4.26	3.85	4.09
2592	NASDAQ	KLIC	Fri, Sep 6, 2002	3.94	4.18	3.80	4.07
2591	NASDAQ	KLIC	Thu, Sep 5, 2002	3.94	3.95	3.62	3.63
2590	NASDAQ	KLIC	Wed, Sep 4, 2002	3.73	4.01	3.58	3.91
2589	NASDAQ	KLIC	Tue, Sep 3, 2002	3.71	3.90	3.58	3.69
2588	NASDAQ	KLIC	Fri, Aug 30, 2002	3.90	3.90	3.72	3.72
2587	NASDAQ	KLIC	Thu, Aug 29, 2002	3.63	3.95	3.52	3.90
2586	NASDAQ	KLIC	Wed, Aug 28, 2002	3.86	3.87	3.63	3.71
2585	NASDAQ	KLIC	Tue, Aug 27, 2002	4.25	4.25	3.84	3.90
2584	NASDAQ	KLIC	Mon, Aug 26, 2002	4.25	4.34	4.01	4.27
2583	NASDAQ	KLIC	Fri, Aug 23, 2002	4.44	4.44	4.00	4.10
2582	NASDAQ	KLIC	Thu, Aug 22, 2002	4.56	4.75	4.40	4.48
2581	NASDAQ	KLIC	Wed, Aug 21, 2002	4.18	4.70	4.17	4.64
2580	NASDAQ	KLIC	Tue, Aug 20, 2002	4.19	4.39	3.95	4.06
2579	NASDAQ	KLIC	Mon, Aug 19, 2002	4.69	4.75	4.38	4.51
2578	NASDAQ	KLIC	Fri, Aug 16, 2002	4.08	4.75	4.01	4.75
2577	NASDAQ	KLIC	Thu, Aug 15, 2002	4.16	4.32	3.95	4.15
2576	NASDAQ	KLIC	Wed, Aug 14, 2002	4.06	4.18	3.51	4.00
2575	NASDAQ	KLIC	Tue, Aug 13, 2002	4.33	4.67	3.99	4.08
2574	NASDAQ	KLIC	Mon, Aug 12, 2002	5.40	5.40	5.05	5.26
2573	NASDAQ	KLIC	Fri, Aug 9, 2002	5.50	5.52	5.24	5.36
2572	NASDAQ	KLIC	Thu, Aug 8, 2002	5.30	5.58	5.04	5.58
2571	NASDAQ	KLIC	Wed, Aug 7, 2002	5.57	5.69	4.85	5.24
2570	NASDAQ	KLIC	Tue, Aug 6, 2002	5.40	5.84	5.32	5.45
2569	NASDAQ	KLIC	Mon, Aug 5, 2002	5.55	5.72	5.10	5.16
2568	NASDAQ	KLIC	Fri, Aug 2, 2002	6.12	6.17	5.55	5.56
2567	NASDAQ	KLIC	Thu, Aug 1, 2002	6.51	6.77	6.05	6.05
2566	NASDAQ	KLIC	Wed, Jul 31, 2002	6.88	7.10	6.35	6.58
2565	NASDAQ	KLIC	Tue, Jul 30, 2002	6.71	7.18	6.50	6.93
2564	NASDAQ	KLIC	Mon, Jul 29, 2002	6.30	6.71	6.15	6.66
2563	NASDAQ	KLIC	Fri, Jul 26, 2002	6.34	6.35	5.90	6.07
2562	NASDAQ	KLIC	Thu, Jul 25, 2002	7.46	7.46	5.82	5.86
2561	NASDAQ	KLIC	Wed, Jul 24, 2002	7.21	7.63	6.35	7.49
2560	NASDAQ	KLIC	Tue, Jul 23, 2002	8.54	8.55	7.20	7.59
2559	NASDAQ	KLIC	Mon, Jul 22, 2002	9.01	9.29	8.51	8.85
2558	NASDAQ	KLIC	Fri, Jul 19, 2002	9.00	9.53	8.91	9.07
2557	NASDAQ	KLIC	Thu, Jul 18, 2002	10.19	10.72	9.18	9.22
2556	NASDAQ	KLIC	Wed, Jul 17, 2002	11.39	12.51	10.14	10.46
2555	NASDAQ	KLIC	Tue, Jul 16, 2002	12.50	12.93	12.01	12.06
2554	NASDAQ	KLIC	Mon, Jul 15, 2002	11.90	12.41	11.49	12.26
2553	NASDAQ	KLIC	Fri, Jul 12, 2002	12.13	12.30	11.70	11.93
2552	NASDAQ	KLIC	Thu, Jul 11, 2002	10.78	11.91	10.56	11.86
2551	NASDAQ	KLIC	Wed, Jul 10, 2002	11.58	11.79	10.74	10.79
2550	NASDAQ	KLIC	Tue, Jul 9, 2002	11.74	11.74	11.16	11.51
2549	NASDAQ	KLIC	Mon, Jul 8, 2002	12.41	12.60	11.63	11.80
2548	NASDAQ	KLIC	Fri, Jul 5, 2002	11.74	12.45	11.66	12.41
2547	NASDAQ	KLIC	Wed, Jul 3, 2002	10.61	11.23	10.53	11.15
2546	NASDAQ	KLIC	Tue, Jul 2, 2002	11.40	11.50	10.61	10.69
2545	NASDAQ	KLIC	Mon, Jul 1, 2002	12.39	12.68	11.41	11.48
2544	NASDAQ	KLIC	Fri, Jun 28, 2002	12.40	13.11	12.28	12.39
2543	NASDAQ	KLIC	Thu, Jun 27, 2002	11.74	12.69	11.73	12.62
2542	NASDAQ	KLIC	Wed, Jun 26, 2002	11.09	11.76	10.68	11.63
2541	NASDAQ	KLIC	Tue, Jun 25, 2002	11.76	12.07	11.05	11.18
2540	NASDAQ	KLIC	Mon, Jun 24, 2002	10.86	11.90	10.85	11.53
2539	NASDAQ	KLIC	Fri, Jun 21, 2002	11.85	11.88	10.65	11.00
2538	NASDAQ	KLIC	Thu, Jun 20, 2002	12.32	12.35	11.45	11.47
2537	NASDAQ	KLIC	Wed, Jun 19, 2002	12.74	12.80	11.85	11.93
2536	NASDAQ	KLIC	Tue, Jun 18, 2002	12.70	13.47	12.67	12.75
2535	NASDAQ	KLIC	Mon, Jun 17, 2002	12.55	13.15	12.53	13.00
2534	NASDAQ	KLIC	Fri, Jun 14, 2002	12.06	12.52	11.50	12.43
2533	NASDAQ	KLIC	Thu, Jun 13, 2002	12.20	12.78	12.09	12.21
2532	NASDAQ	KLIC	Wed, Jun 12, 2002	12.14	12.50	11.79	12.18
2531	NASDAQ	KLIC	Tue, Jun 11, 2002	13.21	13.46	12.11	12.13
2530	NASDAQ	KLIC	Mon, Jun 10, 2002	14.05	14.06	13.07	13.09
2529	NASDAQ	KLIC	Fri, Jun 7, 2002	12.86	13.61	12.58	13.47
2528	NASDAQ	KLIC	Thu, Jun 6, 2002	13.45	13.55	13.16	13.41
2527	NASDAQ	KLIC	Wed, Jun 5, 2002	14.04	14.10	13.20	13.59
2526	NASDAQ	KLIC	Tue, Jun 4, 2002	13.36	14.04	13.20	13.94
2525	NASDAQ	KLIC	Mon, Jun 3, 2002	14.62	14.63	13.40	13.43
2524	NASDAQ	KLIC	Fri, May 31, 2002	15.00	15.05	14.44	14.60
2523	NASDAQ	KLIC	Thu, May 30, 2002	14.56	14.70	14.03	14.69
2522	NASDAQ	KLIC	Wed, May 29, 2002	15.24	15.26	14.58	14.79
2521	NASDAQ	KLIC	Tue, May 28, 2002	15.39	15.53	15.00	15.36
2520	NASDAQ	KLIC	Fri, May 24, 2002	15.84	15.90	14.91	15.12
2519	NASDAQ	KLIC	Thu, May 23, 2002	16.35	16.37	15.10	16.07
2518	NASDAQ	KLIC	Wed, May 22, 2002	16.65	16.95	16.00	16.31
2517	NASDAQ	KLIC	Tue, May 21, 2002	17.34	17.55	16.38	16.70
2516	NASDAQ	KLIC	Mon, May 20, 2002	17.68	17.70	17.09	17.28
2515	NASDAQ	KLIC	Fri, May 17, 2002	18.62	19.04	16.88	17.37
2514	NASDAQ	KLIC	Thu, May 16, 2002	19.65	19.76	19.25	19.66
2513	NASDAQ	KLIC	Wed, May 15, 2002	19.65	20.24	19.00	19.71
2512	NASDAQ	KLIC	Tue, May 14, 2002	19.17	19.80	19.03	19.70
2511	NASDAQ	KLIC	Mon, May 13, 2002	17.10	18.30	17.10	18.30
2510	NASDAQ	KLIC	Fri, May 10, 2002	18.10	18.20	16.95	17.10
2509	NASDAQ	KLIC	Thu, May 9, 2002	18.63	19.00	17.86	18.04
2508	NASDAQ	KLIC	Wed, May 8, 2002	17.35	18.84	17.34	18.70
2507	NASDAQ	KLIC	Tue, May 7, 2002	16.45	17.02	16.05	16.36
2506	NASDAQ	KLIC	Mon, May 6, 2002	16.51	17.05	16.23	16.35
2505	NASDAQ	KLIC	Fri, May 3, 2002	17.18	17.35	16.26	16.48
2504	NASDAQ	KLIC	Thu, May 2, 2002	18.20	18.66	16.95	17.08
2503	NASDAQ	KLIC	Wed, May 1, 2002	18.15	18.45	17.11	18.24
2502	NASDAQ	KLIC	Tue, Apr 30, 2002	17.35	18.22	17.30	18.14
2501	NASDAQ	KLIC	Mon, Apr 29, 2002	17.40	17.95	17.04	17.30
2500	NASDAQ	KLIC	Fri, Apr 26, 2002	18.85	19.24	17.29	17.33
2499	NASDAQ	KLIC	Thu, Apr 25, 2002	18.30	19.04	18.12	18.80
2498	NASDAQ	KLIC	Wed, Apr 24, 2002	19.00	19.41	18.10	18.25
2497	NASDAQ	KLIC	Tue, Apr 23, 2002	19.91	20.10	18.92	18.98
2496	NASDAQ	KLIC	Mon, Apr 22, 2002	19.98	19.98	19.40	19.70
2495	NASDAQ	KLIC	Fri, Apr 19, 2002	20.27	20.45	19.89	20.00
2494	NASDAQ	KLIC	Thu, Apr 18, 2002	21.00	21.12	20.05	20.20
2493	NASDAQ	KLIC	Wed, Apr 17, 2002	20.78	21.67	20.60	20.80
2492	NASDAQ	KLIC	Tue, Apr 16, 2002	20.40	21.12	20.35	20.75
2491	NASDAQ	KLIC	Mon, Apr 15, 2002	19.04	20.00	18.95	19.87
2490	NASDAQ	KLIC	Fri, Apr 12, 2002	18.84	19.16	18.44	19.15
2489	NASDAQ	KLIC	Thu, Apr 11, 2002	18.93	19.29	18.60	18.71
2488	NASDAQ	KLIC	Wed, Apr 10, 2002	19.06	19.40	18.52	18.99
2487	NASDAQ	KLIC	Tue, Apr 9, 2002	19.81	20.11	18.92	19.08
2486	NASDAQ	KLIC	Mon, Apr 8, 2002	19.35	19.74	18.71	19.69
2485	NASDAQ	KLIC	Fri, Apr 5, 2002	20.23	20.39	19.50	19.55
2484	NASDAQ	KLIC	Thu, Apr 4, 2002	19.85	20.33	19.62	20.12
2483	NASDAQ	KLIC	Wed, Apr 3, 2002	20.60	20.85	19.66	19.85
2482	NASDAQ	KLIC	Tue, Apr 2, 2002	21.05	21.06	20.45	20.50
2481	NASDAQ	KLIC	Mon, Apr 1, 2002	20.65	21.25	19.95	21.15
2480	NASDAQ	KLIC	Thu, Mar 28, 2002	20.15	21.00	20.15	20.81
2479	NASDAQ	KLIC	Wed, Mar 27, 2002	20.16	20.52	19.62	20.11
2478	NASDAQ	KLIC	Tue, Mar 26, 2002	19.50	20.22	19.30	20.16
2477	NASDAQ	KLIC	Mon, Mar 25, 2002	20.00	20.37	19.40	19.44
2476	NASDAQ	KLIC	Fri, Mar 22, 2002	20.46	20.80	19.95	19.95
2475	NASDAQ	KLIC	Thu, Mar 21, 2002	19.58	20.45	19.30	20.41
2474	NASDAQ	KLIC	Wed, Mar 20, 2002	19.85	19.87	19.39	19.56
2473	NASDAQ	KLIC	Tue, Mar 19, 2002	19.75	20.09	19.43	20.08
2472	NASDAQ	KLIC	Mon, Mar 18, 2002	19.52	20.50	19.30	19.57
2471	NASDAQ	KLIC	Fri, Mar 15, 2002	18.78	19.67	18.78	19.58
2470	NASDAQ	KLIC	Thu, Mar 14, 2002	18.75	19.23	18.35	18.99
2469	NASDAQ	KLIC	Wed, Mar 13, 2002	19.61	19.62	18.71	18.78
2468	NASDAQ	KLIC	Tue, Mar 12, 2002	19.80	20.15	19.50	19.80
2467	NASDAQ	KLIC	Mon, Mar 11, 2002	20.60	20.72	20.14	20.28
2466	NASDAQ	KLIC	Fri, Mar 8, 2002	20.80	21.65	20.66	21.06
2465	NASDAQ	KLIC	Thu, Mar 7, 2002	20.31	20.80	19.93	20.69
2464	NASDAQ	KLIC	Wed, Mar 6, 2002	20.46	20.49	19.70	20.30
2463	NASDAQ	KLIC	Tue, Mar 5, 2002	19.65	20.84	19.39	20.60
2462	NASDAQ	KLIC	Mon, Mar 4, 2002	19.21	20.00	19.12	19.89
2461	NASDAQ	KLIC	Fri, Mar 1, 2002	17.76	19.59	17.69	19.36
2460	NASDAQ	KLIC	Thu, Feb 28, 2002	18.36	18.46	17.39	17.62
2459	NASDAQ	KLIC	Wed, Feb 27, 2002	17.81	19.00	17.69	18.41
2458	NASDAQ	KLIC	Tue, Feb 26, 2002	17.10	18.08	16.85	17.55
2457	NASDAQ	KLIC	Mon, Feb 25, 2002	15.45	17.22	15.45	16.84
2456	NASDAQ	KLIC	Fri, Feb 22, 2002	15.66	15.86	14.96	15.44
2455	NASDAQ	KLIC	Thu, Feb 21, 2002	16.65	16.73	15.35	15.48
2454	NASDAQ	KLIC	Wed, Feb 20, 2002	15.59	16.30	15.25	16.26
2453	NASDAQ	KLIC	Tue, Feb 19, 2002	16.32	16.33	15.29	15.30
2452	NASDAQ	KLIC	Fri, Feb 15, 2002	16.05	16.78	16.03	16.48
2451	NASDAQ	KLIC	Thu, Feb 14, 2002	16.60	16.83	16.05	16.08
2450	NASDAQ	KLIC	Wed, Feb 13, 2002	15.90	16.80	15.82	16.62
2449	NASDAQ	KLIC	Tue, Feb 12, 2002	15.58	16.15	15.26	15.85
2448	NASDAQ	KLIC	Mon, Feb 11, 2002	14.75	15.78	14.60	15.74
2447	NASDAQ	KLIC	Fri, Feb 8, 2002	14.89	15.10	14.32	14.69
2446	NASDAQ	KLIC	Thu, Feb 7, 2002	15.36	15.70	14.78	14.90
2445	NASDAQ	KLIC	Wed, Feb 6, 2002	15.47	15.75	15.15	15.69
2444	NASDAQ	KLIC	Tue, Feb 5, 2002	15.53	15.80	15.27	15.50
2443	NASDAQ	KLIC	Mon, Feb 4, 2002	15.90	16.50	15.58	15.64
2442	NASDAQ	KLIC	Fri, Feb 1, 2002	16.35	16.36	15.77	15.85
2441	NASDAQ	KLIC	Thu, Jan 31, 2002	16.60	16.60	15.90	16.45
2440	NASDAQ	KLIC	Wed, Jan 30, 2002	15.85	16.27	14.80	16.27
2439	NASDAQ	KLIC	Tue, Jan 29, 2002	16.05	16.60	15.50	15.92
2438	NASDAQ	KLIC	Mon, Jan 28, 2002	17.00	17.00	16.19	16.28
2437	NASDAQ	KLIC	Fri, Jan 25, 2002	16.35	17.06	16.27	16.73
2436	NASDAQ	KLIC	Thu, Jan 24, 2002	16.72	17.08	16.25	16.38
2435	NASDAQ	KLIC	Wed, Jan 23, 2002	15.87	16.75	15.85	16.71
2434	NASDAQ	KLIC	Tue, Jan 22, 2002	16.05	16.05	15.60	15.60
2433	NASDAQ	KLIC	Fri, Jan 18, 2002	15.87	16.29	15.70	16.05
2432	NASDAQ	KLIC	Thu, Jan 17, 2002	16.50	17.29	15.60	16.02
2431	NASDAQ	KLIC	Wed, Jan 16, 2002	18.30	18.43	17.45	17.49
2430	NASDAQ	KLIC	Tue, Jan 15, 2002	19.17	19.45	18.39	18.85
2429	NASDAQ	KLIC	Mon, Jan 14, 2002	19.57	19.61	18.97	19.16
2428	NASDAQ	KLIC	Fri, Jan 11, 2002	19.58	20.08	19.36	19.71
2427	NASDAQ	KLIC	Thu, Jan 10, 2002	20.10	20.10	19.63	19.79
2426	NASDAQ	KLIC	Wed, Jan 9, 2002	20.25	20.92	20.15	20.19
2425	NASDAQ	KLIC	Tue, Jan 8, 2002	19.98	20.35	19.90	20.24
2424	NASDAQ	KLIC	Mon, Jan 7, 2002	20.37	20.80	19.78	20.04
2423	NASDAQ	KLIC	Fri, Jan 4, 2002	20.49	20.78	20.21	20.42
2422	NASDAQ	KLIC	Thu, Jan 3, 2002	18.01	20.35	18.00	20.04
2421	NASDAQ	KLIC	Wed, Jan 2, 2002	17.36	17.95	17.36	17.94
2420	NASDAQ	KLIC	Mon, Dec 31, 2001	17.89	17.90	16.91	17.15
2419	NASDAQ	KLIC	Fri, Dec 28, 2001	17.61	18.05	17.55	17.85
2418	NASDAQ	KLIC	Thu, Dec 27, 2001	17.00	17.50	16.99	17.50
2417	NASDAQ	KLIC	Wed, Dec 26, 2001	16.50	17.24	16.47	16.98
2416	NASDAQ	KLIC	Mon, Dec 24, 2001	16.76	16.90	16.46	16.72
2415	NASDAQ	KLIC	Fri, Dec 21, 2001	16.35	16.89	16.25	16.81
2414	NASDAQ	KLIC	Thu, Dec 20, 2001	17.55	17.57	16.18	16.21
2413	NASDAQ	KLIC	Wed, Dec 19, 2001	17.81	18.15	17.16	17.51
2412	NASDAQ	KLIC	Tue, Dec 18, 2001	17.80	17.99	17.51	17.66
2411	NASDAQ	KLIC	Mon, Dec 17, 2001	17.11	17.77	17.00	17.71
2410	NASDAQ	KLIC	Fri, Dec 14, 2001	16.90	17.13	16.51	17.07
2409	NASDAQ	KLIC	Thu, Dec 13, 2001	17.41	17.55	16.48	16.69
2408	NASDAQ	KLIC	Wed, Dec 12, 2001	17.99	18.40	17.64	18.10
2407	NASDAQ	KLIC	Tue, Dec 11, 2001	17.77	18.22	17.68	17.91
2406	NASDAQ	KLIC	Mon, Dec 10, 2001	17.78	18.35	17.65	17.87
2405	NASDAQ	KLIC	Fri, Dec 7, 2001	18.49	18.80	17.91	18.24
2404	NASDAQ	KLIC	Thu, Dec 6, 2001	18.43	18.97	18.30	18.92
2403	NASDAQ	KLIC	Wed, Dec 5, 2001	17.10	18.85	17.06	18.50
2402	NASDAQ	KLIC	Tue, Dec 4, 2001	16.06	17.09	16.05	17.05
2401	NASDAQ	KLIC	Mon, Dec 3, 2001	15.71	16.13	15.50	15.94
2400	NASDAQ	KLIC	Fri, Nov 30, 2001	16.70	16.79	15.70	15.71
2399	NASDAQ	KLIC	Thu, Nov 29, 2001	16.56	16.93	16.34	16.93
2398	NASDAQ	KLIC	Wed, Nov 28, 2001	17.17	17.42	16.50	16.51
2397	NASDAQ	KLIC	Tue, Nov 27, 2001	16.70	17.75	16.63	17.24
2396	NASDAQ	KLIC	Mon, Nov 26, 2001	16.64	17.14	16.45	17.10
2395	NASDAQ	KLIC	Fri, Nov 23, 2001	16.00	16.71	15.85	16.55
2394	NASDAQ	KLIC	Wed, Nov 21, 2001	16.11	16.30	15.60	16.25
2393	NASDAQ	KLIC	Tue, Nov 20, 2001	17.07	17.08	16.05	16.12
2392	NASDAQ	KLIC	Mon, Nov 19, 2001	17.38	17.44	16.50	17.15
2391	NASDAQ	KLIC	Fri, Nov 16, 2001	17.39	17.60	17.00	17.30
2390	NASDAQ	KLIC	Thu, Nov 15, 2001	17.51	18.40	17.48	17.50
2389	NASDAQ	KLIC	Wed, Nov 14, 2001	18.50	18.80	17.65	18.30
2388	NASDAQ	KLIC	Tue, Nov 13, 2001	17.50	18.37	17.50	18.33
2387	NASDAQ	KLIC	Mon, Nov 12, 2001	17.01	17.50	16.50	17.43
2386	NASDAQ	KLIC	Fri, Nov 9, 2001	16.99	17.49	16.85	17.06
2385	NASDAQ	KLIC	Thu, Nov 8, 2001	18.26	18.82	16.75	17.18
2384	NASDAQ	KLIC	Wed, Nov 7, 2001	17.49	18.40	17.32	18.06
2383	NASDAQ	KLIC	Tue, Nov 6, 2001	17.50	17.79	16.90	17.65
2382	NASDAQ	KLIC	Mon, Nov 5, 2001	17.38	17.87	17.27	17.50
2381	NASDAQ	KLIC	Fri, Nov 2, 2001	16.93	18.00	16.45	17.34
2380	NASDAQ	KLIC	Thu, Nov 1, 2001	15.58	17.40	15.58	17.00
2379	NASDAQ	KLIC	Wed, Oct 31, 2001	14.30	15.20	13.95	15.17
2378	NASDAQ	KLIC	Tue, Oct 30, 2001	13.45	13.85	13.24	13.54
2377	NASDAQ	KLIC	Mon, Oct 29, 2001	14.25	14.25	13.40	13.54
2376	NASDAQ	KLIC	Fri, Oct 26, 2001	14.06	14.30	13.85	14.00
2375	NASDAQ	KLIC	Thu, Oct 25, 2001	12.51	14.38	12.22	14.26
2374	NASDAQ	KLIC	Wed, Oct 24, 2001	12.48	12.90	12.25	12.90
2373	NASDAQ	KLIC	Tue, Oct 23, 2001	12.80	12.85	12.25	12.35
2372	NASDAQ	KLIC	Mon, Oct 22, 2001	12.23	12.97	12.22	12.85
2371	NASDAQ	KLIC	Fri, Oct 19, 2001	11.78	12.57	11.70	12.47
2370	NASDAQ	KLIC	Thu, Oct 18, 2001	12.21	12.48	11.83	11.88
2369	NASDAQ	KLIC	Wed, Oct 17, 2001	13.15	13.20	12.22	12.22
2368	NASDAQ	KLIC	Tue, Oct 16, 2001	12.65	12.82	12.27	12.81
2367	NASDAQ	KLIC	Mon, Oct 15, 2001	12.89	12.90	12.10	12.56
2366	NASDAQ	KLIC	Fri, Oct 12, 2001	13.19	13.44	12.50	13.17
2365	NASDAQ	KLIC	Thu, Oct 11, 2001	11.80	13.45	11.79	13.45
2364	NASDAQ	KLIC	Wed, Oct 10, 2001	11.51	12.08	11.36	11.94
2363	NASDAQ	KLIC	Tue, Oct 9, 2001	11.75	11.84	11.48	11.55
2362	NASDAQ	KLIC	Mon, Oct 8, 2001	11.05	12.13	10.95	12.05
2361	NASDAQ	KLIC	Fri, Oct 5, 2001	11.10	11.40	10.60	11.25
2360	NASDAQ	KLIC	Thu, Oct 4, 2001	11.20	11.92	11.00	11.40
2359	NASDAQ	KLIC	Wed, Oct 3, 2001	9.93	11.30	9.78	11.00
2358	NASDAQ	KLIC	Tue, Oct 2, 2001	9.93	10.69	9.92	10.07
2357	NASDAQ	KLIC	Mon, Oct 1, 2001	10.63	10.99	10.13	10.20
2356	NASDAQ	KLIC	Fri, Sep 28, 2001	10.08	11.09	10.08	10.90
2355	NASDAQ	KLIC	Thu, Sep 27, 2001	10.32	10.50	9.51	10.08
2354	NASDAQ	KLIC	Wed, Sep 26, 2001	10.82	10.95	10.11	10.38
2353	NASDAQ	KLIC	Tue, Sep 25, 2001	10.50	11.00	10.42	11.00
2352	NASDAQ	KLIC	Mon, Sep 24, 2001	10.52	10.80	10.22	10.58
2351	NASDAQ	KLIC	Fri, Sep 21, 2001	9.97	10.23	9.18	10.15
2350	NASDAQ	KLIC	Thu, Sep 20, 2001	9.46	10.50	9.45	10.21
2349	NASDAQ	KLIC	Wed, Sep 19, 2001	10.20	10.38	8.16	9.64
2348	NASDAQ	KLIC	Tue, Sep 18, 2001	11.20	11.45	9.90	10.04
2347	NASDAQ	KLIC	Mon, Sep 17, 2001	12.01	12.25	11.10	11.21
2346	NASDAQ	KLIC	Mon, Sep 10, 2001	13.07	13.20	12.44	12.49
2345	NASDAQ	KLIC	Fri, Sep 7, 2001	12.88	13.59	12.78	13.13
2344	NASDAQ	KLIC	Thu, Sep 6, 2001	13.60	13.65	12.81	13.19
2343	NASDAQ	KLIC	Wed, Sep 5, 2001	14.05	14.20	13.29	13.78
2342	NASDAQ	KLIC	Tue, Sep 4, 2001	14.39	14.81	14.05	14.06
2341	NASDAQ	KLIC	Fri, Aug 31, 2001	14.01	14.70	14.00	14.41
2340	NASDAQ	KLIC	Thu, Aug 30, 2001	14.35	14.65	13.91	14.30
2339	NASDAQ	KLIC	Wed, Aug 29, 2001	14.79	15.00	14.25	14.66
2338	NASDAQ	KLIC	Tue, Aug 28, 2001	15.22	15.38	14.61	14.77
2337	NASDAQ	KLIC	Mon, Aug 27, 2001	15.15	15.60	15.10	15.40
2336	NASDAQ	KLIC	Fri, Aug 24, 2001	14.60	15.20	14.47	15.20
2335	NASDAQ	KLIC	Thu, Aug 23, 2001	14.40	14.80	14.24	14.24
2334	NASDAQ	KLIC	Wed, Aug 22, 2001	14.28	14.61	14.04	14.48
2333	NASDAQ	KLIC	Tue, Aug 21, 2001	14.35	14.55	13.95	14.01
2332	NASDAQ	KLIC	Mon, Aug 20, 2001	14.10	14.60	14.10	14.34
2331	NASDAQ	KLIC	Fri, Aug 17, 2001	14.30	14.50	14.00	14.12
2330	NASDAQ	KLIC	Thu, Aug 16, 2001	14.50	14.70	14.01	14.56
2329	NASDAQ	KLIC	Wed, Aug 15, 2001	14.90	14.95	14.42	14.58
2328	NASDAQ	KLIC	Tue, Aug 14, 2001	14.85	15.10	14.73	14.73
2327	NASDAQ	KLIC	Mon, Aug 13, 2001	14.75	15.05	14.61	14.72
2326	NASDAQ	KLIC	Fri, Aug 10, 2001	14.60	14.75	13.98	14.60
2325	NASDAQ	KLIC	Thu, Aug 9, 2001	15.43	15.72	14.85	14.96
2324	NASDAQ	KLIC	Wed, Aug 8, 2001	15.90	16.00	15.25	15.38
2323	NASDAQ	KLIC	Tue, Aug 7, 2001	16.90	17.00	16.31	16.55
2322	NASDAQ	KLIC	Mon, Aug 6, 2001	17.25	17.37	17.01	17.11
2321	NASDAQ	KLIC	Fri, Aug 3, 2001	17.72	17.80	17.25	17.50
2320	NASDAQ	KLIC	Thu, Aug 2, 2001	18.00	18.30	17.70	17.80
2319	NASDAQ	KLIC	Wed, Aug 1, 2001	17.15	18.10	17.10	17.85
2318	NASDAQ	KLIC	Tue, Jul 31, 2001	16.70	17.15	16.60	16.91
2317	NASDAQ	KLIC	Mon, Jul 30, 2001	16.58	16.95	16.53	16.71
2316	NASDAQ	KLIC	Fri, Jul 27, 2001	16.50	16.80	16.39	16.77
2315	NASDAQ	KLIC	Thu, Jul 26, 2001	15.81	16.79	15.25	16.60
2314	NASDAQ	KLIC	Wed, Jul 25, 2001	15.52	16.00	15.20	15.89
2313	NASDAQ	KLIC	Tue, Jul 24, 2001	16.15	16.16	15.57	15.66
2312	NASDAQ	KLIC	Mon, Jul 23, 2001	16.20	16.40	16.00	16.15
2311	NASDAQ	KLIC	Fri, Jul 20, 2001	16.15	16.46	15.95	16.31
2310	NASDAQ	KLIC	Thu, Jul 19, 2001	16.02	16.74	15.83	16.44
2309	NASDAQ	KLIC	Wed, Jul 18, 2001	16.00	16.21	15.65	15.87
2308	NASDAQ	KLIC	Tue, Jul 17, 2001	15.57	16.35	15.19	16.31
2307	NASDAQ	KLIC	Mon, Jul 16, 2001	16.67	16.85	15.70	15.70
2306	NASDAQ	KLIC	Fri, Jul 13, 2001	16.68	16.99	16.28	16.95
2305	NASDAQ	KLIC	Thu, Jul 12, 2001	15.80	16.74	15.80	16.66
2304	NASDAQ	KLIC	Wed, Jul 11, 2001	15.06	15.71	15.00	15.44
2303	NASDAQ	KLIC	Tue, Jul 10, 2001	15.73	15.95	15.00	15.01
2302	NASDAQ	KLIC	Mon, Jul 9, 2001	15.59	15.74	15.20	15.52
2301	NASDAQ	KLIC	Fri, Jul 6, 2001	16.42	16.42	15.25	15.55
2300	NASDAQ	KLIC	Thu, Jul 5, 2001	16.69	16.80	16.19	16.54
2299	NASDAQ	KLIC	Tue, Jul 3, 2001	17.00	17.05	16.68	16.94
2298	NASDAQ	KLIC	Mon, Jul 2, 2001	17.16	17.25	16.50	17.06
2297	NASDAQ	KLIC	Fri, Jun 29, 2001	16.60	17.30	16.45	17.16
2296	NASDAQ	KLIC	Thu, Jun 28, 2001	15.82	16.64	15.81	16.53
2295	NASDAQ	KLIC	Wed, Jun 27, 2001	15.80	15.92	15.06	15.85
2294	NASDAQ	KLIC	Tue, Jun 26, 2001	14.67	15.84	14.64	15.73
2293	NASDAQ	KLIC	Mon, Jun 25, 2001	14.70	15.18	14.65	15.12
2292	NASDAQ	KLIC	Fri, Jun 22, 2001	14.48	14.92	14.15	14.45
2291	NASDAQ	KLIC	Thu, Jun 21, 2001	14.52	14.57	14.04	14.42
2290	NASDAQ	KLIC	Wed, Jun 20, 2001	13.99	14.54	13.62	14.54
2289	NASDAQ	KLIC	Tue, Jun 19, 2001	14.78	15.20	14.00	14.05
2288	NASDAQ	KLIC	Mon, Jun 18, 2001	15.08	15.40	14.62	14.75
2287	NASDAQ	KLIC	Fri, Jun 15, 2001	15.46	15.75	14.80	15.16
2286	NASDAQ	KLIC	Thu, Jun 14, 2001	16.52	16.52	15.36	15.36
2285	NASDAQ	KLIC	Wed, Jun 13, 2001	17.17	17.30	16.59	16.60
2284	NASDAQ	KLIC	Tue, Jun 12, 2001	16.03	17.19	15.60	17.11
2283	NASDAQ	KLIC	Mon, Jun 11, 2001	17.05	17.06	16.15	16.25
2282	NASDAQ	KLIC	Fri, Jun 8, 2001	17.60	17.68	17.05	17.42
2281	NASDAQ	KLIC	Thu, Jun 7, 2001	16.30	17.65	16.25	17.50
2280	NASDAQ	KLIC	Wed, Jun 6, 2001	16.22	16.67	15.95	16.56
2279	NASDAQ	KLIC	Tue, Jun 5, 2001	15.14	16.73	15.13	16.25
2278	NASDAQ	KLIC	Mon, Jun 4, 2001	15.14	15.15	14.75	15.14
2277	NASDAQ	KLIC	Fri, Jun 1, 2001	14.89	15.29	14.65	15.05
2276	NASDAQ	KLIC	Thu, May 31, 2001	14.65	15.10	14.47	14.80
2275	NASDAQ	KLIC	Wed, May 30, 2001	15.24	15.30	14.11	14.46
2274	NASDAQ	KLIC	Tue, May 29, 2001	16.93	17.00	15.50	15.59
2273	NASDAQ	KLIC	Fri, May 25, 2001	17.45	17.75	16.98	17.14
2272	NASDAQ	KLIC	Thu, May 24, 2001	16.59	17.48	15.95	17.43
2271	NASDAQ	KLIC	Wed, May 23, 2001	17.85	17.98	16.70	16.75
2270	NASDAQ	KLIC	Tue, May 22, 2001	18.31	18.70	17.25	17.99
2269	NASDAQ	KLIC	Mon, May 21, 2001	16.46	18.50	16.44	18.35
2268	NASDAQ	KLIC	Fri, May 18, 2001	16.40	17.00	16.30	16.45
2267	NASDAQ	KLIC	Thu, May 17, 2001	16.00	16.76	16.00	16.43
2266	NASDAQ	KLIC	Wed, May 16, 2001	14.90	15.99	14.88	15.87
2265	NASDAQ	KLIC	Tue, May 15, 2001	15.03	15.52	14.90	15.15
2264	NASDAQ	KLIC	Mon, May 14, 2001	15.30	15.35	14.78	15.01
2263	NASDAQ	KLIC	Fri, May 11, 2001	15.70	15.82	15.21	15.25
2262	NASDAQ	KLIC	Thu, May 10, 2001	16.40	16.50	15.41	15.80
2261	NASDAQ	KLIC	Wed, May 9, 2001	15.52	15.65	15.05	15.33
2260	NASDAQ	KLIC	Tue, May 8, 2001	15.08	16.00	15.06	15.74
2259	NASDAQ	KLIC	Mon, May 7, 2001	14.96	15.40	14.79	15.01
2258	NASDAQ	KLIC	Fri, May 4, 2001	15.10	15.11	14.51	14.82
2257	NASDAQ	KLIC	Thu, May 3, 2001	15.99	15.99	14.96	15.19
2256	NASDAQ	KLIC	Wed, May 2, 2001	15.67	16.20	15.52	16.01
2255	NASDAQ	KLIC	Tue, May 1, 2001	16.79	16.86	15.24	15.50
2254	NASDAQ	KLIC	Mon, Apr 30, 2001	16.09	17.04	16.05	16.75
2253	NASDAQ	KLIC	Fri, Apr 27, 2001	15.79	16.60	15.73	15.82
2252	NASDAQ	KLIC	Thu, Apr 26, 2001	16.21	16.32	15.60	15.76
2251	NASDAQ	KLIC	Wed, Apr 25, 2001	15.88	16.25	15.37	16.09
2250	NASDAQ	KLIC	Tue, Apr 24, 2001	15.79	16.28	15.35	15.80
2249	NASDAQ	KLIC	Mon, Apr 23, 2001	15.60	15.90	15.25	15.76
2248	NASDAQ	KLIC	Fri, Apr 20, 2001	15.50	17.20	15.50	16.96
2247	NASDAQ	KLIC	Thu, Apr 19, 2001	15.64	17.65	15.44	17.58
2246	NASDAQ	KLIC	Wed, Apr 18, 2001	14.92	16.00	14.85	15.41
2245	NASDAQ	KLIC	Tue, Apr 17, 2001	14.20	14.99	13.83	13.95
2244	NASDAQ	KLIC	Mon, Apr 16, 2001	14.90	15.15	14.22	14.80
2243	NASDAQ	KLIC	Thu, Apr 12, 2001	14.21	15.50	13.00	15.49
2242	NASDAQ	KLIC	Wed, Apr 11, 2001	14.17	14.65	13.79	14.22
2241	NASDAQ	KLIC	Tue, Apr 10, 2001	12.25	13.40	12.25	13.40
2240	NASDAQ	KLIC	Mon, Apr 9, 2001	12.60	12.75	11.90	12.39
2239	NASDAQ	KLIC	Fri, Apr 6, 2001	12.69	12.75	12.00	12.31
2238	NASDAQ	KLIC	Thu, Apr 5, 2001	12.00	13.50	11.88	13.31
2237	NASDAQ	KLIC	Wed, Apr 4, 2001	12.19	12.25	11.25	11.44
2236	NASDAQ	KLIC	Tue, Apr 3, 2001	12.13	12.38	11.56	11.94
2235	NASDAQ	KLIC	Mon, Apr 2, 2001	13.25	13.56	12.13	12.19
2234	NASDAQ	KLIC	Fri, Mar 30, 2001	14.25	14.38	13.25	13.56
2233	NASDAQ	KLIC	Thu, Mar 29, 2001	14.75	15.63	14.13	14.19
2232	NASDAQ	KLIC	Wed, Mar 28, 2001	15.50	15.63	14.69	14.84
2231	NASDAQ	KLIC	Tue, Mar 27, 2001	15.25	16.13	15.13	16.00
2230	NASDAQ	KLIC	Mon, Mar 26, 2001	14.38	15.63	14.25	15.31
2229	NASDAQ	KLIC	Fri, Mar 23, 2001	14.38	14.75	14.00	14.44
2228	NASDAQ	KLIC	Thu, Mar 22, 2001	12.75	14.38	12.63	14.00
2227	NASDAQ	KLIC	Wed, Mar 21, 2001	12.13	12.75	12.06	12.56
2226	NASDAQ	KLIC	Tue, Mar 20, 2001	13.25	13.63	12.00	12.03
2225	NASDAQ	KLIC	Mon, Mar 19, 2001	12.00	13.25	12.00	13.06
2224	NASDAQ	KLIC	Fri, Mar 16, 2001	12.94	13.13	12.00	12.13
2223	NASDAQ	KLIC	Thu, Mar 15, 2001	13.56	13.88	12.69	12.75
2222	NASDAQ	KLIC	Wed, Mar 14, 2001	12.75	13.69	12.56	13.25
2221	NASDAQ	KLIC	Tue, Mar 13, 2001	12.69	13.38	12.50	13.31
2220	NASDAQ	KLIC	Mon, Mar 12, 2001	12.63	13.06	12.31	12.44
2219	NASDAQ	KLIC	Fri, Mar 9, 2001	13.78	13.81	12.50	12.69
2218	NASDAQ	KLIC	Thu, Mar 8, 2001	13.69	14.25	13.38	14.25
2217	NASDAQ	KLIC	Wed, Mar 7, 2001	14.56	14.56	13.69	13.81
2216	NASDAQ	KLIC	Tue, Mar 6, 2001	13.50	14.88	13.44	14.25
2215	NASDAQ	KLIC	Mon, Mar 5, 2001	12.88	13.25	12.75	13.13
2214	NASDAQ	KLIC	Fri, Mar 2, 2001	11.38	13.25	11.25	12.38
2213	NASDAQ	KLIC	Thu, Mar 1, 2001	11.84	12.13	11.00	11.88
2212	NASDAQ	KLIC	Wed, Feb 28, 2001	12.38	12.50	11.50	11.50
2211	NASDAQ	KLIC	Tue, Feb 27, 2001	12.31	12.69	11.88	12.00
2210	NASDAQ	KLIC	Mon, Feb 26, 2001	12.75	13.00	12.00	12.38
2209	NASDAQ	KLIC	Fri, Feb 23, 2001	12.31	12.81	11.75	12.75
2208	NASDAQ	KLIC	Thu, Feb 22, 2001	12.25	13.00	12.00	12.75
2207	NASDAQ	KLIC	Wed, Feb 21, 2001	12.94	13.00	12.38	12.75
2206	NASDAQ	KLIC	Tue, Feb 20, 2001	14.25	14.38	13.00	13.06
2205	NASDAQ	KLIC	Fri, Feb 16, 2001	14.56	14.63	13.50	13.98
2204	NASDAQ	KLIC	Thu, Feb 15, 2001	14.97	15.31	14.88	15.00
2203	NASDAQ	KLIC	Wed, Feb 14, 2001	13.44	15.00	13.19	14.56
2202	NASDAQ	KLIC	Tue, Feb 13, 2001	14.19	14.56	13.69	13.81
2201	NASDAQ	KLIC	Mon, Feb 12, 2001	13.56	14.38	13.56	14.19
2200	NASDAQ	KLIC	Fri, Feb 9, 2001	13.88	14.19	13.63	13.69
2199	NASDAQ	KLIC	Thu, Feb 8, 2001	14.00	14.50	13.75	13.88
2198	NASDAQ	KLIC	Wed, Feb 7, 2001	14.06	14.13	13.63	14.00
2197	NASDAQ	KLIC	Tue, Feb 6, 2001	14.06	14.63	14.00	14.31
2196	NASDAQ	KLIC	Mon, Feb 5, 2001	14.75	14.81	13.75	14.25
2195	NASDAQ	KLIC	Fri, Feb 2, 2001	15.75	16.13	14.75	15.00
2194	NASDAQ	KLIC	Thu, Feb 1, 2001	16.50	16.56	15.63	15.88
2193	NASDAQ	KLIC	Wed, Jan 31, 2001	15.69	17.00	15.63	16.69
2192	NASDAQ	KLIC	Tue, Jan 30, 2001	15.69	16.31	15.63	15.63
2191	NASDAQ	KLIC	Mon, Jan 29, 2001	14.31	15.50	14.25	15.50
2190	NASDAQ	KLIC	Fri, Jan 26, 2001	15.38	15.50	14.56	14.63
2189	NASDAQ	KLIC	Thu, Jan 25, 2001	16.50	16.75	15.00	15.19
2188	NASDAQ	KLIC	Wed, Jan 24, 2001	15.94	16.38	15.69	15.94
2187	NASDAQ	KLIC	Tue, Jan 23, 2001	15.13	15.44	14.69	15.44
2186	NASDAQ	KLIC	Mon, Jan 22, 2001	15.72	15.81	15.13	15.38
2185	NASDAQ	KLIC	Fri, Jan 19, 2001	16.56	16.63	15.69	16.00
2184	NASDAQ	KLIC	Thu, Jan 18, 2001	15.88	16.50	15.50	16.50
2183	NASDAQ	KLIC	Wed, Jan 17, 2001	15.63	16.19	15.50	15.94
2182	NASDAQ	KLIC	Tue, Jan 16, 2001	14.81	15.13	14.50	14.75
2181	NASDAQ	KLIC	Fri, Jan 12, 2001	15.97	16.38	15.38	15.69
2180	NASDAQ	KLIC	Thu, Jan 11, 2001	14.69	15.94	14.31	15.94
2179	NASDAQ	KLIC	Wed, Jan 10, 2001	13.63	14.94	13.00	14.75
2178	NASDAQ	KLIC	Tue, Jan 9, 2001	13.88	14.06	13.44	13.81
2177	NASDAQ	KLIC	Mon, Jan 8, 2001	13.50	14.00	13.00	13.56
2176	NASDAQ	KLIC	Fri, Jan 5, 2001	12.63	13.31	12.63	12.81
2175	NASDAQ	KLIC	Thu, Jan 4, 2001	12.94	13.38	12.63	12.69
2174	NASDAQ	KLIC	Wed, Jan 3, 2001	11.44	13.19	11.38	13.06
2173	NASDAQ	KLIC	Tue, Jan 2, 2001	11.38	11.75	11.31	11.69
2172	NASDAQ	KLIC	Fri, Dec 29, 2000	10.94	11.50	10.81	11.25
2171	NASDAQ	KLIC	Thu, Dec 28, 2000	10.50	11.06	10.50	10.81
2170	NASDAQ	KLIC	Wed, Dec 27, 2000	10.06	10.94	10.00	10.63
2169	NASDAQ	KLIC	Tue, Dec 26, 2000	10.38	10.50	9.97	10.31
2168	NASDAQ	KLIC	Fri, Dec 22, 2000	10.19	10.56	10.00	10.38
2167	NASDAQ	KLIC	Thu, Dec 21, 2000	10.38	10.63	9.81	10.31
2166	NASDAQ	KLIC	Wed, Dec 20, 2000	10.81	11.00	10.00	10.38
2165	NASDAQ	KLIC	Tue, Dec 19, 2000	10.59	11.81	10.50	11.00
2164	NASDAQ	KLIC	Mon, Dec 18, 2000	11.25	11.31	10.63	10.81
2163	NASDAQ	KLIC	Fri, Dec 15, 2000	11.22	11.50	11.00	11.25
2162	NASDAQ	KLIC	Thu, Dec 14, 2000	11.50	11.88	11.25	11.52
2161	NASDAQ	KLIC	Wed, Dec 13, 2000	11.66	11.88	11.25	11.56
2160	NASDAQ	KLIC	Tue, Dec 12, 2000	11.31	11.94	10.88	11.69
2159	NASDAQ	KLIC	Mon, Dec 11, 2000	11.00	11.75	10.63	11.63
2158	NASDAQ	KLIC	Fri, Dec 8, 2000	9.78	11.06	9.78	10.88
2157	NASDAQ	KLIC	Thu, Dec 7, 2000	9.63	9.69	9.25	9.44
2156	NASDAQ	KLIC	Wed, Dec 6, 2000	10.38	10.69	9.63	9.88
2155	NASDAQ	KLIC	Tue, Dec 5, 2000	9.67	10.19	9.38	10.19
2154	NASDAQ	KLIC	Mon, Dec 4, 2000	9.22	9.38	9.00	9.09
2153	NASDAQ	KLIC	Fri, Dec 1, 2000	9.56	9.81	9.00	9.25
2152	NASDAQ	KLIC	Thu, Nov 30, 2000	9.25	9.81	9.00	9.34
2151	NASDAQ	KLIC	Wed, Nov 29, 2000	10.06	10.13	9.50	9.66
2150	NASDAQ	KLIC	Tue, Nov 28, 2000	10.41	10.44	9.88	9.88
2149	NASDAQ	KLIC	Mon, Nov 27, 2000	11.00	11.13	10.38	10.38
2148	NASDAQ	KLIC	Fri, Nov 24, 2000	10.75	10.94	10.63	10.81
2147	NASDAQ	KLIC	Wed, Nov 22, 2000	10.56	11.00	10.38	10.50
2146	NASDAQ	KLIC	Tue, Nov 21, 2000	10.69	11.06	10.50	10.50
2145	NASDAQ	KLIC	Mon, Nov 20, 2000	10.88	11.00	10.50	10.63
2144	NASDAQ	KLIC	Fri, Nov 17, 2000	11.44	11.50	10.80	11.00
2143	NASDAQ	KLIC	Thu, Nov 16, 2000	11.69	12.13	11.44	11.56
2142	NASDAQ	KLIC	Wed, Nov 15, 2000	11.31	11.56	10.88	11.19
2141	NASDAQ	KLIC	Tue, Nov 14, 2000	11.00	11.63	10.88	11.25
2140	NASDAQ	KLIC	Mon, Nov 13, 2000	10.28	11.38	10.13	11.19
2139	NASDAQ	KLIC	Fri, Nov 10, 2000	10.81	10.88	10.38	10.38
2138	NASDAQ	KLIC	Thu, Nov 9, 2000	10.88	11.19	10.63	10.94
2137	NASDAQ	KLIC	Wed, Nov 8, 2000	11.22	11.31	10.88	10.88
2136	NASDAQ	KLIC	Tue, Nov 7, 2000	11.69	11.69	11.25	11.38
2135	NASDAQ	KLIC	Mon, Nov 6, 2000	11.50	12.38	11.50	11.75
2134	NASDAQ	KLIC	Fri, Nov 3, 2000	11.44	12.38	10.88	11.75
2133	NASDAQ	KLIC	Thu, Nov 2, 2000	14.94	15.38	14.75	14.88
2132	NASDAQ	KLIC	Wed, Nov 1, 2000	14.13	14.56	13.75	14.31
2131	NASDAQ	KLIC	Tue, Oct 31, 2000	13.38	15.00	13.38	14.69
2130	NASDAQ	KLIC	Mon, Oct 30, 2000	12.72	13.75	12.69	13.56
2129	NASDAQ	KLIC	Fri, Oct 27, 2000	13.63	13.75	12.56	12.69
2128	NASDAQ	KLIC	Thu, Oct 26, 2000	12.81	13.25	12.25	13.13
2127	NASDAQ	KLIC	Wed, Oct 25, 2000	13.22	13.44	12.50	12.50
2126	NASDAQ	KLIC	Tue, Oct 24, 2000	14.50	14.50	13.44	13.56
2125	NASDAQ	KLIC	Mon, Oct 23, 2000	13.81	14.75	13.75	14.50
2124	NASDAQ	KLIC	Fri, Oct 20, 2000	13.97	14.31	13.81	14.00
2123	NASDAQ	KLIC	Thu, Oct 19, 2000	12.94	14.42	12.75	14.38
2122	NASDAQ	KLIC	Wed, Oct 18, 2000	10.75	13.00	10.69	12.00
2121	NASDAQ	KLIC	Tue, Oct 17, 2000	13.06	13.25	11.19	11.81
2120	NASDAQ	KLIC	Mon, Oct 16, 2000	13.88	13.88	13.00	13.13
2119	NASDAQ	KLIC	Fri, Oct 13, 2000	12.75	13.81	12.63	13.69
2118	NASDAQ	KLIC	Thu, Oct 12, 2000	13.31	13.44	12.63	12.69
2117	NASDAQ	KLIC	Wed, Oct 11, 2000	13.06	13.44	12.63	13.00
2116	NASDAQ	KLIC	Tue, Oct 10, 2000	13.97	14.00	12.75	12.94
2115	NASDAQ	KLIC	Mon, Oct 9, 2000	12.75	14.19	12.75	13.69
2114	NASDAQ	KLIC	Fri, Oct 6, 2000	13.75	13.94	13.13	13.25
2113	NASDAQ	KLIC	Thu, Oct 5, 2000	14.19	14.25	13.56	13.69
2112	NASDAQ	KLIC	Wed, Oct 4, 2000	13.00	14.38	12.63	14.00
2111	NASDAQ	KLIC	Tue, Oct 3, 2000	13.25	13.63	12.63	12.75
2110	NASDAQ	KLIC	Mon, Oct 2, 2000	13.56	13.94	13.00	13.19
2109	NASDAQ	KLIC	Fri, Sep 29, 2000	14.00	14.00	13.25	13.31
2108	NASDAQ	KLIC	Thu, Sep 28, 2000	13.31	14.13	13.13	14.00
2107	NASDAQ	KLIC	Wed, Sep 27, 2000	14.00	14.13	13.19	13.38
2106	NASDAQ	KLIC	Tue, Sep 26, 2000	14.06	14.25	13.50	13.56
2105	NASDAQ	KLIC	Mon, Sep 25, 2000	14.88	15.00	13.81	13.88
2104	NASDAQ	KLIC	Fri, Sep 22, 2000	14.25	14.50	13.50	14.44
2103	NASDAQ	KLIC	Thu, Sep 21, 2000	15.38	15.38	14.53	14.81
2102	NASDAQ	KLIC	Wed, Sep 20, 2000	15.88	15.88	14.81	15.44
2101	NASDAQ	KLIC	Tue, Sep 19, 2000	14.75	15.88	14.63	15.63
2100	NASDAQ	KLIC	Mon, Sep 18, 2000	14.88	15.00	14.50	14.56
2099	NASDAQ	KLIC	Fri, Sep 15, 2000	15.25	15.25	14.50	14.63
2098	NASDAQ	KLIC	Thu, Sep 14, 2000	15.63	15.63	15.00	15.06
2097	NASDAQ	KLIC	Wed, Sep 13, 2000	15.50	15.56	14.94	15.00
2096	NASDAQ	KLIC	Tue, Sep 12, 2000	16.59	16.63	15.13	15.31
2095	NASDAQ	KLIC	Mon, Sep 11, 2000	16.50	17.25	16.25	16.50
2094	NASDAQ	KLIC	Fri, Sep 8, 2000	17.19	17.19	15.52	15.69
2093	NASDAQ	KLIC	Thu, Sep 7, 2000	16.56	17.19	16.25	17.06
2092	NASDAQ	KLIC	Wed, Sep 6, 2000	16.94	16.94	16.31	16.38
2091	NASDAQ	KLIC	Tue, Sep 5, 2000	18.31	18.44	16.50	16.63
2090	NASDAQ	KLIC	Fri, Sep 1, 2000	18.56	18.88	18.19	18.44
2089	NASDAQ	KLIC	Thu, Aug 31, 2000	19.03	19.13	18.00	18.19
2088	NASDAQ	KLIC	Wed, Aug 30, 2000	19.06	19.06	18.50	18.69
2087	NASDAQ	KLIC	Tue, Aug 29, 2000	19.16	19.25	18.44	19.06
2086	NASDAQ	KLIC	Mon, Aug 28, 2000	18.94	19.19	18.69	19.06
2085	NASDAQ	KLIC	Fri, Aug 25, 2000	19.19	19.19	18.25	18.75
2084	NASDAQ	KLIC	Thu, Aug 24, 2000	19.72	19.75	18.69	19.00
2083	NASDAQ	KLIC	Wed, Aug 23, 2000	18.00	19.50	17.88	19.38
2082	NASDAQ	KLIC	Tue, Aug 22, 2000	18.94	18.94	17.81	17.88
2081	NASDAQ	KLIC	Mon, Aug 21, 2000	18.97	19.38	17.38	17.69
2080	NASDAQ	KLIC	Fri, Aug 18, 2000	17.00	18.20	16.81	17.88
2079	NASDAQ	KLIC	Thu, Aug 17, 2000	16.25	16.88	16.13	16.69
2078	NASDAQ	KLIC	Wed, Aug 16, 2000	16.31	16.88	15.94	16.13
2077	NASDAQ	KLIC	Tue, Aug 15, 2000	16.81	17.13	16.00	16.19
2076	NASDAQ	KLIC	Mon, Aug 14, 2000	15.09	16.69	15.06	16.56
2075	NASDAQ	KLIC	Fri, Aug 11, 2000	15.13	15.19	14.50	15.13
2074	NASDAQ	KLIC	Thu, Aug 10, 2000	15.72	15.88	15.00	15.19
2073	NASDAQ	KLIC	Wed, Aug 9, 2000	16.06	16.06	15.38	15.56
2072	NASDAQ	KLIC	Tue, Aug 8, 2000	15.88	15.88	15.13	15.44
2071	NASDAQ	KLIC	Mon, Aug 7, 2000	17.00	17.19	15.69	15.88
2070	NASDAQ	KLIC	Fri, Aug 4, 2000	17.19	17.75	15.63	16.50
2069	NASDAQ	KLIC	Thu, Aug 3, 2000	14.25	17.00	13.56	16.63
2068	NASDAQ	KLIC	Wed, Aug 2, 2000	22.25	23.00	21.44	22.13
2067	NASDAQ	KLIC	Tue, Aug 1, 2000	22.88	22.88	21.75	22.13
2066	NASDAQ	KLIC	Mon, Jul 31, 2000	22.69	23.03	22.00	22.56
2065	NASDAQ	KLIC	Fri, Jul 28, 2000	22.23	23.41	21.25	22.22
2064	NASDAQ	KLIC	Thu, Jul 27, 2000	23.97	24.00	21.25	21.59
2063	NASDAQ	KLIC	Wed, Jul 26, 2000	24.31	24.50	22.16	24.22
2062	NASDAQ	KLIC	Tue, Jul 25, 2000	25.00	25.25	23.84	24.25
2061	NASDAQ	KLIC	Mon, Jul 24, 2000	23.78	25.20	23.38	24.25
2060	NASDAQ	KLIC	Fri, Jul 21, 2000	26.39	26.41	23.03	23.38
2059	NASDAQ	KLIC	Thu, Jul 20, 2000	30.38	30.75	26.00	26.25
2058	NASDAQ	KLIC	Wed, Jul 19, 2000	30.81	30.81	28.50	28.97
2057	NASDAQ	KLIC	Tue, Jul 18, 2000	32.47	32.56	30.25	30.81
2056	NASDAQ	KLIC	Mon, Jul 17, 2000	32.22	33.13	31.94	32.53
2055	NASDAQ	KLIC	Fri, Jul 14, 2000	30.50	32.19	30.34	32.09
2054	NASDAQ	KLIC	Thu, Jul 13, 2000	29.94	30.38	29.25	30.03
2053	NASDAQ	KLIC	Wed, Jul 12, 2000	29.06	30.00	28.88	29.72
2052	NASDAQ	KLIC	Tue, Jul 11, 2000	29.13	29.75	28.31	28.38
2051	NASDAQ	KLIC	Mon, Jul 10, 2000	27.94	29.44	27.91	29.13
2050	NASDAQ	KLIC	Fri, Jul 7, 2000	27.81	28.50	27.44	27.56
2049	NASDAQ	KLIC	Thu, Jul 6, 2000	26.97	27.63	26.50	27.50
2048	NASDAQ	KLIC	Wed, Jul 5, 2000	29.75	29.88	26.00	26.22
2047	NASDAQ	KLIC	Mon, Jul 3, 2000	29.55	30.44	29.50	30.41
2046	NASDAQ	KLIC	Fri, Jun 30, 2000	29.48	30.03	29.13	29.69
2045	NASDAQ	KLIC	Thu, Jun 29, 2000	29.84	30.06	29.00	29.34
2044	NASDAQ	KLIC	Wed, Jun 28, 2000	28.94	31.44	28.81	30.41
2043	NASDAQ	KLIC	Tue, Jun 27, 2000	30.63	31.31	28.31	28.75
2042	NASDAQ	KLIC	Mon, Jun 26, 2000	31.64	31.72	29.63	30.00
2041	NASDAQ	KLIC	Fri, Jun 23, 2000	31.75	32.63	31.28	31.31
2040	NASDAQ	KLIC	Thu, Jun 22, 2000	33.16	33.63	31.50	31.72
2039	NASDAQ	KLIC	Wed, Jun 21, 2000	33.64	35.06	32.41	33.22
2038	NASDAQ	KLIC	Tue, Jun 20, 2000	32.59	34.38	32.56	34.34
2037	NASDAQ	KLIC	Mon, Jun 19, 2000	29.38	32.81	29.38	32.75
2036	NASDAQ	KLIC	Fri, Jun 16, 2000	29.55	31.56	29.31	29.94
2035	NASDAQ	KLIC	Thu, Jun 15, 2000	28.34	29.56	28.06	29.13
2034	NASDAQ	KLIC	Wed, Jun 14, 2000	29.25	29.84	28.00	28.00
2033	NASDAQ	KLIC	Tue, Jun 13, 2000	28.19	28.88	27.22	28.75
2032	NASDAQ	KLIC	Mon, Jun 12, 2000	29.50	29.63	28.25	28.63
2031	NASDAQ	KLIC	Fri, Jun 9, 2000	29.75	29.97	29.16	29.34
2030	NASDAQ	KLIC	Thu, Jun 8, 2000	28.78	29.63	28.77	28.84
2029	NASDAQ	KLIC	Wed, Jun 7, 2000	28.34	28.94	27.91	28.53
2028	NASDAQ	KLIC	Tue, Jun 6, 2000	28.81	30.16	27.63	27.91
2027	NASDAQ	KLIC	Mon, Jun 5, 2000	29.53	30.06	28.06	28.53
2026	NASDAQ	KLIC	Fri, Jun 2, 2000	27.50	29.63	27.50	29.19
2025	NASDAQ	KLIC	Thu, Jun 1, 2000	25.53	27.25	25.53	27.00
2024	NASDAQ	KLIC	Wed, May 31, 2000	24.59	27.00	24.38	25.16
2023	NASDAQ	KLIC	Tue, May 30, 2000	22.06	24.94	22.03	24.38
2022	NASDAQ	KLIC	Fri, May 26, 2000	22.00	22.69	21.22	21.81
2021	NASDAQ	KLIC	Thu, May 25, 2000	23.75	24.75	21.63	21.94
2020	NASDAQ	KLIC	Wed, May 24, 2000	21.88	23.56	19.94	23.56
2019	NASDAQ	KLIC	Tue, May 23, 2000	22.09	23.00	21.75	21.94
2018	NASDAQ	KLIC	Mon, May 22, 2000	23.78	23.84	20.84	22.75
2017	NASDAQ	KLIC	Fri, May 19, 2000	26.09	26.09	23.69	24.22
2016	NASDAQ	KLIC	Thu, May 18, 2000	28.50	28.50	26.00	26.00
2015	NASDAQ	KLIC	Wed, May 17, 2000	28.22	29.38	28.00	28.25
2014	NASDAQ	KLIC	Tue, May 16, 2000	28.50	29.21	27.84	28.50
2013	NASDAQ	KLIC	Mon, May 15, 2000	28.72	28.75	26.38	27.84
2012	NASDAQ	KLIC	Fri, May 12, 2000	29.19	30.31	28.03	28.69
2011	NASDAQ	KLIC	Thu, May 11, 2000	28.50	29.00	27.00	28.63
2010	NASDAQ	KLIC	Wed, May 10, 2000	30.31	30.31	26.75	27.56
2009	NASDAQ	KLIC	Tue, May 9, 2000	32.38	33.19	29.38	30.34
2008	NASDAQ	KLIC	Mon, May 8, 2000	33.78	34.25	32.00	32.16
2007	NASDAQ	KLIC	Fri, May 5, 2000	33.47	35.44	33.25	34.34
2006	NASDAQ	KLIC	Thu, May 4, 2000	33.75	35.75	32.75	33.75
2005	NASDAQ	KLIC	Wed, May 3, 2000	37.09	37.19	32.00	33.72
2004	NASDAQ	KLIC	Tue, May 2, 2000	39.25	40.22	38.06	38.41
2003	NASDAQ	KLIC	Mon, May 1, 2000	39.75	40.31	39.31	39.56
2002	NASDAQ	KLIC	Fri, Apr 28, 2000	38.84	40.25	38.75	39.16
2001	NASDAQ	KLIC	Thu, Apr 27, 2000	35.19	39.13	34.97	38.59
2000	NASDAQ	KLIC	Wed, Apr 26, 2000	38.81	39.25	36.00	37.13
1999	NASDAQ	KLIC	Tue, Apr 25, 2000	35.16	38.50	35.13	38.50
1998	NASDAQ	KLIC	Mon, Apr 24, 2000	35.56	35.56	33.38	35.00
1997	NASDAQ	KLIC	Thu, Apr 20, 2000	37.94	38.34	35.59	37.31
1996	NASDAQ	KLIC	Wed, Apr 19, 2000	35.88	38.50	34.75	38.44
1995	NASDAQ	KLIC	Tue, Apr 18, 2000	33.13	36.09	31.63	36.09
1994	NASDAQ	KLIC	Mon, Apr 17, 2000	25.75	32.50	25.25	32.03
1993	NASDAQ	KLIC	Fri, Apr 14, 2000	31.03	32.72	28.38	28.78
1992	NASDAQ	KLIC	Thu, Apr 13, 2000	32.31	34.63	31.69	32.50
1991	NASDAQ	KLIC	Wed, Apr 12, 2000	32.00	32.94	30.75	32.06
1990	NASDAQ	KLIC	Tue, Apr 11, 2000	29.78	32.31	28.00	31.19
1989	NASDAQ	KLIC	Mon, Apr 10, 2000	32.94	33.34	30.00	30.16
1988	NASDAQ	KLIC	Fri, Apr 7, 2000	31.31	33.44	30.97	33.22
1987	NASDAQ	KLIC	Thu, Apr 6, 2000	30.50	31.44	30.00	30.50
1986	NASDAQ	KLIC	Wed, Apr 5, 2000	27.31	30.66	26.50	29.59
1985	NASDAQ	KLIC	Tue, Apr 4, 2000	28.00	29.25	21.50	27.91
1984	NASDAQ	KLIC	Mon, Apr 3, 2000	30.50	31.59	28.00	28.28
1983	NASDAQ	KLIC	Fri, Mar 31, 2000	32.53	33.97	31.16	32.03
1982	NASDAQ	KLIC	Thu, Mar 30, 2000	32.50	33.56	31.75	32.22
1981	NASDAQ	KLIC	Wed, Mar 29, 2000	36.56	36.63	33.25	33.59
1980	NASDAQ	KLIC	Tue, Mar 28, 2000	38.25	38.88	35.63	36.44
1979	NASDAQ	KLIC	Mon, Mar 27, 2000	39.56	40.00	37.88	38.03
1978	NASDAQ	KLIC	Fri, Mar 24, 2000	38.63	39.75	38.59	39.00
1977	NASDAQ	KLIC	Thu, Mar 23, 2000	37.97	39.00	37.69	38.06
1976	NASDAQ	KLIC	Wed, Mar 22, 2000	36.53	38.16	36.38	38.00
1975	NASDAQ	KLIC	Tue, Mar 21, 2000	34.81	37.50	33.75	36.63
1974	NASDAQ	KLIC	Mon, Mar 20, 2000	36.22	37.44	34.50	34.81
1973	NASDAQ	KLIC	Fri, Mar 17, 2000	35.31	36.00	33.56	35.31
1972	NASDAQ	KLIC	Thu, Mar 16, 2000	36.13	36.91	32.75	35.00
1971	NASDAQ	KLIC	Wed, Mar 15, 2000	37.19	37.19	34.19	35.94
1970	NASDAQ	KLIC	Tue, Mar 14, 2000	40.25	41.31	36.81	37.09
1969	NASDAQ	KLIC	Mon, Mar 13, 2000	40.00	41.13	39.13	40.09
1968	NASDAQ	KLIC	Fri, Mar 10, 2000	41.34	42.88	40.88	41.44
1967	NASDAQ	KLIC	Thu, Mar 9, 2000	39.84	41.88	39.84	41.75
1966	NASDAQ	KLIC	Wed, Mar 8, 2000	41.13	41.25	38.50	40.09
1965	NASDAQ	KLIC	Tue, Mar 7, 2000	43.38	43.66	40.84	41.09
1964	NASDAQ	KLIC	Mon, Mar 6, 2000	41.63	43.44	41.50	43.00
1963	NASDAQ	KLIC	Fri, Mar 3, 2000	39.63	41.25	39.63	41.22
1962	NASDAQ	KLIC	Thu, Mar 2, 2000	40.38	41.00	38.56	39.50
1961	NASDAQ	KLIC	Wed, Mar 1, 2000	40.03	42.63	39.78	40.16
1960	NASDAQ	KLIC	Tue, Feb 29, 2000	37.50	40.47	37.48	39.75
1959	NASDAQ	KLIC	Mon, Feb 28, 2000	36.78	37.53	35.00	37.50
1958	NASDAQ	KLIC	Fri, Feb 25, 2000	37.50	37.88	36.25	36.63
1957	NASDAQ	KLIC	Thu, Feb 24, 2000	37.31	38.94	36.44	37.28
1956	NASDAQ	KLIC	Wed, Feb 23, 2000	35.69	37.47	35.41	36.94
1955	NASDAQ	KLIC	Tue, Feb 22, 2000	35.13	36.19	32.88	35.38
1954	NASDAQ	KLIC	Fri, Feb 18, 2000	34.25	34.55	33.28	33.53
1953	NASDAQ	KLIC	Thu, Feb 17, 2000	34.06	34.81	32.94	34.50
1952	NASDAQ	KLIC	Wed, Feb 16, 2000	34.13	35.25	33.22	33.28
1951	NASDAQ	KLIC	Tue, Feb 15, 2000	32.75	33.81	32.56	33.78
1950	NASDAQ	KLIC	Mon, Feb 14, 2000	33.25	33.81	32.09	32.69
1949	NASDAQ	KLIC	Fri, Feb 11, 2000	34.50	34.75	33.00	33.03
1948	NASDAQ	KLIC	Thu, Feb 10, 2000	32.75	35.06	32.50	35.06
1947	NASDAQ	KLIC	Wed, Feb 9, 2000	32.22	33.00	31.50	32.94
1946	NASDAQ	KLIC	Tue, Feb 8, 2000	32.47	32.50	31.56	32.06
1945	NASDAQ	KLIC	Mon, Feb 7, 2000	30.97	32.06	30.56	31.97
1944	NASDAQ	KLIC	Fri, Feb 4, 2000	30.41	31.06	30.19	30.50
1943	NASDAQ	KLIC	Thu, Feb 3, 2000	28.84	29.88	28.28	29.63
1942	NASDAQ	KLIC	Wed, Feb 2, 2000	28.22	29.69	27.88	28.50
1941	NASDAQ	KLIC	Tue, Feb 1, 2000	26.50	28.19	25.25	28.13
1940	NASDAQ	KLIC	Mon, Jan 31, 2000	27.02	27.19	24.16	26.16
1939	NASDAQ	KLIC	Fri, Jan 28, 2000	27.13	28.00	26.63	26.63
1938	NASDAQ	KLIC	Thu, Jan 27, 2000	27.38	28.69	27.00	27.25
1937	NASDAQ	KLIC	Wed, Jan 26, 2000	28.09	28.47	26.69	27.22
1936	NASDAQ	KLIC	Tue, Jan 25, 2000	27.94	28.50	26.75	28.38
1935	NASDAQ	KLIC	Mon, Jan 24, 2000	28.00	29.69	27.63	27.69
1934	NASDAQ	KLIC	Fri, Jan 21, 2000	29.44	29.50	27.78	28.00
1933	NASDAQ	KLIC	Thu, Jan 20, 2000	29.63	30.06	29.13	29.25
1932	NASDAQ	KLIC	Wed, Jan 19, 2000	30.19	30.25	28.56	29.63
1931	NASDAQ	KLIC	Tue, Jan 18, 2000	26.56	31.25	26.53	30.41
1930	NASDAQ	KLIC	Fri, Jan 14, 2000	25.97	26.88	25.69	25.97
1929	NASDAQ	KLIC	Thu, Jan 13, 2000	24.47	25.75	24.41	25.56
1928	NASDAQ	KLIC	Wed, Jan 12, 2000	23.50	24.63	23.44	24.25
1927	NASDAQ	KLIC	Tue, Jan 11, 2000	23.94	24.88	23.63	23.78
1926	NASDAQ	KLIC	Mon, Jan 10, 2000	24.13	25.69	24.00	24.09
1925	NASDAQ	KLIC	Fri, Jan 7, 2000	21.75	23.63	21.50	23.63
1924	NASDAQ	KLIC	Thu, Jan 6, 2000	20.97	21.63	20.56	21.34
1923	NASDAQ	KLIC	Wed, Jan 5, 2000	21.53	21.81	20.75	20.97
1922	NASDAQ	KLIC	Tue, Jan 4, 2000	21.84	22.34	21.00	21.47
1921	NASDAQ	KLIC	Mon, Jan 3, 2000	21.75	21.75	19.59	20.78
1920	NASDAQ	KLIC	Fri, Dec 31, 1999	21.06	21.75	21.00	21.28
1919	NASDAQ	KLIC	Thu, Dec 30, 1999	20.50	21.22	20.44	20.97
1918	NASDAQ	KLIC	Wed, Dec 29, 1999	20.75	20.78	20.13	20.50
1917	NASDAQ	KLIC	Tue, Dec 28, 1999	20.50	21.75	20.38	20.72
1916	NASDAQ	KLIC	Mon, Dec 27, 1999	21.16	21.19	20.03	20.66
1915	NASDAQ	KLIC	Thu, Dec 23, 1999	21.47	21.72	21.00	21.03
1914	NASDAQ	KLIC	Wed, Dec 22, 1999	21.69	21.94	20.88	21.50
1913	NASDAQ	KLIC	Tue, Dec 21, 1999	20.22	22.63	20.00	22.44
1912	NASDAQ	KLIC	Mon, Dec 20, 1999	18.00	20.06	17.94	19.75
1911	NASDAQ	KLIC	Fri, Dec 17, 1999	17.94	18.19	17.60	17.81
1910	NASDAQ	KLIC	Thu, Dec 16, 1999	16.53	17.50	16.53	17.41
1909	NASDAQ	KLIC	Wed, Dec 15, 1999	17.16	17.16	15.75	16.50
1908	NASDAQ	KLIC	Tue, Dec 14, 1999	18.09	18.09	17.25	17.28
1907	NASDAQ	KLIC	Mon, Dec 13, 1999	18.31	18.38	18.06	18.13
1906	NASDAQ	KLIC	Fri, Dec 10, 1999	18.50	18.53	17.88	18.34
1905	NASDAQ	KLIC	Thu, Dec 9, 1999	18.53	18.75	18.31	18.44
1904	NASDAQ	KLIC	Wed, Dec 8, 1999	18.38	19.00	18.38	18.50
1903	NASDAQ	KLIC	Tue, Dec 7, 1999	18.22	18.22	17.81	18.03
1902	NASDAQ	KLIC	Mon, Dec 6, 1999	18.44	18.56	17.84	18.16
1901	NASDAQ	KLIC	Fri, Dec 3, 1999	18.94	19.25	18.44	18.59
1900	NASDAQ	KLIC	Thu, Dec 2, 1999	17.88	18.88	17.75	18.69
1899	NASDAQ	KLIC	Wed, Dec 1, 1999	17.63	18.06	17.38	17.88
1898	NASDAQ	KLIC	Tue, Nov 30, 1999	17.88	18.50	17.63	17.84
1897	NASDAQ	KLIC	Mon, Nov 29, 1999	19.06	19.13	18.00	18.13
1896	NASDAQ	KLIC	Fri, Nov 26, 1999	18.69	19.69	18.63	19.13
1895	NASDAQ	KLIC	Wed, Nov 24, 1999	18.03	18.88	17.81	18.75
1894	NASDAQ	KLIC	Tue, Nov 23, 1999	18.69	19.16	17.88	18.03
1893	NASDAQ	KLIC	Mon, Nov 22, 1999	19.75	19.84	18.44	18.72
1892	NASDAQ	KLIC	Fri, Nov 19, 1999	19.28	20.13	19.00	19.72
1891	NASDAQ	KLIC	Thu, Nov 18, 1999	20.25	20.25	18.88	19.16
1890	NASDAQ	KLIC	Wed, Nov 17, 1999	19.41	21.09	19.38	20.28
1889	NASDAQ	KLIC	Tue, Nov 16, 1999	19.00	19.00	18.25	18.88
1888	NASDAQ	KLIC	Mon, Nov 15, 1999	18.47	18.50	17.44	17.78
1887	NASDAQ	KLIC	Fri, Nov 12, 1999	18.88	18.97	18.25	18.50
1886	NASDAQ	KLIC	Thu, Nov 11, 1999	18.81	19.00	18.41	18.91
1885	NASDAQ	KLIC	Wed, Nov 10, 1999	18.81	19.09	18.31	18.63
1884	NASDAQ	KLIC	Tue, Nov 9, 1999	18.25	19.38	18.19	19.13
1883	NASDAQ	KLIC	Mon, Nov 8, 1999	17.16	17.88	17.00	17.47
1882	NASDAQ	KLIC	Fri, Nov 5, 1999	16.03	18.16	16.03	17.28
1881	NASDAQ	KLIC	Thu, Nov 4, 1999	16.36	16.41	15.63	16.00
1880	NASDAQ	KLIC	Wed, Nov 3, 1999	16.22	16.56	15.88	16.09
1879	NASDAQ	KLIC	Tue, Nov 2, 1999	15.00	16.16	14.97	16.13
1878	NASDAQ	KLIC	Mon, Nov 1, 1999	14.75	14.88	14.38	14.88
1877	NASDAQ	KLIC	Fri, Oct 29, 1999	14.22	14.94	14.22	14.72
1876	NASDAQ	KLIC	Thu, Oct 28, 1999	12.84	13.88	12.78	13.83
1875	NASDAQ	KLIC	Wed, Oct 27, 1999	12.70	12.75	12.41	12.56
1874	NASDAQ	KLIC	Tue, Oct 26, 1999	12.63	13.06	12.50	12.56
1873	NASDAQ	KLIC	Mon, Oct 25, 1999	12.22	12.63	12.03	12.50
1872	NASDAQ	KLIC	Fri, Oct 22, 1999	12.00	12.25	11.88	12.00
1871	NASDAQ	KLIC	Thu, Oct 21, 1999	11.97	11.97	11.50	11.81
1870	NASDAQ	KLIC	Wed, Oct 20, 1999	12.31	12.50	11.75	12.00
1869	NASDAQ	KLIC	Tue, Oct 19, 1999	12.44	12.69	11.97	12.19
1868	NASDAQ	KLIC	Mon, Oct 18, 1999	12.50	12.72	12.03	12.25
1867	NASDAQ	KLIC	Fri, Oct 15, 1999	12.44	12.91	12.38	12.66
1866	NASDAQ	KLIC	Thu, Oct 14, 1999	13.06	13.19	12.84	12.97
1865	NASDAQ	KLIC	Wed, Oct 13, 1999	13.81	13.81	12.63	12.88
1864	NASDAQ	KLIC	Tue, Oct 12, 1999	14.00	14.66	13.97	14.00
1863	NASDAQ	KLIC	Mon, Oct 11, 1999	13.25	13.84	13.19	13.69
1862	NASDAQ	KLIC	Fri, Oct 8, 1999	13.09	13.22	12.53	13.22
1861	NASDAQ	KLIC	Thu, Oct 7, 1999	13.22	13.22	12.44	12.50
1860	NASDAQ	KLIC	Wed, Oct 6, 1999	12.75	13.31	12.75	13.06
1859	NASDAQ	KLIC	Tue, Oct 5, 1999	12.47	13.00	12.47	12.69
1858	NASDAQ	KLIC	Mon, Oct 4, 1999	12.27	12.59	12.13	12.50
1857	NASDAQ	KLIC	Fri, Oct 1, 1999	12.28	12.66	12.16	12.17
1856	NASDAQ	KLIC	Thu, Sep 30, 1999	12.64	12.66	12.09	12.16
1855	NASDAQ	KLIC	Wed, Sep 29, 1999	12.81	12.97	12.56	12.69
1854	NASDAQ	KLIC	Tue, Sep 28, 1999	12.06	13.00	11.88	12.94
1853	NASDAQ	KLIC	Mon, Sep 27, 1999	11.69	12.38	11.50	12.13
1852	NASDAQ	KLIC	Fri, Sep 24, 1999	12.06	12.13	11.28	11.47
1851	NASDAQ	KLIC	Thu, Sep 23, 1999	13.22	13.25	12.03	12.06
1850	NASDAQ	KLIC	Wed, Sep 22, 1999	13.25	13.38	12.88	13.16
1849	NASDAQ	KLIC	Tue, Sep 21, 1999	13.38	13.50	13.09	13.25
1848	NASDAQ	KLIC	Mon, Sep 20, 1999	13.41	13.56	13.06	13.31
1847	NASDAQ	KLIC	Fri, Sep 17, 1999	13.50	13.63	13.25	13.41
1846	NASDAQ	KLIC	Thu, Sep 16, 1999	12.88	13.44	12.81	13.34
1845	NASDAQ	KLIC	Wed, Sep 15, 1999	12.63	13.31	12.59	12.88
1844	NASDAQ	KLIC	Tue, Sep 14, 1999	11.50	12.53	11.47	12.50
1843	NASDAQ	KLIC	Mon, Sep 13, 1999	12.00	12.00	11.19	11.28
1842	NASDAQ	KLIC	Fri, Sep 10, 1999	11.50	11.94	11.50	11.78
1841	NASDAQ	KLIC	Thu, Sep 9, 1999	11.25	11.38	11.06	11.38
1840	NASDAQ	KLIC	Wed, Sep 8, 1999	11.34	11.63	11.13	11.25
1839	NASDAQ	KLIC	Tue, Sep 7, 1999	11.16	11.56	11.13	11.41
1838	NASDAQ	KLIC	Fri, Sep 3, 1999	10.34	11.25	10.34	11.16
1837	NASDAQ	KLIC	Thu, Sep 2, 1999	10.03	10.25	9.91	10.13
1836	NASDAQ	KLIC	Wed, Sep 1, 1999	10.34	10.63	10.13	10.31
1835	NASDAQ	KLIC	Tue, Aug 31, 1999	10.25	10.38	9.56	10.28
1834	NASDAQ	KLIC	Mon, Aug 30, 1999	11.00	11.22	10.19	10.28
1833	NASDAQ	KLIC	Fri, Aug 27, 1999	11.47	11.63	11.09	11.16
1832	NASDAQ	KLIC	Thu, Aug 26, 1999	11.56	11.75	11.31	11.34
1831	NASDAQ	KLIC	Wed, Aug 25, 1999	11.97	12.19	11.66	11.75
1830	NASDAQ	KLIC	Tue, Aug 24, 1999	11.86	12.13	11.69	11.88
1829	NASDAQ	KLIC	Mon, Aug 23, 1999	11.56	11.97	11.50	11.88
1828	NASDAQ	KLIC	Fri, Aug 20, 1999	11.44	11.75	11.38	11.69
1827	NASDAQ	KLIC	Thu, Aug 19, 1999	11.66	11.66	11.13	11.44
1826	NASDAQ	KLIC	Wed, Aug 18, 1999	12.31	12.36	11.59	11.69
1825	NASDAQ	KLIC	Tue, Aug 17, 1999	12.47	12.56	12.19	12.41
1824	NASDAQ	KLIC	Mon, Aug 16, 1999	12.69	12.97	12.34	12.44
1823	NASDAQ	KLIC	Fri, Aug 13, 1999	13.09	13.19	12.53	12.69
1822	NASDAQ	KLIC	Thu, Aug 12, 1999	13.63	13.63	12.91	12.97
1821	NASDAQ	KLIC	Wed, Aug 11, 1999	12.63	13.56	12.56	13.56
1820	NASDAQ	KLIC	Tue, Aug 10, 1999	12.69	13.09	12.25	12.50
1819	NASDAQ	KLIC	Mon, Aug 9, 1999	12.53	13.19	12.53	12.72
1818	NASDAQ	KLIC	Fri, Aug 6, 1999	12.31	12.88	12.31	12.47
1817	NASDAQ	KLIC	Thu, Aug 5, 1999	12.25	12.50	12.13	12.31
1816	NASDAQ	KLIC	Wed, Aug 4, 1999	12.44	12.81	12.25	12.28
1815	NASDAQ	KLIC	Tue, Aug 3, 1999	12.63	12.69	12.34	12.69
1814	NASDAQ	KLIC	Mon, Aug 2, 1999	12.19	12.75	12.19	12.63
1813	NASDAQ	KLIC	Fri, Jul 30, 1999	12.19	12.66	12.06	12.31
1812	NASDAQ	KLIC	Thu, Jul 29, 1999	12.56	12.75	11.94	12.19
1811	NASDAQ	KLIC	Wed, Jul 28, 1999	12.84	12.88	12.44	12.81
1810	NASDAQ	KLIC	Tue, Jul 27, 1999	12.22	13.06	12.22	12.84
1809	NASDAQ	KLIC	Mon, Jul 26, 1999	12.11	12.72	11.78	11.94
1808	NASDAQ	KLIC	Fri, Jul 23, 1999	11.81	12.25	11.78	12.22
1807	NASDAQ	KLIC	Thu, Jul 22, 1999	12.50	12.63	11.50	11.84
1806	NASDAQ	KLIC	Wed, Jul 21, 1999	13.19	13.25	12.16	12.44
1805	NASDAQ	KLIC	Tue, Jul 20, 1999	13.94	14.13	12.81	12.94
1804	NASDAQ	KLIC	Mon, Jul 19, 1999	14.22	14.50	13.94	14.09
1803	NASDAQ	KLIC	Fri, Jul 16, 1999	13.91	14.25	13.56	14.22
1802	NASDAQ	KLIC	Thu, Jul 15, 1999	14.38	14.50	13.94	14.09
1801	NASDAQ	KLIC	Wed, Jul 14, 1999	13.75	14.44	13.63	14.25
1800	NASDAQ	KLIC	Tue, Jul 13, 1999	14.06	14.06	13.50	13.50
1799	NASDAQ	KLIC	Mon, Jul 12, 1999	13.63	14.34	13.56	14.22
1798	NASDAQ	KLIC	Fri, Jul 9, 1999	13.88	14.00	13.34	13.50
1797	NASDAQ	KLIC	Thu, Jul 8, 1999	13.88	14.19	13.56	13.81
1796	NASDAQ	KLIC	Wed, Jul 7, 1999	13.81	14.00	13.50	13.78
1795	NASDAQ	KLIC	Tue, Jul 6, 1999	13.63	14.16	13.50	14.06
1794	NASDAQ	KLIC	Fri, Jul 2, 1999	13.66	13.75	13.34	13.50
1793	NASDAQ	KLIC	Thu, Jul 1, 1999	13.50	13.88	13.31	13.78
1792	NASDAQ	KLIC	Wed, Jun 30, 1999	13.63	13.69	13.13	13.41
1791	NASDAQ	KLIC	Tue, Jun 29, 1999	12.13	13.66	12.00	13.50
1790	NASDAQ	KLIC	Mon, Jun 28, 1999	11.94	12.28	11.91	12.13
1789	NASDAQ	KLIC	Fri, Jun 25, 1999	12.25	12.38	11.81	12.03
1788	NASDAQ	KLIC	Thu, Jun 24, 1999	12.50	12.94	12.06	12.31
1787	NASDAQ	KLIC	Wed, Jun 23, 1999	12.97	12.97	12.13	12.56
1786	NASDAQ	KLIC	Tue, Jun 22, 1999	12.75	12.97	12.47	12.94
1785	NASDAQ	KLIC	Mon, Jun 21, 1999	12.50	12.91	12.31	12.88
1784	NASDAQ	KLIC	Fri, Jun 18, 1999	12.50	12.81	12.47	12.56
1783	NASDAQ	KLIC	Thu, Jun 17, 1999	12.91	12.91	12.19	12.44
1782	NASDAQ	KLIC	Wed, Jun 16, 1999	12.63	13.13	12.59	12.91
1781	NASDAQ	KLIC	Tue, Jun 15, 1999	11.69	12.56	11.56	12.34
1780	NASDAQ	KLIC	Mon, Jun 14, 1999	11.97	12.03	11.50	11.66
1779	NASDAQ	KLIC	Fri, Jun 11, 1999	12.75	12.75	11.81	12.06
1778	NASDAQ	KLIC	Thu, Jun 10, 1999	12.06	12.72	12.00	12.66
1777	NASDAQ	KLIC	Wed, Jun 9, 1999	11.38	12.38	11.22	12.28
1776	NASDAQ	KLIC	Tue, Jun 8, 1999	11.69	11.69	11.06	11.13
1775	NASDAQ	KLIC	Mon, Jun 7, 1999	11.19	11.63	11.09	11.50
1774	NASDAQ	KLIC	Fri, Jun 4, 1999	10.94	11.31	10.94	11.09
1773	NASDAQ	KLIC	Thu, Jun 3, 1999	11.19	11.19	10.88	10.88
1772	NASDAQ	KLIC	Wed, Jun 2, 1999	11.00	11.47	10.56	11.03
1771	NASDAQ	KLIC	Tue, Jun 1, 1999	10.59	11.13	10.31	10.94
1770	NASDAQ	KLIC	Fri, May 28, 1999	10.28	10.63	10.25	10.56
1769	NASDAQ	KLIC	Thu, May 27, 1999	9.69	10.88	9.69	10.06
1768	NASDAQ	KLIC	Wed, May 26, 1999	10.03	10.28	9.50	10.13
1767	NASDAQ	KLIC	Tue, May 25, 1999	10.31	10.50	9.63	9.78
1766	NASDAQ	KLIC	Mon, May 24, 1999	11.00	11.22	10.38	10.44
1765	NASDAQ	KLIC	Fri, May 21, 1999	11.13	11.25	11.00	11.16
1764	NASDAQ	KLIC	Thu, May 20, 1999	11.38	11.50	10.94	10.94
1763	NASDAQ	KLIC	Wed, May 19, 1999	11.53	12.06	11.09	11.31
1762	NASDAQ	KLIC	Tue, May 18, 1999	11.09	11.44	10.88	11.00
1761	NASDAQ	KLIC	Mon, May 17, 1999	11.00	11.06	10.75	11.00
1760	NASDAQ	KLIC	Fri, May 14, 1999	11.50	11.56	10.84	11.19
1759	NASDAQ	KLIC	Thu, May 13, 1999	10.81	12.00	10.75	11.56
1758	NASDAQ	KLIC	Wed, May 12, 1999	10.63	10.78	10.44	10.75
1757	NASDAQ	KLIC	Tue, May 11, 1999	10.75	10.94	10.50	10.69
1756	NASDAQ	KLIC	Mon, May 10, 1999	10.56	11.00	10.25	10.88
1755	NASDAQ	KLIC	Fri, May 7, 1999	10.69	11.00	10.38	10.63
1754	NASDAQ	KLIC	Thu, May 6, 1999	10.88	11.13	10.38	10.63
1753	NASDAQ	KLIC	Wed, May 5, 1999	10.72	10.81	10.13	10.56
1752	NASDAQ	KLIC	Tue, May 4, 1999	10.88	11.13	10.75	10.83
1751	NASDAQ	KLIC	Mon, May 3, 1999	11.56	11.69	10.88	10.91
1750	NASDAQ	KLIC	Fri, Apr 30, 1999	11.75	11.88	10.81	11.44
1749	NASDAQ	KLIC	Thu, Apr 29, 1999	12.69	12.69	11.50	11.81
1748	NASDAQ	KLIC	Wed, Apr 28, 1999	13.16	14.50	12.94	14.06
1747	NASDAQ	KLIC	Tue, Apr 27, 1999	13.25	13.69	12.94	13.28
1746	NASDAQ	KLIC	Mon, Apr 26, 1999	12.94	13.38	12.75	12.75
1745	NASDAQ	KLIC	Fri, Apr 23, 1999	13.56	13.91	13.00	13.19
1744	NASDAQ	KLIC	Thu, Apr 22, 1999	13.38	13.91	13.25	13.88
1743	NASDAQ	KLIC	Wed, Apr 21, 1999	11.13	13.06	11.13	12.88
1742	NASDAQ	KLIC	Tue, Apr 20, 1999	10.97	11.13	10.50	10.88
1741	NASDAQ	KLIC	Mon, Apr 19, 1999	11.47	11.88	10.63	10.94
1740	NASDAQ	KLIC	Fri, Apr 16, 1999	11.50	11.53	11.06	11.38
1739	NASDAQ	KLIC	Thu, Apr 15, 1999	10.88	11.56	10.69	11.50
1738	NASDAQ	KLIC	Wed, Apr 14, 1999	11.06	11.72	10.63	10.69
1737	NASDAQ	KLIC	Tue, Apr 13, 1999	11.75	11.94	10.50	10.84
1736	NASDAQ	KLIC	Mon, Apr 12, 1999	12.38	12.53	11.63	11.75
1735	NASDAQ	KLIC	Fri, Apr 9, 1999	12.50	12.72	12.31	12.59
1734	NASDAQ	KLIC	Thu, Apr 8, 1999	12.81	13.00	12.31	12.50
1733	NASDAQ	KLIC	Wed, Apr 7, 1999	13.00	13.13	12.63	12.75
1732	NASDAQ	KLIC	Tue, Apr 6, 1999	12.78	13.25	12.75	12.94
1731	NASDAQ	KLIC	Mon, Apr 5, 1999	12.84	13.13	12.72	12.84
1730	NASDAQ	KLIC	Thu, Apr 1, 1999	12.59	12.81	12.41	12.56
1729	NASDAQ	KLIC	Wed, Mar 31, 1999	12.97	13.25	12.44	12.63
1728	NASDAQ	KLIC	Tue, Mar 30, 1999	13.00	13.53	12.63	13.19
1727	NASDAQ	KLIC	Mon, Mar 29, 1999	11.69	13.63	11.63	13.00
1726	NASDAQ	KLIC	Fri, Mar 26, 1999	12.00	12.06	11.63	11.66
1725	NASDAQ	KLIC	Thu, Mar 25, 1999	12.13	12.63	11.81	11.91
1724	NASDAQ	KLIC	Wed, Mar 24, 1999	11.59	12.13	11.50	12.06
1723	NASDAQ	KLIC	Tue, Mar 23, 1999	11.69	12.00	11.38	11.56
1722	NASDAQ	KLIC	Mon, Mar 22, 1999	11.88	12.00	11.75	11.81
1721	NASDAQ	KLIC	Fri, Mar 19, 1999	12.56	12.94	11.56	11.69
1720	NASDAQ	KLIC	Thu, Mar 18, 1999	12.06	12.56	12.00	12.31
1719	NASDAQ	KLIC	Wed, Mar 17, 1999	12.56	12.69	11.88	12.25
1718	NASDAQ	KLIC	Tue, Mar 16, 1999	11.94	12.69	11.84	12.44
1717	NASDAQ	KLIC	Mon, Mar 15, 1999	11.06	11.72	10.75	11.72
1716	NASDAQ	KLIC	Fri, Mar 12, 1999	11.94	12.00	11.06	11.41
1715	NASDAQ	KLIC	Thu, Mar 11, 1999	12.81	12.94	11.59	11.94
1714	NASDAQ	KLIC	Wed, Mar 10, 1999	12.56	12.88	12.13	12.81
1713	NASDAQ	KLIC	Tue, Mar 9, 1999	13.00	13.75	12.25	12.47
1712	NASDAQ	KLIC	Mon, Mar 8, 1999	12.78	13.38	12.78	13.06
1711	NASDAQ	KLIC	Fri, Mar 5, 1999	13.00	13.22	12.66	12.78
1710	NASDAQ	KLIC	Thu, Mar 4, 1999	12.41	12.94	12.25	12.63
1709	NASDAQ	KLIC	Wed, Mar 3, 1999	12.81	13.06	12.19	12.44
1708	NASDAQ	KLIC	Tue, Mar 2, 1999	13.38	13.50	12.69	12.81
1707	NASDAQ	KLIC	Mon, Mar 1, 1999	12.53	13.44	11.81	12.97
1706	NASDAQ	KLIC	Fri, Feb 26, 1999	14.53	14.56	12.31	12.69
1705	NASDAQ	KLIC	Thu, Feb 25, 1999	16.50	16.53	14.38	14.44
1704	NASDAQ	KLIC	Wed, Feb 24, 1999	16.56	17.63	16.50	16.50
1703	NASDAQ	KLIC	Tue, Feb 23, 1999	16.84	17.44	16.51	16.69
1702	NASDAQ	KLIC	Mon, Feb 22, 1999	15.63	16.75	15.63	16.75
1701	NASDAQ	KLIC	Fri, Feb 19, 1999	15.34	15.81	15.19	15.75
1700	NASDAQ	KLIC	Thu, Feb 18, 1999	15.72	15.81	15.00	15.34
1699	NASDAQ	KLIC	Wed, Feb 17, 1999	15.44	16.25	15.44	15.72
1698	NASDAQ	KLIC	Tue, Feb 16, 1999	15.47	15.88	15.19	15.56
1697	NASDAQ	KLIC	Fri, Feb 12, 1999	14.84	15.44	14.72	15.19
1696	NASDAQ	KLIC	Thu, Feb 11, 1999	14.50	15.50	14.38	15.19
1695	NASDAQ	KLIC	Wed, Feb 10, 1999	14.63	14.97	14.00	14.44
1694	NASDAQ	KLIC	Tue, Feb 9, 1999	15.38	15.44	14.44	14.69
1693	NASDAQ	KLIC	Mon, Feb 8, 1999	15.63	16.03	15.00	15.38
1692	NASDAQ	KLIC	Fri, Feb 5, 1999	14.31	15.56	14.25	14.69
1691	NASDAQ	KLIC	Thu, Feb 4, 1999	15.78	16.59	14.25	14.25
1690	NASDAQ	KLIC	Wed, Feb 3, 1999	13.78	16.16	13.78	16.06
1689	NASDAQ	KLIC	Tue, Feb 2, 1999	13.56	14.00	12.94	14.00
1688	NASDAQ	KLIC	Mon, Feb 1, 1999	14.75	14.75	13.63	14.09
1687	NASDAQ	KLIC	Fri, Jan 29, 1999	13.31	14.56	13.00	14.50
1686	NASDAQ	KLIC	Thu, Jan 28, 1999	13.50	13.81	13.06	13.34
1685	NASDAQ	KLIC	Wed, Jan 27, 1999	13.63	14.13	13.06	13.50
1684	NASDAQ	KLIC	Tue, Jan 26, 1999	11.25	13.53	11.06	13.44
1683	NASDAQ	KLIC	Mon, Jan 25, 1999	11.25	11.81	10.81	10.84
1682	NASDAQ	KLIC	Fri, Jan 22, 1999	10.25	11.63	10.25	11.38
1681	NASDAQ	KLIC	Thu, Jan 21, 1999	10.50	10.69	10.25	10.50
1680	NASDAQ	KLIC	Wed, Jan 20, 1999	10.75	11.44	10.50	10.69
1679	NASDAQ	KLIC	Tue, Jan 19, 1999	11.13	11.25	10.38	10.44
1678	NASDAQ	KLIC	Fri, Jan 15, 1999	10.75	11.19	10.75	11.06
1677	NASDAQ	KLIC	Thu, Jan 14, 1999	11.00	11.00	10.56	10.72
1676	NASDAQ	KLIC	Wed, Jan 13, 1999	10.16	11.06	9.81	10.94
1675	NASDAQ	KLIC	Tue, Jan 12, 1999	11.38	11.41	10.59	10.75
1674	NASDAQ	KLIC	Mon, Jan 11, 1999	12.00	12.00	11.19	11.50
1673	NASDAQ	KLIC	Fri, Jan 8, 1999	11.59	12.56	11.59	11.88
1672	NASDAQ	KLIC	Thu, Jan 7, 1999	10.69	11.84	10.56	11.38
1671	NASDAQ	KLIC	Wed, Jan 6, 1999	10.44	11.09	10.31	10.94
1670	NASDAQ	KLIC	Tue, Jan 5, 1999	8.91	10.50	8.81	10.19
1669	NASDAQ	KLIC	Mon, Jan 4, 1999	8.91	9.38	8.81	8.91
1668	NASDAQ	KLIC	Thu, Dec 31, 1998	8.75	8.88	8.50	8.88
1667	NASDAQ	KLIC	Wed, Dec 30, 1998	8.41	8.84	8.41	8.56
1666	NASDAQ	KLIC	Tue, Dec 29, 1998	8.63	8.69	8.41	8.44
1665	NASDAQ	KLIC	Mon, Dec 28, 1998	8.69	9.00	8.44	8.69
1664	NASDAQ	KLIC	Thu, Dec 24, 1998	9.06	9.13	8.72	8.72
1663	NASDAQ	KLIC	Wed, Dec 23, 1998	9.28	9.50	9.00	9.06
1662	NASDAQ	KLIC	Tue, Dec 22, 1998	9.00	9.22	8.88	9.06
1661	NASDAQ	KLIC	Mon, Dec 21, 1998	9.28	9.47	9.13	9.25
1660	NASDAQ	KLIC	Fri, Dec 18, 1998	8.69	9.41	8.63	9.19
1659	NASDAQ	KLIC	Thu, Dec 17, 1998	8.38	8.73	8.38	8.69
1658	NASDAQ	KLIC	Wed, Dec 16, 1998	8.75	8.81	8.14	8.38
1657	NASDAQ	KLIC	Tue, Dec 15, 1998	8.06	8.81	7.97	8.81
1656	NASDAQ	KLIC	Mon, Dec 14, 1998	8.81	8.88	7.94	8.06
1655	NASDAQ	KLIC	Fri, Dec 11, 1998	9.25	9.25	8.69	8.78
1654	NASDAQ	KLIC	Thu, Dec 10, 1998	10.31	10.34	9.75	9.81
1653	NASDAQ	KLIC	Wed, Dec 9, 1998	10.69	10.75	10.38	10.41
1652	NASDAQ	KLIC	Tue, Dec 8, 1998	10.19	10.94	10.13	10.56
1651	NASDAQ	KLIC	Mon, Dec 7, 1998	10.00	10.72	9.88	10.16
1650	NASDAQ	KLIC	Fri, Dec 4, 1998	9.94	10.72	9.75	10.09
1649	NASDAQ	KLIC	Thu, Dec 3, 1998	8.88	10.31	8.63	9.47
1648	NASDAQ	KLIC	Wed, Dec 2, 1998	8.44	9.16	8.31	9.00
1647	NASDAQ	KLIC	Tue, Dec 1, 1998	8.47	8.50	8.31	8.38
1646	NASDAQ	KLIC	Mon, Nov 30, 1998	9.00	9.00	8.50	8.53
1645	NASDAQ	KLIC	Fri, Nov 27, 1998	8.97	9.09	8.97	9.00
1644	NASDAQ	KLIC	Wed, Nov 25, 1998	8.78	9.00	8.56	8.84
1643	NASDAQ	KLIC	Tue, Nov 24, 1998	9.19	9.22	8.69	8.69
1642	NASDAQ	KLIC	Mon, Nov 23, 1998	9.13	9.44	9.13	9.28
1641	NASDAQ	KLIC	Fri, Nov 20, 1998	8.75	9.06	8.63	9.00
1640	NASDAQ	KLIC	Thu, Nov 19, 1998	8.47	8.84	8.38	8.72
1639	NASDAQ	KLIC	Wed, Nov 18, 1998	8.53	8.84	8.34	8.49
1638	NASDAQ	KLIC	Tue, Nov 17, 1998	8.31	8.59	8.19	8.50
1637	NASDAQ	KLIC	Mon, Nov 16, 1998	8.19	8.56	8.19	8.38
1636	NASDAQ	KLIC	Fri, Nov 13, 1998	8.81	8.81	8.13	8.25
1635	NASDAQ	KLIC	Thu, Nov 12, 1998	8.41	8.91	8.31	8.63
1634	NASDAQ	KLIC	Wed, Nov 11, 1998	8.28	8.59	8.22	8.36
1633	NASDAQ	KLIC	Tue, Nov 10, 1998	8.00	8.19	7.88	7.91
1632	NASDAQ	KLIC	Mon, Nov 9, 1998	8.16	8.22	8.00	8.00
1631	NASDAQ	KLIC	Fri, Nov 6, 1998	7.91	8.38	7.91	8.19
1630	NASDAQ	KLIC	Thu, Nov 5, 1998	7.84	8.00	7.63	7.94
1629	NASDAQ	KLIC	Wed, Nov 4, 1998	7.84	8.25	7.72	7.81
1628	NASDAQ	KLIC	Tue, Nov 3, 1998	8.00	8.00	7.63	7.78
1627	NASDAQ	KLIC	Mon, Nov 2, 1998	8.19	8.19	7.91	8.03
1626	NASDAQ	KLIC	Fri, Oct 30, 1998	8.63	8.63	8.13	8.16
1625	NASDAQ	KLIC	Thu, Oct 29, 1998	8.25	8.63	8.00	8.50
1624	NASDAQ	KLIC	Wed, Oct 28, 1998	7.84	8.25	7.56	8.13
1623	NASDAQ	KLIC	Tue, Oct 27, 1998	8.44	8.50	7.84	8.00
1622	NASDAQ	KLIC	Mon, Oct 26, 1998	7.88	8.38	7.78	8.22
1621	NASDAQ	KLIC	Fri, Oct 23, 1998	7.78	8.62	7.53	7.56
1620	NASDAQ	KLIC	Thu, Oct 22, 1998	7.22	8.00	7.03	7.94
1619	NASDAQ	KLIC	Wed, Oct 21, 1998	6.88	7.16	6.44	7.03
1618	NASDAQ	KLIC	Tue, Oct 20, 1998	6.06	7.19	6.06	6.56
1617	NASDAQ	KLIC	Mon, Oct 19, 1998	6.00	6.13	5.81	6.00
1616	NASDAQ	KLIC	Fri, Oct 16, 1998	6.19	6.25	5.88	6.00
1615	NASDAQ	KLIC	Thu, Oct 15, 1998	6.06	6.50	5.94	6.22
1614	NASDAQ	KLIC	Wed, Oct 14, 1998	5.78	6.25	5.75	6.13
1613	NASDAQ	KLIC	Tue, Oct 13, 1998	6.13	6.22	5.59	5.75
1612	NASDAQ	KLIC	Mon, Oct 12, 1998	5.88	6.72	5.84	6.19
1611	NASDAQ	KLIC	Fri, Oct 9, 1998	5.28	5.88	5.25	5.78
1610	NASDAQ	KLIC	Thu, Oct 8, 1998	5.00	5.56	4.69	5.19
1609	NASDAQ	KLIC	Wed, Oct 7, 1998	6.03	6.03	4.81	5.19
1608	NASDAQ	KLIC	Tue, Oct 6, 1998	6.31	6.41	5.94	5.97
1607	NASDAQ	KLIC	Mon, Oct 5, 1998	6.28	6.31	5.78	6.13
1606	NASDAQ	KLIC	Fri, Oct 2, 1998	6.69	6.72	6.44	6.47
1605	NASDAQ	KLIC	Thu, Oct 1, 1998	6.56	6.81	6.38	6.63
1604	NASDAQ	KLIC	Wed, Sep 30, 1998	6.78	7.00	6.69	6.81
1603	NASDAQ	KLIC	Tue, Sep 29, 1998	7.00	7.00	6.81	6.84
1602	NASDAQ	KLIC	Mon, Sep 28, 1998	7.00	7.41	6.91	6.94
1601	NASDAQ	KLIC	Fri, Sep 25, 1998	6.84	7.06	6.78	7.00
1600	NASDAQ	KLIC	Thu, Sep 24, 1998	7.00	7.47	6.75	6.84
1599	NASDAQ	KLIC	Wed, Sep 23, 1998	7.25	7.31	7.00	7.19
1598	NASDAQ	KLIC	Tue, Sep 22, 1998	7.00	7.33	7.00	7.19
1597	NASDAQ	KLIC	Mon, Sep 21, 1998	6.50	7.16	6.38	7.00
1596	NASDAQ	KLIC	Fri, Sep 18, 1998	6.91	6.94	6.63	6.72
1595	NASDAQ	KLIC	Thu, Sep 17, 1998	6.81	6.94	6.66	6.88
1594	NASDAQ	KLIC	Wed, Sep 16, 1998	6.94	7.06	6.88	7.00
1593	NASDAQ	KLIC	Tue, Sep 15, 1998	7.13	7.13	6.81	6.94
1592	NASDAQ	KLIC	Mon, Sep 14, 1998	7.19	7.47	6.91	7.09
1591	NASDAQ	KLIC	Fri, Sep 11, 1998	6.09	7.00	6.09	7.00
1590	NASDAQ	KLIC	Thu, Sep 10, 1998	5.94	6.06	5.81	5.91
1589	NASDAQ	KLIC	Wed, Sep 9, 1998	6.25	6.38	6.03	6.06
1588	NASDAQ	KLIC	Tue, Sep 8, 1998	6.38	6.38	6.13	6.22
1587	NASDAQ	KLIC	Fri, Sep 4, 1998	6.19	6.25	5.75	5.94
1586	NASDAQ	KLIC	Thu, Sep 3, 1998	6.25	6.31	6.06	6.09
1585	NASDAQ	KLIC	Wed, Sep 2, 1998	6.63	6.63	6.19	6.25
1584	NASDAQ	KLIC	Tue, Sep 1, 1998	6.63	6.88	6.13	6.28
1583	NASDAQ	KLIC	Mon, Aug 31, 1998	6.88	6.97	6.38	6.47
1582	NASDAQ	KLIC	Fri, Aug 28, 1998	7.19	7.25	6.66	6.69
1581	NASDAQ	KLIC	Thu, Aug 27, 1998	7.38	7.38	6.81	7.03
1580	NASDAQ	KLIC	Wed, Aug 26, 1998	8.13	8.19	7.38	7.53
1579	NASDAQ	KLIC	Tue, Aug 25, 1998	8.63	8.81	8.38	8.44
1578	NASDAQ	KLIC	Mon, Aug 24, 1998	8.63	9.06	8.47	8.50
1577	NASDAQ	KLIC	Fri, Aug 21, 1998	8.75	8.78	8.28	8.56
1576	NASDAQ	KLIC	Thu, Aug 20, 1998	9.13	9.22	8.66	8.94
1575	NASDAQ	KLIC	Wed, Aug 19, 1998	9.56	9.75	9.06	9.34
1574	NASDAQ	KLIC	Tue, Aug 18, 1998	8.94	9.63	8.94	9.31
1573	NASDAQ	KLIC	Mon, Aug 17, 1998	8.75	8.94	8.63	8.75
1572	NASDAQ	KLIC	Fri, Aug 14, 1998	8.56	8.97	8.50	8.78
1571	NASDAQ	KLIC	Thu, Aug 13, 1998	8.13	8.56	8.00	8.50
1570	NASDAQ	KLIC	Wed, Aug 12, 1998	7.94	8.28	7.88	8.00
1569	NASDAQ	KLIC	Tue, Aug 11, 1998	7.50	7.78	7.50	7.78
1568	NASDAQ	KLIC	Mon, Aug 10, 1998	8.41	8.50	7.81	7.81
1567	NASDAQ	KLIC	Fri, Aug 7, 1998	7.91	8.88	7.91	8.56
1566	NASDAQ	KLIC	Thu, Aug 6, 1998	7.06	7.88	6.94	7.81
1565	NASDAQ	KLIC	Wed, Aug 5, 1998	6.81	7.16	6.75	7.06
1564	NASDAQ	KLIC	Tue, Aug 4, 1998	7.16	7.19	6.78	6.81
1563	NASDAQ	KLIC	Mon, Aug 3, 1998	7.09	7.13	6.97	7.00
1562	NASDAQ	KLIC	Fri, Jul 31, 1998	7.00	7.50	7.00	7.13
1561	NASDAQ	KLIC	Thu, Jul 30, 1998	6.81	7.31	6.81	7.00
1560	NASDAQ	KLIC	Wed, Jul 29, 1998	7.13	7.19	6.81	6.81
1559	NASDAQ	KLIC	Tue, Jul 28, 1998	7.13	7.50	6.75	7.06
1558	NASDAQ	KLIC	Mon, Jul 27, 1998	7.16	7.19	7.00	7.00
1557	NASDAQ	KLIC	Fri, Jul 24, 1998	7.50	7.63	7.06	7.14
1556	NASDAQ	KLIC	Thu, Jul 23, 1998	7.28	7.66	7.25	7.50
1555	NASDAQ	KLIC	Wed, Jul 22, 1998	7.25	7.84	7.19	7.34
1554	NASDAQ	KLIC	Tue, Jul 21, 1998	7.97	8.13	7.84	7.84
1553	NASDAQ	KLIC	Mon, Jul 20, 1998	7.94	8.00	7.78	7.91
1552	NASDAQ	KLIC	Fri, Jul 17, 1998	7.69	8.03	7.44	7.88
1551	NASDAQ	KLIC	Thu, Jul 16, 1998	7.84	8.13	7.66	7.72
1550	NASDAQ	KLIC	Wed, Jul 15, 1998	7.06	7.75	7.03	7.75
1549	NASDAQ	KLIC	Tue, Jul 14, 1998	7.28	7.38	6.97	7.03
1548	NASDAQ	KLIC	Mon, Jul 13, 1998	7.75	7.75	7.00	7.25
1547	NASDAQ	KLIC	Fri, Jul 10, 1998	7.84	7.94	7.66	7.75
1546	NASDAQ	KLIC	Thu, Jul 9, 1998	8.06	8.06	7.81	7.88
1545	NASDAQ	KLIC	Wed, Jul 8, 1998	8.22	8.22	7.88	8.00
1544	NASDAQ	KLIC	Tue, Jul 7, 1998	8.06	8.16	7.94	8.16
1543	NASDAQ	KLIC	Mon, Jul 6, 1998	8.25	8.38	7.88	8.00
1542	NASDAQ	KLIC	Thu, Jul 2, 1998	8.63	8.75	8.13	8.28
1541	NASDAQ	KLIC	Wed, Jul 1, 1998	8.50	8.94	8.50	8.72
1540	NASDAQ	KLIC	Tue, Jun 30, 1998	8.06	8.50	7.81	8.50
1539	NASDAQ	KLIC	Mon, Jun 29, 1998	8.38	8.56	8.06	8.25
1538	NASDAQ	KLIC	Fri, Jun 26, 1998	8.06	8.31	8.03	8.31
1537	NASDAQ	KLIC	Thu, Jun 25, 1998	8.50	8.91	7.88	7.91
1536	NASDAQ	KLIC	Wed, Jun 24, 1998	8.31	8.47	8.06	8.38
1535	NASDAQ	KLIC	Tue, Jun 23, 1998	7.81	8.31	7.81	8.19
1534	NASDAQ	KLIC	Mon, Jun 22, 1998	7.16	7.81	7.16	7.81
1533	NASDAQ	KLIC	Fri, Jun 19, 1998	7.25	7.25	7.13	7.13
1532	NASDAQ	KLIC	Thu, Jun 18, 1998	7.13	7.38	7.13	7.16
1531	NASDAQ	KLIC	Wed, Jun 17, 1998	7.02	7.38	6.94	7.16
1530	NASDAQ	KLIC	Tue, Jun 16, 1998	7.88	8.25	7.81	7.81
1529	NASDAQ	KLIC	Mon, Jun 15, 1998	8.00	8.41	7.44	7.56
1528	NASDAQ	KLIC	Fri, Jun 12, 1998	7.94	7.97	7.38	7.94
1527	NASDAQ	KLIC	Thu, Jun 11, 1998	8.41	8.44	7.94	8.03
1526	NASDAQ	KLIC	Wed, Jun 10, 1998	8.69	8.69	8.38	8.47
1525	NASDAQ	KLIC	Tue, Jun 9, 1998	8.63	8.78	8.25	8.63
1524	NASDAQ	KLIC	Mon, Jun 8, 1998	8.63	8.63	8.44	8.44
1523	NASDAQ	KLIC	Fri, Jun 5, 1998	8.56	8.63	8.38	8.53
1522	NASDAQ	KLIC	Thu, Jun 4, 1998	8.75	8.75	8.19	8.41
1521	NASDAQ	KLIC	Wed, Jun 3, 1998	9.00	9.09	8.56	8.56
1520	NASDAQ	KLIC	Tue, Jun 2, 1998	8.66	9.00	8.63	9.00
1519	NASDAQ	KLIC	Mon, Jun 1, 1998	8.63	8.88	8.56	8.63
1518	NASDAQ	KLIC	Fri, May 29, 1998	9.34	9.34	8.56	8.56
1517	NASDAQ	KLIC	Thu, May 28, 1998	9.25	9.44	9.13	9.22
1516	NASDAQ	KLIC	Wed, May 27, 1998	9.00	9.19	8.75	9.19
1515	NASDAQ	KLIC	Tue, May 26, 1998	9.00	9.25	8.94	9.06
1514	NASDAQ	KLIC	Fri, May 22, 1998	9.00	9.09	8.75	8.91
1513	NASDAQ	KLIC	Thu, May 21, 1998	9.06	9.19	8.94	9.03
1512	NASDAQ	KLIC	Wed, May 20, 1998	9.19	9.56	9.06	9.06
1511	NASDAQ	KLIC	Tue, May 19, 1998	9.19	9.25	9.00	9.19
1510	NASDAQ	KLIC	Mon, May 18, 1998	9.38	9.38	9.13	9.25
1509	NASDAQ	KLIC	Fri, May 15, 1998	9.69	9.69	9.25	9.38
1508	NASDAQ	KLIC	Thu, May 14, 1998	9.81	9.81	9.56	9.56
1507	NASDAQ	KLIC	Wed, May 13, 1998	9.75	9.97	9.72	9.84
1506	NASDAQ	KLIC	Tue, May 12, 1998	9.94	9.94	9.59	9.78
1505	NASDAQ	KLIC	Mon, May 11, 1998	10.16	10.16	9.84	9.88
1504	NASDAQ	KLIC	Fri, May 8, 1998	10.09	10.31	9.97	10.03
1503	NASDAQ	KLIC	Thu, May 7, 1998	10.13	10.13	9.91	10.03
1502	NASDAQ	KLIC	Wed, May 6, 1998	10.19	10.31	10.00	10.00
1501	NASDAQ	KLIC	Tue, May 5, 1998	10.38	10.44	9.88	10.03
1500	NASDAQ	KLIC	Mon, May 4, 1998	10.69	10.75	10.31	10.38
1499	NASDAQ	KLIC	Fri, May 1, 1998	10.88	10.88	10.56	10.56
1498	NASDAQ	KLIC	Thu, Apr 30, 1998	10.63	10.88	10.50	10.75
1497	NASDAQ	KLIC	Wed, Apr 29, 1998	10.72	10.72	10.53	10.56
1496	NASDAQ	KLIC	Tue, Apr 28, 1998	10.72	10.94	10.31	10.63
1495	NASDAQ	KLIC	Mon, Apr 27, 1998	11.00	11.25	10.38	10.56
1494	NASDAQ	KLIC	Fri, Apr 24, 1998	10.81	11.31	10.69	11.25
1493	NASDAQ	KLIC	Thu, Apr 23, 1998	11.50	11.75	10.75	10.75
1492	NASDAQ	KLIC	Wed, Apr 22, 1998	11.63	11.75	11.38	11.47
1491	NASDAQ	KLIC	Tue, Apr 21, 1998	11.38	11.63	11.25	11.56
1490	NASDAQ	KLIC	Mon, Apr 20, 1998	10.75	11.38	10.75	11.31
1489	NASDAQ	KLIC	Fri, Apr 17, 1998	11.06	11.25	10.50	10.75
1488	NASDAQ	KLIC	Thu, Apr 16, 1998	10.63	10.91	10.44	10.81
1487	NASDAQ	KLIC	Wed, Apr 15, 1998	10.75	10.94	10.56	10.69
1486	NASDAQ	KLIC	Tue, Apr 14, 1998	10.00	10.72	9.94	10.69
1485	NASDAQ	KLIC	Mon, Apr 13, 1998	10.00	10.16	9.94	9.94
1484	NASDAQ	KLIC	Thu, Apr 9, 1998	10.19	10.31	9.91	10.00
1483	NASDAQ	KLIC	Wed, Apr 8, 1998	10.38	10.38	9.88	9.94
1482	NASDAQ	KLIC	Tue, Apr 7, 1998	10.31	10.38	9.94	10.31
1481	NASDAQ	KLIC	Mon, Apr 6, 1998	10.38	10.72	10.25	10.50
1480	NASDAQ	KLIC	Fri, Apr 3, 1998	11.00	11.13	10.31	10.38
1479	NASDAQ	KLIC	Thu, Apr 2, 1998	11.94	12.41	11.56	11.88
1478	NASDAQ	KLIC	Wed, Apr 1, 1998	10.97	11.94	10.81	11.88
1477	NASDAQ	KLIC	Tue, Mar 31, 1998	10.75	11.06	10.75	10.88
1476	NASDAQ	KLIC	Mon, Mar 30, 1998	10.88	10.97	10.63	10.63
1475	NASDAQ	KLIC	Fri, Mar 27, 1998	11.22	11.25	10.78	10.88
1474	NASDAQ	KLIC	Thu, Mar 26, 1998	11.31	11.31	10.94	11.06
1473	NASDAQ	KLIC	Wed, Mar 25, 1998	11.00	11.50	11.00	11.25
1472	NASDAQ	KLIC	Tue, Mar 24, 1998	10.88	10.88	10.72	10.88
1471	NASDAQ	KLIC	Mon, Mar 23, 1998	11.19	11.19	10.75	10.84
1470	NASDAQ	KLIC	Fri, Mar 20, 1998	11.78	11.88	11.06	11.06
1469	NASDAQ	KLIC	Thu, Mar 19, 1998	11.75	11.91	11.53	11.78
1468	NASDAQ	KLIC	Wed, Mar 18, 1998	12.00	12.13	11.38	11.50
1467	NASDAQ	KLIC	Tue, Mar 17, 1998	12.38	12.38	11.88	12.19
1466	NASDAQ	KLIC	Mon, Mar 16, 1998	12.06	12.44	12.06	12.38
1465	NASDAQ	KLIC	Fri, Mar 13, 1998	12.13	12.25	11.97	12.06
1464	NASDAQ	KLIC	Thu, Mar 12, 1998	12.19	12.31	12.00	12.00
1463	NASDAQ	KLIC	Wed, Mar 11, 1998	11.66	12.19	11.66	12.03
1462	NASDAQ	KLIC	Tue, Mar 10, 1998	11.75	11.75	11.38	11.63
1461	NASDAQ	KLIC	Mon, Mar 9, 1998	12.22	12.31	11.50	11.53
1460	NASDAQ	KLIC	Fri, Mar 6, 1998	12.13	12.69	12.00	12.28
1459	NASDAQ	KLIC	Thu, Mar 5, 1998	11.63	12.19	11.63	11.81
1458	NASDAQ	KLIC	Wed, Mar 4, 1998	12.63	13.06	12.44	12.84
1457	NASDAQ	KLIC	Tue, Mar 3, 1998	13.00	13.19	12.44	12.78
1456	NASDAQ	KLIC	Mon, Mar 2, 1998	13.94	13.94	13.25	13.38
1455	NASDAQ	KLIC	Fri, Feb 27, 1998	13.75	13.94	13.63	13.88
1454	NASDAQ	KLIC	Thu, Feb 26, 1998	13.75	14.16	13.56	13.88
1453	NASDAQ	KLIC	Wed, Feb 25, 1998	13.75	14.25	13.50	13.94
1452	NASDAQ	KLIC	Tue, Feb 24, 1998	13.81	13.94	13.50	13.50
1451	NASDAQ	KLIC	Mon, Feb 23, 1998	13.50	14.00	13.44	13.94
1450	NASDAQ	KLIC	Fri, Feb 20, 1998	14.09	14.34	13.22	13.25
1449	NASDAQ	KLIC	Thu, Feb 19, 1998	13.34	13.97	13.16	13.97
1448	NASDAQ	KLIC	Wed, Feb 18, 1998	13.13	13.53	12.94	13.25
1447	NASDAQ	KLIC	Tue, Feb 17, 1998	14.00	14.13	13.00	13.13
1446	NASDAQ	KLIC	Fri, Feb 13, 1998	14.25	14.25	13.56	13.63
1445	NASDAQ	KLIC	Thu, Feb 12, 1998	14.22	14.44	14.00	14.31
1444	NASDAQ	KLIC	Wed, Feb 11, 1998	13.38	14.81	13.38	14.22
1443	NASDAQ	KLIC	Tue, Feb 10, 1998	12.00	13.63	11.94	13.56
1442	NASDAQ	KLIC	Mon, Feb 9, 1998	12.06	12.25	11.94	12.09
1441	NASDAQ	KLIC	Fri, Feb 6, 1998	11.69	12.22	11.38	12.09
1440	NASDAQ	KLIC	Thu, Feb 5, 1998	12.47	12.56	11.63	11.66
1439	NASDAQ	KLIC	Wed, Feb 4, 1998	11.94	12.50	11.28	12.13
1438	NASDAQ	KLIC	Tue, Feb 3, 1998	11.50	12.19	11.28	11.94
1437	NASDAQ	KLIC	Mon, Feb 2, 1998	10.31	11.19	10.31	11.06
1436	NASDAQ	KLIC	Fri, Jan 30, 1998	9.94	10.13	9.88	10.13
1435	NASDAQ	KLIC	Thu, Jan 29, 1998	10.25	10.25	9.75	9.78
1434	NASDAQ	KLIC	Wed, Jan 28, 1998	9.88	10.34	9.81	10.22
1433	NASDAQ	KLIC	Tue, Jan 27, 1998	9.78	10.00	9.63	9.88
1432	NASDAQ	KLIC	Mon, Jan 26, 1998	10.00	10.13	9.66	9.78
1431	NASDAQ	KLIC	Fri, Jan 23, 1998	9.63	9.88	9.44	9.88
1430	NASDAQ	KLIC	Thu, Jan 22, 1998	10.00	10.22	9.38	9.44
1429	NASDAQ	KLIC	Wed, Jan 21, 1998	9.31	9.97	9.13	9.94
1428	NASDAQ	KLIC	Tue, Jan 20, 1998	9.38	9.53	9.13	9.44
1427	NASDAQ	KLIC	Fri, Jan 16, 1998	9.56	9.56	9.00	9.03
1426	NASDAQ	KLIC	Thu, Jan 15, 1998	9.13	9.47	8.88	9.25
1425	NASDAQ	KLIC	Wed, Jan 14, 1998	9.44	9.50	8.75	8.94
1424	NASDAQ	KLIC	Tue, Jan 13, 1998	9.06	9.31	8.94	9.13
1423	NASDAQ	KLIC	Mon, Jan 12, 1998	8.25	8.81	8.13	8.56
1422	NASDAQ	KLIC	Fri, Jan 9, 1998	9.69	9.69	8.31	8.31
1421	NASDAQ	KLIC	Thu, Jan 8, 1998	9.44	9.97	9.25	9.59
1420	NASDAQ	KLIC	Wed, Jan 7, 1998	9.75	9.75	9.22	9.44
1419	NASDAQ	KLIC	Tue, Jan 6, 1998	10.38	10.44	9.56	9.72
1418	NASDAQ	KLIC	Mon, Jan 5, 1998	9.75	10.69	9.47	10.25
1417	NASDAQ	KLIC	Fri, Jan 2, 1998	9.44	9.47	9.09	9.38
1416	NASDAQ	KLIC	Wed, Dec 31, 1997	9.31	9.44	8.94	9.31
1415	NASDAQ	KLIC	Tue, Dec 30, 1997	9.44	9.50	9.16	9.16
1414	NASDAQ	KLIC	Mon, Dec 29, 1997	9.13	9.47	9.03	9.31
1413	NASDAQ	KLIC	Fri, Dec 26, 1997	9.00	9.00	8.88	8.94
1412	NASDAQ	KLIC	Wed, Dec 24, 1997	9.00	9.13	8.88	8.88
1411	NASDAQ	KLIC	Tue, Dec 23, 1997	9.13	9.13	8.69	8.78
1410	NASDAQ	KLIC	Mon, Dec 22, 1997	8.94	9.44	8.88	9.00
1409	NASDAQ	KLIC	Fri, Dec 19, 1997	8.63	9.19	8.56	8.69
1408	NASDAQ	KLIC	Thu, Dec 18, 1997	9.59	9.59	8.91	8.91
1407	NASDAQ	KLIC	Wed, Dec 17, 1997	9.50	9.81	9.44	9.44
1406	NASDAQ	KLIC	Tue, Dec 16, 1997	8.78	9.38	8.63	9.25
1405	NASDAQ	KLIC	Mon, Dec 15, 1997	9.06	9.19	8.25	8.72
1404	NASDAQ	KLIC	Fri, Dec 12, 1997	9.19	9.31	8.63	8.94
1403	NASDAQ	KLIC	Thu, Dec 11, 1997	8.50	9.75	8.50	9.06
1402	NASDAQ	KLIC	Wed, Dec 10, 1997	13.25	13.25	12.16	12.44
1401	NASDAQ	KLIC	Tue, Dec 9, 1997	13.75	13.94	13.25	13.28
1400	NASDAQ	KLIC	Mon, Dec 8, 1997	13.94	14.19	13.38	14.00
1399	NASDAQ	KLIC	Fri, Dec 5, 1997	12.50	13.50	12.38	13.44
1398	NASDAQ	KLIC	Thu, Dec 4, 1997	13.22	13.50	12.13	12.56
1397	NASDAQ	KLIC	Wed, Dec 3, 1997	12.94	13.06	12.38	12.94
1396	NASDAQ	KLIC	Tue, Dec 2, 1997	13.50	13.88	13.00	13.00
1395	NASDAQ	KLIC	Mon, Dec 1, 1997	14.00	14.31	13.31	13.31
1394	NASDAQ	KLIC	Fri, Nov 28, 1997	13.50	13.88	13.06	13.78
1393	NASDAQ	KLIC	Wed, Nov 26, 1997	14.81	14.81	13.19	13.31
1392	NASDAQ	KLIC	Tue, Nov 25, 1997	14.38	15.13	14.19	14.59
1391	NASDAQ	KLIC	Mon, Nov 24, 1997	14.81	14.88	14.19	14.34
1390	NASDAQ	KLIC	Fri, Nov 21, 1997	16.06	16.19	14.88	14.88
1389	NASDAQ	KLIC	Thu, Nov 20, 1997	15.44	15.94	15.25	15.91
1388	NASDAQ	KLIC	Wed, Nov 19, 1997	14.94	15.75	14.81	15.19
1387	NASDAQ	KLIC	Tue, Nov 18, 1997	15.00	15.06	14.63	15.00
1386	NASDAQ	KLIC	Mon, Nov 17, 1997	14.75	15.31	14.50	14.94
1385	NASDAQ	KLIC	Fri, Nov 14, 1997	15.06	15.25	13.84	14.19
1384	NASDAQ	KLIC	Thu, Nov 13, 1997	13.69	14.19	12.31	14.06
1383	NASDAQ	KLIC	Wed, Nov 12, 1997	14.19	14.19	12.75	13.44
1382	NASDAQ	KLIC	Tue, Nov 11, 1997	15.25	15.31	14.00	14.38
1381	NASDAQ	KLIC	Mon, Nov 10, 1997	16.00	16.00	15.13	15.19
1380	NASDAQ	KLIC	Fri, Nov 7, 1997	15.13	15.94	14.69	15.50
1379	NASDAQ	KLIC	Thu, Nov 6, 1997	16.81	17.44	15.75	16.00
1378	NASDAQ	KLIC	Wed, Nov 5, 1997	15.88	17.28	15.50	16.66
1377	NASDAQ	KLIC	Tue, Nov 4, 1997	13.94	15.69	13.63	15.25
1376	NASDAQ	KLIC	Mon, Nov 3, 1997	13.25	13.75	13.00	13.31
1375	NASDAQ	KLIC	Fri, Oct 31, 1997	13.06	13.31	11.56	12.88
1374	NASDAQ	KLIC	Thu, Oct 30, 1997	12.63	13.38	12.00	12.00
1373	NASDAQ	KLIC	Wed, Oct 29, 1997	13.88	15.06	13.06	13.06
1372	NASDAQ	KLIC	Tue, Oct 28, 1997	11.31	13.69	11.13	13.06
1371	NASDAQ	KLIC	Mon, Oct 27, 1997	13.50	14.44	12.38	12.50
1370	NASDAQ	KLIC	Fri, Oct 24, 1997	16.13	16.25	13.50	14.06
1369	NASDAQ	KLIC	Thu, Oct 23, 1997	16.50	17.13	15.75	15.75
1368	NASDAQ	KLIC	Wed, Oct 22, 1997	17.25	17.75	16.94	17.50
1367	NASDAQ	KLIC	Tue, Oct 21, 1997	16.00	17.44	15.94	17.00
1366	NASDAQ	KLIC	Mon, Oct 20, 1997	16.50	16.63	15.25	15.88
1365	NASDAQ	KLIC	Fri, Oct 17, 1997	16.50	16.75	15.19	16.03
1364	NASDAQ	KLIC	Thu, Oct 16, 1997	18.50	18.63	16.06	16.59
1363	NASDAQ	KLIC	Wed, Oct 15, 1997	18.06	18.50	17.81	18.34
1362	NASDAQ	KLIC	Tue, Oct 14, 1997	19.19	19.31	18.19	18.41
1361	NASDAQ	KLIC	Mon, Oct 13, 1997	19.31	19.63	19.19	19.19
1360	NASDAQ	KLIC	Fri, Oct 10, 1997	18.94	19.66	18.75	19.31
1359	NASDAQ	KLIC	Thu, Oct 9, 1997	19.88	20.00	18.94	19.01
1358	NASDAQ	KLIC	Wed, Oct 8, 1997	18.50	20.13	18.44	20.13
1357	NASDAQ	KLIC	Tue, Oct 7, 1997	18.94	19.00	18.13	18.38
1356	NASDAQ	KLIC	Mon, Oct 6, 1997	19.72	19.94	17.19	19.50
1355	NASDAQ	KLIC	Fri, Oct 3, 1997	23.06	24.13	22.69	23.56
1354	NASDAQ	KLIC	Thu, Oct 2, 1997	21.69	23.00	21.56	22.84
1353	NASDAQ	KLIC	Wed, Oct 1, 1997	23.25	23.25	20.63	21.31
1352	NASDAQ	KLIC	Tue, Sep 30, 1997	23.13	24.13	22.75	23.16
1351	NASDAQ	KLIC	Mon, Sep 29, 1997	23.88	25.13	22.75	23.16
1350	NASDAQ	KLIC	Fri, Sep 26, 1997	25.81	25.81	22.50	24.00
1349	NASDAQ	KLIC	Thu, Sep 25, 1997	26.75	26.94	24.59	24.78
1348	NASDAQ	KLIC	Wed, Sep 24, 1997	28.50	28.63	27.25	27.25
1347	NASDAQ	KLIC	Tue, Sep 23, 1997	27.77	28.88	27.69	28.44
1346	NASDAQ	KLIC	Mon, Sep 22, 1997	26.50	27.94	26.38	27.75
1345	NASDAQ	KLIC	Fri, Sep 19, 1997	26.25	26.81	25.88	26.38
1344	NASDAQ	KLIC	Thu, Sep 18, 1997	26.38	26.75	25.75	26.50
1343	NASDAQ	KLIC	Wed, Sep 17, 1997	27.00	27.50	25.94	26.25
1342	NASDAQ	KLIC	Tue, Sep 16, 1997	25.75	26.94	25.44	26.94
1341	NASDAQ	KLIC	Mon, Sep 15, 1997	27.00	27.00	25.00	25.22
1340	NASDAQ	KLIC	Fri, Sep 12, 1997	28.63	28.75	26.88	27.00
1339	NASDAQ	KLIC	Thu, Sep 11, 1997	27.13	29.19	26.94	28.63
1338	NASDAQ	KLIC	Wed, Sep 10, 1997	26.69	27.56	26.69	27.25
1337	NASDAQ	KLIC	Tue, Sep 9, 1997	26.25	27.13	26.00	26.88
1336	NASDAQ	KLIC	Mon, Sep 8, 1997	27.56	28.00	26.00	26.50
1335	NASDAQ	KLIC	Fri, Sep 5, 1997	25.00	27.50	24.50	27.31
1334	NASDAQ	KLIC	Thu, Sep 4, 1997	24.94	25.44	24.88	24.94
1333	NASDAQ	KLIC	Wed, Sep 3, 1997	24.81	25.19	23.91	25.06
1332	NASDAQ	KLIC	Tue, Sep 2, 1997	23.06	25.06	22.94	24.94
1331	NASDAQ	KLIC	Fri, Aug 29, 1997	23.13	23.81	22.81	22.97
1330	NASDAQ	KLIC	Thu, Aug 28, 1997	24.00	24.00	22.75	23.13
1329	NASDAQ	KLIC	Wed, Aug 27, 1997	24.63	24.69	23.81	24.19
1328	NASDAQ	KLIC	Tue, Aug 26, 1997	25.19	25.38	24.19	24.50
1327	NASDAQ	KLIC	Mon, Aug 25, 1997	25.38	25.88	25.19	25.25
1326	NASDAQ	KLIC	Fri, Aug 22, 1997	24.75	25.50	24.50	25.50
1325	NASDAQ	KLIC	Thu, Aug 21, 1997	25.00	26.38	24.44	25.44
1324	NASDAQ	KLIC	Wed, Aug 20, 1997	23.00	25.44	22.88	25.25
1323	NASDAQ	KLIC	Tue, Aug 19, 1997	22.50	23.25	21.88	23.06
1322	NASDAQ	KLIC	Mon, Aug 18, 1997	22.31	22.91	21.81	22.50
1321	NASDAQ	KLIC	Fri, Aug 15, 1997	21.88	22.88	21.63	22.31
1320	NASDAQ	KLIC	Thu, Aug 14, 1997	21.75	22.31	21.63	21.88
1319	NASDAQ	KLIC	Wed, Aug 13, 1997	21.44	22.19	20.63	21.69
1318	NASDAQ	KLIC	Tue, Aug 12, 1997	21.56	22.00	21.00	21.13
1317	NASDAQ	KLIC	Mon, Aug 11, 1997	21.69	21.75	21.00	21.34
1316	NASDAQ	KLIC	Fri, Aug 8, 1997	20.94	21.69	20.50	21.50
1315	NASDAQ	KLIC	Thu, Aug 7, 1997	21.75	21.94	21.19	21.38
1314	NASDAQ	KLIC	Wed, Aug 6, 1997	20.88	22.19	20.56	21.50
1313	NASDAQ	KLIC	Tue, Aug 5, 1997	20.38	20.88	20.31	20.75
1312	NASDAQ	KLIC	Mon, Aug 4, 1997	20.06	21.19	19.88	20.31
1311	NASDAQ	KLIC	Fri, Aug 1, 1997	19.38	20.19	18.88	20.06
1310	NASDAQ	KLIC	Thu, Jul 31, 1997	19.38	19.75	19.22	19.41
1309	NASDAQ	KLIC	Wed, Jul 30, 1997	19.00	19.69	18.88	19.44
1308	NASDAQ	KLIC	Tue, Jul 29, 1997	20.00	20.16	19.00	19.38
1307	NASDAQ	KLIC	Mon, Jul 28, 1997	20.13	20.50	19.69	19.94
1306	NASDAQ	KLIC	Fri, Jul 25, 1997	19.94	20.13	19.63	19.88
1305	NASDAQ	KLIC	Thu, Jul 24, 1997	20.69	20.81	19.69	19.88
1304	NASDAQ	KLIC	Wed, Jul 23, 1997	20.25	21.00	20.19	20.69
1303	NASDAQ	KLIC	Tue, Jul 22, 1997	19.56	20.19	19.25	20.00
1302	NASDAQ	KLIC	Mon, Jul 21, 1997	19.38	19.84	18.88	19.50
1301	NASDAQ	KLIC	Fri, Jul 18, 1997	19.75	20.00	18.19	19.44
1300	NASDAQ	KLIC	Thu, Jul 17, 1997	19.75	19.88	19.69	19.72
1299	NASDAQ	KLIC	Wed, Jul 16, 1997	19.50	19.88	19.50	19.75
1298	NASDAQ	KLIC	Tue, Jul 15, 1997	19.38	19.56	19.31	19.41
1297	NASDAQ	KLIC	Mon, Jul 14, 1997	19.56	19.63	19.00	19.38
1296	NASDAQ	KLIC	Fri, Jul 11, 1997	19.56	20.19	19.44	19.63
1295	NASDAQ	KLIC	Thu, Jul 10, 1997	18.38	19.50	18.00	19.50
1294	NASDAQ	KLIC	Wed, Jul 9, 1997	17.63	18.91	17.53	18.31
1293	NASDAQ	KLIC	Tue, Jul 8, 1997	16.38	17.63	16.31	17.34
1292	NASDAQ	KLIC	Mon, Jul 7, 1997	16.06	16.63	15.94	16.31
1291	NASDAQ	KLIC	Thu, Jul 3, 1997	16.00	16.13	15.69	16.00
1290	NASDAQ	KLIC	Wed, Jul 2, 1997	16.44	16.63	15.50	15.69
1289	NASDAQ	KLIC	Tue, Jul 1, 1997	16.06	17.00	16.00	16.50
1288	NASDAQ	KLIC	Mon, Jun 30, 1997	16.00	16.38	15.88	16.23
1287	NASDAQ	KLIC	Fri, Jun 27, 1997	16.25	16.38	15.56	16.00
1286	NASDAQ	KLIC	Thu, Jun 26, 1997	15.63	16.19	15.50	16.19
1285	NASDAQ	KLIC	Wed, Jun 25, 1997	15.31	15.78	15.19	15.56
1284	NASDAQ	KLIC	Tue, Jun 24, 1997	14.75	15.09	14.38	15.00
1283	NASDAQ	KLIC	Mon, Jun 23, 1997	14.13	14.75	13.94	14.06
1282	NASDAQ	KLIC	Fri, Jun 20, 1997	14.13	14.19	13.78	13.94
1281	NASDAQ	KLIC	Thu, Jun 19, 1997	13.56	14.22	13.38	14.19
1280	NASDAQ	KLIC	Wed, Jun 18, 1997	13.38	14.25	13.25	13.50
1279	NASDAQ	KLIC	Tue, Jun 17, 1997	13.00	14.19	12.94	13.72
1278	NASDAQ	KLIC	Mon, Jun 16, 1997	13.56	13.56	12.81	13.00
1277	NASDAQ	KLIC	Fri, Jun 13, 1997	13.25	13.81	13.19	13.38
1276	NASDAQ	KLIC	Thu, Jun 12, 1997	13.25	13.75	12.88	13.38
1275	NASDAQ	KLIC	Wed, Jun 11, 1997	13.44	13.47	12.06	13.06
1274	NASDAQ	KLIC	Tue, Jun 10, 1997	15.06	15.13	13.38	13.56
1273	NASDAQ	KLIC	Mon, Jun 9, 1997	15.44	15.50	15.13	15.19
1272	NASDAQ	KLIC	Fri, Jun 6, 1997	15.69	15.69	15.19	15.31
1271	NASDAQ	KLIC	Thu, Jun 5, 1997	15.44	16.13	15.44	15.56
1270	NASDAQ	KLIC	Wed, Jun 4, 1997	15.81	16.19	15.16	15.31
1269	NASDAQ	KLIC	Tue, Jun 3, 1997	16.50	16.56	16.00	16.00
1268	NASDAQ	KLIC	Mon, Jun 2, 1997	16.94	17.13	16.56	16.59
1267	NASDAQ	KLIC	Fri, May 30, 1997	16.25	17.19	15.06	16.88
1266	NASDAQ	KLIC	Thu, May 29, 1997	17.44	17.56	16.81	17.06
1265	NASDAQ	KLIC	Wed, May 28, 1997	17.06	17.81	16.50	17.69
1264	NASDAQ	KLIC	Tue, May 27, 1997	16.25	17.50	16.06	17.38
1263	NASDAQ	KLIC	Fri, May 23, 1997	15.94	16.25	15.50	16.25
1262	NASDAQ	KLIC	Thu, May 22, 1997	16.13	16.13	15.75	15.94
1261	NASDAQ	KLIC	Wed, May 21, 1997	15.50	16.06	15.50	16.06
1260	NASDAQ	KLIC	Tue, May 20, 1997	15.31	15.56	15.06	15.50
1259	NASDAQ	KLIC	Mon, May 19, 1997	15.44	15.56	15.19	15.25
1258	NASDAQ	KLIC	Fri, May 16, 1997	15.19	15.50	15.13	15.44
1257	NASDAQ	KLIC	Thu, May 15, 1997	14.88	15.50	14.81	15.38
1256	NASDAQ	KLIC	Wed, May 14, 1997	15.75	15.89	14.81	14.81
1255	NASDAQ	KLIC	Tue, May 13, 1997	16.38	16.50	15.56	15.63
1254	NASDAQ	KLIC	Mon, May 12, 1997	16.00	16.88	16.00	16.38
1253	NASDAQ	KLIC	Fri, May 9, 1997	15.50	16.00	15.38	15.88
1252	NASDAQ	KLIC	Thu, May 8, 1997	15.63	15.63	14.88	15.16
1251	NASDAQ	KLIC	Wed, May 7, 1997	15.50	16.13	15.38	15.69
1250	NASDAQ	KLIC	Tue, May 6, 1997	16.00	16.25	15.56	15.72
1249	NASDAQ	KLIC	Mon, May 5, 1997	14.69	16.38	14.69	16.06
1248	NASDAQ	KLIC	Fri, May 2, 1997	14.31	14.88	14.31	14.69
1247	NASDAQ	KLIC	Thu, May 1, 1997	13.94	14.69	13.69	14.38
1246	NASDAQ	KLIC	Wed, Apr 30, 1997	13.81	14.13	13.81	13.97
1245	NASDAQ	KLIC	Tue, Apr 29, 1997	13.94	14.19	13.75	14.00
1244	NASDAQ	KLIC	Mon, Apr 28, 1997	13.50	13.88	13.31	13.63
1243	NASDAQ	KLIC	Fri, Apr 25, 1997	13.81	14.00	13.31	13.63
1242	NASDAQ	KLIC	Thu, Apr 24, 1997	13.56	14.13	13.56	14.00
1241	NASDAQ	KLIC	Wed, Apr 23, 1997	12.94	14.00	12.75	13.41
1240	NASDAQ	KLIC	Tue, Apr 22, 1997	12.44	13.00	12.13	12.84
1239	NASDAQ	KLIC	Mon, Apr 21, 1997	12.81	12.88	12.38	12.50
1238	NASDAQ	KLIC	Fri, Apr 18, 1997	12.56	13.13	12.38	12.81
1237	NASDAQ	KLIC	Thu, Apr 17, 1997	11.81	12.50	11.81	12.34
1236	NASDAQ	KLIC	Wed, Apr 16, 1997	12.00	12.25	11.56	11.88
1235	NASDAQ	KLIC	Tue, Apr 15, 1997	12.63	12.69	12.25	12.31
1234	NASDAQ	KLIC	Mon, Apr 14, 1997	12.38	12.81	12.25	12.50
1233	NASDAQ	KLIC	Fri, Apr 11, 1997	12.50	12.69	12.13	12.44
1232	NASDAQ	KLIC	Thu, Apr 10, 1997	13.13	13.19	12.63	12.81
1231	NASDAQ	KLIC	Wed, Apr 9, 1997	13.75	13.75	13.25	13.38
1230	NASDAQ	KLIC	Tue, Apr 8, 1997	12.50	13.81	12.31	13.70
1229	NASDAQ	KLIC	Mon, Apr 7, 1997	12.56	12.81	12.50	12.59
1228	NASDAQ	KLIC	Fri, Apr 4, 1997	11.94	12.69	11.63	12.31
1227	NASDAQ	KLIC	Thu, Apr 3, 1997	11.06	12.00	10.75	12.00
1226	NASDAQ	KLIC	Wed, Apr 2, 1997	10.63	11.13	10.44	10.94
1225	NASDAQ	KLIC	Tue, Apr 1, 1997	10.50	10.63	10.38	10.38
1224	NASDAQ	KLIC	Mon, Mar 31, 1997	10.88	10.94	10.50	10.56
1223	NASDAQ	KLIC	Thu, Mar 27, 1997	11.13	11.63	10.88	10.88
1222	NASDAQ	KLIC	Wed, Mar 26, 1997	10.25	11.44	10.19	11.00
1221	NASDAQ	KLIC	Tue, Mar 25, 1997	9.94	10.19	9.56	10.19
1220	NASDAQ	KLIC	Mon, Mar 24, 1997	10.38	10.44	9.84	9.88
1219	NASDAQ	KLIC	Fri, Mar 21, 1997	10.56	10.94	10.44	10.44
1218	NASDAQ	KLIC	Thu, Mar 20, 1997	10.38	10.56	9.81	10.50
1217	NASDAQ	KLIC	Wed, Mar 19, 1997	11.25	11.38	10.13	10.34
1216	NASDAQ	KLIC	Tue, Mar 18, 1997	11.81	11.88	10.94	11.38
1215	NASDAQ	KLIC	Mon, Mar 17, 1997	12.31	12.38	11.16	11.44
1214	NASDAQ	KLIC	Fri, Mar 14, 1997	12.88	12.94	12.25	12.38
1213	NASDAQ	KLIC	Thu, Mar 13, 1997	12.31	12.81	12.31	12.69
1212	NASDAQ	KLIC	Wed, Mar 12, 1997	12.38	12.50	12.06	12.31
1211	NASDAQ	KLIC	Tue, Mar 11, 1997	11.69	12.63	11.56	12.44
1210	NASDAQ	KLIC	Mon, Mar 10, 1997	12.31	12.38	11.38	11.38
1209	NASDAQ	KLIC	Fri, Mar 7, 1997	12.63	12.75	12.13	12.19
1208	NASDAQ	KLIC	Thu, Mar 6, 1997	13.19	13.19	12.63	12.63
1207	NASDAQ	KLIC	Wed, Mar 5, 1997	13.19	13.38	13.06	13.06
1206	NASDAQ	KLIC	Tue, Mar 4, 1997	12.81	13.25	12.81	13.13
1205	NASDAQ	KLIC	Mon, Mar 3, 1997	13.13	13.38	12.81	12.94
1204	NASDAQ	KLIC	Fri, Feb 28, 1997	13.13	13.50	12.75	13.25
1203	NASDAQ	KLIC	Thu, Feb 27, 1997	13.38	13.75	13.13	13.19
1202	NASDAQ	KLIC	Wed, Feb 26, 1997	12.88	13.50	12.56	13.31
1201	NASDAQ	KLIC	Tue, Feb 25, 1997	13.19	13.44	12.94	13.00
1200	NASDAQ	KLIC	Mon, Feb 24, 1997	12.75	13.94	12.63	13.25
1199	NASDAQ	KLIC	Fri, Feb 21, 1997	12.81	13.06	12.38	12.94
1198	NASDAQ	KLIC	Thu, Feb 20, 1997	13.81	13.81	12.81	12.81
1197	NASDAQ	KLIC	Wed, Feb 19, 1997	13.75	14.31	13.75	14.06
1196	NASDAQ	KLIC	Tue, Feb 18, 1997	13.25	13.88	12.88	13.75
1195	NASDAQ	KLIC	Fri, Feb 14, 1997	14.31	14.31	13.06	13.25
1194	NASDAQ	KLIC	Thu, Feb 13, 1997	13.75	15.00	13.50	14.25
1193	NASDAQ	KLIC	Wed, Feb 12, 1997	12.06	13.88	11.69	13.63
1192	NASDAQ	KLIC	Tue, Feb 11, 1997	11.38	11.88	11.19	11.69
1191	NASDAQ	KLIC	Mon, Feb 10, 1997	12.63	12.63	11.31	11.31
1190	NASDAQ	KLIC	Fri, Feb 7, 1997	12.63	12.88	12.25	12.50
1189	NASDAQ	KLIC	Thu, Feb 6, 1997	11.88	12.13	11.50	12.00
1188	NASDAQ	KLIC	Wed, Feb 5, 1997	12.38	12.56	11.50	11.56
1187	NASDAQ	KLIC	Tue, Feb 4, 1997	13.38	13.56	12.13	12.50
1186	NASDAQ	KLIC	Mon, Feb 3, 1997	13.69	13.75	13.38	13.38
1185	NASDAQ	KLIC	Fri, Jan 31, 1997	13.94	14.38	13.38	13.75
1184	NASDAQ	KLIC	Thu, Jan 30, 1997	13.75	14.06	13.75	14.00
1183	NASDAQ	KLIC	Wed, Jan 29, 1997	13.88	14.13	13.63	13.75
1182	NASDAQ	KLIC	Tue, Jan 28, 1997	13.56	14.38	13.56	13.88
1181	NASDAQ	KLIC	Mon, Jan 27, 1997	13.75	13.88	13.50	13.50
1180	NASDAQ	KLIC	Fri, Jan 24, 1997	14.06	14.31	13.25	13.94
1179	NASDAQ	KLIC	Thu, Jan 23, 1997	13.88	14.94	13.88	14.19
1178	NASDAQ	KLIC	Wed, Jan 22, 1997	13.63	14.50	13.00	13.69
1177	NASDAQ	KLIC	Tue, Jan 21, 1997	12.50	14.44	12.38	13.69
1176	NASDAQ	KLIC	Mon, Jan 20, 1997	12.06	12.63	12.06	12.50
1175	NASDAQ	KLIC	Fri, Jan 17, 1997	12.31	12.31	11.81	12.13
1174	NASDAQ	KLIC	Thu, Jan 16, 1997	12.38	12.63	12.25	12.31
1173	NASDAQ	KLIC	Wed, Jan 15, 1997	12.38	12.63	12.31	12.44
1172	NASDAQ	KLIC	Tue, Jan 14, 1997	12.50	12.56	12.25	12.44
1171	NASDAQ	KLIC	Mon, Jan 13, 1997	12.38	12.50	12.25	12.44
1170	NASDAQ	KLIC	Fri, Jan 10, 1997	11.94	12.56	11.75	12.31
1169	NASDAQ	KLIC	Thu, Jan 9, 1997	11.75	12.69	11.63	12.28
1168	NASDAQ	KLIC	Wed, Jan 8, 1997	10.63	11.06	10.63	11.06
1167	NASDAQ	KLIC	Tue, Jan 7, 1997	10.75	10.75	10.44	10.69
1166	NASDAQ	KLIC	Mon, Jan 6, 1997	10.50	11.13	10.50	10.81
1165	NASDAQ	KLIC	Fri, Jan 3, 1997	9.50	10.75	9.50	10.50
1164	NASDAQ	KLIC	Thu, Jan 2, 1997	9.50	9.63	9.38	9.50
1163	NASDAQ	KLIC	Tue, Dec 31, 1996	9.88	10.06	9.31	9.50
1162	NASDAQ	KLIC	Mon, Dec 30, 1996	9.88	10.00	9.75	9.88
1161	NASDAQ	KLIC	Fri, Dec 27, 1996	10.00	10.06	9.69	9.81
1160	NASDAQ	KLIC	Thu, Dec 26, 1996	10.00	10.13	9.75	9.88
1159	NASDAQ	KLIC	Tue, Dec 24, 1996	10.19	10.31	10.00	10.00
1158	NASDAQ	KLIC	Mon, Dec 23, 1996	10.31	10.38	10.19	10.19
1157	NASDAQ	KLIC	Fri, Dec 20, 1996	10.38	10.44	10.31	10.44
1156	NASDAQ	KLIC	Thu, Dec 19, 1996	10.44	10.56	10.25	10.44
1155	NASDAQ	KLIC	Wed, Dec 18, 1996	10.13	10.50	9.94	10.19
1154	NASDAQ	KLIC	Tue, Dec 17, 1996	9.88	9.94	9.75	9.75
1153	NASDAQ	KLIC	Mon, Dec 16, 1996	9.94	10.13	9.88	9.94
1152	NASDAQ	KLIC	Fri, Dec 13, 1996	10.00	10.19	9.88	9.88
1151	NASDAQ	KLIC	Thu, Dec 12, 1996	10.56	10.69	10.38	10.38
1150	NASDAQ	KLIC	Wed, Dec 11, 1996	10.38	10.63	10.00	10.63
1149	NASDAQ	KLIC	Tue, Dec 10, 1996	11.09	11.13	10.69	10.69
1148	NASDAQ	KLIC	Mon, Dec 9, 1996	10.19	11.00	10.19	11.00
1147	NASDAQ	KLIC	Fri, Dec 6, 1996	9.81	10.31	9.75	10.25
1146	NASDAQ	KLIC	Thu, Dec 5, 1996	10.31	10.44	10.19	10.38
1145	NASDAQ	KLIC	Wed, Dec 4, 1996	10.31	10.38	10.19	10.31
1144	NASDAQ	KLIC	Tue, Dec 3, 1996	10.38	10.81	10.25	10.44
1143	NASDAQ	KLIC	Mon, Dec 2, 1996	10.13	10.44	9.81	10.25
1142	NASDAQ	KLIC	Fri, Nov 29, 1996	10.00	10.25	10.00	10.13
1141	NASDAQ	KLIC	Wed, Nov 27, 1996	9.56	10.25	9.56	10.25
1140	NASDAQ	KLIC	Tue, Nov 26, 1996	10.00	10.06	9.38	9.63
1139	NASDAQ	KLIC	Mon, Nov 25, 1996	10.44	10.44	9.94	10.00
1138	NASDAQ	KLIC	Fri, Nov 22, 1996	10.69	10.94	10.19	10.44
1137	NASDAQ	KLIC	Thu, Nov 21, 1996	9.00	10.31	9.00	10.25
1136	NASDAQ	KLIC	Wed, Nov 20, 1996	9.00	9.00	8.56	8.63
1135	NASDAQ	KLIC	Tue, Nov 19, 1996	8.94	9.06	8.88	8.94
1134	NASDAQ	KLIC	Mon, Nov 18, 1996	9.00	9.13	8.75	8.94
1133	NASDAQ	KLIC	Fri, Nov 15, 1996	8.63	8.94	8.44	8.81
1132	NASDAQ	KLIC	Thu, Nov 14, 1996	8.00	8.56	7.56	8.56
1131	NASDAQ	KLIC	Wed, Nov 13, 1996	8.19	8.25	7.88	7.88
1130	NASDAQ	KLIC	Tue, Nov 12, 1996	8.44	8.44	8.06	8.19
1129	NASDAQ	KLIC	Mon, Nov 11, 1996	7.50	8.25	7.44	8.06
1128	NASDAQ	KLIC	Fri, Nov 8, 1996	7.31	7.69	7.13	7.63
1127	NASDAQ	KLIC	Thu, Nov 7, 1996	6.69	7.50	6.63	7.25
1126	NASDAQ	KLIC	Wed, Nov 6, 1996	6.38	6.69	6.38	6.63
1125	NASDAQ	KLIC	Tue, Nov 5, 1996	6.63	6.75	6.38	6.38
1124	NASDAQ	KLIC	Mon, Nov 4, 1996	6.25	6.63	6.25	6.56
1123	NASDAQ	KLIC	Fri, Nov 1, 1996	6.63	6.63	6.25	6.44
1122	NASDAQ	KLIC	Thu, Oct 31, 1996	6.56	6.75	6.50	6.56
1121	NASDAQ	KLIC	Wed, Oct 30, 1996	6.25	6.75	6.13	6.56
1120	NASDAQ	KLIC	Tue, Oct 29, 1996	6.63	6.69	6.00	6.25
1119	NASDAQ	KLIC	Mon, Oct 28, 1996	5.50	6.50	5.38	6.50
1118	NASDAQ	KLIC	Fri, Oct 25, 1996	5.69	5.88	5.56	5.69
1117	NASDAQ	KLIC	Thu, Oct 24, 1996	5.56	5.75	5.50	5.56
1116	NASDAQ	KLIC	Wed, Oct 23, 1996	5.31	5.63	5.25	5.50
1115	NASDAQ	KLIC	Tue, Oct 22, 1996	5.38	5.44	5.25	5.25
1114	NASDAQ	KLIC	Mon, Oct 21, 1996	5.56	5.56	5.38	5.50
1113	NASDAQ	KLIC	Fri, Oct 18, 1996	5.75	5.75	5.44	5.50
1112	NASDAQ	KLIC	Thu, Oct 17, 1996	5.94	5.94	5.63	5.66
1111	NASDAQ	KLIC	Wed, Oct 16, 1996	6.00	6.00	5.75	5.81
1110	NASDAQ	KLIC	Tue, Oct 15, 1996	6.00	6.13	5.75	6.00
1109	NASDAQ	KLIC	Mon, Oct 14, 1996	6.06	6.06	5.63	5.88
1108	NASDAQ	KLIC	Fri, Oct 11, 1996	6.00	6.06	5.88	6.00
1107	NASDAQ	KLIC	Thu, Oct 10, 1996	6.13	6.25	5.88	5.94
1106	NASDAQ	KLIC	Wed, Oct 9, 1996	6.38	6.38	6.06	6.09
1105	NASDAQ	KLIC	Tue, Oct 8, 1996	5.63	6.00	5.63	6.00
1104	NASDAQ	KLIC	Mon, Oct 7, 1996	5.50	5.56	5.38	5.56
1103	NASDAQ	KLIC	Fri, Oct 4, 1996	5.63	5.63	5.25	5.31
1102	NASDAQ	KLIC	Thu, Oct 3, 1996	5.56	5.56	5.25	5.50
1101	NASDAQ	KLIC	Wed, Oct 2, 1996	5.75	5.75	5.44	5.56
1100	NASDAQ	KLIC	Tue, Oct 1, 1996	5.81	5.81	5.44	5.63
1099	NASDAQ	KLIC	Mon, Sep 30, 1996	5.81	5.94	5.69	5.69
1098	NASDAQ	KLIC	Fri, Sep 27, 1996	6.25	6.31	5.81	5.81
1097	NASDAQ	KLIC	Thu, Sep 26, 1996	5.94	6.25	5.88	6.13
1096	NASDAQ	KLIC	Wed, Sep 25, 1996	5.75	6.00	5.75	5.94
1095	NASDAQ	KLIC	Tue, Sep 24, 1996	5.25	6.00	5.13	5.88
1094	NASDAQ	KLIC	Mon, Sep 23, 1996	5.25	5.25	5.06	5.19
1093	NASDAQ	KLIC	Fri, Sep 20, 1996	5.38	5.50	5.19	5.19
1092	NASDAQ	KLIC	Thu, Sep 19, 1996	5.00	5.38	4.94	5.38
1091	NASDAQ	KLIC	Wed, Sep 18, 1996	5.25	5.50	5.06	5.19
1090	NASDAQ	KLIC	Tue, Sep 17, 1996	4.88	5.38	4.88	5.38
1089	NASDAQ	KLIC	Mon, Sep 16, 1996	4.50	4.69	4.50	4.68
1088	NASDAQ	KLIC	Fri, Sep 13, 1996	4.63	4.63	4.44	4.44
1087	NASDAQ	KLIC	Thu, Sep 12, 1996	4.38	4.50	4.38	4.44
1086	NASDAQ	KLIC	Wed, Sep 11, 1996	4.56	4.56	4.38	4.47
1085	NASDAQ	KLIC	Tue, Sep 10, 1996	4.44	4.69	4.44	4.50
1084	NASDAQ	KLIC	Mon, Sep 9, 1996	4.69	4.69	4.50	4.50
1083	NASDAQ	KLIC	Fri, Sep 6, 1996	4.63	4.75	4.63	4.69
1082	NASDAQ	KLIC	Thu, Sep 5, 1996	4.69	4.75	4.63	4.66
1081	NASDAQ	KLIC	Wed, Sep 4, 1996	4.94	4.94	4.69	4.69
1080	NASDAQ	KLIC	Tue, Sep 3, 1996	4.75	4.94	4.69	4.75
1079	NASDAQ	KLIC	Fri, Aug 30, 1996	4.75	4.94	4.69	4.94
1078	NASDAQ	KLIC	Thu, Aug 29, 1996	5.00	5.00	4.75	4.94
1077	NASDAQ	KLIC	Wed, Aug 28, 1996	4.94	5.00	4.81	4.88
1076	NASDAQ	KLIC	Tue, Aug 27, 1996	4.88	5.13	4.81	4.94
1075	NASDAQ	KLIC	Mon, Aug 26, 1996	5.06	5.25	4.88	5.06
1074	NASDAQ	KLIC	Fri, Aug 23, 1996	5.06	5.06	4.88	5.00
1073	NASDAQ	KLIC	Thu, Aug 22, 1996	5.13	5.13	4.88	5.06
1072	NASDAQ	KLIC	Wed, Aug 21, 1996	5.00	5.13	5.00	5.06
1071	NASDAQ	KLIC	Tue, Aug 20, 1996	5.19	5.19	4.94	5.03
1070	NASDAQ	KLIC	Mon, Aug 19, 1996	5.25	5.38	5.00	5.00
1069	NASDAQ	KLIC	Fri, Aug 16, 1996	5.50	5.56	5.25	5.31
1068	NASDAQ	KLIC	Thu, Aug 15, 1996	5.69	5.69	5.50	5.53
1067	NASDAQ	KLIC	Wed, Aug 14, 1996	5.50	5.69	5.50	5.69
1066	NASDAQ	KLIC	Tue, Aug 13, 1996	5.69	5.75	5.50	5.63
1065	NASDAQ	KLIC	Mon, Aug 12, 1996	6.00	6.00	5.50	5.63
1064	NASDAQ	KLIC	Fri, Aug 9, 1996	5.69	6.00	5.50	6.00
1063	NASDAQ	KLIC	Thu, Aug 8, 1996	5.94	5.94	5.63	5.75
1062	NASDAQ	KLIC	Wed, Aug 7, 1996	5.25	6.00	5.13	5.94
1061	NASDAQ	KLIC	Tue, Aug 6, 1996	5.13	5.13	4.94	5.00
1060	NASDAQ	KLIC	Mon, Aug 5, 1996	5.25	5.44	5.00	5.00
1059	NASDAQ	KLIC	Fri, Aug 2, 1996	4.69	5.31	4.63	5.31
1058	NASDAQ	KLIC	Thu, Aug 1, 1996	4.75	4.75	4.50	4.56
1057	NASDAQ	KLIC	Wed, Jul 31, 1996	5.00	5.00	4.69	4.72
1056	NASDAQ	KLIC	Tue, Jul 30, 1996	5.00	5.13	4.75	4.84
1055	NASDAQ	KLIC	Mon, Jul 29, 1996	5.00	5.13	4.88	4.88
1054	NASDAQ	KLIC	Fri, Jul 26, 1996	4.63	5.38	4.50	5.00
1053	NASDAQ	KLIC	Thu, Jul 25, 1996	5.50	5.50	5.25	5.50
1052	NASDAQ	KLIC	Wed, Jul 24, 1996	5.00	5.50	4.81	5.38
1051	NASDAQ	KLIC	Tue, Jul 23, 1996	5.63	5.88	5.19	5.19
1050	NASDAQ	KLIC	Mon, Jul 22, 1996	5.69	5.81	5.63	5.63
1049	NASDAQ	KLIC	Fri, Jul 19, 1996	5.94	5.94	5.63	5.63
1048	NASDAQ	KLIC	Thu, Jul 18, 1996	6.13	6.25	6.00	6.06
1047	NASDAQ	KLIC	Wed, Jul 17, 1996	5.63	6.38	5.56	6.13
1046	NASDAQ	KLIC	Tue, Jul 16, 1996	5.19	5.63	5.06	5.38
1045	NASDAQ	KLIC	Mon, Jul 15, 1996	6.13	6.13	5.25	5.38
1044	NASDAQ	KLIC	Fri, Jul 12, 1996	6.13	6.19	6.00	6.16
1043	NASDAQ	KLIC	Thu, Jul 11, 1996	6.25	6.31	5.94	6.13
1042	NASDAQ	KLIC	Wed, Jul 10, 1996	6.88	6.88	6.19	6.44
1041	NASDAQ	KLIC	Tue, Jul 9, 1996	7.06	7.25	6.69	6.88
1040	NASDAQ	KLIC	Mon, Jul 8, 1996	7.13	7.13	6.88	7.00
1039	NASDAQ	KLIC	Fri, Jul 5, 1996	6.88	7.06	6.75	7.06
1038	NASDAQ	KLIC	Wed, Jul 3, 1996	7.19	7.25	6.94	7.00
1037	NASDAQ	KLIC	Tue, Jul 2, 1996	7.31	7.31	7.13	7.25
1036	NASDAQ	KLIC	Mon, Jul 1, 1996	7.31	7.31	7.19	7.28
1035	NASDAQ	KLIC	Fri, Jun 28, 1996	6.88	7.31	6.81	7.31
1034	NASDAQ	KLIC	Thu, Jun 27, 1996	6.63	6.88	6.63	6.75
1033	NASDAQ	KLIC	Wed, Jun 26, 1996	7.06	7.06	6.69	6.75
1032	NASDAQ	KLIC	Tue, Jun 25, 1996	7.50	7.50	6.88	7.13
1031	NASDAQ	KLIC	Mon, Jun 24, 1996	7.38	7.56	7.31	7.38
1030	NASDAQ	KLIC	Fri, Jun 21, 1996	7.75	7.75	7.38	7.38
1029	NASDAQ	KLIC	Thu, Jun 20, 1996	7.63	7.75	7.50	7.66
1028	NASDAQ	KLIC	Wed, Jun 19, 1996	7.88	7.88	7.63	7.63
1027	NASDAQ	KLIC	Tue, Jun 18, 1996	7.69	7.81	7.63	7.69
1026	NASDAQ	KLIC	Mon, Jun 17, 1996	7.88	8.00	7.69	7.77
1025	NASDAQ	KLIC	Fri, Jun 14, 1996	7.88	8.00	7.88	7.88
1024	NASDAQ	KLIC	Thu, Jun 13, 1996	8.00	8.19	7.88	8.00
1023	NASDAQ	KLIC	Wed, Jun 12, 1996	8.19	8.19	8.00	8.06
1022	NASDAQ	KLIC	Tue, Jun 11, 1996	8.06	8.25	8.00	8.06
1021	NASDAQ	KLIC	Mon, Jun 10, 1996	8.31	8.31	8.06	8.25
1020	NASDAQ	KLIC	Fri, Jun 7, 1996	8.00	8.38	7.88	8.19
1019	NASDAQ	KLIC	Thu, Jun 6, 1996	8.75	8.75	8.19	8.19
1018	NASDAQ	KLIC	Wed, Jun 5, 1996	8.88	9.00	8.63	8.75
1017	NASDAQ	KLIC	Tue, Jun 4, 1996	8.88	9.06	8.88	8.94
1016	NASDAQ	KLIC	Mon, Jun 3, 1996	8.75	9.00	8.75	8.88
1015	NASDAQ	KLIC	Fri, May 31, 1996	9.00	9.00	8.75	8.75
1014	NASDAQ	KLIC	Thu, May 30, 1996	8.75	8.75	8.63	8.75
1013	NASDAQ	KLIC	Wed, May 29, 1996	8.63	8.88	8.50	8.63
1012	NASDAQ	KLIC	Tue, May 28, 1996	8.50	8.75	8.25	8.63
1011	NASDAQ	KLIC	Fri, May 24, 1996	8.88	8.88	8.50	8.51
1010	NASDAQ	KLIC	Thu, May 23, 1996	8.88	9.00	8.50	8.88
1009	NASDAQ	KLIC	Wed, May 22, 1996	8.94	9.00	8.88	8.88
1008	NASDAQ	KLIC	Tue, May 21, 1996	8.94	9.13	8.94	8.94
1007	NASDAQ	KLIC	Mon, May 20, 1996	9.25	9.25	8.88	9.06
1006	NASDAQ	KLIC	Fri, May 17, 1996	9.25	9.25	9.13	9.19
1005	NASDAQ	KLIC	Thu, May 16, 1996	9.13	9.25	9.00	9.13
1004	NASDAQ	KLIC	Wed, May 15, 1996	9.38	9.38	9.13	9.19
1003	NASDAQ	KLIC	Tue, May 14, 1996	9.38	9.38	9.05	9.38
1002	NASDAQ	KLIC	Mon, May 13, 1996	9.00	9.25	9.00	9.25
1001	NASDAQ	KLIC	Fri, May 10, 1996	9.25	9.25	9.00	9.06
1000	NASDAQ	KLIC	Thu, May 9, 1996	8.88	9.25	8.88	9.25
999	NASDAQ	KLIC	Wed, May 8, 1996	9.00	9.25	8.88	9.00
998	NASDAQ	KLIC	Tue, May 7, 1996	9.38	9.63	9.00	9.13
997	NASDAQ	KLIC	Mon, May 6, 1996	9.63	9.63	9.25	9.38
996	NASDAQ	KLIC	Fri, May 3, 1996	9.75	9.75	9.50	9.63
995	NASDAQ	KLIC	Thu, May 2, 1996	10.00	10.25	9.25	9.50
994	NASDAQ	KLIC	Wed, May 1, 1996	9.38	9.75	8.88	9.69
993	NASDAQ	KLIC	Tue, Apr 30, 1996	9.25	9.50	9.00	9.50
992	NASDAQ	KLIC	Mon, Apr 29, 1996	10.25	10.25	9.63	9.63
991	NASDAQ	KLIC	Fri, Apr 26, 1996	10.25	10.25	9.88	10.19
990	NASDAQ	KLIC	Thu, Apr 25, 1996	10.00	10.00	9.63	9.88
989	NASDAQ	KLIC	Wed, Apr 24, 1996	8.75	9.63	8.63	9.50
988	NASDAQ	KLIC	Tue, Apr 23, 1996	8.63	8.75	8.38	8.63
987	NASDAQ	KLIC	Mon, Apr 22, 1996	8.31	8.63	8.25	8.56
986	NASDAQ	KLIC	Fri, Apr 19, 1996	8.25	8.44	8.00	8.31
985	NASDAQ	KLIC	Thu, Apr 18, 1996	8.25	8.50	8.25	8.25
984	NASDAQ	KLIC	Wed, Apr 17, 1996	8.13	8.38	7.94	8.31
983	NASDAQ	KLIC	Tue, Apr 16, 1996	7.88	8.13	7.88	8.00
982	NASDAQ	KLIC	Mon, Apr 15, 1996	7.88	8.25	7.88	7.88
981	NASDAQ	KLIC	Fri, Apr 12, 1996	7.88	8.13	7.88	8.13
980	NASDAQ	KLIC	Thu, Apr 11, 1996	8.13	8.31	7.75	7.88
979	NASDAQ	KLIC	Wed, Apr 10, 1996	8.25	8.38	8.00	8.13
978	NASDAQ	KLIC	Tue, Apr 9, 1996	8.25	8.50	8.06	8.50
977	NASDAQ	KLIC	Mon, Apr 8, 1996	7.56	8.00	7.50	8.00
976	NASDAQ	KLIC	Thu, Apr 4, 1996	7.88	7.88	7.50	7.81
975	NASDAQ	KLIC	Wed, Apr 3, 1996	7.50	7.88	7.44	7.88
974	NASDAQ	KLIC	Tue, Apr 2, 1996	8.00	8.00	7.44	7.50
973	NASDAQ	KLIC	Mon, Apr 1, 1996	7.88	8.13	7.75	7.76
972	NASDAQ	KLIC	Fri, Mar 29, 1996	7.88	8.13	7.88	7.88
971	NASDAQ	KLIC	Thu, Mar 28, 1996	8.13	8.13	7.81	7.88
970	NASDAQ	KLIC	Wed, Mar 27, 1996	7.88	8.13	7.88	8.13
969	NASDAQ	KLIC	Tue, Mar 26, 1996	8.13	8.25	7.88	8.00
968	NASDAQ	KLIC	Mon, Mar 25, 1996	8.13	8.50	8.13	8.16
967	NASDAQ	KLIC	Fri, Mar 22, 1996	8.50	8.50	8.13	8.38
966	NASDAQ	KLIC	Thu, Mar 21, 1996	8.38	8.38	8.13	8.25
965	NASDAQ	KLIC	Wed, Mar 20, 1996	8.50	8.75	8.25	8.38
964	NASDAQ	KLIC	Tue, Mar 19, 1996	8.75	8.75	8.38	8.56
963	NASDAQ	KLIC	Mon, Mar 18, 1996	8.25	8.63	8.13	8.44
962	NASDAQ	KLIC	Fri, Mar 15, 1996	7.88	8.00	7.56	7.88
961	NASDAQ	KLIC	Thu, Mar 14, 1996	8.00	8.13	7.75	7.88
960	NASDAQ	KLIC	Wed, Mar 13, 1996	9.75	9.75	9.00	9.38
959	NASDAQ	KLIC	Tue, Mar 12, 1996	10.25	10.25	9.50	9.53
958	NASDAQ	KLIC	Mon, Mar 11, 1996	10.25	10.50	10.00	10.00
957	NASDAQ	KLIC	Fri, Mar 8, 1996	9.88	10.38	9.75	10.25
956	NASDAQ	KLIC	Thu, Mar 7, 1996	10.38	10.38	10.00	10.00
955	NASDAQ	KLIC	Wed, Mar 6, 1996	10.56	10.56	10.13	10.38
954	NASDAQ	KLIC	Tue, Mar 5, 1996	10.75	10.75	10.38	10.44
953	NASDAQ	KLIC	Mon, Mar 4, 1996	11.00	11.13	10.63	10.75
952	NASDAQ	KLIC	Fri, Mar 1, 1996	10.38	10.75	10.00	10.75
951	NASDAQ	KLIC	Thu, Feb 29, 1996	10.38	10.38	10.13	10.38
950	NASDAQ	KLIC	Wed, Feb 28, 1996	10.75	11.13	10.25	10.38
949	NASDAQ	KLIC	Tue, Feb 27, 1996	11.00	11.13	10.63	10.69
948	NASDAQ	KLIC	Mon, Feb 26, 1996	11.25	11.41	10.75	11.00
947	NASDAQ	KLIC	Fri, Feb 23, 1996	11.63	11.75	11.25	11.38
946	NASDAQ	KLIC	Thu, Feb 22, 1996	11.00	11.50	10.81	11.44
945	NASDAQ	KLIC	Wed, Feb 21, 1996	10.38	10.63	10.19	10.63
944	NASDAQ	KLIC	Tue, Feb 20, 1996	10.13	10.25	9.88	10.09
943	NASDAQ	KLIC	Fri, Feb 16, 1996	10.00	10.25	10.00	10.13
942	NASDAQ	KLIC	Thu, Feb 15, 1996	10.38	10.38	10.00	10.13
941	NASDAQ	KLIC	Wed, Feb 14, 1996	10.88	11.00	9.88	10.25
940	NASDAQ	KLIC	Tue, Feb 13, 1996	10.63	11.13	10.63	10.94
939	NASDAQ	KLIC	Mon, Feb 12, 1996	11.38	11.63	11.13	11.38
938	NASDAQ	KLIC	Fri, Feb 9, 1996	11.63	11.75	10.88	11.06
937	NASDAQ	KLIC	Thu, Feb 8, 1996	11.81	11.88	11.38	11.63
936	NASDAQ	KLIC	Wed, Feb 7, 1996	12.63	12.75	11.38	11.50
935	NASDAQ	KLIC	Tue, Feb 6, 1996	12.00	12.63	11.88	12.44
934	NASDAQ	KLIC	Mon, Feb 5, 1996	11.75	11.88	11.50	11.75
933	NASDAQ	KLIC	Fri, Feb 2, 1996	11.50	11.88	11.25	11.50
932	NASDAQ	KLIC	Thu, Feb 1, 1996	11.25	11.50	10.50	11.38
931	NASDAQ	KLIC	Wed, Jan 31, 1996	12.81	12.88	10.38	10.94
930	NASDAQ	KLIC	Tue, Jan 30, 1996	12.50	12.50	11.75	12.13
929	NASDAQ	KLIC	Mon, Jan 29, 1996	12.50	12.50	11.50	11.81
928	NASDAQ	KLIC	Fri, Jan 26, 1996	10.63	11.25	10.50	11.13
927	NASDAQ	KLIC	Thu, Jan 25, 1996	10.75	11.25	10.38	10.75
926	NASDAQ	KLIC	Wed, Jan 24, 1996	11.13	11.25	10.13	10.69
925	NASDAQ	KLIC	Tue, Jan 23, 1996	11.38	11.63	10.88	10.88
924	NASDAQ	KLIC	Mon, Jan 22, 1996	10.63	11.50	10.38	11.00
923	NASDAQ	KLIC	Fri, Jan 19, 1996	10.38	10.63	9.88	10.38
922	NASDAQ	KLIC	Thu, Jan 18, 1996	9.38	9.75	9.00	9.50
921	NASDAQ	KLIC	Wed, Jan 17, 1996	8.75	9.25	8.63	9.13
920	NASDAQ	KLIC	Tue, Jan 16, 1996	9.13	9.38	8.13	9.25
919	NASDAQ	KLIC	Mon, Jan 15, 1996	9.88	9.88	8.75	8.88
918	NASDAQ	KLIC	Fri, Jan 12, 1996	10.00	10.13	9.50	9.50
917	NASDAQ	KLIC	Thu, Jan 11, 1996	9.63	10.00	9.38	9.94
916	NASDAQ	KLIC	Wed, Jan 10, 1996	9.38	10.00	8.75	9.00
915	NASDAQ	KLIC	Tue, Jan 9, 1996	11.25	11.50	9.25	9.63
914	NASDAQ	KLIC	Mon, Jan 8, 1996	11.25	11.38	11.13	11.13
913	NASDAQ	KLIC	Fri, Jan 5, 1996	11.13	11.63	11.00	11.38
912	NASDAQ	KLIC	Thu, Jan 4, 1996	11.63	11.63	11.13	11.25
911	NASDAQ	KLIC	Wed, Jan 3, 1996	11.31	11.63	11.25	11.63
910	NASDAQ	KLIC	Tue, Jan 2, 1996	11.63	11.88	11.50	11.50
909	NASDAQ	KLIC	Fri, Dec 29, 1995	11.38	11.88	11.00	11.63
908	NASDAQ	KLIC	Thu, Dec 28, 1995	11.63	12.00	11.25	11.50
907	NASDAQ	KLIC	Wed, Dec 27, 1995	12.00	12.38	11.88	12.00
906	NASDAQ	KLIC	Tue, Dec 26, 1995	12.13	12.63	11.88	12.06
905	NASDAQ	KLIC	Fri, Dec 22, 1995	12.25	12.50	11.63	12.28
904	NASDAQ	KLIC	Thu, Dec 21, 1995	13.13	13.13	11.88	12.38
903	NASDAQ	KLIC	Wed, Dec 20, 1995	13.00	13.50	12.63	13.00
902	NASDAQ	KLIC	Tue, Dec 19, 1995	12.38	12.38	11.75	12.38
901	NASDAQ	KLIC	Mon, Dec 18, 1995	12.63	13.13	11.38	11.81
900	NASDAQ	KLIC	Fri, Dec 15, 1995	12.63	13.13	11.88	13.00
899	NASDAQ	KLIC	Thu, Dec 14, 1995	13.38	13.75	12.88	13.00
898	NASDAQ	KLIC	Wed, Dec 13, 1995	13.75	13.75	13.38	13.63
897	NASDAQ	KLIC	Tue, Dec 12, 1995	13.88	14.13	13.38	13.44
896	NASDAQ	KLIC	Mon, Dec 11, 1995	13.50	13.88	12.88	13.88
895	NASDAQ	KLIC	Fri, Dec 8, 1995	13.38	13.63	12.88	13.19
894	NASDAQ	KLIC	Thu, Dec 7, 1995	13.13	13.75	12.75	13.63
893	NASDAQ	KLIC	Wed, Dec 6, 1995	14.25	14.25	13.00	13.00
892	NASDAQ	KLIC	Tue, Dec 5, 1995	14.75	14.75	14.00	14.00
891	NASDAQ	KLIC	Mon, Dec 4, 1995	14.00	14.63	13.63	14.25
890	NASDAQ	KLIC	Fri, Dec 1, 1995	14.00	14.25	13.63	14.00
889	NASDAQ	KLIC	Thu, Nov 30, 1995	14.25	14.88	13.75	14.19
888	NASDAQ	KLIC	Wed, Nov 29, 1995	14.38	15.00	13.75	14.38
887	NASDAQ	KLIC	Tue, Nov 28, 1995	13.63	14.38	13.25	14.28
886	NASDAQ	KLIC	Mon, Nov 27, 1995	13.88	14.00	13.00	13.56
885	NASDAQ	KLIC	Fri, Nov 24, 1995	14.00	14.00	13.50	13.88
884	NASDAQ	KLIC	Wed, Nov 22, 1995	14.50	15.13	13.88	13.94
883	NASDAQ	KLIC	Tue, Nov 21, 1995	13.50	14.25	12.88	14.25
882	NASDAQ	KLIC	Mon, Nov 20, 1995	14.75	14.88	13.75	13.75
881	NASDAQ	KLIC	Fri, Nov 17, 1995	15.50	15.50	13.88	14.50
880	NASDAQ	KLIC	Thu, Nov 16, 1995	17.25	17.25	15.00	15.50
879	NASDAQ	KLIC	Wed, Nov 15, 1995	16.88	16.88	16.00	16.75
878	NASDAQ	KLIC	Tue, Nov 14, 1995	16.25	17.00	16.00	16.50
877	NASDAQ	KLIC	Mon, Nov 13, 1995	16.00	16.75	16.00	16.50
876	NASDAQ	KLIC	Fri, Nov 10, 1995	16.00	16.63	15.88	16.19
875	NASDAQ	KLIC	Thu, Nov 9, 1995	16.38	16.50	15.50	16.00
874	NASDAQ	KLIC	Wed, Nov 8, 1995	14.63	15.25	14.38	14.38
873	NASDAQ	KLIC	Tue, Nov 7, 1995	14.63	15.38	14.38	14.50
872	NASDAQ	KLIC	Mon, Nov 6, 1995	15.00	15.38	14.88	15.25
871	NASDAQ	KLIC	Fri, Nov 3, 1995	14.63	15.25	14.25	14.75
870	NASDAQ	KLIC	Thu, Nov 2, 1995	14.00	14.63	13.88	14.11
869	NASDAQ	KLIC	Wed, Nov 1, 1995	14.00	15.25	13.13	13.38
868	NASDAQ	KLIC	Tue, Oct 31, 1995	17.13	18.00	16.88	17.50
867	NASDAQ	KLIC	Mon, Oct 30, 1995	16.63	17.13	16.63	17.13
866	NASDAQ	KLIC	Fri, Oct 27, 1995	16.75	17.00	16.38	16.88
865	NASDAQ	KLIC	Thu, Oct 26, 1995	16.75	17.13	15.75	16.38
864	NASDAQ	KLIC	Wed, Oct 25, 1995	17.50	18.00	17.00	17.25
863	NASDAQ	KLIC	Tue, Oct 24, 1995	17.75	18.13	17.25	17.88
862	NASDAQ	KLIC	Mon, Oct 23, 1995	15.25	17.13	15.00	17.13
861	NASDAQ	KLIC	Fri, Oct 20, 1995	16.63	16.88	16.00	16.38
860	NASDAQ	KLIC	Thu, Oct 19, 1995	16.13	17.25	15.38	16.50
859	NASDAQ	KLIC	Wed, Oct 18, 1995	15.00	15.88	14.88	15.75
858	NASDAQ	KLIC	Tue, Oct 17, 1995	13.50	14.38	13.50	14.25
857	NASDAQ	KLIC	Mon, Oct 16, 1995	14.50	14.50	13.50	13.63
856	NASDAQ	KLIC	Fri, Oct 13, 1995	14.88	15.13	14.25	14.75
855	NASDAQ	KLIC	Thu, Oct 12, 1995	14.25	14.75	13.38	14.63
854	NASDAQ	KLIC	Wed, Oct 11, 1995	15.25	15.25	13.75	13.75
853	NASDAQ	KLIC	Tue, Oct 10, 1995	11.75	14.63	11.00	13.50
852	NASDAQ	KLIC	Mon, Oct 9, 1995	16.25	16.25	13.75	13.88
851	NASDAQ	KLIC	Fri, Oct 6, 1995	16.75	16.75	16.00	16.00
850	NASDAQ	KLIC	Thu, Oct 5, 1995	16.13	16.50	15.38	16.38
849	NASDAQ	KLIC	Wed, Oct 4, 1995	16.38	16.75	15.63	16.00
848	NASDAQ	KLIC	Tue, Oct 3, 1995	17.88	17.88	16.25	17.38
847	NASDAQ	KLIC	Mon, Oct 2, 1995	18.38	18.38	17.38	17.88
846	NASDAQ	KLIC	Fri, Sep 29, 1995	19.25	19.50	18.25	18.25
845	NASDAQ	KLIC	Thu, Sep 28, 1995	18.25	18.75	17.50	18.50
844	NASDAQ	KLIC	Wed, Sep 27, 1995	18.25	18.25	16.44	17.63
843	NASDAQ	KLIC	Tue, Sep 26, 1995	18.38	19.00	17.75	18.38
842	NASDAQ	KLIC	Mon, Sep 25, 1995	19.50	19.50	18.13	18.38
841	NASDAQ	KLIC	Fri, Sep 22, 1995	19.00	19.50	19.00	19.13
840	NASDAQ	KLIC	Thu, Sep 21, 1995	19.50	20.25	19.13	19.75
839	NASDAQ	KLIC	Wed, Sep 20, 1995	20.63	21.63	19.63	19.75
838	NASDAQ	KLIC	Tue, Sep 19, 1995	19.88	20.69	19.88	20.13
837	NASDAQ	KLIC	Mon, Sep 18, 1995	19.25	20.38	18.88	20.25
836	NASDAQ	KLIC	Fri, Sep 15, 1995	20.25	20.44	19.13	19.25
835	NASDAQ	KLIC	Thu, Sep 14, 1995	21.75	21.75	21.00	21.13
834	NASDAQ	KLIC	Wed, Sep 13, 1995	21.38	21.88	21.13	21.63
833	NASDAQ	KLIC	Tue, Sep 12, 1995	21.50	22.13	21.38	21.50
832	NASDAQ	KLIC	Mon, Sep 11, 1995	21.50	21.88	21.00	21.50
831	NASDAQ	KLIC	Fri, Sep 8, 1995	21.00	21.38	20.63	21.38
830	NASDAQ	KLIC	Thu, Sep 7, 1995	21.13	21.75	20.75	21.25
829	NASDAQ	KLIC	Wed, Sep 6, 1995	21.00	21.50	20.63	20.75
828	NASDAQ	KLIC	Tue, Sep 5, 1995	20.25	20.88	19.50	20.63
827	NASDAQ	KLIC	Fri, Sep 1, 1995	19.88	20.00	19.38	19.63
826	NASDAQ	KLIC	Thu, Aug 31, 1995	19.38	20.00	19.38	19.44
825	NASDAQ	KLIC	Wed, Aug 30, 1995	19.00	20.00	18.38	19.75
824	NASDAQ	KLIC	Tue, Aug 29, 1995	18.63	19.38	16.75	18.38
823	NASDAQ	KLIC	Mon, Aug 28, 1995	19.75	19.75	18.75	19.25
822	NASDAQ	KLIC	Fri, Aug 25, 1995	19.38	20.00	19.25	19.38
821	NASDAQ	KLIC	Thu, Aug 24, 1995	20.75	20.75	19.38	19.50
820	NASDAQ	KLIC	Wed, Aug 23, 1995	20.25	20.75	19.50	19.56
819	NASDAQ	KLIC	Tue, Aug 22, 1995	19.50	19.75	18.50	19.50
818	NASDAQ	KLIC	Mon, Aug 21, 1995	20.50	20.50	18.38	18.75
817	NASDAQ	KLIC	Fri, Aug 18, 1995	21.13	21.13	19.75	20.25
816	NASDAQ	KLIC	Thu, Aug 17, 1995	21.50	21.50	20.50	20.50
815	NASDAQ	KLIC	Wed, Aug 16, 1995	20.38	21.50	20.38	21.00
814	NASDAQ	KLIC	Tue, Aug 15, 1995	20.75	20.88	19.63	20.13
813	NASDAQ	KLIC	Mon, Aug 14, 1995	20.63	21.00	20.13	20.75
812	NASDAQ	KLIC	Fri, Aug 11, 1995	20.25	20.63	19.50	20.50
811	NASDAQ	KLIC	Thu, Aug 10, 1995	19.38	20.00	19.00	19.00
810	NASDAQ	KLIC	Wed, Aug 9, 1995	19.75	20.25	19.63	19.75
809	NASDAQ	KLIC	Tue, Aug 8, 1995	20.13	20.50	19.50	19.88
808	NASDAQ	KLIC	Mon, Aug 7, 1995	19.88	20.13	19.13	20.06
807	NASDAQ	KLIC	Fri, Aug 4, 1995	19.50	20.00	18.88	19.75
806	NASDAQ	KLIC	Thu, Aug 3, 1995	18.00	19.00	17.13	18.94
805	NASDAQ	KLIC	Wed, Aug 2, 1995	20.00	20.75	18.75	18.75
804	NASDAQ	KLIC	Tue, Aug 1, 1995	20.50	21.00	19.00	19.88
803	NASDAQ	KLIC	Mon, Jul 31, 1995	21.25	21.25	19.38	20.50
802	NASDAQ	KLIC	Fri, Jul 28, 1995	21.53	21.53	20.81	21.19
801	NASDAQ	KLIC	Thu, Jul 27, 1995	21.38	22.00	21.06	21.25
800	NASDAQ	KLIC	Wed, Jul 26, 1995	22.25	22.25	21.13	21.13
799	NASDAQ	KLIC	Tue, Jul 25, 1995	22.69	22.69	21.50	22.19
798	NASDAQ	KLIC	Mon, Jul 24, 1995	21.00	21.63	20.38	21.63
797	NASDAQ	KLIC	Fri, Jul 21, 1995	20.19	20.69	19.13	19.88
796	NASDAQ	KLIC	Thu, Jul 20, 1995	17.94	18.25	16.63	18.06
795	NASDAQ	KLIC	Wed, Jul 19, 1995	17.06	18.19	16.94	17.44
794	NASDAQ	KLIC	Tue, Jul 18, 1995	19.69	19.69	18.13	18.25
793	NASDAQ	KLIC	Mon, Jul 17, 1995	19.63	20.28	19.25	19.69
792	NASDAQ	KLIC	Fri, Jul 14, 1995	17.91	19.41	17.63	19.34
791	NASDAQ	KLIC	Thu, Jul 13, 1995	18.75	18.94	18.28	18.41
790	NASDAQ	KLIC	Wed, Jul 12, 1995	17.31	18.66	17.31	18.56
789	NASDAQ	KLIC	Tue, Jul 11, 1995	17.38	17.50	17.00	17.03
788	NASDAQ	KLIC	Mon, Jul 10, 1995	17.31	17.91	17.25	17.63
787	NASDAQ	KLIC	Fri, Jul 7, 1995	16.69	17.25	16.64	17.22
786	NASDAQ	KLIC	Thu, Jul 6, 1995	16.56	16.88	16.44	16.72
785	NASDAQ	KLIC	Wed, Jul 5, 1995	16.38	16.78	16.38	16.44
784	NASDAQ	KLIC	Mon, Jul 3, 1995	16.56	16.63	16.38	16.41
783	NASDAQ	KLIC	Fri, Jun 30, 1995	16.03	16.69	16.00	16.58
782	NASDAQ	KLIC	Thu, Jun 29, 1995	15.16	15.91	15.09	15.91
781	NASDAQ	KLIC	Wed, Jun 28, 1995	15.34	15.34	14.84	15.13
780	NASDAQ	KLIC	Tue, Jun 27, 1995	15.00	15.59	14.97	15.31
779	NASDAQ	KLIC	Mon, Jun 26, 1995	15.13	15.25	14.88	15.03
778	NASDAQ	KLIC	Fri, Jun 23, 1995	15.19	15.44	15.06	15.25
777	NASDAQ	KLIC	Thu, Jun 22, 1995	14.94	15.22	14.84	15.19
776	NASDAQ	KLIC	Wed, Jun 21, 1995	15.38	15.47	14.69	14.84
775	NASDAQ	KLIC	Tue, Jun 20, 1995	14.44	15.44	14.30	15.16
774	NASDAQ	KLIC	Mon, Jun 19, 1995	12.91	14.13	12.84	14.06
773	NASDAQ	KLIC	Fri, Jun 16, 1995	12.22	12.84	12.06	12.81
772	NASDAQ	KLIC	Thu, Jun 15, 1995	12.13	12.34	12.13	12.25
771	NASDAQ	KLIC	Wed, Jun 14, 1995	12.09	12.28	12.06	12.13
770	NASDAQ	KLIC	Tue, Jun 13, 1995	12.13	12.25	11.91	12.16
769	NASDAQ	KLIC	Mon, Jun 12, 1995	11.75	11.94	11.72	11.81
768	NASDAQ	KLIC	Fri, Jun 9, 1995	11.47	11.75	11.25	11.66
767	NASDAQ	KLIC	Thu, Jun 8, 1995	11.53	11.56	11.28	11.47
766	NASDAQ	KLIC	Wed, Jun 7, 1995	11.53	11.56	11.34	11.53
765	NASDAQ	KLIC	Tue, Jun 6, 1995	11.53	11.59	11.34	11.47
764	NASDAQ	KLIC	Mon, Jun 5, 1995	11.56	12.03	11.53	11.56
763	NASDAQ	KLIC	Fri, Jun 2, 1995	11.19	11.53	10.75	11.41
762	NASDAQ	KLIC	Thu, Jun 1, 1995	10.59	11.31	10.47	11.25
761	NASDAQ	KLIC	Wed, May 31, 1995	10.81	10.88	10.34	10.63
760	NASDAQ	KLIC	Tue, May 30, 1995	11.44	11.44	10.78	10.78
759	NASDAQ	KLIC	Fri, May 26, 1995	11.56	11.69	11.31	11.38
758	NASDAQ	KLIC	Thu, May 25, 1995	12.00	12.22	11.72	11.78
757	NASDAQ	KLIC	Wed, May 24, 1995	12.50	12.56	12.00	12.00
756	NASDAQ	KLIC	Tue, May 23, 1995	12.50	12.50	12.38	12.38
755	NASDAQ	KLIC	Mon, May 22, 1995	12.44	12.56	12.38	12.38
754	NASDAQ	KLIC	Fri, May 19, 1995	12.25	12.56	12.22	12.47
753	NASDAQ	KLIC	Thu, May 18, 1995	12.13	12.72	11.94	12.34
752	NASDAQ	KLIC	Wed, May 17, 1995	11.56	12.34	11.50	12.06
751	NASDAQ	KLIC	Tue, May 16, 1995	10.97	11.22	10.97	11.14
750	NASDAQ	KLIC	Mon, May 15, 1995	11.44	11.44	10.88	10.94
749	NASDAQ	KLIC	Fri, May 12, 1995	11.38	11.53	11.34	11.34
748	NASDAQ	KLIC	Thu, May 11, 1995	11.00	11.63	11.00	11.47
747	NASDAQ	KLIC	Wed, May 10, 1995	11.31	11.44	10.95	11.13
746	NASDAQ	KLIC	Tue, May 9, 1995	11.59	11.59	11.00	11.03
745	NASDAQ	KLIC	Mon, May 8, 1995	10.94	11.69	10.94	11.47
744	NASDAQ	KLIC	Fri, May 5, 1995	11.41	11.66	11.16	11.19
743	NASDAQ	KLIC	Thu, May 4, 1995	11.19	11.69	11.16	11.28
742	NASDAQ	KLIC	Wed, May 3, 1995	10.09	11.06	10.00	11.06
741	NASDAQ	KLIC	Tue, May 2, 1995	10.06	10.47	9.94	10.06
740	NASDAQ	KLIC	Mon, May 1, 1995	10.63	10.94	9.94	10.00
739	NASDAQ	KLIC	Fri, Apr 28, 1995	10.38	10.91	9.88	10.59
738	NASDAQ	KLIC	Thu, Apr 27, 1995	10.94	11.03	10.06	10.34
737	NASDAQ	KLIC	Wed, Apr 26, 1995	9.94	11.06	9.88	10.88
736	NASDAQ	KLIC	Tue, Apr 25, 1995	9.25	10.09	9.25	10.00
735	NASDAQ	KLIC	Mon, Apr 24, 1995	8.34	9.00	8.28	8.88
734	NASDAQ	KLIC	Fri, Apr 21, 1995	8.44	8.53	8.31	8.38
733	NASDAQ	KLIC	Thu, Apr 20, 1995	8.50	8.59	8.22	8.31
732	NASDAQ	KLIC	Wed, Apr 19, 1995	8.47	8.63	8.13	8.38
731	NASDAQ	KLIC	Tue, Apr 18, 1995	8.28	8.53	7.81	8.50
730	NASDAQ	KLIC	Mon, Apr 17, 1995	8.66	8.69	8.19	8.22
729	NASDAQ	KLIC	Thu, Apr 13, 1995	9.13	9.25	8.53	8.56
728	NASDAQ	KLIC	Wed, Apr 12, 1995	8.50	9.06	8.44	9.02
727	NASDAQ	KLIC	Tue, Apr 11, 1995	8.17	8.47	8.00	8.47
726	NASDAQ	KLIC	Mon, Apr 10, 1995	7.75	8.22	7.69	8.06
725	NASDAQ	KLIC	Fri, Apr 7, 1995	7.56	7.78	7.38	7.66
724	NASDAQ	KLIC	Thu, Apr 6, 1995	7.13	7.22	7.09	7.13
723	NASDAQ	KLIC	Wed, Apr 5, 1995	6.81	7.16	6.81	7.13
722	NASDAQ	KLIC	Tue, Apr 4, 1995	6.72	6.91	6.72	6.83
721	NASDAQ	KLIC	Mon, Apr 3, 1995	6.84	6.88	6.63	6.70
720	NASDAQ	KLIC	Fri, Mar 31, 1995	6.81	6.94	6.69	6.84
719	NASDAQ	KLIC	Thu, Mar 30, 1995	7.13	7.19	6.91	7.06
718	NASDAQ	KLIC	Wed, Mar 29, 1995	7.25	7.25	7.09	7.13
717	NASDAQ	KLIC	Tue, Mar 28, 1995	7.25	7.31	7.16	7.19
716	NASDAQ	KLIC	Mon, Mar 27, 1995	7.25	7.31	7.13	7.25
715	NASDAQ	KLIC	Fri, Mar 24, 1995	7.38	7.44	7.25	7.25
714	NASDAQ	KLIC	Thu, Mar 23, 1995	6.84	7.41	6.81	7.34
713	NASDAQ	KLIC	Wed, Mar 22, 1995	6.69	6.91	6.59	6.88
712	NASDAQ	KLIC	Tue, Mar 21, 1995	6.59	6.88	6.59	6.69
711	NASDAQ	KLIC	Mon, Mar 20, 1995	6.59	6.72	6.56	6.59
710	NASDAQ	KLIC	Fri, Mar 17, 1995	6.72	6.75	6.59	6.61
709	NASDAQ	KLIC	Thu, Mar 16, 1995	6.19	6.63	6.19	6.59
708	NASDAQ	KLIC	Wed, Mar 15, 1995	6.38	6.44	6.34	6.34
707	NASDAQ	KLIC	Tue, Mar 14, 1995	6.50	6.56	6.38	6.41
706	NASDAQ	KLIC	Mon, Mar 13, 1995	5.97	6.53	5.97	6.45
705	NASDAQ	KLIC	Fri, Mar 10, 1995	5.88	6.09	5.81	6.03
704	NASDAQ	KLIC	Thu, Mar 9, 1995	6.03	6.06	5.81	5.84
703	NASDAQ	KLIC	Wed, Mar 8, 1995	5.88	6.03	5.81	5.94
702	NASDAQ	KLIC	Tue, Mar 7, 1995	6.13	6.13	5.72	5.84
701	NASDAQ	KLIC	Mon, Mar 6, 1995	6.25	6.31	6.13	6.13
700	NASDAQ	KLIC	Fri, Mar 3, 1995	6.44	6.47	6.22	6.33
699	NASDAQ	KLIC	Thu, Mar 2, 1995	6.41	6.53	6.34	6.44
698	NASDAQ	KLIC	Wed, Mar 1, 1995	6.03	6.34	6.03	6.33
697	NASDAQ	KLIC	Tue, Feb 28, 1995	6.00	6.09	6.00	6.09
696	NASDAQ	KLIC	Mon, Feb 27, 1995	6.06	6.13	5.94	6.03
695	NASDAQ	KLIC	Fri, Feb 24, 1995	5.94	6.19	5.78	6.13
694	NASDAQ	KLIC	Thu, Feb 23, 1995	5.94	6.00	5.91	5.94
693	NASDAQ	KLIC	Wed, Feb 22, 1995	5.94	6.00	5.94	6.00
692	NASDAQ	KLIC	Tue, Feb 21, 1995	5.84	5.94	5.84	5.86
691	NASDAQ	KLIC	Fri, Feb 17, 1995	5.94	5.94	5.84	5.88
690	NASDAQ	KLIC	Thu, Feb 16, 1995	5.97	6.00	5.81	5.98
689	NASDAQ	KLIC	Wed, Feb 15, 1995	5.94	6.06	5.94	6.00
688	NASDAQ	KLIC	Tue, Feb 14, 1995	5.88	5.97	5.84	5.88
687	NASDAQ	KLIC	Mon, Feb 13, 1995	5.88	6.06	5.78	5.88
686	NASDAQ	KLIC	Fri, Feb 10, 1995	5.41	5.88	5.41	5.83
685	NASDAQ	KLIC	Thu, Feb 9, 1995	5.16	5.38	5.16	5.38
684	NASDAQ	KLIC	Wed, Feb 8, 1995	5.16	5.22	5.06	5.13
683	NASDAQ	KLIC	Tue, Feb 7, 1995	5.38	5.38	5.13	5.16
682	NASDAQ	KLIC	Mon, Feb 6, 1995	5.31	5.38	5.28	5.38
681	NASDAQ	KLIC	Fri, Feb 3, 1995	5.09	5.28	5.09	5.20
680	NASDAQ	KLIC	Thu, Feb 2, 1995	4.97	5.09	4.97	5.06
679	NASDAQ	KLIC	Wed, Feb 1, 1995	4.97	5.09	4.97	4.97
678	NASDAQ	KLIC	Tue, Jan 31, 1995	4.84	5.03	4.84	4.94
677	NASDAQ	KLIC	Mon, Jan 30, 1995	5.19	5.19	4.81	4.88
676	NASDAQ	KLIC	Fri, Jan 27, 1995	5.03	5.25	5.03	5.14
675	NASDAQ	KLIC	Thu, Jan 26, 1995	4.97	5.03	4.97	4.97
674	NASDAQ	KLIC	Wed, Jan 25, 1995	5.00	5.13	4.94	5.00
673	NASDAQ	KLIC	Tue, Jan 24, 1995	5.28	5.34	5.06	5.09
672	NASDAQ	KLIC	Mon, Jan 23, 1995	5.31	5.34	5.19	5.19
671	NASDAQ	KLIC	Fri, Jan 20, 1995	5.63	5.69	5.38	5.48
670	NASDAQ	KLIC	Thu, Jan 19, 1995	5.56	5.75	5.53	5.69
669	NASDAQ	KLIC	Wed, Jan 18, 1995	5.28	5.53	5.28	5.50
668	NASDAQ	KLIC	Tue, Jan 17, 1995	5.28	5.34	5.25	5.34
667	NASDAQ	KLIC	Mon, Jan 16, 1995	5.38	5.38	5.28	5.33
666	NASDAQ	KLIC	Fri, Jan 13, 1995	5.34	5.41	5.31	5.38
665	NASDAQ	KLIC	Thu, Jan 12, 1995	5.38	5.38	5.31	5.38
664	NASDAQ	KLIC	Wed, Jan 11, 1995	5.50	5.50	5.31	5.34
663	NASDAQ	KLIC	Tue, Jan 10, 1995	5.38	5.50	5.31	5.44
662	NASDAQ	KLIC	Mon, Jan 9, 1995	4.88	5.31	4.88	5.28
661	NASDAQ	KLIC	Fri, Jan 6, 1995	4.56	4.97	4.56	4.91
660	NASDAQ	KLIC	Thu, Jan 5, 1995	4.94	5.03	4.94	5.00
659	NASDAQ	KLIC	Wed, Jan 4, 1995	5.16	5.17	4.81	4.94
658	NASDAQ	KLIC	Tue, Jan 3, 1995	5.22	5.22	5.16	5.16
657	NASDAQ	KLIC	Fri, Dec 30, 1994	5.19	5.28	5.16	5.25
656	NASDAQ	KLIC	Thu, Dec 29, 1994	5.13	5.19	5.13	5.16
655	NASDAQ	KLIC	Wed, Dec 28, 1994	5.16	5.25	5.09	5.09
654	NASDAQ	KLIC	Tue, Dec 27, 1994	5.13	5.25	5.13	5.16
653	NASDAQ	KLIC	Fri, Dec 23, 1994	5.13	5.16	5.13	5.13
652	NASDAQ	KLIC	Thu, Dec 22, 1994	5.19	5.19	5.13	5.19
651	NASDAQ	KLIC	Wed, Dec 21, 1994	5.16	5.22	5.13	5.13
650	NASDAQ	KLIC	Tue, Dec 20, 1994	5.13	5.25	5.13	5.19
649	NASDAQ	KLIC	Mon, Dec 19, 1994	5.16	5.17	5.09	5.16
648	NASDAQ	KLIC	Fri, Dec 16, 1994	5.28	5.28	5.17	5.19
647	NASDAQ	KLIC	Thu, Dec 15, 1994	5.16	5.28	5.13	5.22
646	NASDAQ	KLIC	Wed, Dec 14, 1994	5.09	5.16	5.09	5.11
645	NASDAQ	KLIC	Tue, Dec 13, 1994	5.03	5.19	5.03	5.09
644	NASDAQ	KLIC	Mon, Dec 12, 1994	4.97	5.08	4.97	5.03
643	NASDAQ	KLIC	Fri, Dec 9, 1994	4.97	5.09	4.97	4.97
642	NASDAQ	KLIC	Thu, Dec 8, 1994	5.25	5.31	4.97	4.97
641	NASDAQ	KLIC	Wed, Dec 7, 1994	5.13	5.34	5.13	5.31
640	NASDAQ	KLIC	Tue, Dec 6, 1994	5.22	5.31	5.16	5.25
639	NASDAQ	KLIC	Mon, Dec 5, 1994	5.13	5.28	5.13	5.28
638	NASDAQ	KLIC	Fri, Dec 2, 1994	5.03	5.19	4.97	5.17
637	NASDAQ	KLIC	Thu, Dec 1, 1994	4.97	5.06	4.97	4.98
636	NASDAQ	KLIC	Wed, Nov 30, 1994	4.97	5.16	4.94	5.06
635	NASDAQ	KLIC	Tue, Nov 29, 1994	5.03	5.22	4.97	5.19
634	NASDAQ	KLIC	Mon, Nov 28, 1994	4.81	5.03	4.75	5.00
633	NASDAQ	KLIC	Fri, Nov 25, 1994	4.63	4.80	4.63	4.78
632	NASDAQ	KLIC	Wed, Nov 23, 1994	4.84	4.94	4.56	4.64
631	NASDAQ	KLIC	Tue, Nov 22, 1994	5.16	5.25	4.97	5.00
630	NASDAQ	KLIC	Mon, Nov 21, 1994	4.88	5.48	4.88	5.19
629	NASDAQ	KLIC	Fri, Nov 18, 1994	4.44	4.84	4.38	4.78
628	NASDAQ	KLIC	Thu, Nov 17, 1994	4.63	4.66	4.28	4.31
627	NASDAQ	KLIC	Wed, Nov 16, 1994	4.69	4.75	4.56	4.59
626	NASDAQ	KLIC	Tue, Nov 15, 1994	4.72	4.81	4.69	4.75
625	NASDAQ	KLIC	Mon, Nov 14, 1994	4.63	4.72	4.56	4.69
624	NASDAQ	KLIC	Fri, Nov 11, 1994	4.78	4.78	4.59	4.59
623	NASDAQ	KLIC	Thu, Nov 10, 1994	4.66	4.84	4.66	4.78
622	NASDAQ	KLIC	Wed, Nov 9, 1994	4.88	4.91	4.66	4.75
621	NASDAQ	KLIC	Tue, Nov 8, 1994	4.41	4.81	4.41	4.78
620	NASDAQ	KLIC	Mon, Nov 7, 1994	4.41	4.44	4.34	4.44
619	NASDAQ	KLIC	Fri, Nov 4, 1994	4.63	4.69	4.41	4.44
618	NASDAQ	KLIC	Thu, Nov 3, 1994	4.78	4.81	4.63	4.63
617	NASDAQ	KLIC	Wed, Nov 2, 1994	4.53	4.94	4.53	4.78
616	NASDAQ	KLIC	Tue, Nov 1, 1994	4.59	4.60	4.50	4.55
615	NASDAQ	KLIC	Mon, Oct 31, 1994	4.69	4.69	4.59	4.63
614	NASDAQ	KLIC	Fri, Oct 28, 1994	4.69	4.69	4.63	4.63
613	NASDAQ	KLIC	Thu, Oct 27, 1994	4.63	4.78	4.63	4.69
612	NASDAQ	KLIC	Wed, Oct 26, 1994	4.66	4.84	4.59	4.66
611	NASDAQ	KLIC	Tue, Oct 25, 1994	4.41	4.66	4.41	4.63
610	NASDAQ	KLIC	Mon, Oct 24, 1994	4.25	4.50	4.25	4.41
609	NASDAQ	KLIC	Fri, Oct 21, 1994	3.97	4.31	3.91	4.31
608	NASDAQ	KLIC	Thu, Oct 20, 1994	3.81	3.97	3.81	3.97
607	NASDAQ	KLIC	Wed, Oct 19, 1994	3.81	3.84	3.75	3.84
606	NASDAQ	KLIC	Tue, Oct 18, 1994	3.81	3.84	3.75	3.75
605	NASDAQ	KLIC	Mon, Oct 17, 1994	3.78	3.84	3.78	3.78
604	NASDAQ	KLIC	Fri, Oct 14, 1994	3.88	3.88	3.78	3.78
603	NASDAQ	KLIC	Thu, Oct 13, 1994	4.03	4.03	3.84	3.84
602	NASDAQ	KLIC	Wed, Oct 12, 1994	4.03	4.06	3.91	3.91
601	NASDAQ	KLIC	Tue, Oct 11, 1994	4.09	4.16	4.03	4.03
600	NASDAQ	KLIC	Mon, Oct 10, 1994	4.13	4.16	4.09	4.09
599	NASDAQ	KLIC	Fri, Oct 7, 1994	4.06	4.13	4.00	4.09
598	NASDAQ	KLIC	Thu, Oct 6, 1994	4.03	4.06	4.00	4.00
597	NASDAQ	KLIC	Wed, Oct 5, 1994	3.97	4.00	3.97	4.00
596	NASDAQ	KLIC	Tue, Oct 4, 1994	4.03	4.09	3.97	3.97
595	NASDAQ	KLIC	Mon, Oct 3, 1994	4.06	4.13	4.03	4.03
594	NASDAQ	KLIC	Fri, Sep 30, 1994	4.09	4.16	4.06	4.06
593	NASDAQ	KLIC	Thu, Sep 29, 1994	4.16	4.25	4.09	4.09
592	NASDAQ	KLIC	Wed, Sep 28, 1994	4.13	4.25	4.06	4.25
591	NASDAQ	KLIC	Tue, Sep 27, 1994	4.06	4.13	4.06	4.13
590	NASDAQ	KLIC	Mon, Sep 26, 1994	4.09	4.09	4.03	4.09
589	NASDAQ	KLIC	Fri, Sep 23, 1994	4.13	4.19	4.06	4.09
588	NASDAQ	KLIC	Thu, Sep 22, 1994	4.13	4.19	4.06	4.16
587	NASDAQ	KLIC	Wed, Sep 21, 1994	4.16	4.16	3.94	4.09
586	NASDAQ	KLIC	Tue, Sep 20, 1994	4.13	4.19	4.13	4.13
585	NASDAQ	KLIC	Mon, Sep 19, 1994	4.19	4.34	4.19	4.22
584	NASDAQ	KLIC	Fri, Sep 16, 1994	3.97	4.22	3.94	4.19
583	NASDAQ	KLIC	Thu, Sep 15, 1994	3.78	4.00	3.78	4.00
582	NASDAQ	KLIC	Wed, Sep 14, 1994	3.69	3.81	3.69	3.81
581	NASDAQ	KLIC	Tue, Sep 13, 1994	3.78	3.84	3.72	3.72
580	NASDAQ	KLIC	Mon, Sep 12, 1994	3.72	3.78	3.72	3.75
579	NASDAQ	KLIC	Fri, Sep 9, 1994	3.81	3.81	3.72	3.78
578	NASDAQ	KLIC	Thu, Sep 8, 1994	3.81	3.88	3.81	3.88
577	NASDAQ	KLIC	Wed, Sep 7, 1994	3.81	3.84	3.75	3.81
576	NASDAQ	KLIC	Tue, Sep 6, 1994	3.78	3.84	3.75	3.81
575	NASDAQ	KLIC	Fri, Sep 2, 1994	3.81	3.84	3.78	3.84
574	NASDAQ	KLIC	Thu, Sep 1, 1994	3.88	3.97	3.75	3.84
573	NASDAQ	KLIC	Wed, Aug 31, 1994	3.94	4.06	3.94	3.94
572	NASDAQ	KLIC	Tue, Aug 30, 1994	4.00	4.06	3.91	4.00
571	NASDAQ	KLIC	Mon, Aug 29, 1994	3.91	4.09	3.91	4.03
570	NASDAQ	KLIC	Fri, Aug 26, 1994	3.69	3.94	3.69	3.91
569	NASDAQ	KLIC	Thu, Aug 25, 1994	3.75	3.81	3.69	3.72
568	NASDAQ	KLIC	Wed, Aug 24, 1994	3.81	3.84	3.75	3.78
567	NASDAQ	KLIC	Tue, Aug 23, 1994	3.84	3.97	3.81	3.81
566	NASDAQ	KLIC	Mon, Aug 22, 1994	3.75	4.00	3.66	3.84
565	NASDAQ	KLIC	Fri, Aug 19, 1994	3.66	3.75	3.66	3.75
564	NASDAQ	KLIC	Thu, Aug 18, 1994	3.47	3.81	3.41	3.69
563	NASDAQ	KLIC	Wed, Aug 17, 1994	3.28	3.45	3.28	3.41
562	NASDAQ	KLIC	Tue, Aug 16, 1994	3.34	3.44	3.28	3.34
561	NASDAQ	KLIC	Mon, Aug 15, 1994	3.06	3.34	3.06	3.25
560	NASDAQ	KLIC	Fri, Aug 12, 1994	3.06	3.16	3.06	3.06
559	NASDAQ	KLIC	Thu, Aug 11, 1994	3.19	3.31	3.06	3.06
558	NASDAQ	KLIC	Wed, Aug 10, 1994	3.00	3.19	3.00	3.19
557	NASDAQ	KLIC	Tue, Aug 9, 1994	3.00	3.06	2.94	3.03
556	NASDAQ	KLIC	Mon, Aug 8, 1994	3.00	3.00	2.94	3.00
555	NASDAQ	KLIC	Fri, Aug 5, 1994	3.00	3.00	2.97	2.97
554	NASDAQ	KLIC	Thu, Aug 4, 1994	2.94	3.06	2.94	2.97
553	NASDAQ	KLIC	Wed, Aug 3, 1994	3.03	3.03	2.94	2.94
552	NASDAQ	KLIC	Tue, Aug 2, 1994	3.03	3.19	2.97	2.97
551	NASDAQ	KLIC	Mon, Aug 1, 1994	3.09	3.16	3.00	3.09
550	NASDAQ	KLIC	Fri, Jul 29, 1994	2.88	3.09	2.81	3.09
549	NASDAQ	KLIC	Thu, Jul 28, 1994	3.06	3.28	3.06	3.28
548	NASDAQ	KLIC	Wed, Jul 27, 1994	3.16	3.22	3.06	3.09
547	NASDAQ	KLIC	Tue, Jul 26, 1994	3.19	3.25	3.16	3.22
546	NASDAQ	KLIC	Mon, Jul 25, 1994	3.25	3.34	3.19	3.19
545	NASDAQ	KLIC	Fri, Jul 22, 1994	3.38	3.38	3.28	3.34
544	NASDAQ	KLIC	Thu, Jul 21, 1994	3.38	3.41	3.31	3.38
543	NASDAQ	KLIC	Wed, Jul 20, 1994	3.31	3.38	3.28	3.38
542	NASDAQ	KLIC	Tue, Jul 19, 1994	3.38	3.38	3.25	3.31
541	NASDAQ	KLIC	Mon, Jul 18, 1994	3.34	3.41	3.28	3.34
540	NASDAQ	KLIC	Fri, Jul 15, 1994	3.47	3.47	3.34	3.34
539	NASDAQ	KLIC	Thu, Jul 14, 1994	3.53	3.72	3.47	3.56
538	NASDAQ	KLIC	Wed, Jul 13, 1994	3.47	3.53	3.41	3.50
537	NASDAQ	KLIC	Tue, Jul 12, 1994	3.44	3.50	3.33	3.44
536	NASDAQ	KLIC	Mon, Jul 11, 1994	3.63	3.63	3.50	3.56
535	NASDAQ	KLIC	Fri, Jul 8, 1994	3.47	3.63	3.47	3.56
534	NASDAQ	KLIC	Thu, Jul 7, 1994	3.47	3.56	3.38	3.50
533	NASDAQ	KLIC	Wed, Jul 6, 1994	3.50	3.50	3.38	3.44
532	NASDAQ	KLIC	Tue, Jul 5, 1994	3.34	3.50	3.34	3.47
531	NASDAQ	KLIC	Fri, Jul 1, 1994	3.44	3.44	3.38	3.44
530	NASDAQ	KLIC	Thu, Jun 30, 1994	3.44	3.47	3.38	3.44
529	NASDAQ	KLIC	Wed, Jun 29, 1994	3.22	3.47	3.22	3.41
528	NASDAQ	KLIC	Tue, Jun 28, 1994	3.28	3.28	3.22	3.22
527	NASDAQ	KLIC	Mon, Jun 27, 1994	3.19	3.28	3.16	3.22
526	NASDAQ	KLIC	Fri, Jun 24, 1994	3.25	3.31	3.19	3.19
525	NASDAQ	KLIC	Thu, Jun 23, 1994	3.34	3.38	3.28	3.28
524	NASDAQ	KLIC	Wed, Jun 22, 1994	3.28	3.34	3.28	3.28
523	NASDAQ	KLIC	Tue, Jun 21, 1994	3.28	3.34	3.25	3.34
522	NASDAQ	KLIC	Mon, Jun 20, 1994	3.31	3.38	3.25	3.31
521	NASDAQ	KLIC	Fri, Jun 17, 1994	3.38	3.44	3.28	3.31
520	NASDAQ	KLIC	Thu, Jun 16, 1994	3.38	3.47	3.38	3.47
519	NASDAQ	KLIC	Wed, Jun 15, 1994	3.50	3.53	3.38	3.47
518	NASDAQ	KLIC	Tue, Jun 14, 1994	3.63	3.69	3.50	3.53
517	NASDAQ	KLIC	Mon, Jun 13, 1994	3.72	3.72	3.59	3.64
516	NASDAQ	KLIC	Fri, Jun 10, 1994	3.69	3.72	3.63	3.69
515	NASDAQ	KLIC	Thu, Jun 9, 1994	3.59	3.66	3.59	3.66
514	NASDAQ	KLIC	Wed, Jun 8, 1994	3.66	3.72	3.59	3.63
513	NASDAQ	KLIC	Tue, Jun 7, 1994	3.66	3.75	3.63	3.66
512	NASDAQ	KLIC	Mon, Jun 6, 1994	3.69	3.75	3.50	3.66
511	NASDAQ	KLIC	Fri, Jun 3, 1994	3.91	3.94	3.59	3.63
510	NASDAQ	KLIC	Thu, Jun 2, 1994	3.91	4.00	3.84	3.91
509	NASDAQ	KLIC	Wed, Jun 1, 1994	3.97	3.97	3.81	3.88
508	NASDAQ	KLIC	Tue, May 31, 1994	3.75	4.06	3.69	3.94
507	NASDAQ	KLIC	Fri, May 27, 1994	3.78	3.78	3.69	3.72
506	NASDAQ	KLIC	Thu, May 26, 1994	3.69	3.78	3.60	3.75
505	NASDAQ	KLIC	Wed, May 25, 1994	3.63	3.69	3.53	3.63
504	NASDAQ	KLIC	Tue, May 24, 1994	3.47	3.66	3.47	3.56
503	NASDAQ	KLIC	Mon, May 23, 1994	3.34	3.59	3.28	3.47
502	NASDAQ	KLIC	Fri, May 20, 1994	3.31	3.34	3.25	3.31
501	NASDAQ	KLIC	Thu, May 19, 1994	3.25	3.31	3.19	3.31
500	NASDAQ	KLIC	Wed, May 18, 1994	3.25	3.25	3.19	3.25
499	NASDAQ	KLIC	Tue, May 17, 1994	3.16	3.25	3.16	3.22
498	NASDAQ	KLIC	Mon, May 16, 1994	3.25	3.31	3.16	3.19
497	NASDAQ	KLIC	Fri, May 13, 1994	3.25	3.31	3.25	3.25
496	NASDAQ	KLIC	Thu, May 12, 1994	3.34	3.34	3.25	3.31
495	NASDAQ	KLIC	Wed, May 11, 1994	3.19	3.31	3.13	3.25
494	NASDAQ	KLIC	Tue, May 10, 1994	3.16	3.19	3.09	3.19
493	NASDAQ	KLIC	Mon, May 9, 1994	3.03	3.16	2.94	3.03
492	NASDAQ	KLIC	Fri, May 6, 1994	2.97	3.03	2.91	3.03
491	NASDAQ	KLIC	Thu, May 5, 1994	3.03	3.13	3.00	3.00
490	NASDAQ	KLIC	Wed, May 4, 1994	3.06	3.16	3.03	3.09
489	NASDAQ	KLIC	Tue, May 3, 1994	3.22	3.22	3.00	3.09
488	NASDAQ	KLIC	Mon, May 2, 1994	3.22	3.22	3.13	3.14
487	NASDAQ	KLIC	Fri, Apr 29, 1994	3.28	3.28	3.13	3.16
486	NASDAQ	KLIC	Thu, Apr 28, 1994	3.28	3.38	3.16	3.28
485	NASDAQ	KLIC	Tue, Apr 26, 1994	3.00	3.19	2.91	3.09
484	NASDAQ	KLIC	Mon, Apr 25, 1994	3.00	3.09	2.91	2.97
483	NASDAQ	KLIC	Fri, Apr 22, 1994	2.66	2.72	2.56	2.69
482	NASDAQ	KLIC	Thu, Apr 21, 1994	2.63	2.66	2.53	2.56
481	NASDAQ	KLIC	Wed, Apr 20, 1994	2.44	2.59	2.41	2.56
480	NASDAQ	KLIC	Tue, Apr 19, 1994	2.53	2.59	2.34	2.44
479	NASDAQ	KLIC	Mon, Apr 18, 1994	2.66	2.66	2.50	2.56
478	NASDAQ	KLIC	Fri, Apr 15, 1994	2.78	2.78	2.56	2.56
477	NASDAQ	KLIC	Thu, Apr 14, 1994	2.72	2.84	2.66	2.72
476	NASDAQ	KLIC	Wed, Apr 13, 1994	2.72	2.78	2.66	2.70
475	NASDAQ	KLIC	Tue, Apr 12, 1994	2.78	2.78	2.69	2.72
474	NASDAQ	KLIC	Mon, Apr 11, 1994	2.78	2.88	2.75	2.84
473	NASDAQ	KLIC	Fri, Apr 8, 1994	3.03	3.13	2.81	2.84
472	NASDAQ	KLIC	Thu, Apr 7, 1994	2.84	3.03	2.81	3.00
471	NASDAQ	KLIC	Wed, Apr 6, 1994	2.91	2.91	2.75	2.81
470	NASDAQ	KLIC	Tue, Apr 5, 1994	2.84	2.88	2.78	2.88
469	NASDAQ	KLIC	Mon, Apr 4, 1994	2.63	2.75	2.53	2.75
468	NASDAQ	KLIC	Thu, Mar 31, 1994	2.84	2.84	2.63	2.75
467	NASDAQ	KLIC	Wed, Mar 30, 1994	2.94	3.00	2.81	2.81
466	NASDAQ	KLIC	Tue, Mar 29, 1994	3.06	3.06	2.91	2.91
465	NASDAQ	KLIC	Mon, Mar 28, 1994	3.25	3.31	2.97	3.03
464	NASDAQ	KLIC	Fri, Mar 25, 1994	3.28	3.31	3.22	3.25
463	NASDAQ	KLIC	Thu, Mar 24, 1994	3.41	3.47	3.19	3.25
462	NASDAQ	KLIC	Wed, Mar 23, 1994	3.56	3.66	3.38	3.47
461	NASDAQ	KLIC	Tue, Mar 22, 1994	3.38	3.59	3.38	3.50
460	NASDAQ	KLIC	Mon, Mar 21, 1994	3.41	3.47	3.38	3.41
459	NASDAQ	KLIC	Fri, Mar 18, 1994	3.47	3.53	3.41	3.47
458	NASDAQ	KLIC	Thu, Mar 17, 1994	3.47	3.53	3.47	3.47
457	NASDAQ	KLIC	Wed, Mar 16, 1994	3.44	3.53	3.44	3.53
456	NASDAQ	KLIC	Tue, Mar 15, 1994	3.34	3.53	3.28	3.47
455	NASDAQ	KLIC	Mon, Mar 14, 1994	3.34	3.34	3.28	3.31
454	NASDAQ	KLIC	Fri, Mar 11, 1994	3.38	3.38	3.31	3.34
453	NASDAQ	KLIC	Thu, Mar 10, 1994	3.59	3.59	3.28	3.38
452	NASDAQ	KLIC	Wed, Mar 9, 1994	3.59	3.59	3.47	3.50
451	NASDAQ	KLIC	Tue, Mar 8, 1994	3.38	3.63	3.38	3.53
450	NASDAQ	KLIC	Mon, Mar 7, 1994	3.16	3.47	3.16	3.44
449	NASDAQ	KLIC	Fri, Mar 4, 1994	3.13	3.19	3.13	3.19
448	NASDAQ	KLIC	Thu, Mar 3, 1994	3.16	3.22	3.13	3.13
447	NASDAQ	KLIC	Wed, Mar 2, 1994	3.13	3.16	3.09	3.16
446	NASDAQ	KLIC	Tue, Mar 1, 1994	3.16	3.22	3.13	3.19
445	NASDAQ	KLIC	Mon, Feb 28, 1994	3.16	3.16	3.09	3.13
444	NASDAQ	KLIC	Fri, Feb 25, 1994	3.13	3.19	3.09	3.16
443	NASDAQ	KLIC	Thu, Feb 24, 1994	3.28	3.28	3.13	3.13
442	NASDAQ	KLIC	Wed, Feb 23, 1994	3.03	3.31	2.97	3.22
441	NASDAQ	KLIC	Tue, Feb 22, 1994	2.72	2.94	2.69	2.94
440	NASDAQ	KLIC	Fri, Feb 18, 1994	2.78	2.78	2.63	2.78
439	NASDAQ	KLIC	Thu, Feb 17, 1994	2.75	2.88	2.66	2.69
438	NASDAQ	KLIC	Wed, Feb 16, 1994	2.69	2.75	2.63	2.75
437	NASDAQ	KLIC	Tue, Feb 15, 1994	2.75	2.81	2.66	2.75
436	NASDAQ	KLIC	Mon, Feb 14, 1994	2.66	2.78	2.63	2.72
435	NASDAQ	KLIC	Fri, Feb 11, 1994	2.69	2.75	2.66	2.69
434	NASDAQ	KLIC	Thu, Feb 10, 1994	2.75	2.88	2.69	2.69
433	NASDAQ	KLIC	Wed, Feb 9, 1994	2.63	2.88	2.59	2.81
432	NASDAQ	KLIC	Tue, Feb 8, 1994	2.81	2.88	2.59	2.69
431	NASDAQ	KLIC	Mon, Feb 7, 1994	2.69	2.84	2.66	2.78
430	NASDAQ	KLIC	Fri, Feb 4, 1994	2.88	3.03	2.75	2.75
429	NASDAQ	KLIC	Thu, Feb 3, 1994	3.19	3.19	2.88	2.94
428	NASDAQ	KLIC	Wed, Feb 2, 1994	3.72	3.81	3.72	3.72
427	NASDAQ	KLIC	Tue, Feb 1, 1994	3.75	3.81	3.72	3.81
426	NASDAQ	KLIC	Mon, Jan 31, 1994	3.69	3.84	3.69	3.78
425	NASDAQ	KLIC	Fri, Jan 28, 1994	3.94	3.94	3.69	3.75
424	NASDAQ	KLIC	Thu, Jan 27, 1994	4.00	4.00	3.88	3.94
423	NASDAQ	KLIC	Wed, Jan 26, 1994	3.84	4.00	3.84	4.00
422	NASDAQ	KLIC	Tue, Jan 25, 1994	3.94	4.03	3.84	3.84
421	NASDAQ	KLIC	Mon, Jan 24, 1994	4.00	4.06	3.91	3.94
420	NASDAQ	KLIC	Fri, Jan 21, 1994	4.13	4.19	4.06	4.06
419	NASDAQ	KLIC	Thu, Jan 20, 1994	3.81	4.09	3.81	4.03
418	NASDAQ	KLIC	Wed, Jan 19, 1994	4.03	4.06	3.72	3.84
417	NASDAQ	KLIC	Tue, Jan 18, 1994	4.19	4.28	4.13	4.13
416	NASDAQ	KLIC	Mon, Jan 17, 1994	4.41	4.41	4.13	4.19
415	NASDAQ	KLIC	Fri, Jan 14, 1994	4.03	4.41	4.03	4.38
414	NASDAQ	KLIC	Thu, Jan 13, 1994	4.00	4.09	3.94	4.09
413	NASDAQ	KLIC	Wed, Jan 12, 1994	3.97	4.03	3.88	4.00
412	NASDAQ	KLIC	Tue, Jan 11, 1994	3.78	3.81	3.72	3.72
411	NASDAQ	KLIC	Mon, Jan 10, 1994	3.69	3.81	3.69	3.72
410	NASDAQ	KLIC	Fri, Jan 7, 1994	3.75	3.81	3.69	3.75
409	NASDAQ	KLIC	Thu, Jan 6, 1994	3.63	3.88	3.53	3.78
408	NASDAQ	KLIC	Wed, Jan 5, 1994	3.41	3.56	3.31	3.56
407	NASDAQ	KLIC	Tue, Jan 4, 1994	3.31	3.31	3.31	3.31
406	NASDAQ	KLIC	Mon, Jan 3, 1994	3.44	3.50	3.38	3.41
405	NASDAQ	KLIC	Fri, Dec 31, 1993	3.47	3.53	3.41	3.50
404	NASDAQ	KLIC	Thu, Dec 30, 1993	3.47	3.53	3.41	3.44
403	NASDAQ	KLIC	Wed, Dec 29, 1993	3.56	3.66	3.47	3.53
402	NASDAQ	KLIC	Tue, Dec 28, 1993	3.59	3.66	3.56	3.66
401	NASDAQ	KLIC	Mon, Dec 27, 1993	3.53	3.63	3.50	3.56
400	NASDAQ	KLIC	Thu, Dec 23, 1993	3.59	3.59	3.53	3.56
399	NASDAQ	KLIC	Wed, Dec 22, 1993	3.66	3.72	3.50	3.59
398	NASDAQ	KLIC	Tue, Dec 21, 1993	3.31	3.63	3.31	3.59
397	NASDAQ	KLIC	Mon, Dec 20, 1993	3.34	3.44	3.31	3.41
396	NASDAQ	KLIC	Fri, Dec 17, 1993	3.41	3.50	3.34	3.44
395	NASDAQ	KLIC	Thu, Dec 16, 1993	3.41	3.47	3.38	3.44
394	NASDAQ	KLIC	Wed, Dec 15, 1993	3.09	3.41	3.09	3.41
393	NASDAQ	KLIC	Tue, Dec 14, 1993	3.25	3.25	3.09	3.09
392	NASDAQ	KLIC	Mon, Dec 13, 1993	3.28	3.38	3.16	3.22
391	NASDAQ	KLIC	Fri, Dec 10, 1993	3.47	3.47	3.25	3.25
390	NASDAQ	KLIC	Thu, Dec 9, 1993	3.72	3.72	3.41	3.47
389	NASDAQ	KLIC	Wed, Dec 8, 1993	3.69	3.78	3.63	3.72
388	NASDAQ	KLIC	Tue, Dec 7, 1993	3.72	3.84	3.72	3.78
387	NASDAQ	KLIC	Mon, Dec 6, 1993	3.72	3.81	3.56	3.81
386	NASDAQ	KLIC	Fri, Dec 3, 1993	3.91	3.91	3.72	3.75
385	NASDAQ	KLIC	Thu, Dec 2, 1993	3.88	3.97	3.81	3.81
384	NASDAQ	KLIC	Wed, Dec 1, 1993	3.72	3.88	3.66	3.84
383	NASDAQ	KLIC	Tue, Nov 30, 1993	3.59	3.69	3.56	3.66
382	NASDAQ	KLIC	Mon, Nov 29, 1993	3.41	3.59	3.38	3.56
381	NASDAQ	KLIC	Fri, Nov 26, 1993	3.28	3.28	3.22	3.25
380	NASDAQ	KLIC	Wed, Nov 24, 1993	3.28	3.34	3.19	3.28
379	NASDAQ	KLIC	Tue, Nov 23, 1993	3.41	3.41	3.16	3.34
378	NASDAQ	KLIC	Mon, Nov 22, 1993	3.59	3.63	3.25	3.34
377	NASDAQ	KLIC	Fri, Nov 19, 1993	3.84	3.97	3.63	3.66
376	NASDAQ	KLIC	Thu, Nov 18, 1993	3.91	4.00	3.63	3.72
375	NASDAQ	KLIC	Wed, Nov 17, 1993	4.44	4.56	3.63	3.84
374	NASDAQ	KLIC	Tue, Nov 16, 1993	5.81	5.84	4.28	4.34
373	NASDAQ	KLIC	Mon, Nov 15, 1993	5.50	5.81	5.50	5.78
372	NASDAQ	KLIC	Fri, Nov 12, 1993	5.72	5.78	5.44	5.47
371	NASDAQ	KLIC	Thu, Nov 11, 1993	5.00	5.78	4.97	5.66
370	NASDAQ	KLIC	Wed, Nov 10, 1993	5.00	5.16	4.94	4.94
369	NASDAQ	KLIC	Tue, Nov 9, 1993	4.94	5.06	4.84	4.84
368	NASDAQ	KLIC	Mon, Nov 8, 1993	4.81	5.13	4.81	4.81
367	NASDAQ	KLIC	Fri, Nov 5, 1993	4.94	5.09	4.75	4.78
366	NASDAQ	KLIC	Thu, Nov 4, 1993	5.38	5.44	4.91	4.91
365	NASDAQ	KLIC	Wed, Nov 3, 1993	5.91	6.00	5.38	5.50
364	NASDAQ	KLIC	Tue, Nov 2, 1993	6.00	6.06	5.81	6.00
363	NASDAQ	KLIC	Mon, Nov 1, 1993	5.66	6.00	5.66	5.97
362	NASDAQ	KLIC	Fri, Oct 29, 1993	5.53	5.66	5.44	5.59
361	NASDAQ	KLIC	Thu, Oct 28, 1993	5.44	5.50	5.38	5.50
360	NASDAQ	KLIC	Wed, Oct 27, 1993	5.31	5.53	5.31	5.50
359	NASDAQ	KLIC	Tue, Oct 26, 1993	5.34	5.44	5.28	5.31
358	NASDAQ	KLIC	Mon, Oct 25, 1993	5.47	5.53	5.34	5.34
357	NASDAQ	KLIC	Fri, Oct 22, 1993	5.56	5.69	5.31	5.47
356	NASDAQ	KLIC	Thu, Oct 21, 1993	5.22	5.47	5.13	5.47
355	NASDAQ	KLIC	Wed, Oct 20, 1993	5.00	5.31	5.00	5.19
354	NASDAQ	KLIC	Tue, Oct 19, 1993	5.13	5.16	4.75	5.03
353	NASDAQ	KLIC	Mon, Oct 18, 1993	5.59	5.66	5.16	5.16
352	NASDAQ	KLIC	Fri, Oct 15, 1993	5.69	5.69	5.56	5.59
351	NASDAQ	KLIC	Thu, Oct 14, 1993	5.78	5.88	5.50	5.66
350	NASDAQ	KLIC	Wed, Oct 13, 1993	6.31	6.41	5.66	5.78
349	NASDAQ	KLIC	Tue, Oct 12, 1993	6.50	6.53	6.44	6.53
348	NASDAQ	KLIC	Mon, Oct 11, 1993	6.31	6.38	6.22	6.38
347	NASDAQ	KLIC	Fri, Oct 8, 1993	6.31	6.50	6.19	6.25
346	NASDAQ	KLIC	Thu, Oct 7, 1993	6.13	6.47	6.06	6.31
345	NASDAQ	KLIC	Wed, Oct 6, 1993	6.72	6.72	5.94	5.97
344	NASDAQ	KLIC	Tue, Oct 5, 1993	7.28	7.34	6.66	6.72
343	NASDAQ	KLIC	Mon, Oct 4, 1993	7.16	7.28	7.06	7.25
342	NASDAQ	KLIC	Fri, Oct 1, 1993	7.16	7.28	6.97	7.13
341	NASDAQ	KLIC	Thu, Sep 30, 1993	7.19	7.28	7.19	7.19
340	NASDAQ	KLIC	Wed, Sep 29, 1993	7.47	7.53	7.19	7.28
339	NASDAQ	KLIC	Tue, Sep 28, 1993	7.63	7.63	7.47	7.53
338	NASDAQ	KLIC	Mon, Sep 27, 1993	7.72	7.72	7.53	7.56
337	NASDAQ	KLIC	Fri, Sep 24, 1993	7.59	7.81	7.47	7.63
336	NASDAQ	KLIC	Thu, Sep 23, 1993	7.50	7.63	7.47	7.50
335	NASDAQ	KLIC	Wed, Sep 22, 1993	7.13	7.53	7.06	7.47
334	NASDAQ	KLIC	Tue, Sep 21, 1993	7.41	7.63	6.91	7.09
333	NASDAQ	KLIC	Mon, Sep 20, 1993	6.94	7.41	6.84	7.41
332	NASDAQ	KLIC	Fri, Sep 17, 1993	6.94	6.94	6.84	6.94
331	NASDAQ	KLIC	Thu, Sep 16, 1993	6.47	6.94	6.44	6.94
330	NASDAQ	KLIC	Wed, Sep 15, 1993	6.41	6.50	6.38	6.47
329	NASDAQ	KLIC	Tue, Sep 14, 1993	6.59	6.59	6.38	6.41
328	NASDAQ	KLIC	Mon, Sep 13, 1993	6.53	6.59	6.47	6.59
327	NASDAQ	KLIC	Fri, Sep 10, 1993	6.53	6.53	6.47	6.53
326	NASDAQ	KLIC	Thu, Sep 9, 1993	6.56	6.56	6.47	6.53
325	NASDAQ	KLIC	Wed, Sep 8, 1993	6.44	6.56	6.38	6.56
324	NASDAQ	KLIC	Tue, Sep 7, 1993	6.69	6.69	6.41	6.41
323	NASDAQ	KLIC	Fri, Sep 3, 1993	6.72	6.72	6.56	6.69
322	NASDAQ	KLIC	Thu, Sep 2, 1993	6.69	6.72	6.63	6.66
321	NASDAQ	KLIC	Wed, Sep 1, 1993	6.50	6.72	6.44	6.63
320	NASDAQ	KLIC	Tue, Aug 31, 1993	6.25	6.53	6.19	6.50
319	NASDAQ	KLIC	Mon, Aug 30, 1993	6.34	6.41	6.19	6.19
318	NASDAQ	KLIC	Fri, Aug 27, 1993	6.44	6.44	6.31	6.38
317	NASDAQ	KLIC	Thu, Aug 26, 1993	6.81	6.88	6.34	6.44
316	NASDAQ	KLIC	Wed, Aug 25, 1993	6.97	6.97	6.78	6.88
315	NASDAQ	KLIC	Tue, Aug 24, 1993	6.94	7.00	6.84	6.94
314	NASDAQ	KLIC	Mon, Aug 23, 1993	6.78	6.94	6.72	6.94
313	NASDAQ	KLIC	Fri, Aug 20, 1993	6.75	6.81	6.69	6.75
312	NASDAQ	KLIC	Thu, Aug 19, 1993	6.75	6.81	6.66	6.75
311	NASDAQ	KLIC	Wed, Aug 18, 1993	6.66	6.75	6.50	6.75
310	NASDAQ	KLIC	Tue, Aug 17, 1993	6.88	6.91	6.56	6.56
309	NASDAQ	KLIC	Mon, Aug 16, 1993	6.88	6.91	6.78	6.88
308	NASDAQ	KLIC	Fri, Aug 13, 1993	6.97	6.97	6.78	6.88
307	NASDAQ	KLIC	Thu, Aug 12, 1993	7.06	7.06	6.88	6.88
306	NASDAQ	KLIC	Wed, Aug 11, 1993	7.00	7.06	6.91	7.03
305	NASDAQ	KLIC	Tue, Aug 10, 1993	7.00	7.00	6.88	6.97
304	NASDAQ	KLIC	Mon, Aug 9, 1993	6.81	7.03	6.75	6.97
303	NASDAQ	KLIC	Fri, Aug 6, 1993	6.44	6.84	6.34	6.75
302	NASDAQ	KLIC	Thu, Aug 5, 1993	5.97	6.44	5.88	6.34
301	NASDAQ	KLIC	Wed, Aug 4, 1993	6.03	6.03	5.81	5.91
300	NASDAQ	KLIC	Tue, Aug 3, 1993	6.16	6.16	5.88	6.00
299	NASDAQ	KLIC	Mon, Aug 2, 1993	6.09	6.16	5.97	6.09
298	NASDAQ	KLIC	Fri, Jul 30, 1993	5.97	6.06	5.91	5.97
297	NASDAQ	KLIC	Thu, Jul 29, 1993	5.84	5.97	5.78	5.94
296	NASDAQ	KLIC	Wed, Jul 28, 1993	5.63	5.84	5.50	5.84
295	NASDAQ	KLIC	Tue, Jul 27, 1993	5.28	5.38	5.22	5.31
294	NASDAQ	KLIC	Mon, Jul 26, 1993	5.38	5.38	5.16	5.22
293	NASDAQ	KLIC	Fri, Jul 23, 1993	5.19	5.38	5.13	5.28
292	NASDAQ	KLIC	Thu, Jul 22, 1993	4.91	5.16	4.88	5.16
291	NASDAQ	KLIC	Wed, Jul 21, 1993	5.00	5.00	4.81	4.94
290	NASDAQ	KLIC	Tue, Jul 20, 1993	5.06	5.06	4.94	4.94
289	NASDAQ	KLIC	Mon, Jul 19, 1993	5.31	5.41	5.00	5.06
288	NASDAQ	KLIC	Fri, Jul 16, 1993	5.59	5.59	5.31	5.38
287	NASDAQ	KLIC	Thu, Jul 15, 1993	5.47	5.63	5.41	5.63
286	NASDAQ	KLIC	Wed, Jul 14, 1993	5.44	5.47	5.38	5.47
285	NASDAQ	KLIC	Tue, Jul 13, 1993	5.34	5.47	5.31	5.41
284	NASDAQ	KLIC	Mon, Jul 12, 1993	5.22	5.34	5.22	5.34
283	NASDAQ	KLIC	Fri, Jul 9, 1993	5.22	5.31	5.19	5.28
282	NASDAQ	KLIC	Thu, Jul 8, 1993	5.03	5.22	4.97	5.16
281	NASDAQ	KLIC	Wed, Jul 7, 1993	5.00	5.03	4.88	5.03
280	NASDAQ	KLIC	Tue, Jul 6, 1993	5.34	5.38	5.00	5.06
279	NASDAQ	KLIC	Fri, Jul 2, 1993	5.25	5.34	5.19	5.34
278	NASDAQ	KLIC	Thu, Jul 1, 1993	5.25	5.25	5.16	5.25
277	NASDAQ	KLIC	Wed, Jun 30, 1993	5.19	5.28	5.09	5.25
276	NASDAQ	KLIC	Tue, Jun 29, 1993	5.47	5.50	5.09	5.16
275	NASDAQ	KLIC	Mon, Jun 28, 1993	5.03	5.38	5.03	5.28
274	NASDAQ	KLIC	Fri, Jun 25, 1993	4.94	5.06	4.88	4.97
273	NASDAQ	KLIC	Thu, Jun 24, 1993	5.03	5.06	4.94	5.00
272	NASDAQ	KLIC	Wed, Jun 23, 1993	5.00	5.13	4.97	5.13
271	NASDAQ	KLIC	Tue, Jun 22, 1993	5.03	5.03	4.91	5.00
270	NASDAQ	KLIC	Mon, Jun 21, 1993	5.03	5.03	4.91	5.03
269	NASDAQ	KLIC	Fri, Jun 18, 1993	4.97	5.03	4.91	4.94
268	NASDAQ	KLIC	Thu, Jun 17, 1993	5.03	5.03	4.91	4.91
267	NASDAQ	KLIC	Wed, Jun 16, 1993	4.97	5.03	4.94	5.00
266	NASDAQ	KLIC	Tue, Jun 15, 1993	5.06	5.09	4.97	5.00
265	NASDAQ	KLIC	Mon, Jun 14, 1993	4.91	5.06	4.91	4.97
264	NASDAQ	KLIC	Fri, Jun 11, 1993	5.06	5.06	4.88	4.91
263	NASDAQ	KLIC	Thu, Jun 10, 1993	5.09	5.22	4.97	5.06
262	NASDAQ	KLIC	Wed, Jun 9, 1993	5.09	5.22	5.09	5.22
261	NASDAQ	KLIC	Tue, Jun 8, 1993	5.09	5.22	5.09	5.13
260	NASDAQ	KLIC	Mon, Jun 7, 1993	5.16	5.22	5.13	5.13
259	NASDAQ	KLIC	Fri, Jun 4, 1993	5.25	5.28	5.13	5.16
258	NASDAQ	KLIC	Thu, Jun 3, 1993	5.41	5.41	5.31	5.31
257	NASDAQ	KLIC	Wed, Jun 2, 1993	5.38	5.41	5.31	5.34
256	NASDAQ	KLIC	Tue, Jun 1, 1993	5.06	5.38	5.00	5.34
255	NASDAQ	KLIC	Fri, May 28, 1993	5.06	5.06	4.88	5.06
254	NASDAQ	KLIC	Thu, May 27, 1993	4.69	5.06	4.69	4.97
253	NASDAQ	KLIC	Wed, May 26, 1993	4.50	4.66	4.44	4.59
252	NASDAQ	KLIC	Tue, May 25, 1993	4.56	4.66	4.50	4.50
251	NASDAQ	KLIC	Mon, May 24, 1993	4.66	4.66	4.56	4.59
250	NASDAQ	KLIC	Fri, May 21, 1993	4.72	4.72	4.63	4.66
249	NASDAQ	KLIC	Thu, May 20, 1993	4.75	4.75	4.66	4.72
248	NASDAQ	KLIC	Wed, May 19, 1993	4.88	4.88	4.66	4.69
247	NASDAQ	KLIC	Tue, May 18, 1993	4.69	4.88	4.63	4.78
246	NASDAQ	KLIC	Mon, May 17, 1993	4.59	4.66	4.47	4.66
245	NASDAQ	KLIC	Fri, May 14, 1993	4.50	4.63	4.50	4.56
244	NASDAQ	KLIC	Thu, May 13, 1993	4.44	4.56	4.41	4.47
243	NASDAQ	KLIC	Wed, May 12, 1993	4.34	4.81	4.25	4.50
242	NASDAQ	KLIC	Tue, May 11, 1993	4.00	4.34	3.88	4.25
241	NASDAQ	KLIC	Mon, May 10, 1993	4.03	4.09	3.94	4.03
240	NASDAQ	KLIC	Fri, May 7, 1993	4.09	4.16	4.03	4.03
239	NASDAQ	KLIC	Thu, May 6, 1993	4.19	4.19	4.09	4.16
238	NASDAQ	KLIC	Wed, May 5, 1993	3.97	4.19	3.94	4.19
237	NASDAQ	KLIC	Tue, May 4, 1993	3.78	3.97	3.78	3.94
236	NASDAQ	KLIC	Mon, May 3, 1993	3.81	3.88	3.75	3.78
235	NASDAQ	KLIC	Fri, Apr 30, 1993	3.72	3.88	3.63	3.81
234	NASDAQ	KLIC	Thu, Apr 29, 1993	3.16	3.44	3.09	3.44
233	NASDAQ	KLIC	Wed, Apr 28, 1993	3.09	3.16	3.06	3.16
232	NASDAQ	KLIC	Tue, Apr 27, 1993	3.09	3.16	3.09	3.16
231	NASDAQ	KLIC	Mon, Apr 26, 1993	3.19	3.19	3.09	3.09
230	NASDAQ	KLIC	Fri, Apr 23, 1993	3.13	3.19	3.09	3.09
229	NASDAQ	KLIC	Thu, Apr 22, 1993	3.19	3.19	3.13	3.13
228	NASDAQ	KLIC	Wed, Apr 21, 1993	3.03	3.19	3.03	3.19
227	NASDAQ	KLIC	Tue, Apr 20, 1993	2.97	3.06	2.84	3.03
226	NASDAQ	KLIC	Mon, Apr 19, 1993	2.97	3.03	2.97	2.97
225	NASDAQ	KLIC	Fri, Apr 16, 1993	3.22	3.31	2.97	3.00
224	NASDAQ	KLIC	Thu, Apr 15, 1993	3.25	3.31	3.22	3.22
223	NASDAQ	KLIC	Wed, Apr 14, 1993	3.22	3.31	3.22	3.25
222	NASDAQ	KLIC	Tue, Apr 13, 1993	3.25	3.34	3.25	3.31
221	NASDAQ	KLIC	Mon, Apr 12, 1993	3.34	3.34	3.28	3.31
220	NASDAQ	KLIC	Thu, Apr 8, 1993	3.22	3.38	3.22	3.28
219	NASDAQ	KLIC	Wed, Apr 7, 1993	3.22	3.31	3.22	3.31
218	NASDAQ	KLIC	Tue, Apr 6, 1993	3.38	3.38	3.25	3.31
217	NASDAQ	KLIC	Mon, Apr 5, 1993	3.28	3.38	3.28	3.38
216	NASDAQ	KLIC	Fri, Apr 2, 1993	3.41	3.44	3.28	3.31
215	NASDAQ	KLIC	Thu, Apr 1, 1993	3.53	3.59	3.44	3.47
214	NASDAQ	KLIC	Wed, Mar 31, 1993	3.44	3.59	3.44	3.59
213	NASDAQ	KLIC	Tue, Mar 30, 1993	3.31	3.50	3.25	3.44
212	NASDAQ	KLIC	Mon, Mar 29, 1993	3.19	3.31	3.19	3.25
211	NASDAQ	KLIC	Fri, Mar 26, 1993	3.16	3.25	3.16	3.19
210	NASDAQ	KLIC	Thu, Mar 25, 1993	2.94	3.19	2.94	3.19
209	NASDAQ	KLIC	Wed, Mar 24, 1993	3.06	3.13	2.94	3.03
208	NASDAQ	KLIC	Tue, Mar 23, 1993	3.16	3.19	3.06	3.06
207	NASDAQ	KLIC	Mon, Mar 22, 1993	3.25	3.34	3.16	3.19
206	NASDAQ	KLIC	Fri, Mar 19, 1993	3.41	3.41	3.31	3.31
205	NASDAQ	KLIC	Thu, Mar 18, 1993	3.38	3.44	3.34	3.41
204	NASDAQ	KLIC	Wed, Mar 17, 1993	3.28	3.38	3.28	3.34
203	NASDAQ	KLIC	Tue, Mar 16, 1993	3.19	3.38	3.19	3.31
202	NASDAQ	KLIC	Mon, Mar 15, 1993	3.16	3.28	3.16	3.25
201	NASDAQ	KLIC	Fri, Mar 12, 1993	3.13	3.19	2.94	3.16
200	NASDAQ	KLIC	Thu, Mar 11, 1993	3.25	3.31	3.13	3.13
199	NASDAQ	KLIC	Wed, Mar 10, 1993	2.91	3.25	2.81	3.25
198	NASDAQ	KLIC	Tue, Mar 9, 1993	2.88	2.94	2.75	2.88
197	NASDAQ	KLIC	Mon, Mar 8, 1993	2.75	2.88	2.75	2.84
196	NASDAQ	KLIC	Fri, Mar 5, 1993	2.72	2.84	2.72	2.78
195	NASDAQ	KLIC	Thu, Mar 4, 1993	2.69	2.78	2.69	2.72
194	NASDAQ	KLIC	Wed, Mar 3, 1993	2.72	2.72	2.66	2.72
193	NASDAQ	KLIC	Tue, Mar 2, 1993	2.72	2.75	2.66	2.72
192	NASDAQ	KLIC	Mon, Mar 1, 1993	2.66	2.78	2.66	2.75
191	NASDAQ	KLIC	Fri, Feb 26, 1993	2.75	2.75	2.66	2.75
190	NASDAQ	KLIC	Thu, Feb 25, 1993	2.75	2.75	2.66	2.66
189	NASDAQ	KLIC	Wed, Feb 24, 1993	2.66	2.72	2.56	2.66
188	NASDAQ	KLIC	Tue, Feb 23, 1993	2.50	2.56	2.50	2.56
187	NASDAQ	KLIC	Mon, Feb 22, 1993	2.38	2.44	2.31	2.41
186	NASDAQ	KLIC	Fri, Feb 19, 1993	2.28	2.38	2.25	2.38
185	NASDAQ	KLIC	Thu, Feb 18, 1993	2.25	2.25	2.16	2.16
184	NASDAQ	KLIC	Wed, Feb 17, 1993	2.13	2.19	2.09	2.19
183	NASDAQ	KLIC	Tue, Feb 16, 1993	2.31	2.41	2.13	2.13
182	NASDAQ	KLIC	Fri, Feb 12, 1993	2.34	2.44	2.34	2.34
181	NASDAQ	KLIC	Thu, Feb 11, 1993	2.47	2.47	2.34	2.38
180	NASDAQ	KLIC	Wed, Feb 10, 1993	2.50	2.53	2.41	2.44
179	NASDAQ	KLIC	Tue, Feb 9, 1993	2.34	2.47	2.34	2.41
178	NASDAQ	KLIC	Mon, Feb 8, 1993	2.28	2.34	2.25	2.34
177	NASDAQ	KLIC	Fri, Feb 5, 1993	2.28	2.34	2.25	2.28
176	NASDAQ	KLIC	Thu, Feb 4, 1993	2.22	2.34	2.19	2.28
175	NASDAQ	KLIC	Wed, Feb 3, 1993	2.13	2.22	2.09	2.19
174	NASDAQ	KLIC	Tue, Feb 2, 1993	2.16	2.16	2.09	2.09
173	NASDAQ	KLIC	Mon, Feb 1, 1993	2.09	2.16	2.09	2.13
172	NASDAQ	KLIC	Fri, Jan 29, 1993	2.16	2.25	2.09	2.09
171	NASDAQ	KLIC	Thu, Jan 28, 1993	2.06	2.22	2.06	2.16
170	NASDAQ	KLIC	Wed, Jan 27, 1993	2.09	2.13	2.03	2.09
169	NASDAQ	KLIC	Tue, Jan 26, 1993	2.16	2.22	2.09	2.09
168	NASDAQ	KLIC	Mon, Jan 25, 1993	2.13	2.22	2.13	2.19
167	NASDAQ	KLIC	Fri, Jan 22, 1993	2.16	2.19	2.09	2.13
166	NASDAQ	KLIC	Thu, Jan 21, 1993	2.06	2.13	2.06	2.06
165	NASDAQ	KLIC	Wed, Jan 20, 1993	2.03	2.13	2.03	2.06
164	NASDAQ	KLIC	Tue, Jan 19, 1993	2.09	2.13	2.00	2.03
163	NASDAQ	KLIC	Mon, Jan 18, 1993	1.88	2.09	1.88	2.00
162	NASDAQ	KLIC	Fri, Jan 15, 1993	1.91	1.97	1.88	1.91
161	NASDAQ	KLIC	Thu, Jan 14, 1993	1.94	2.00	1.91	1.91
160	NASDAQ	KLIC	Wed, Jan 13, 1993	1.94	1.97	1.84	1.94
159	NASDAQ	KLIC	Tue, Jan 12, 1993	1.59	1.91	1.59	1.91
158	NASDAQ	KLIC	Mon, Jan 11, 1993	1.66	1.66	1.59	1.66
157	NASDAQ	KLIC	Fri, Jan 8, 1993	1.59	1.66	1.59	1.59
156	NASDAQ	KLIC	Thu, Jan 7, 1993	1.63	1.66	1.59	1.63
155	NASDAQ	KLIC	Wed, Jan 6, 1993	1.63	1.66	1.59	1.66
154	NASDAQ	KLIC	Tue, Jan 5, 1993	1.63	1.63	1.56	1.56
153	NASDAQ	KLIC	Mon, Jan 4, 1993	1.63	1.63	1.56	1.56
152	NASDAQ	KLIC	Thu, Dec 31, 1992	1.59	1.59	1.56	1.56
151	NASDAQ	KLIC	Wed, Dec 30, 1992	1.56	1.59	1.53	1.56
150	NASDAQ	KLIC	Tue, Dec 29, 1992	1.56	1.63	1.56	1.56
149	NASDAQ	KLIC	Mon, Dec 28, 1992	1.53	1.63	1.53	1.63
148	NASDAQ	KLIC	Thu, Dec 24, 1992	1.50	1.56	1.50	1.53
147	NASDAQ	KLIC	Wed, Dec 23, 1992	1.56	1.59	1.47	1.50
146	NASDAQ	KLIC	Tue, Dec 22, 1992	1.53	1.56	1.47	1.56
145	NASDAQ	KLIC	Mon, Dec 21, 1992	1.47	1.53	1.47	1.50
144	NASDAQ	KLIC	Fri, Dec 18, 1992	1.53	1.53	1.47	1.47
143	NASDAQ	KLIC	Thu, Dec 17, 1992	1.44	1.53	1.44	1.53
142	NASDAQ	KLIC	Wed, Dec 16, 1992	1.47	1.53	1.44	1.47
141	NASDAQ	KLIC	Tue, Dec 15, 1992	1.47	1.50	1.47	1.50
140	NASDAQ	KLIC	Mon, Dec 14, 1992	1.56	1.56	1.47	1.47
139	NASDAQ	KLIC	Fri, Dec 11, 1992	1.47	1.56	1.47	1.56
138	NASDAQ	KLIC	Thu, Dec 10, 1992	1.44	1.59	1.41	1.47
137	NASDAQ	KLIC	Wed, Dec 9, 1992	1.50	1.50	1.38	1.44
136	NASDAQ	KLIC	Tue, Dec 8, 1992	1.59	1.66	1.47	1.50
135	NASDAQ	KLIC	Mon, Dec 7, 1992	1.63	1.69	1.59	1.66
134	NASDAQ	KLIC	Fri, Dec 4, 1992	1.66	1.69	1.59	1.59
133	NASDAQ	KLIC	Thu, Dec 3, 1992	1.59	1.66	1.59	1.59
132	NASDAQ	KLIC	Wed, Dec 2, 1992	1.59	1.66	1.59	1.59
131	NASDAQ	KLIC	Tue, Dec 1, 1992	1.59	1.66	1.56	1.63
130	NASDAQ	KLIC	Mon, Nov 30, 1992	1.53	1.66	1.53	1.59
129	NASDAQ	KLIC	Fri, Nov 27, 1992	1.63	1.63	1.56	1.56
128	NASDAQ	KLIC	Wed, Nov 25, 1992	1.53	1.63	1.53	1.63
127	NASDAQ	KLIC	Tue, Nov 24, 1992	1.53	1.59	1.53	1.59
126	NASDAQ	KLIC	Mon, Nov 23, 1992	1.59	1.59	1.53	1.56
125	NASDAQ	KLIC	Fri, Nov 20, 1992	1.50	1.59	1.50	1.56
124	NASDAQ	KLIC	Thu, Nov 19, 1992	1.59	1.66	1.47	1.53
123	NASDAQ	KLIC	Wed, Nov 18, 1992	1.41	1.59	1.41	1.56
122	NASDAQ	KLIC	Tue, Nov 17, 1992	1.38	1.47	1.38	1.41
121	NASDAQ	KLIC	Mon, Nov 16, 1992	1.44	1.44	1.38	1.38
120	NASDAQ	KLIC	Fri, Nov 13, 1992	1.34	1.44	1.34	1.44
119	NASDAQ	KLIC	Thu, Nov 12, 1992	1.44	1.47	1.34	1.44
118	NASDAQ	KLIC	Wed, Nov 11, 1992	1.47	1.50	1.47	1.50
117	NASDAQ	KLIC	Tue, Nov 10, 1992	1.44	1.53	1.44	1.53
116	NASDAQ	KLIC	Mon, Nov 9, 1992	1.38	1.50	1.38	1.50
115	NASDAQ	KLIC	Fri, Nov 6, 1992	1.34	1.41	1.34	1.41
114	NASDAQ	KLIC	Thu, Nov 5, 1992	1.41	1.41	1.34	1.34
113	NASDAQ	KLIC	Wed, Nov 4, 1992	1.41	1.41	1.34	1.34
112	NASDAQ	KLIC	Tue, Nov 3, 1992	1.34	1.41	1.34	1.38
111	NASDAQ	KLIC	Mon, Nov 2, 1992	1.34	1.41	1.34	1.34
110	NASDAQ	KLIC	Fri, Oct 30, 1992	1.34	1.34	1.34	1.34
109	NASDAQ	KLIC	Thu, Oct 29, 1992	1.41	1.41	1.34	1.38
108	NASDAQ	KLIC	Wed, Oct 28, 1992	1.41	1.41	1.34	1.38
107	NASDAQ	KLIC	Tue, Oct 27, 1992	1.41	1.41	1.38	1.38
106	NASDAQ	KLIC	Mon, Oct 26, 1992	1.41	1.41	1.34	1.38
105	NASDAQ	KLIC	Fri, Oct 23, 1992	1.38	1.38	1.34	1.38
104	NASDAQ	KLIC	Thu, Oct 22, 1992	1.41	1.41	1.34	1.34
103	NASDAQ	KLIC	Wed, Oct 21, 1992	1.41	1.41	1.34	1.34
102	NASDAQ	KLIC	Tue, Oct 20, 1992	1.41	1.41	1.38	1.38
101	NASDAQ	KLIC	Mon, Oct 19, 1992	1.25	1.41	1.25	1.41
100	NASDAQ	KLIC	Fri, Oct 16, 1992	1.28	1.34	1.28	1.34
99	NASDAQ	KLIC	Thu, Oct 15, 1992	1.22	1.34	1.22	1.34
98	NASDAQ	KLIC	Wed, Oct 14, 1992	1.22	1.28	1.22	1.28
97	NASDAQ	KLIC	Tue, Oct 13, 1992	1.28	1.28	1.22	1.22
96	NASDAQ	KLIC	Mon, Oct 12, 1992	1.22	1.22	1.22	1.22
95	NASDAQ	KLIC	Fri, Oct 9, 1992	1.22	1.28	1.22	1.28
94	NASDAQ	KLIC	Thu, Oct 8, 1992	1.19	1.28	1.19	1.28
93	NASDAQ	KLIC	Wed, Oct 7, 1992	1.19	1.22	1.19	1.22
92	NASDAQ	KLIC	Tue, Oct 6, 1992	1.19	1.19	1.19	1.19
91	NASDAQ	KLIC	Mon, Oct 5, 1992	1.19	1.22	1.19	1.22
90	NASDAQ	KLIC	Fri, Oct 2, 1992	1.19	1.19	1.19	1.19
89	NASDAQ	KLIC	Thu, Oct 1, 1992	1.19	1.25	1.19	1.22
88	NASDAQ	KLIC	Wed, Sep 30, 1992	1.19	1.25	1.19	1.25
87	NASDAQ	KLIC	Tue, Sep 29, 1992	1.16	1.25	1.16	1.25
86	NASDAQ	KLIC	Fri, Sep 25, 1992	1.16	1.22	1.16	1.16
85	NASDAQ	KLIC	Thu, Sep 24, 1992	1.22	1.22	1.16	1.16
84	NASDAQ	KLIC	Wed, Sep 23, 1992	1.13	1.22	1.13	1.22
83	NASDAQ	KLIC	Tue, Sep 22, 1992	1.13	1.16	1.13	1.16
82	NASDAQ	KLIC	Mon, Sep 21, 1992	1.22	1.22	1.13	1.22
81	NASDAQ	KLIC	Fri, Sep 18, 1992	1.16	1.19	1.16	1.19
80	NASDAQ	KLIC	Thu, Sep 17, 1992	1.25	1.25	1.16	1.16
79	NASDAQ	KLIC	Wed, Sep 16, 1992	1.16	1.25	1.16	1.19
78	NASDAQ	KLIC	Tue, Sep 15, 1992	1.25	1.25	1.25	1.25
77	NASDAQ	KLIC	Mon, Sep 14, 1992	1.25	1.25	1.16	1.25
76	NASDAQ	KLIC	Fri, Sep 11, 1992	1.16	1.25	1.16	1.19
75	NASDAQ	KLIC	Thu, Sep 10, 1992	1.16	1.25	1.16	1.25
74	NASDAQ	KLIC	Wed, Sep 9, 1992	1.16	1.25	1.16	1.22
73	NASDAQ	KLIC	Tue, Sep 8, 1992	1.28	1.28	1.19	1.19
72	NASDAQ	KLIC	Fri, Sep 4, 1992	1.22	1.22	1.22	1.22
71	NASDAQ	KLIC	Thu, Sep 3, 1992	1.28	1.28	1.22	1.25
70	NASDAQ	KLIC	Wed, Sep 2, 1992	1.22	1.25	1.22	1.25
69	NASDAQ	KLIC	Tue, Sep 1, 1992	1.28	1.28	1.28	1.28
68	NASDAQ	KLIC	Mon, Aug 31, 1992	1.28	1.28	1.22	1.25
67	NASDAQ	KLIC	Fri, Aug 28, 1992	1.31	1.31	1.22	1.25
66	NASDAQ	KLIC	Thu, Aug 27, 1992	1.31	1.31	1.22	1.22
65	NASDAQ	KLIC	Wed, Aug 26, 1992	1.22	1.25	1.22	1.25
64	NASDAQ	KLIC	Tue, Aug 25, 1992	1.25	1.25	1.16	1.16
63	NASDAQ	KLIC	Mon, Aug 24, 1992	1.16	1.25	1.16	1.25
62	NASDAQ	KLIC	Fri, Aug 21, 1992	1.19	1.22	1.16	1.16
61	NASDAQ	KLIC	Thu, Aug 20, 1992	1.19	1.25	1.19	1.19
60	NASDAQ	KLIC	Wed, Aug 19, 1992	1.19	1.19	1.19	1.19
59	NASDAQ	KLIC	Tue, Aug 18, 1992	1.16	1.25	1.16	1.25
58	NASDAQ	KLIC	Mon, Aug 17, 1992	1.19	1.19	1.16	1.16
57	NASDAQ	KLIC	Fri, Aug 14, 1992	1.19	1.19	1.16	1.19
56	NASDAQ	KLIC	Thu, Aug 13, 1992	1.25	1.31	1.16	1.19
55	NASDAQ	KLIC	Wed, Aug 12, 1992	1.44	1.44	1.25	1.25
54	NASDAQ	KLIC	Tue, Aug 11, 1992	1.44	1.44	1.31	1.31
53	NASDAQ	KLIC	Mon, Aug 10, 1992	1.31	1.38	1.31	1.38
52	NASDAQ	KLIC	Fri, Aug 7, 1992	1.44	1.44	1.31	1.31
51	NASDAQ	KLIC	Thu, Aug 6, 1992	1.34	1.44	1.34	1.38
50	NASDAQ	KLIC	Wed, Aug 5, 1992	1.38	1.44	1.34	1.44
49	NASDAQ	KLIC	Tue, Aug 4, 1992	1.44	1.47	1.41	1.44
48	NASDAQ	KLIC	Mon, Aug 3, 1992	1.50	1.50	1.41	1.50
47	NASDAQ	KLIC	Fri, Jul 31, 1992	1.47	1.50	1.38	1.50
46	NASDAQ	KLIC	Thu, Jul 30, 1992	1.31	1.44	1.25	1.44
45	NASDAQ	KLIC	Wed, Jul 29, 1992	1.25	1.28	1.19	1.28
44	NASDAQ	KLIC	Tue, Jul 28, 1992	1.13	1.25	1.13	1.25
43	NASDAQ	KLIC	Mon, Jul 27, 1992	1.06	1.16	1.06	1.13
42	NASDAQ	KLIC	Fri, Jul 24, 1992	1.06	1.06	1.00	1.03
41	NASDAQ	KLIC	Thu, Jul 23, 1992	1.06	1.06	1.00	1.06
40	NASDAQ	KLIC	Wed, Jul 22, 1992	1.09	1.09	1.00	1.06
39	NASDAQ	KLIC	Tue, Jul 21, 1992	1.03	1.09	1.00	1.09
38	NASDAQ	KLIC	Mon, Jul 20, 1992	1.00	1.09	1.00	1.03
37	NASDAQ	KLIC	Fri, Jul 17, 1992	1.00	1.09	1.00	1.09
36	NASDAQ	KLIC	Thu, Jul 16, 1992	1.09	1.09	1.00	1.00
35	NASDAQ	KLIC	Wed, Jul 15, 1992	1.09	1.09	1.00	1.09
34	NASDAQ	KLIC	Tue, Jul 14, 1992	1.09	1.09	1.00	1.03
33	NASDAQ	KLIC	Mon, Jul 13, 1992	1.09	1.09	1.00	1.09
32	NASDAQ	KLIC	Fri, Jul 10, 1992	1.06	1.06	1.00	1.06
31	NASDAQ	KLIC	Thu, Jul 9, 1992	0.97	1.03	0.97	1.03
30	NASDAQ	KLIC	Wed, Jul 8, 1992	1.03	1.03	1.00	1.03
29	NASDAQ	KLIC	Tue, Jul 7, 1992	1.00	1.03	0.97	0.97
28	NASDAQ	KLIC	Mon, Jul 6, 1992	1.03	1.03	1.00	1.00
27	NASDAQ	KLIC	Thu, Jul 2, 1992	1.03	1.06	1.00	1.03
26	NASDAQ	KLIC	Wed, Jul 1, 1992	1.09	1.09	0.94	1.03
25	NASDAQ	KLIC	Tue, Jun 30, 1992	1.13	1.13	1.03	1.09
24	NASDAQ	KLIC	Mon, Jun 29, 1992	1.13	1.22	1.06	1.06
23	NASDAQ	KLIC	Fri, Jun 26, 1992	1.13	1.22	1.13	1.13
22	NASDAQ	KLIC	Thu, Jun 25, 1992	1.13	1.22	1.13	1.13
21	NASDAQ	KLIC	Wed, Jun 24, 1992	1.13	1.19	1.13	1.13
20	NASDAQ	KLIC	Tue, Jun 23, 1992	1.13	1.19	1.13	1.19
19	NASDAQ	KLIC	Mon, Jun 22, 1992	1.19	1.19	1.13	1.13
18	NASDAQ	KLIC	Fri, Jun 19, 1992	1.19	1.19	1.13	1.13
17	NASDAQ	KLIC	Thu, Jun 18, 1992	1.13	1.19	1.13	1.13
16	NASDAQ	KLIC	Wed, Jun 17, 1992	1.13	1.13	1.13	1.13
15	NASDAQ	KLIC	Tue, Jun 16, 1992	1.19	1.19	1.13	1.19
14	NASDAQ	KLIC	Mon, Jun 15, 1992	1.19	1.19	1.13	1.19
13	NASDAQ	KLIC	Fri, Jun 12, 1992	1.13	1.19	1.13	1.19
12	NASDAQ	KLIC	Thu, Jun 11, 1992	1.22	1.22	1.13	1.16
11	NASDAQ	KLIC	Wed, Jun 10, 1992	1.25	1.25	1.19	1.19
10	NASDAQ	KLIC	Tue, Jun 9, 1992	1.22	1.28	1.22	1.25
9	NASDAQ	KLIC	Mon, Jun 8, 1992	1.28	1.28	1.22	1.28
8	NASDAQ	KLIC	Fri, Jun 5, 1992	1.22	1.28	1.22	1.28
7	NASDAQ	KLIC	Thu, Jun 4, 1992	1.22	1.28	1.22	1.22
6	NASDAQ	KLIC	Wed, Jun 3, 1992	1.31	1.31	1.22	1.25
5	NASDAQ	KLIC	Tue, Jun 2, 1992	1.22	1.28	1.22	1.28
4	NASDAQ	KLIC	Mon, Jun 1, 1992	1.28	1.28	1.28	1.28
3	NASDAQ	KLIC	Fri, May 29, 1992	1.25	1.25	1.19	1.25
2	NASDAQ	KLIC	Thu, May 28, 1992	1.25	1.25	1.19	1.22
1	NASDAQ	KLIC	Wed, May 27, 1992	1.25	1.25	1.19	1.25
#	Exchange	Symbol	Date	Open	High	Low	Close

Kulicke & Soffa Industries Inc NASDAQ:KLIC Historical Prices

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